JP6877601B2 - プラズマ処理装置及びプラズマ処理装置の運転方法 - Google Patents
プラズマ処理装置及びプラズマ処理装置の運転方法 Download PDFInfo
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Description
すなわち、前述の通り、半導体デバイス生産のためのプラズマエッチングを用いたウエハ処理において、ナノメートルレベルの加工精度を維持しながら、量産を継続する必要がある。そのためのAPCには、ナノメートルレベルの加工ばらつきを評価できる、高精度なプラズマ光のOESデータが必要である。
次に、上記の実施例の変形例を図12乃至15を用いて説明する。図12は、図1に示す実施例の変形例に係るプラズマ処理装置の構成の概略を模式的に示す縦断面図である。
プラズマを形成してウエハの処理を開始した後の処理が進行する時間の経過に伴なって内壁表面上に形成されて厚さが変化していく膜からの干渉光Ifの変化を図13に示す。図13は、図12の変形例において検出される処理室100の内壁表面の膜からの干渉光の量Ifの時間の変化に対する変化を示すグラフである。
2…天板、
3…シャワープレート、
4…Oリング、
5…真空容器壁、
6…ライナー、
7…採光窓、
8…サセプタ、
9…バッフル、
10…圧力制御バルブ、
11…試料台、
12…電極カバー、
13…光路シールド、
14…コリメートレンズ、
15…受光ポート、
16…放射ポート、
17…基準光ポート、
18…反射ポート、
19…スプリッタ、
20…スプリッタホルダ、
21…外部光源、
22…外部光源ポート、
23…分光器、
24…分光器ポート、
25…ファイバ、
26…ファイバコネクタ、
27…分岐ファイバ、
28…スペクトル演算部、
29…データベース作成部、
30…プラズマ条件制御部。
Claims (7)
- 真空容器内部に配置された処理室内に形成されるプラズマを用いて前記処理室内に配置されたウエハを処理するプラズマ装置であって、
前記処理室の周囲を囲む前記真空容器の一方の側の側壁に配置され前記処理室内のプラズマからの光が透過する一方の窓と、この一方の窓の処理室を挟んだ他方の側に配置されこの処理室からの光が透過する他方の窓と、前記一方の窓の外側であって前記処理室の外側に配置され当該一方の窓を透過した光が吸収される光吸収部と、前記他方の窓の外側であって前記処理室の外側に配置された光源と、当該光源と前記他方の窓との間に配置され前記光源からの光を前記処理室内に向かう光路及び別の方向に向かう光路に分岐すると共に前記他方の窓からの前記処理室内の光をさらに別の方向に分岐する光分岐部とを備え、
当該光分岐部から前記処理室へ向かう光と前記光分岐部で前記別の方向に分岐された光及び前記光分岐部で前記さらに別の方向への光との各々を選択的に伝達可能に構成された受光部と、選択的に伝達されて前記受光部で受光されたこれらの光の量を検出する検出部と、当該検出部が検出した結果に基づいて前記ウエハを処理する条件を調節する制御部とを備えたプラズマ処理装置。
- 請求項1に記載のプラズマ装置であって、
前記光源から前記他方の窓に入射する光を平行にする機構を備え、
前記受光部は、前記光源からの光が平行にされた後に前記他方の窓を透過して前記処理室に入射して前記一方の窓から反射された光を受光するプラズマ処理装置。
- 請求項1または2に記載のプラズマ装置であって、
前記光吸収部が前記一方の窓の外側の大気圧にされた部材の表面上に配置されたプラズマ処理装置
- 請求項1または2に記載のプラズマ装置であって、
前記検出部が、前記受光部で受光された光の量を用いて前記処理室の内壁の表面に形成された堆積膜の状態を検出するプラズマ処理装置。
- 請求項4に記載のプラズマ処理装置であって、
前記検出部が、前記検出した前記処理室内の内壁の表面に形成された堆積膜の状態をパラメータとして前記プラズマの条件と前記処理後に得られるウエハの表面の形状の寸法との相関を示すデータを用いて、前記ウエハを処理する条件を調節するプラズマ処理装置。
- 請求項4または5に記載のプラズマ処理装置であって、
前記プラズマが形成される前記ウエハが処理中に、前記光源からの光が前記他方の窓を透過して前記処理室内に放射される期間及び放射されない期間を有し、前記検出部が、前記放射される期間に前記受光部で受光された光の量と前記放射されない期間に前記受光部で受光された光の量とを用いて前記堆積膜の状態を検出するプラズマ処理装置。
- 請求項4に記載のプラズマ処理装置であって、
前記真空容器内部の前記一方および他方の窓の内側に配置され前記処理室内の前記プラズマが形成される空間を囲んで配置され当該空間からの光及び前記光源からの光が透過するライナーを備え、前記検出部が、前記受光部で受光された光の量を用いて前記ライナーの内壁の表面に形成された堆積膜の状態を検出するプラズマ処理装置。
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US10672595B2 (en) | 2020-06-02 |
US20160177449A1 (en) | 2016-06-23 |
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US10008370B2 (en) | 2018-06-26 |
TWI592980B (zh) | 2017-07-21 |
JP6650259B2 (ja) | 2020-02-19 |
KR20160075350A (ko) | 2016-06-29 |
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