JP6883042B2 - 液体吐出装置 - Google Patents
液体吐出装置 Download PDFInfo
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- JP6883042B2 JP6883042B2 JP2018533915A JP2018533915A JP6883042B2 JP 6883042 B2 JP6883042 B2 JP 6883042B2 JP 2018533915 A JP2018533915 A JP 2018533915A JP 2018533915 A JP2018533915 A JP 2018533915A JP 6883042 B2 JP6883042 B2 JP 6883042B2
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- 239000007788 liquid Substances 0.000 title claims description 188
- 239000012528 membrane Substances 0.000 claims description 116
- 239000012530 fluid Substances 0.000 claims description 83
- 238000005086 pumping Methods 0.000 claims description 41
- 239000000463 material Substances 0.000 claims description 28
- 230000000149 penetrating effect Effects 0.000 claims description 15
- 229920000642 polymer Polymers 0.000 claims description 8
- 238000007599 discharging Methods 0.000 claims description 7
- 239000010410 layer Substances 0.000 description 345
- 235000012431 wafers Nutrition 0.000 description 126
- 238000005530 etching Methods 0.000 description 114
- 239000010408 film Substances 0.000 description 80
- 239000000758 substrate Substances 0.000 description 60
- 238000004519 manufacturing process Methods 0.000 description 57
- 238000000034 method Methods 0.000 description 43
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 22
- 229910052710 silicon Inorganic materials 0.000 description 22
- 239000010703 silicon Substances 0.000 description 22
- 230000008569 process Effects 0.000 description 21
- 238000001020 plasma etching Methods 0.000 description 16
- 238000001459 lithography Methods 0.000 description 12
- 150000004767 nitrides Chemical class 0.000 description 12
- 238000001039 wet etching Methods 0.000 description 9
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 6
- 238000000708 deep reactive-ion etching Methods 0.000 description 6
- 238000000227 grinding Methods 0.000 description 6
- 238000005304 joining Methods 0.000 description 6
- 230000010355 oscillation Effects 0.000 description 6
- 238000005498 polishing Methods 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 230000001965 increasing effect Effects 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 3
- 239000000356 contaminant Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000012790 adhesive layer Substances 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000009795 derivation Methods 0.000 description 2
- 239000004205 dimethyl polysiloxane Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 229910017090 AlO 2 Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- -1 polydimethylsiloxane Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14403—Structure thereof only for on-demand ink jet heads including a filter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14459—Matrix arrangement of the pressure chambers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/12—Embodiments of or processes related to ink-jet heads with ink circulating through the whole print head
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Ink Jet (AREA)
- Nozzles (AREA)
Description
同様に、膜300の上面は、戻りチャネル28の下側表面と同一平面にあり得る。
