JP6903459B2 - Electroplating equipment and electroplating method - Google Patents

Electroplating equipment and electroplating method Download PDF

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JP6903459B2
JP6903459B2 JP2017061071A JP2017061071A JP6903459B2 JP 6903459 B2 JP6903459 B2 JP 6903459B2 JP 2017061071 A JP2017061071 A JP 2017061071A JP 2017061071 A JP2017061071 A JP 2017061071A JP 6903459 B2 JP6903459 B2 JP 6903459B2
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transport means
power source
power supply
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workpiece
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JP2018028143A (en
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チウ、ユ、ヒム
ホイ、カイ、パン
チェン、クォン、チョウ
ポール、ヘニングトン
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Process Automation International Ltd
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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/02—Tanks; Installations therefor
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/007—Current directing devices
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/12—Process control or regulation

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  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Electroplating Methods And Accessories (AREA)

Description

本発明は、電気めっき装置、特に、多くの移動可能な被加工物搬送手段を備えたそのような機械、及び電気めっき方法に関する。 The present invention relates to electroplating equipment, in particular such machines equipped with many movable workpiece transfer means, and electroplating methods.

図１に示されるように、全体として１０のように示された従来の電気めっき装置において、多くの被加工物搬送手段１２が、電気めっき溶液を収容するタンク１４内を通過するように相対的に移動可能である。各被加工物搬送手段１２は、電気めっきされる各々の被加工物に対して、着脱可能になっている。被加工物が被加工物搬送手段１２に装着されると、被加工物と被加工物搬送手段１２は互いに電気的に接続される。被加工物搬送手段１２は、順次、即ち次から次へと一列になって、タンク１４内を連続的に移動可能であり、これにより、タンク１４内を通過するように被加工物を順次移動させる。電気めっきされる被加工物は、通常、矩形であり平坦な形状をしている。被加工物が被加工物搬送手段１２に装着され、搬送されると、被加工物の対向主面が横を向き、被加工物は垂直な状態へ方向付けられる。これにより、電気めっき装置は、連続垂直式電気めっき装置と呼ばれる。 As shown in FIG. 1, in the conventional electroplating apparatus shown as 10 as a whole, many workpiece transporting means 12 are relative to pass through the tank 14 containing the electroplating solution. It is possible to move to. Each work piece transporting means 12 is removable from each work piece to be electroplated. When the workpiece is mounted on the workpiece transporting means 12, the workpiece and the workpiece transporting means 12 are electrically connected to each other. The workpiece transporting means 12 can move continuously in the tank 14 in a row, that is, one after another, whereby the workpiece is sequentially moved so as to pass through the tank 14. Let me. The work piece to be electroplated is usually rectangular and has a flat shape. When the workpiece is mounted on the workpiece transporting means 12 and transported, the opposing main surfaces of the workpiece face sideways and the workpiece is oriented in a vertical state. As a result, the electroplating apparatus is called a continuous vertical electroplating apparatus.

陰極棒１６が電気めっき装置１０のタンク１４に対して固定されており、被加工物搬送手段１２の各々は各スライドコンタクト１８を介して陰極棒１６に電気的に接続され、それにより、被加工物搬送手段１２がタンク１４内を通過するように相対的に移動している間に、陰極棒１６に電気的に接続されるようにする。各々が各電源２２により通電される多くの陽極板２０がタンク１４内に位置し、そして、タンク１４に対して固定されている。従って、被加工物が被加工物搬送手段１２によりタンク１４内の電気めっき溶液中を移動すると、被加工物は陰極棒１６と陽極板２０との間で電界に晒され、電気めっき溶液中の金属が被加工物上に堆積する。 The cathode rod 16 is fixed to the tank 14 of the electroplating apparatus 10, and each of the workpiece transporting means 12 is electrically connected to the cathode rod 16 via each slide contact 18, whereby the workpiece is processed. While the object transporting means 12 is relatively moving so as to pass through the tank 14, it is electrically connected to the cathode rod 16. Many anode plates 20, each energized by each power source 22, are located in the tank 14 and fixed to the tank 14. Therefore, when the workpiece moves in the electroplating solution in the tank 14 by the workpiece transporting means 12, the workpiece is exposed to an electric field between the cathode rod 16 and the anode plate 20 and is in the electroplating solution. Metal deposits on the workpiece.

