JP6917295B2 - 電子部品内蔵基板、シート基板 - Google Patents
電子部品内蔵基板、シート基板 Download PDFInfo
- Publication number
- JP6917295B2 JP6917295B2 JP2017247790A JP2017247790A JP6917295B2 JP 6917295 B2 JP6917295 B2 JP 6917295B2 JP 2017247790 A JP2017247790 A JP 2017247790A JP 2017247790 A JP2017247790 A JP 2017247790A JP 6917295 B2 JP6917295 B2 JP 6917295B2
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- Prior art keywords
- substrate
- electronic component
- layer
- upper substrate
- solder resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 claims description 316
- 239000011347 resin Substances 0.000 claims description 69
- 229920005989 resin Polymers 0.000 claims description 69
- 229910000679 solder Inorganic materials 0.000 claims description 62
- 238000007789 sealing Methods 0.000 claims description 40
- 238000005520 cutting process Methods 0.000 claims description 24
- 239000010410 layer Substances 0.000 description 173
- 239000004065 semiconductor Substances 0.000 description 42
- 229910052751 metal Inorganic materials 0.000 description 25
- 239000002184 metal Substances 0.000 description 25
- 239000010931 gold Substances 0.000 description 22
- 239000000463 material Substances 0.000 description 19
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 17
- 239000010949 copper Substances 0.000 description 12
- 239000011800 void material Substances 0.000 description 12
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 11
- 229910045601 alloy Inorganic materials 0.000 description 9
- 239000000956 alloy Substances 0.000 description 9
- 229910052802 copper Inorganic materials 0.000 description 9
- 239000003822 epoxy resin Substances 0.000 description 9
- 229920000647 polyepoxide Polymers 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 229910052718 tin Inorganic materials 0.000 description 7
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000004925 Acrylic resin Substances 0.000 description 4
- 229920000178 Acrylic resin Polymers 0.000 description 4
- 239000000945 filler Substances 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 239000009719 polyimide resin Substances 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- AOWKSNWVBZGMTJ-UHFFFAOYSA-N calcium titanate Chemical compound [Ca+2].[O-][Ti]([O-])=O AOWKSNWVBZGMTJ-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000003755 preservative agent Substances 0.000 description 1
- 230000002335 preservative effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 238000001721 transfer moulding Methods 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
Images
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- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
- H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/8138—Bonding interfaces outside the semiconductor or solid-state body
- H01L2224/81399—Material
- H01L2224/814—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/81438—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/81444—Gold [Au] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/8138—Bonding interfaces outside the semiconductor or solid-state body
- H01L2224/81399—Material
- H01L2224/814—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/81438—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/81447—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
- H01L23/3128—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation the substrate having spherical bumps for external connection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
