JP6840339B2 - 微細素子の製造方法 - Google Patents
微細素子の製造方法 Download PDFInfo
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- JP6840339B2 JP6840339B2 JP2017055732A JP2017055732A JP6840339B2 JP 6840339 B2 JP6840339 B2 JP 6840339B2 JP 2017055732 A JP2017055732 A JP 2017055732A JP 2017055732 A JP2017055732 A JP 2017055732A JP 6840339 B2 JP6840339 B2 JP 6840339B2
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- 238000005530 etching Methods 0.000 description 7
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
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- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
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- BCMCBBGGLRIHSE-UHFFFAOYSA-N 1,3-benzoxazole Chemical compound C1=CC=C2OC=NC2=C1 BCMCBBGGLRIHSE-UHFFFAOYSA-N 0.000 description 1
- DKNPRRRKHAEUMW-UHFFFAOYSA-N Iodine aqueous Chemical compound [K+].I[I-]I DKNPRRRKHAEUMW-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
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Description
Claims (4)
- 基板の上に支持部を形成する第1工程と、
前記支持部の上に一端が固定された梁状のばね部を形成する第2工程と、
前記ばね部の他端の上に固定されて前記基板の上に離間して変位可能に配置される可動部を形成する第3工程と、
前記可動部の上面に接続部を形成する第4工程と、
前記可動部の上に前記接続部で接続する錘部を形成する第5工程と
を備えることを特徴とする微細素子の製造方法。 - 請求項1記載の微細素子の製造方法において、
前記第5工程では、他基板の上に前記錘部を形成し、貼り合わせによって前記可動部の上に前記接続部に前記錘部を接続し、前記錘部を前記接続部に接続した後で前記ばね部より前記他基板を除去する
ことを特徴とする微細素子の製造方法。 - 請求項1または2記載の微細素子の製造方法において、
前記錘部の上に新規接続部を形成する第6工程と、
前記錘部の上に前記新規接続部に接続する新規錘部を形成する第7工程と
を更に備えることを特徴とする微細素子の製造方法。 - 請求項1〜3のいずれか1項に記載の微細素子の製造方法において、
前記基板の上の前記可動部の下面に向かい合う箇所に固定電極を形成する第8工程を備え、
前記可動部を可動電極とする加速度センサを形成することを特徴とする微細素子の製造方法。
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JP2017055732A JP6840339B2 (ja) | 2017-03-22 | 2017-03-22 | 微細素子の製造方法 |
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JP2017055732A JP6840339B2 (ja) | 2017-03-22 | 2017-03-22 | 微細素子の製造方法 |
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JP2018159573A JP2018159573A (ja) | 2018-10-11 |
JP6840339B2 true JP6840339B2 (ja) | 2021-03-10 |
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JP2017055732A Active JP6840339B2 (ja) | 2017-03-22 | 2017-03-22 | 微細素子の製造方法 |
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