そのような電気めっき装置の有効カバー領域は被加工物の幅と同程度に短くなり得ることが一般的に知られている。被加工物上に電気めっきされる金属の総量は、主に、電気めっき処理中に電気めっき溶液内において被加工物によって消費されるアンペア時の総量に依存するので、各被加工物に供給される電流量を制御することが重要である。ところが、従来の電気めっき装置１０では、もし、被加工物の電気抵抗が異なっていたり、被加工物搬送手段１２が異なっていると、タンク１４内を移動する被加工物の各々に供給される電流を制御することが非常に困難となる。何故ならば、電気めっきが行われている間に、電気抵抗がより小さい被加工物と被加工物搬送手段１２は、より多くの電流を消費し、電気抵抗がより大きい被加工物と被加工物搬送手段１２は、より少ない電流を消費するからである。 It is generally known that the effective cover area of such electroplating equipment can be as short as the width of the workpiece. The total amount of metal electroplated on the workpiece depends primarily on the amp-hours consumed by the workpiece in the electroplating solution during the electroplating process and is therefore supplied to each workpiece. It is important to control the amount of current. However, in the conventional electroplating apparatus 10, if the electrical resistance of the workpiece is different or the workpiece transporting means 12 is different, the electric plating apparatus 10 is supplied to each of the workpieces moving in the tank 14. It becomes very difficult to control the current. This is because, during electroplating, the workpiece and workpiece transfer means 12 with lower electrical resistance consumes more current and the workpiece and workpiece with higher electrical resistance. This is because the object transporting means 12 consumes less current.

従って、本発明の目的は、上記欠陥を緩和する電気めっき装置及び電気めっき方法を提供し、もしくは、少なくとも商業並びに公衆に対し有用な代替え手段を提供するものである。特に、中国特許出願公開番号１０３４３６９４６Ａ号に開示された自動電気めっきシステムを基にしたさらなる改良と技術革新とにより、少なくとも上記欠陥を緩和することが可能であることが分かっている。 Therefore, an object of the present invention is to provide an electroplating apparatus and an electroplating method for alleviating the above defects, or at least to provide a useful alternative to commerce and the public. In particular, it has been found that at least the above defects can be mitigated by further improvements and technological innovations based on the automatic electroplating system disclosed in Chinese Patent Application Publication No. 1034369646A.

本発明の第１の特徴によれば、電気めっき溶液を収容する少なくとも１つのタンクと、電気めっきされる第１被加工物に着脱可能となっており、タンクに対し相対的に移動可能な第１搬送手段と、電気めっきされる第２被加工物に着脱可能となっており、タンクに対し相対的に移動可能な第２搬送手段とを備え、第１搬送手段は、少なくとも１つの第１電源に電気的に接続され、該第１電源と同時に移動可能であり、第２搬送手段は、少なくとも１つの第２電源に電気的に接続され、該第２電源と同時に移動可能であり、第１電源と前記第２電源は、少なくとも１つの接地された共通導電体と電気的に接続されている、電気めっき装置が提供される。 According to the first feature of the present invention, at least one tank for accommodating the electroplating solution and the first work piece to be electroplated are detachable and movable relative to the tank. It is provided with a first transport means and a second transport means that is removable from the second workpiece to be electroplated and is movable relative to the tank, and the first transport means is at least one first. The second transport means is electrically connected to a power source and can move at the same time as the first power source, and the second transport means is electrically connected to at least one second power source and can move at the same time as the second power source. An electroplating apparatus is provided in which one power source and the second power source are electrically connected to at least one grounded common conductor.

本発明の第２の特徴によれば、（ａ）第１被加工物を第１搬送手段に着脱可能に取り付けかつ電気的に接続し、（ｂ）電気めっき溶液を収容するタンクを通過するように、かつ、該タンクに対して相対的に、第１搬送手段を移動させ、（ｃ）第１搬送手段と同時に移動可能に、少なくとも１つの第１電源を第１搬送手段に関連付け、（ｄ）第１電源から電力を第１搬送手段に供給し、（ｅ）第２被加工物を第２搬送手段に着脱可能に取り付けかつ電気的に接続し、（ｆ）電気めっき溶液を収容するタンクを通過するように、かつ、該タンクに対して相対的に、第２の搬送手段を移動させ、（ｇ）第２搬送手段と同時に移動可能に、少なくとも１つの第２電源を第２搬送手段に関連付け、（ｈ）第２電源から電力を第２搬送手段に供給し、（ｉ）第１搬送手段に供給される電流と第２搬送手段に供給される電流とを個別に調整し、（ｊ）第１電源および第２電源を、少なくとも１つの接地された共通導電体に電気的に接続するステップを具備する、少なくとも一つの被加工物を電気めっきする方法が提供される。 According to the second feature of the present invention, (a) the first workpiece is detachably attached to and electrically connected to the first transport means, and (b) passes through a tank containing an electroplating solution. In addition, the first transport means is moved relative to the tank, and (c) at least one first power source is associated with the first transport means so as to be movable at the same time as the first transport means, (d). ) Power is supplied from the first power source to the first transport means, (e) the second workpiece is detachably attached to and electrically connected to the second transport means, and (f) a tank for accommodating the electroplating solution. The second transport means is moved so as to pass through the tank and relative to the tank, and (g) at least one second power source can be moved at the same time as the second transport means. (H) Power is supplied from the second power source to the second transport means, and (i) the current supplied to the first transport means and the current supplied to the second transport means are individually adjusted to (i). j) Provided is a method of electroplating at least one workpiece comprising the step of electrically connecting a first power source and a second power source to at least one grounded common conductor.