- H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49838—Geometry or layout
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Geometry (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Structure Of Printed Boards (AREA)
Description
なお、添付図面は、理解を容易にするために構成要素を拡大して示している場合がある。構成要素の寸法比率は実際のものと、または別の図面中のものと異なる場合がある。また、断面図では、理解を容易にするために、一部の構成要素のハッチングを省略している場合がある。
配線層12は、基板本体11の上面に形成されている。配線層14は、基板本体11の下面に形成されている。配線層12,14の材料としては、例えば銅(Cu)等を用いることができる。
ソルダーレジスト層23は、基板本体21の上面を覆うように設けられている。ソルダーレジスト層23の材料としては、たとえばエポキシ樹脂やアクリル樹脂などの絶縁性樹脂を用いることができる。
基板本体21としては、内部に配線層が形成されていてもよく、配線層が形成されていなくてもよい。なお、基板本体21の内部に配線層が形成される場合には、複数の配線層が絶縁層を介して積層され、絶縁層に形成されたビアと配線層によって内部の配線層が配線層24と電気的に接続される。内部に形成される配線層やビアの材料としては、たとえば銅や銅合金を用いることができる。絶縁層の材料としては、たとえばエポキシ樹脂やポリイミド樹脂などの絶縁性樹脂、又はこれら樹脂にシリカやアルミナ等のフィラーを混入した樹脂材を用いることができる。基板本体21としては、例えばコア基板を有するコア付きビルドアップ基板やコア基板を有さないコアレス基板等を用いることができる。また、基板本体21として、シリコン基板やセラミック基板等を用いてもよい。
基板接続部材40は、下基板10と上基板20とを電気的に接続する機能を有する。また、基板接続部材40は、下基板10と上基板20との間に所定の間隔(離間距離,ギャップ)を規定値とする機能を有する。
ワーク基板120には、上基板20がマトリックス状(図2(a)では、2×3)に配置されている。ワーク基板120には、シート切断の工程において上基板20を個片化するための切断領域A2が設定されている。切断領域A2は、各上基板20を囲むように設定されている。
(作用)
図1(a)に示すように、電子部品内蔵基板1は、下基板10と上基板20とを有している。下基板10には半導体素子31が実装されている。上基板20は下基板10の上方に配置され、基板接続部材40により接続されている。下基板10と上基板20との間には、半導体素子31と基板接続部材40を封止する封止樹脂50が形成されている。上基板20は、基板本体21と、基板本体21の下面21bに形成されたソルダーレジスト層25とを有し、ソルダーレジスト層25には、少なくとも半導体素子31と対向する直上領域A1から、上基板20の側面20dまで延びる排出溝27が形成されている。この排出溝27により、封止樹脂50の形成時に生じるボイドの残存を抑制する。これを、比較例と比較して説明する。
図4(a)に示す電子部品内蔵基板200は、下基板10と上基板20との間の距離(ギャップ)は、半導体素子31と上基板20との間に封止樹脂50を十分に充填するように設定されている。図4(b)に示す電子部品内蔵基板210は、小型化のため、図4(a)に示す電子部品内蔵基板200のギャップG1と比べ、下基板10と上基板20との間のギャップG2が狭く設定されている。この電子部品内蔵基板210では、半導体素子31と上基板20との間に十分に封止樹脂50が充填されず、上基板20の下面にボイド(気泡)B1が発生する。
(1)電子部品内蔵基板1は、下基板10と上基板20とを有している。下基板10には半導体素子31が実装されている。上基板20は下基板10の上方に配置され、基板接続部材40により接続されている。下基板10と上基板20との間には、半導体素子31と基板接続部材40を封止する封止樹脂50が形成されている。上基板20は、基板本体21と、基板本体21の下面21bに形成されたソルダーレジスト層25とを有し、ソルダーレジスト層25には、少なくとも半導体素子31と対向する直上領域A1から、上基板20の側面20dまで延びる排出溝27が形成されている。
尚、上記各実施形態は、以下の態様で実施してもよい。
・上記実施形態に対し、上基板20の構成や、排出溝27の本数、形状、等を適宜変更してもよい。
図12に示すように、上基板370のソルダーレジスト層371は、基板本体21の下面21bと配線層24の一部を覆う第1レジスト層372と、第1レジスト層372の一部を覆う第2レジスト層373を有している。第2レジスト層373には、第1レジスト層372の開口部372Xにより露出された接続パッド26を露出する開口部373Xと、第1レジスト層372の下面372bの一部を露出するように形成された排出溝374とを有している。
・接続パッド26は上記実施形態の形状に限定されず、例えば、四角形状、つまり開口部25Xの形状を四角形状としてもよい。
20 上基板
21 基板本体
25 ソルダーレジスト層
27 排出溝(溝)
31 半導体素子(電子部品)
40 基板接続部材
100 シート基板
110、120 ワーク基板
A1 直上領域
A2 切断領域
Claims (5)
- 下基板と、
前記下基板上に実装された電子部品と、
前記下基板と前記電子部品との間に充填されたアンダーフィル樹脂と、
前記電子部品及び前記下基板の上方に設けられた上基板と、
前記下基板と前記上基板との間に設けられ、前記下基板と前記上基板とを接続する基板接続部材と、
前記下基板と前記上基板との間に充填され、前記電子部品及び前記基板接続部材を封止する封止樹脂と、
を有し、
前記上基板は、基板本体と、基板本体の下面に形成されたソルダーレジスト層とを有し、
前記ソルダーレジスト層には、前記電子部品と対向する直上領域に先端が配置され、前記先端から、前記上基板の側面まで延びる複数の溝が形成され、
複数の前記溝の互いの間隔が前記側面に向って徐々に広くなるように設定されていること、
を特徴とする電子部品内蔵基板。 - 前記上基板は、互いに対向する2対の第1の側面対及び第2の側面対を有し、
前記基板接続部材は、前記第1の側面対に沿って配列され、
前記溝は、前記第2の側面対のうちの一方の側面まで延びるように形成されていること、
を特徴とする請求項1に記載の電子部品内蔵基板。 - 前記溝は、前記直上領域内の先端から前記側面に向けて徐々に幅広となるように形成されていること、を特徴とする請求項1又は2に記載の電子部品内蔵基板。
- 前記溝は、前記直上領域内の先端から前記側面まで等しい幅にて形成されていること、を特徴とする請求項1又は2に記載の電子部品内蔵基板。
- 複数の電子部品内蔵基板と、
隣接する2つの前記電子部品内蔵基板の間に設定された切断領域と、
を有し、
前記電子部品内蔵基板は、
下基板と、
前記下基板上に実装された電子部品と、
前記下基板と前記電子部品との間に充填されたアンダーフィル樹脂と、
前記電子部品及び前記下基板の上方に設けられた上基板と、
前記下基板と前記上基板との間に設けられ、前記下基板と前記上基板とを接続する基板接続部材と、
前記下基板と前記上基板との間に充填され、前記電子部品及び前記基板接続部材を封止する封止樹脂と、
を有し、
前記上基板は、基板本体と、基板本体の下面に形成されたソルダーレジスト層とを有し、
前記ソルダーレジスト層には、前記電子部品と対向する直上領域に先端が配置され、前記先端から、前記切断領域まで延びる複数の溝が形成され、
複数の前記溝の互いの間隔が前記切断領域に向って徐々に広くなるように設定されていること、
を特徴とするシート基板。
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