JP6908123B2 - 外観検査装置及び外観検査方法 - Google Patents
外観検査装置及び外観検査方法 Download PDFInfo
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- JP6908123B2 JP6908123B2 JP2019544304A JP2019544304A JP6908123B2 JP 6908123 B2 JP6908123 B2 JP 6908123B2 JP 2019544304 A JP2019544304 A JP 2019544304A JP 2019544304 A JP2019544304 A JP 2019544304A JP 6908123 B2 JP6908123 B2 JP 6908123B2
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- 238000011179 visual inspection Methods 0.000 title claims description 44
- 238000000034 method Methods 0.000 title claims description 8
- 238000005286 illumination Methods 0.000 claims description 77
- 238000003384 imaging method Methods 0.000 claims description 55
- 238000007689 inspection Methods 0.000 claims description 44
- 238000001514 detection method Methods 0.000 claims description 43
- 230000007547 defect Effects 0.000 claims description 35
- 230000003028 elevating effect Effects 0.000 claims description 8
- 230000032258 transport Effects 0.000 description 16
- 230000005856 abnormality Effects 0.000 description 8
- 239000000853 adhesive Substances 0.000 description 8
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- 230000037303 wrinkles Effects 0.000 description 6
- 230000001174 ascending effect Effects 0.000 description 3
- 238000005266 casting Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
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- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8812—Diffuse illumination, e.g. "sky"
- G01N2021/8816—Diffuse illumination, e.g. "sky" by using multiple sources, e.g. LEDs
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8822—Dark field detection
- G01N2021/8825—Separate detection of dark field and bright field
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/20—Special algorithmic details
- G06T2207/20021—Dividing image into blocks, subimages or windows
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30164—Workpiece; Machine component
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Theoretical Computer Science (AREA)
- Quality & Reliability (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
光する。
Claims (6)
- ワークの外観を検査する外観検査装置であって、 前記ワークに光を照射する第1照明部と、 前記第1照明部によって照射された前記ワークを撮像する第1撮像部と、 前記第1撮像部が撮像した画像から第1不良を検出する第1検出部と、 前記ワークに光を照射する第2照明部と、 前記第2照明部によって照射された前記ワークを撮像する第2撮像部と、 前記第2撮像部が撮像した画像から第2不良を検出する第2検出部と、 を含み、 前記第1照明部は、同軸落射照明を用い、 前記第2照明部は、同軸落射照明及びドーム照明を用いる、 外観検査装置。
- 請求項1に記載の外観検査装置であって、 前記ワークを前記第2照明部に向けて上昇又は下降させる昇降部を含み、 前記昇降部は、前記第2照明部の鉛直方向の下方に設けられる、 外観検査装
置。 - 請求項1又は2に記載の外観検査装置であって、 前記第1照明部及び前記第2照明部は、白色光を用いる、 外観検査装置。
- ワークの外観を検査する外観検査方法であって、 前記ワークに光が照射される第1照明工程と、 前記第1照明工程にて照射された前記ワークが撮像される第1撮像工程と、 前記第1撮像工程にて撮像された画像から第1不良が検出される第1検出工程と、 前記ワークに光が照射される第2照明工程と、 前記第2照明工程にて照射された前記ワークが撮像される第2撮像工程と、 前記第2撮像工程にて撮像された画像から第2不良が検出される第2検出工程と、 を含み、 前記第1照明工程では、同軸落射照明が用いられ、 前記第2照明工程では、同軸落射照明及びドーム照明が用いられる、 外観検査方法。
- 請求項4に記載の外観検査方法であって、 前記第2照明工程では、前記ワークが鉛直方向に上昇又は下降される、 外観検査方法。
- 請求項4又は5に記載の外観検査方法であって、 前記第1照明工程及び前記第2照明工程では、白色光を用いられる、 外観検査方法。
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JP2017188853 | 2017-09-28 | ||
JP2017188853 | 2017-09-28 | ||
PCT/JP2018/026003 WO2019064810A1 (ja) | 2017-09-28 | 2018-07-10 | 外観検査装置及び外観検査方法 |
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JPWO2019064810A1 JPWO2019064810A1 (ja) | 2020-10-22 |
JP6908123B2 true JP6908123B2 (ja) | 2021-07-21 |
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US (1) | US11280744B2 (ja) |
JP (1) | JP6908123B2 (ja) |
CN (1) | CN111033243A (ja) |
WO (1) | WO2019064810A1 (ja) |
Families Citing this family (4)
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US11815465B2 (en) * | 2019-03-08 | 2023-11-14 | Gemological Institute Of America, Inc. (Gia) | Portable high-resolution gem imaging system |
CN112730420B (zh) * | 2019-10-14 | 2024-02-20 | 富泰华工业(深圳)有限公司 | 外观瑕疵检测工站 |
CN114330404B (zh) * | 2021-12-28 | 2024-07-19 | 易唯思智能自动化装备无锡有限公司 | 二维码刻印效果验证方法、***及存储介质 |
WO2024092153A1 (en) * | 2022-10-26 | 2024-05-02 | Sterling Jewelers, Inc. | System and method for a jewelry viewing stand |
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US5461417A (en) | 1993-02-16 | 1995-10-24 | Northeast Robotics, Inc. | Continuous diffuse illumination method and apparatus |
JP2005091049A (ja) * | 2003-09-12 | 2005-04-07 | Ccs Inc | 画像処理用光照射装置及び画像処理用光照射方法 |
JP4743827B2 (ja) * | 2004-08-24 | 2011-08-10 | 株式会社日本マイクロニクス | 液晶パネルの外観検査装置 |
JP4389982B2 (ja) * | 2007-08-09 | 2009-12-24 | オムロン株式会社 | 基板外観検査装置 |
JP2009236648A (ja) * | 2008-03-27 | 2009-10-15 | Daido Steel Co Ltd | 外観検査装置 |
KR101429723B1 (ko) * | 2008-12-08 | 2014-09-24 | 삼성전자주식회사 | 패키지를 다양한 각도에서 조명하고 영상으로 획득하며, 색정보를 이용하여 패키지의 결함을 판단하는 반도체 패키지검사장치 |
JP5947169B2 (ja) * | 2012-09-14 | 2016-07-06 | 株式会社キーエンス | 外観検査装置、外観検査法およびプログラム |
JP6287249B2 (ja) | 2014-01-22 | 2018-03-07 | 大日本印刷株式会社 | 外観検査装置、外観検査方法、およびプログラム |
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2018
- 2018-07-10 CN CN201880051640.1A patent/CN111033243A/zh active Pending
- 2018-07-10 US US16/638,749 patent/US11280744B2/en active Active
- 2018-07-10 WO PCT/JP2018/026003 patent/WO2019064810A1/ja active Application Filing
- 2018-07-10 JP JP2019544304A patent/JP6908123B2/ja active Active
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Publication number | Publication date |
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WO2019064810A1 (ja) | 2019-04-04 |
CN111033243A (zh) | 2020-04-17 |
US11280744B2 (en) | 2022-03-22 |
JPWO2019064810A1 (ja) | 2020-10-22 |
US20200333260A1 (en) | 2020-10-22 |
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