従来の電気めっき装置の概略図。Schematic of a conventional electroplating apparatus. 本発明の第１実施形態に係る電気めっき装置の概略図。The schematic diagram of the electroplating apparatus which concerns on 1st Embodiment of this invention. 本発明の第２実施形態に係る電気めっき装置の概略図。The schematic diagram of the electroplating apparatus which concerns on 2nd Embodiment of this invention.

本発明の実施形態を、添付の図面を参照して、あくまでも例として説明する。本発明の第１実施形態に係る連続垂直式電気めっき装置の概略図を図２に示し、その全体は１００として示されている。 An embodiment of the present invention will be described as an example with reference to the accompanying drawings. A schematic view of the continuous vertical electroplating apparatus according to the first embodiment of the present invention is shown in FIG. 2, and the whole is shown as 100.

電気めっき装置１００は電気めっき溶液を収容するためのタンク１０２を備えている。多くの被加工物搬送手段１０４（そのうち５個が図２に示されている）がタンク１０２内を通過しかつ相対的に順次移動可能になっている。各被加工物搬送手段１０４は、電気めっきされる被加工物に対して物理的かつ電気的に接続されて被加工物との物理的及び電気的接続を確立するために、着脱可能となっている。 The electroplating apparatus 100 includes a tank 102 for accommodating the electroplating solution. Many workpiece transporting means 104, five of which are shown in FIG. 2, pass through the tank 102 and are relatively sequentially movable. Each work piece transporting means 104 is physically and electrically connected to the work piece to be electroplated and becomes removable in order to establish a physical and electrical connection with the work piece. There is.

各被加工物搬送手段１０４は、電流レギュレータ等の一組の電源１０６ａ、１０６ｂに固定されかつ電気的に接続されている。複数の電源１０６ａは第１共通陽極１０８に電気的に接続され、各電源１０６ａは、陽極１０８との電気的な接続を維持しながら陽極１０８に対する相対的なスライド運動を行うための各スライドコンタクト１１２ａを介して、陽極１０８に電気的に接続されており、複数の電源１０６ｂは第２共通陽極１１０に電気的に接続され、各電源１０６ｂは、陽極１１０との電気的な接続を維持しながら陽極１１０に対する相対的なスライド運動を行うための各スライドコンタクト１１２ｂを介して、陽極１１０に電気的に接続されている。従って、各組の電源１０６ａ、１０６ｂは、互いにかつこれらが電気的、物理的に接続されている被加工物搬送手段１０４と共に、同時にタンク１０２に対して相対的に移動可能となっている。電源１０６ａは、陽極１０８と被加工物搬送手段１０４との間に電気的に接続され、電源１０６ｂは、陽極１１０と被加工物搬送手段１０４との間に電気的に接続されている。多くの陽極板１１４（そのうち６個が図２に示されている）がタンク１０２内に位置し、タンク１０２に対して固定されている。 Each work piece conveying means 104 is fixed and electrically connected to a set of power supplies 106a and 106b such as a current regulator. The plurality of power supplies 106a are electrically connected to the first common anode 108, and each power supply 106a is a slide contact 112a for performing a sliding motion relative to the anode 108 while maintaining an electrical connection with the anode 108. Is electrically connected to the anode 108, a plurality of power supplies 106b are electrically connected to the second common anode 110, and each power supply 106b is an anode while maintaining an electrical connection with the anode 110. It is electrically connected to the anode 110 via each slide contact 112b for performing a sliding motion relative to the 110. Therefore, the power supplies 106a and 106b of each set can move relative to the tank 102 at the same time together with the workpiece transporting means 104 to which they are electrically and physically connected to each other. The power supply 106a is electrically connected between the anode 108 and the workpiece conveying means 104, and the power supply 106b is electrically connected between the anode 110 and the workpiece conveying means 104. Many anode plates 114, six of which are shown in FIG. 2, are located within the tank 102 and are secured to the tank 102.

二つの陽極１０８、１１０は共に接地されていてもよい。もしくは、二つの陽極１０８、１１０は、例えば、５ボルトの電圧に設定されてもよい。もし、適切であれば、二つの陽極１０８、１１０はそれぞれ異なる電圧に設定されてもよい。 The two anodes 108 and 110 may both be grounded. Alternatively, the two anodes 108, 110 may be set to a voltage of, for example, 5 volts. If appropriate, the two anodes 108 and 110 may be set to different voltages.