11 ノズル層
11a 表面
12 基板導入口
14、14a 導入供給チャネル
16 圧送チャンバ導入通路
16a アセンダ部
16b (水平)圧送チャンバ導入口
18 圧送チャンバ
20 ディセンダ部
22 ノズル
23、23a、23b 列
24 ノズル開口部
26 導出通路
26a 第一領域
26b 第二領域
27、208、506 凹み
28、28a、28b 導出供給チャネル(戻りチャネル)
30 アクチュエータ
31 圧電層
32a、32b 部分
40 マスク
42 開口部
44 セル領域
50 微細構造
52、54 底面
60 第一ウェハ
64 駆動電極
65 接地電極
66 膜(層)
67 接着層
74 上面
76 流路ウェハ
80 第一ウェハ
81、87 マスク層
82、88 デバイス層
84、90 エッチング停止層
85、92 ハンドル層
86 第二ウェハ
88a、88b、88c、88d、88e デバイス層の一部
96 アセンブリ
100 プリントヘッド
110 基板
112 基板の底面
120 インターポーザアセンブリ
122 上側インターポーザ
124 下側インターポーザ
130 筐体
132 液体サプライチャンバ
134 隔壁
136 戻りチャンバ
150 液体吐出装置
200、510 開口部
202、204 凹んだエリア
220 第二凹み
222 第三凹み
300、304、502 膜
302 穴
310 インピーダンス特徴部(インピーダンス構造)
320 フィルター特徴部(ろ過構造)
340、342 アパーチャ(開口部)
400 流路
402 液体サプライ導入口(導入開口部)
408 液体戻り導出口(導出開口部)
475 吐出装置の流路(流動路)
500 空洞
504 内面
Claims (18)
- 外面、内面、および該内面と該外面との間に延在するノズルを有するノズル層であって、該ノズルが、液体を受け入れるための入口を該内面に有し、ならびに液体の吐出のための出口開口部を該外面に有する、ノズル層と、
該ノズル層の該内面が固定される本体であって、圧送チャンバ、戻りチャネル、および該圧送チャンバを該ノズルの該入口に流体接続する第一通路を含む、本体と、
該ノズルの該入口を該戻りチャネルに流体接続する第二通路と、
該圧送チャンバから液体を流し出すように構成されたアクチュエータであって、その作動によって液体が該ノズルから放出される、アクチュエータと、
該アクチュエータと該圧送チャンバとの間に設けられた第一膜と、
該第一膜とは異なるとともに、該ノズルの該入口にわたって、該入口を部分的に遮断するように配置された第二膜であって、それ自身を貫通する少なくとも1つの穴を有し、液体吐出装置の作動時に流体が該第二膜の該少なくとも1つの穴を通って流れる、第二膜と、
を含む、液体吐出装置。 - 少なくとも一つの穴を有する前記第二膜が、流体が前記ノズルから吐出されるときに前記第一通路に、第一インピーダンスを提供し、流体が該ノズルから放出されないときに前記第一通路に第二インピーダンスを提供するように構成される、請求項1に記載の液体吐出装置。
- 前記第一インピーダンスが、前記第二インピーダンスよりも大きい、請求項2に記載の液体吐出装置。
- 前記第二膜が、前記ノズルの共鳴周波数においてまたはその周辺において前記第二通路に最大インピーダンスを提供するように構成される、請求項2に記載の液体吐出装置。
- 前記第二膜が、前記外面に対して実質的に平行に延在する、請求項1に記載の液体吐出装置。
- 前記第二膜が、それ自身を貫通する複数の穴を有する、請求項1に記載の液体吐出装置。
- 前記複数の穴が、前記第二膜にわたって一様に離間されている、請求項6に記載の液体吐出装置。
- 前記第一膜が、前記外面に対して平行に延在するとともに、前記液体吐出装置にわたって横設されている、請求項1に記載の液体吐出装置。
- 膜層が、前記本体と前記ノズル層との間に設けられる、請求項8に記載の液体吐出装置。
- 前記穴が、該穴の全ての側部において、前記ノズルの壁部から離間されている、請求項1に記載の液体吐出装置。
- 前記第二膜が、前記ノズルの壁部に対して実質的に垂直に、内側方向に突出する、請求項1に記載の液体吐出装置。
- 前記第二膜が、前記ノズルの壁部を形成する材料の弾性率よりも低い弾性率を有する材料で形成される、請求項1に記載の液体吐出装置。
- 前記第二膜が、前記ノズルの壁部より柔軟である、請求項1に記載の液体吐出装置。
- 前記第二膜を貫通する前記穴が、前記ノズルの前記出口開口部より狭い、請求項1に記載の液体吐出装置。
- 前記第二膜が酸化物で形成される、請求項1に記載の液体吐出装置。
- 前記第二膜が、約0.5μmから約5μmの間の厚さを有する、請求項15に記載の液体吐出装置。
- 前記第二膜がポリマーで形成される、請求項1に記載の液体吐出装置。
- 前記第二膜が、約10μmから約30μmの間の厚さを有する、請求項17に記載の液体吐出装置。
Priority Applications (1)
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Country Status (5)
Country | Link |
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US (4) | US10315421B2 (ja) |
EP (1) | EP3397493A4 (ja) |
JP (3) | JP6883042B2 (ja) |
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Also Published As
Publication number | Publication date |
---|---|
US11904610B2 (en) | 2024-02-20 |
US11001059B2 (en) | 2021-05-11 |
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JP2019505411A (ja) | 2019-02-28 |
JP7277508B2 (ja) | 2023-05-19 |
US20190248138A1 (en) | 2019-08-15 |
EP3397493A1 (en) | 2018-11-07 |
JP2023093768A (ja) | 2023-07-04 |
US20210245508A1 (en) | 2021-08-12 |
CN112895718A (zh) | 2021-06-04 |
US20170190179A1 (en) | 2017-07-06 |
JP2021175609A (ja) | 2021-11-04 |
WO2017117518A1 (en) | 2017-07-06 |
CN108698405B (zh) | 2021-02-02 |
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CN112895718B (zh) | 2022-09-13 |
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