各被加工物搬送手段１０４に接続されている各電源１０６ａ、１０６ｂから各被加工物搬送手段１０４への電力は個別に調整可能である。特に、電源１０６ａ、１０６ｂを電流制御モードに設定することができ、よって、個々の被加工物搬送手段１０４と個々の被加工物の電気抵抗が異なっていてもこれに関わらず、各被加工物搬送手段１０４（および、各被加工物搬送手段１０４により搬送される各被加工物）に供給される電流が同じになるように様々な電源１０６ａ、１０６ｂが制御される。被加工物上に電気めっきされる金属の総量は、主に、タンク１０２内での電気めっき処理中に電気めっき溶液内において被加工物によって消費されるアンペア時間に依存するので、すべての被加工物搬送手段１０４（および、被加工物搬送手段１０４により搬送されるすべての各被加工物）に同じ電流を供給するようにすべての電源１０６ａ、１０６ｂを制御することにより、個々の被加工物搬送手段１０４と個々の被加工物の電気抵抗が異なっていても、これに関わらず、より均一且つ一貫性のある電気めっきの結果物を得ることができる。 The electric power from each of the power sources 106a and 106b connected to each workpiece transport means 104 to each workpiece transport means 104 can be adjusted individually. In particular, the power supplies 106a and 106b can be set to the current control mode, so that even if the electrical resistances of the individual workpiece transfer means 104 and the individual workpieces are different, each workpiece is different. The various power supplies 106a and 106b are controlled so that the currents supplied to the transport means 104 (and the workpieces transported by the workpiece transport means 104) are the same. The total amount of metal electroplated on the work piece depends primarily on the amp-hours consumed by the work piece in the electroplating solution during the electroplating process in the tank 102, and thus all work work. By controlling all the power supplies 106a and 106b to supply the same current to the object transporting means 104 (and all the workpieces transported by the workpiece transporting means 104), the individual workpieces are transported. Even if the electrical resistance of the individual workpieces differs from that of the means 104, a more uniform and consistent electroplating result can be obtained regardless of this.

本発明の第２実施形態に係る連続垂直式電気めっき装置の概略図を図３に示し、その全体は２００として示されている。 A schematic view of the continuous vertical electroplating apparatus according to the second embodiment of the present invention is shown in FIG. 3, and the whole is shown as 200.

電気めっき装置２００は電気めっき溶液を収容するためのタンク２０２を備えている。多くの被加工物搬送手段２０４（そのうち４個が図３に示されている）がタンク２０２内を通過しかつ相対的に順次移動可能になっている。各被加工物搬送手段１０４は、電気めっきされる各被加工物２０５に対して物理的かつ電気的に接続されて被加工物２０５との物理的及び電気的接続を確立するために、着脱可能となっている。 The electroplating apparatus 200 includes a tank 202 for accommodating the electroplating solution. Many workpiece transport means 204 (four of which are shown in FIG. 3) pass through the tank 202 and are relatively sequentially movable. Each workpiece transport means 104 is physically and electrically connected to each electroplated workpiece 205 and is removable to establish a physical and electrical connection with the workpiece 205. It has become.

各被加工物搬送手段２０４は、電流レギュレータ等の一組の電源２０６ａ、２０６ｂに固定されかつ電気的に接続されている。複数の電源２０６ａは分割陽極２０８に電気的に接続され、各電源２０６ａは、分割陽極２０８との電気的な接続を維持しながら分割陽極２０８に対する相対的なスライド運動を行うための各スライドコンタクト２１２ａを介して、分割陽極２０８に電気的に接続されている。複数の電源２０６ｂは分割陽極２１０に電気的に接続され、各電源２０６ｂは、分割陽極２１０との電気的な接続を維持しながら分割陽極２１０に対する相対的なスライド運動を行うための各スライドコンタクト２１２ｂを介して、分割陽極２１０に電気的に接続されている。従って、電源２０６ａ、２０６ｂの各ペアは、互いにかつこれらが電気的、物理的に接続されている被加工物搬送手段２０４と共に、同時にタンク２０２に対して相対的に移動可能となっている。電源２０６ａは、分割陽極２０８と被加工物搬送手段２０４との間に電気的に接続され、電源２０６ｂは、分割陽極２１０と被加工物搬送手段２０４との間に電気的に接続されている。 Each work piece conveying means 204 is fixed and electrically connected to a set of power supplies 206a and 206b such as a current regulator. The plurality of power supplies 206a are electrically connected to the split anode 208, and each power supply 206a is a slide contact 212a for performing a sliding motion relative to the split anode 208 while maintaining an electrical connection with the split anode 208. Is electrically connected to the split anode 208 via. The plurality of power supplies 206b are electrically connected to the split anode 210, and each power supply 206b is a slide contact 212b for performing a sliding motion relative to the split anode 210 while maintaining an electrical connection with the split anode 210. Is electrically connected to the split anode 210 via. Therefore, each pair of the power supplies 206a and 206b can move relative to the tank 202 at the same time together with the workpiece transporting means 204 to which they are electrically and physically connected to each other. The power supply 206a is electrically connected between the split anode 208 and the workpiece conveying means 204, and the power supply 206b is electrically connected between the split anode 210 and the workpiece conveying means 204.

上記の如く述べたように、陽極２０８，２１０は共に分割されている。特に、陽極２０８は、複数の電気的に分離された分割部２２２を形成するように、多くの位置２２０で分割されている。従って、電気めっき装置２００の動作中、並びに、被加工物２０５がタンク２０２内を通過するように移動している間、各電源２０６ａは、連続的に（直列的に）配置されているが電気的には分離されている陽極２０８の複数の分割部２２２に対して相対的に移動して連続的に電気的に接続され、電源２０６ｂは、連続的に（直列的に）配置されているが電気的に分離されている陽極２１０の複数の分割部２２６に対して相対的に移動して連続的に電気的に接続される。例えば、電源２０６に電気的に接続されている被加工物搬送手段２０４が電気めっき装置２００のタンク２０２内を通過するように相対的に移動している間、電源２０６ａは、陽極２０８の第１分割部２２２、次に、第２分割部２２２、そして、第３分割部２２２に連続的に電気的に接続するように移動する。ここで、第１、第２、および、第３分割部２２２は、順次、長手方向に配置され、かつ、互いに電気的に分離されている。 As described above, the anodes 208 and 210 are both separated. In particular, the anode 208 is split at many positions 220 so as to form a plurality of electrically separated split portions 222. Therefore, while the electroplating apparatus 200 is in operation and the workpiece 205 is moving so as to pass through the tank 202, each power supply 206a is arranged continuously (in series) but is electrically charged. Although the power supply 206b is arranged continuously (in series), it moves relative to the plurality of divided portions 222 of the anode 208 which is separated and is continuously electrically connected. It moves relative to the plurality of divided portions 226 of the anode 210 that are electrically separated and is continuously electrically connected. For example, while the workpiece transport means 204 electrically connected to the power supply 206 is relatively moving so as to pass through the tank 202 of the electroplating apparatus 200, the power supply 206a is the first of the anode 208. It moves so as to be continuously electrically connected to the split portion 222, then to the second split portion 222, and then to the third split portion 222. Here, the first, second, and third divided portions 222 are sequentially arranged in the longitudinal direction and electrically separated from each other.

このような配置により、陽極２０８の各分割部２２２の電圧を個別に制御することが可能となり、それにより、異なった電気めっき効果が得られ、即ち、異なる製品を電気めっきすることができる。同様に、陽極２１０も、複数の電気的に分離された分割部２２６を形成するように、多くの位置２２４で分割されている。このような構成により、陽極２１０の各分割部２２６の電圧を個別に制御することが可能となり、それにより、異なった電気めっき効果が得られ、即ち、異なる製品を電気めっきすることができる。電源２０６ａ、２０６ｂの各陰極側は、各スライドコンタクト２２９を介して、接地されている共通導電体２３０に電気的に接続されており、従って、電源２０６ａ、２０６ｂの各陰極側（および、各被加工物搬送手段２０４に搬送される各被加工物２０５）もまた互い接続されている。接地された共通導電体２３０は、電気めっき装置２００の接地された筐体でもよい。 With such an arrangement, it is possible to individually control the voltage of each divided portion 222 of the anode 208, whereby different electroplating effects can be obtained, that is, different products can be electroplated. Similarly, the anode 210 is also split at many positions 224 so as to form a plurality of electrically separated splits 226. With such a configuration, it is possible to individually control the voltage of each divided portion 226 of the anode 210, whereby different electroplating effects can be obtained, that is, different products can be electroplated. Each cathode side of the power supplies 206a, 206b is electrically connected to the grounded common conductor 230 via each slide contact 229, and thus each cathode side (and each cover) of the power supplies 206a, 206b. The workpieces 205) transported to the workpiece transport means 204 are also connected to each other. The grounded common conductor 230 may be a grounded housing of the electroplating apparatus 200.

各被加工物搬送手段２０４に接続されている各電源２０６ａ、２０６ｂから各被加工物搬送手段２０４へ供給される電力は個別に調整可能である。特に、電源２０６ａ、２０６ｂを電流制御モードに設定することができ、よって、個々の被加工物搬送手段２０４と個々の被加工物の電気抵抗が異なっていてもこれに関わらず、各被加工物搬送手段２０４（および、各被加工物搬送手段２０４により搬送される各被加工物）に供給される電流が同じになるように、陽極２１０の同じ分割部２２６に接続された様々な電源２０６ａ、２０６ｂが制御される。同様に、各被加工物搬送手段２０４（および、各被加工物搬送手段２０４により搬送される各被加工物）に供給される電流が同じになるように、陽極２０８の同じ分割部２２２に接続された様々な電源２０６ａ、２０６ｂが制御される。被加工物上に電気めっきされる金属の総量は、主に、タンク２０２内での電気めっき処理中に電気めっき溶液内において被加工物によって消費されるアンペア時間に依存するので、各陽極２０８，２１０の各々の分割部２２２，２２６においてすべての被加工物搬送手段２０４（および、被加工物搬送手段２０４により搬送されるすべての各被加工物）に同じ電流を供給するように、すべての電源２０６ａ、２０６ｂを制御することにより、個々の被加工物搬送手段２０４と個々の被加工物の電気抵抗が異なっていても、これに関わらず、より均一且つ一貫性のある電気めっきの結果を得ることができる。 The electric power supplied from the power supplies 206a and 206b connected to the workpiece transport means 204 to the workpiece transport means 204 can be individually adjusted. In particular, the power supplies 206a and 206b can be set to the current control mode, so that even if the electrical resistances of the individual workpiece transport means 204 and the individual workpieces are different, each workpiece Various power supplies 206a, connected to the same split 226 of the anode 210, so that the currents supplied to the transport means 204 (and each workpiece transported by each workpiece transport means 204) are the same. 206b is controlled. Similarly, it is connected to the same divided portion 222 of the anode 208 so that the current supplied to each workpiece transporting means 204 (and each workpiece transported by each workpiece transporting means 204) is the same. Various power supplies 206a and 206b are controlled. The total amount of metal electroplated on the workpiece depends primarily on the amperage time consumed by the workpiece in the electroplating solution during the electroplating process in the tank 202, so each anode 208, All power supplies so that the same current is supplied to all the workpiece transfer means 204 (and all the workpieces conveyed by the workpiece transfer means 204) in each of the divisions 222 and 226 of 210. By controlling 206a and 206b, even if the electrical resistances of the individual workpiece transport means 204 and the individual workpieces are different, a more uniform and consistent electroplating result can be obtained regardless of the difference. be able to.

電源２０６ａ、２０６ｂの各陰極側を、接地されている共通導電体２３０（例えば、装置２００の接地された筐体）に電気的に接続することにより、複数の被加工物搬送手段２０４により搬送される複数の被加工物２０５の両端にかかる電圧はそれぞれ同電圧となり、従って、エッジ効果が低減される。加えて、既存の電気めっき装置では、共通陰極導電体に大きな電流が流れ、これが被加工物２０５間にさらなる電位差を引き起こす。一方、本発明に係る電気めっき装置２００では、電源２０６ａ、２０６ｂが局所的に電気を発生するので、大きな電流を流す必要がなく、そして、これがさらに被加工物２０５間の電位差を小さくする。 By electrically connecting each cathode side of the power supplies 206a and 206b to a grounded common conductor 230 (for example, a grounded housing of the device 200), the work piece is conveyed by a plurality of workpiece transfer means 204. The voltages applied to both ends of the plurality of workpieces 205 are the same, and therefore the edge effect is reduced. In addition, in existing electroplating equipment, a large current flows through the common cathode conductor, which causes a further potential difference between the workpiece 205. On the other hand, in the electroplating apparatus 200 according to the present invention, since the power supplies 206a and 206b locally generate electricity, it is not necessary to pass a large current, and this further reduces the potential difference between the workpiece 205.

上記は、本発明が実行可能な例を説明しただけであり、本発明の要旨を逸脱しない範囲で、種々の変更及び／又は置き換えを行うことができることが理解されるところである。 It is understood that the above is only a feasible example of the present invention and that various modifications and / or replacements can be made without departing from the gist of the present invention.

さらに、例えば、明瞭にするために別々の実施形態の中で説明した本発明のある特徴は、一つの実施形態に組み合わせてもよい。逆に、例えば、簡潔にするために一つの実施形態の中で説明した本発明の様々な特徴は、別々の実施形態としてもよく、又は、如何なる適切な部分的な組み合わせとしてもよい。 Further, for example, certain features of the invention described in separate embodiments for clarity may be combined into one embodiment. Conversely, for example, the various features of the invention described in one embodiment for brevity may be separate embodiments or any suitable partial combination.

Claims (16)

電気めっき溶液を収容する少なくとも１つのタンクと、
電気めっきされる第１被加工物に着脱可能となっており、前記タンクに対し相対的に移動可能な第１搬送手段と、
電気めっきされる第２被加工物に着脱可能となっており、前記タンクに対し相対的に移動可能な第２搬送手段とを備え、
前記第１搬送手段は、前記第１搬送手段に電流を供給する少なくとも１つの第１電源に電気的に接続され、該第１電源と同時に移動可能であり、
前記第２搬送手段は、前記第２搬送手段に電流を供給する少なくとも１つの第２電源に電気的に接続され、該第２電源と同時に移動可能であり、
前記第１電源と前記第２電源は、少なくとも１つの接地された共通導電体と電気的に接続されており、
前記第１搬送手段に供給される電流と前記第２搬送手段に供給される電流とが実質的に同じになるように、前記第１電源および前記第２電源が制御可能であり、
前記第１電源と前記第２電源は少なくとも１つの分割陽極に電気的に接続されており、
前記接地された共通導電体は前記装置の筐体であり、
前記第１電源の陰極側および前記第２電源の陰極側は、前記接地された共通導電体に電気的に接続されている、電気めっき装置。 With at least one tank containing the electroplating solution,
A first transport means that is removable from the first electroplated workpiece and can move relative to the tank.
It is equipped with a second transport means that is removable from the second work piece to be electroplated and can move relative to the tank.
The first transport means is electrically connected to at least one first power source that supplies an electric current to the first transport means, and can move at the same time as the first power source.
The second transport means is electrically connected to at least one second power source that supplies an electric current to the second transport means, and can move at the same time as the second power source.
The first power source and the second power source are electrically connected to at least one grounded common conductor .
The first power supply and the second power supply can be controlled so that the current supplied to the first transport means and the current supplied to the second transport means are substantially the same.
The first power source and the second power source are electrically connected to at least one split anode.
The grounded common conductor is the housing of the device.
An electroplating apparatus in which the cathode side of the first power source and the cathode side of the second power source are electrically connected to the grounded common conductor. 前記第１電源は、第１スライドコンタクトを介して、前記接地された共通導電体に対してスライド可能である、請求項１に記載の電気めっき装置。 The electroplating apparatus according to claim 1, wherein the first power source is slidable with respect to the grounded common conductor via a first slide contact. 前記第２電源は、第２スライドコンタクトを介して、前記接地された共通導電体に対してスライド可能である、請求項１に記載の電気めっき装置。 The electroplating apparatus according to claim 1, wherein the second power source is slidable with respect to the grounded common conductor via a second slide contact. 前記第１搬送手段は、少なくとも１つの第３電源に電気的に接続され、該第３電源と同時に移動可能である、請求項１に記載の電気めっき装置。 The electroplating apparatus according to claim 1, wherein the first transport means is electrically connected to at least one third power source and can move at the same time as the third power source. 前記第２搬送手段は、少なくとも１つの第４電源に電気的に接続され、該第４電源と同時に移動可能である、請求項４に記載の電気めっき装置。 The electroplating apparatus according to claim 4, wherein the second transport means is electrically connected to at least one fourth power source and can move at the same time as the fourth power source. 前記第１搬送手段に供給される電流と前記第２搬送手段に供給される電流とが実質的に同じになるように、前記第１電源、前記第２電源、前記第３電源および前記第４電源が制御可能である、請求項５に記載の電気めっき装置。 The first power supply, the second power supply, the third power supply, and the fourth power supply so that the current supplied to the first transport means and the current supplied to the second transport means are substantially the same. The electroplating apparatus according to claim 5, wherein the power supply is controllable. 前記第１電源および前記第２電源は、各々、電流レギュレータである、請求項１に記載の電気めっき装置。 The electroplating apparatus according to claim 1, wherein the first power supply and the second power supply are current regulators, respectively. 前記第３電源および前記第４電源は、各々、電流レギュレータである、請求項５に記載の電気めっき装置。 The electroplating apparatus according to claim 5, wherein the third power supply and the fourth power supply are current regulators, respectively. 前記第１搬送手段に供給される電力と前記第２搬送手段に供給される電力は個別に調整可能である、請求項１に記載の電気めっき装置。 The electroplating apparatus according to claim 1, wherein the electric power supplied to the first conveying means and the electric power supplied to the second conveying means can be individually adjusted. 前記分割陽極は、互いに電気的に分離された第１分割部と第２分割部とを少なくとも含む、請求項１に記載の電気めっき装置。 The electroplating apparatus according to claim 1 , wherein the split anode includes at least a first split portion and a second split portion that are electrically separated from each other. （ａ）第１被加工物を第１搬送手段に着脱可能に取り付けかつ電気的に接続し、
（ｂ）電気めっき溶液を収容するタンクを通過するように、かつ、該タンクに対して相対的に、前記第１搬送手段を移動させ、
（ｃ）前記第１搬送手段と同時に移動可能に、少なくとも１つの第１電源を前記第１搬送手段に関連付け、
（ｄ）前記第１電源から電力を前記第１搬送手段に供給し、
（ｅ）第２被加工物を第２搬送手段に着脱可能に取り付けかつ電気的に接続し、
（ｆ）前記電気めっき溶液を収容する前記タンクを通過するように、かつ、該タンクに対して相対的に、前記第２の搬送手段を移動させ、
（ｇ）前記第２搬送手段と同時に移動可能に、少なくとも１つの第２電源を前記第２搬送手段に関連付け、
（ｈ）前記第２電源から電力を前記第２搬送手段に供給し、
（ｉ）前記第１搬送手段に供給される電流と前記第２搬送手段に供給される電流とを個別に調整し、
（ｊ）前記第１電源および前記第２電源を、少なくとも１つの接地された共通導電体に電気的に接続するステップを具備する、少なくとも一つの被加工物を電気めっきし、
（ｋ）前記第１電源と前記第２電源とを、互いに電気的に分離された少なくとも１つの第１分割部と１つの第２分割部とを含む分割陽極に電気的に接続し、前記第１電源の陰極側および前記第２電源の陰極側は、前記接地された共通導電体に電気的に接続されており、
（ｌ）前記第１搬送手段に供給される電流と前記第２搬送手段に供給される電流とが実質的に同じになるように、前記第１電源および前記第２電源を制御する方法。 (A) The first workpiece is detachably attached to the first transport means and electrically connected.
(B) The first transport means is moved so as to pass through the tank containing the electroplating solution and relative to the tank.
(C) At least one first power source is associated with the first transport means so as to be movable at the same time as the first transport means.
(D) Electric power is supplied from the first power source to the first transport means, and the electric power is supplied to the first transport means.
(E) The second workpiece is detachably attached to the second transport means and electrically connected.
(F) The second transport means is moved so as to pass through the tank containing the electroplating solution and relative to the tank.
(G) At least one second power source is associated with the second transport means so as to be movable at the same time as the second transport means.
(H) Power is supplied from the second power source to the second transport means,
(I) The current supplied to the first transport means and the current supplied to the second transport means are individually adjusted.
(J) Electroplating at least one workpiece comprising the step of electrically connecting the first power source and the second power source to at least one grounded common conductor .
(K) The first power supply and the second power supply are electrically connected to a split anode including at least one first split portion and one second split portion electrically separated from each other, and the first power supply is electrically connected. The cathode side of the first power supply and the cathode side of the second power supply are electrically connected to the grounded common conductor.
(L) A method of controlling the first power supply and the second power supply so that the current supplied to the first transport means and the current supplied to the second transport means are substantially the same. 前記第１搬送手段と同時に移動可能に、第３電源を前記第１搬送手段に関連付けるステップ（ｍ）と、前記第２搬送手段と同時に移動可能に、第４電源を前記第２搬送手段に関連付けるステップ（ｎ）とをさらに具備する、請求項１１に記載の方法。 A step (m ) of associating a third power source with the first transport means so as to be movable at the same time as the first transport means, and associating a fourth power source with the second transport means so as to be movable at the same time as the second transport means 11. The method of claim 11 , further comprising step (n). 前記第１電源は前記分割陽極の前記第１分割部に電気的に接続され、前記第２電源は前記分割陽極の前記第２分割部に電気的に接続されている、請求項１１に記載の方法。 The first power source is electrically connected to the first division section of the divided anode, the second power source is electrically connected to the second divided portion of the divided anode of claim 11 Method. 少なくとも前記第１電源を前記分割陽極の前記第１分割部に電気的に接続し、次に、少なくとも前記第１電源を前記分割陽極の前記第２分割部に電気的に接続するために、少なくとも前記第１電源を移動させる工程（ｏ）をさらに備えた、請求項１１に記載の方法。 At least to electrically connect the first power supply to the first split portion of the split anode and then at least electrically connect the first power supply to the second split portion of the split anode. The method according to claim 11 , further comprising the step (o) of moving the first power source. 前記接地された共通導電体は電気めっき装置の筐体である、請求項１１に記載の方法。 The method according to claim 11 , wherein the grounded common conductor is a housing of an electroplating apparatus. 前記第１搬送手段に供給される電流と前記第２搬送手段に供給される電流とが実質的に同じになるように、前記第１電源、前記第２電源、前記第３電源および前記第４電源を制御するステップ（ｐ）をさらに具備する、請求項１２に記載の方法。 The first power supply, the second power supply, the third power supply, and the fourth power supply so that the current supplied to the first transport means and the current supplied to the second transport means are substantially the same. 12. The method of claim 12 , further comprising a step (p) of controlling the power supply.
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