JP6839434B2 - Nanocarbon fiber-containing fixed abrasive wire saw and its manufacturing method - Google Patents
Nanocarbon fiber-containing fixed abrasive wire saw and its manufacturing method Download PDFInfo
- Publication number
- JP6839434B2 JP6839434B2 JP2016182270A JP2016182270A JP6839434B2 JP 6839434 B2 JP6839434 B2 JP 6839434B2 JP 2016182270 A JP2016182270 A JP 2016182270A JP 2016182270 A JP2016182270 A JP 2016182270A JP 6839434 B2 JP6839434 B2 JP 6839434B2
- Authority
- JP
- Japan
- Prior art keywords
- abrasive
- metal layer
- fixed
- plated metal
- nanocarbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000835 fiber Substances 0.000 title claims description 71
- 229910021392 nanocarbon Inorganic materials 0.000 title claims description 70
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000010410 layer Substances 0.000 claims description 151
- 229910052751 metal Inorganic materials 0.000 claims description 111
- 239000006061 abrasive grain Substances 0.000 claims description 110
- 239000002184 metal Substances 0.000 claims description 110
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 88
- 238000007747 plating Methods 0.000 claims description 58
- 229910052759 nickel Inorganic materials 0.000 claims description 37
- 239000011230 binding agent Substances 0.000 claims description 35
- 238000005520 cutting process Methods 0.000 claims description 25
- 239000002245 particle Substances 0.000 claims description 25
- 239000013078 crystal Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 15
- 230000002093 peripheral effect Effects 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 10
- 239000002356 single layer Substances 0.000 claims description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 7
- 239000010953 base metal Substances 0.000 claims description 3
- 229910021389 graphene Inorganic materials 0.000 claims description 3
- 239000004094 surface-active agent Substances 0.000 claims description 3
- 239000006185 dispersion Substances 0.000 claims description 2
- 238000004070 electrodeposition Methods 0.000 description 12
- 229910003460 diamond Inorganic materials 0.000 description 9
- 239000010432 diamond Substances 0.000 description 9
- 238000003754 machining Methods 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 239000002048 multi walled nanotube Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 6
- KERTUBUCQCSNJU-UHFFFAOYSA-L nickel(2+);disulfamate Chemical compound [Ni+2].NS([O-])(=O)=O.NS([O-])(=O)=O KERTUBUCQCSNJU-UHFFFAOYSA-L 0.000 description 6
- 238000005728 strengthening Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 230000003746 surface roughness Effects 0.000 description 6
- 238000003917 TEM image Methods 0.000 description 3
- 239000002041 carbon nanotube Substances 0.000 description 3
- 229910021393 carbon nanotube Inorganic materials 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000000635 electron micrograph Methods 0.000 description 3
- 238000009713 electroplating Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 229920000049 Carbon (fiber) Polymers 0.000 description 2
- 241001422033 Thestylus Species 0.000 description 2
- 239000004917 carbon fiber Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005469 granulation Methods 0.000 description 2
- 230000003179 granulation Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- MOWMLACGTDMJRV-UHFFFAOYSA-N nickel tungsten Chemical compound [Ni].[W] MOWMLACGTDMJRV-UHFFFAOYSA-N 0.000 description 2
- 238000007670 refining Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000002109 single walled nanotube Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- LNOPIUAQISRISI-UHFFFAOYSA-N n'-hydroxy-2-propan-2-ylsulfonylethanimidamide Chemical compound CC(C)S(=O)(=O)CC(N)=NO LNOPIUAQISRISI-UHFFFAOYSA-N 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Description
本発明は、複合めっき被膜を用いた固定砥粒ワイヤーソーとその製造方法に関するもので、より詳細には、砥粒保持層であるめっき被膜を強化することにより砥粒の脱落を抑制することで高能率加工及び難削材加工に適用可能な固定砥粒ワイヤーソーとその製造方法に関する。 The present invention relates to a fixed-abrasive wire saw using a composite plating film and a method for manufacturing the same. More specifically, by strengthening the plating film which is an abrasive grain holding layer, the falling of abrasive grains is suppressed. The present invention relates to a fixed-abrasive wire saw applicable to high-efficiency machining and difficult-to-cut material machining and its manufacturing method.
半導体などに用いられる結晶性材料のインゴット切断には、ソーワイヤーが用いられている。特に、ピアノ線に硬質砥粒を電着により固着した固定砥粒ワイヤーソー、すなわち電着ワイヤーは、他のソーワイヤーに比べ、寿命及び加工能率に優れている。 Saw wire is used for ingot cutting of crystalline materials used for semiconductors and the like. In particular, a fixed-abrasive wire saw in which hard abrasive grains are fixed to a piano wire by electrodeposition, that is, an electrodeposited wire, has excellent life and processing efficiency as compared with other saw wires.
固定砥粒ワイヤーソーは、低コスト化を目的としたさらなる高能率加工、あるいは炭化ケイ素、サファイヤなどの難削材加工への適用が求められている。これらの加工では砥粒に大きな力が加わるため砥粒の脱落が問題となる。 The fixed-abrasive wire saw is required to be applied to further high-efficiency machining for the purpose of cost reduction or machining of difficult-to-cut materials such as silicon carbide and sapphire. In these processes, a large force is applied to the abrasive grains, so that the abrasive grains fall off becomes a problem.
砥粒の脱落を抑制する手段として、砥粒を保持するめっき層を強化する方法がある。特許文献１では、めっき層を硬質なニッケル‐タングステン合金めっき被膜にすることで、砥粒保持力の強化を行う方法が提案されている。しかし、ニッケル‐タングステンめっき浴は不安定であるため、めっき層の膜厚や砥粒保持力などの品質が安定しないという課題がある。さらに、成膜速度もニッケルめっきに比べて遅いため、時間とコストがかかるという課題がある。 As a means for suppressing the falling off of the abrasive grains, there is a method of strengthening the plating layer that holds the abrasive grains. Patent Document 1 proposes a method of strengthening the abrasive grain holding force by forming the plating layer into a hard nickel-tungsten alloy plating film. However, since the nickel-tungsten plating bath is unstable, there is a problem that the quality such as the film thickness of the plating layer and the abrasive grain holding power is not stable. Further, since the film forming speed is slower than that of nickel plating, there is a problem that it takes time and cost.
特許文献２では、ダイヤモンドをニッケルめっきで固着したさらに外側にＡｌ、Ｍｏ、Ｎｂ、Ｓｉ、Ｔｉ、Ｖ、Ｗ、Ｙ、Ｚｒなどの金属の被膜を０．００１〜１μｍ形成することにより、砥粒の保持力を高める手法をとっているが、被膜が薄く、また、形成されている金属被膜も強度が弱いため、砥粒保持力の強化には不十分であると考えられる。 In Patent Document 2, abrasive grains are formed by forming a metal film such as Al, Mo, Nb, Si, Ti, V, W, Y, and Zr on the outer side of which diamond is fixed by nickel plating in an amount of 0.001 to 1 μm. However, since the coating is thin and the metal coating formed is also weak in strength, it is considered that it is insufficient to enhance the holding power of abrasive grains.
特許文献３では、ニッケル結晶粒を微細化することでめっき層の硬質化を図るとともに、砥粒固着層を４〜１０層に多層化し、硬質なめっきと軟質なめっきを交互に積層させることにより、ワイヤーの柔軟性を確保している。しかしながら、この手法ではニッケル結晶粒が２００ｎｍ以上と大きく、ビッカース硬度も４５０ＨＶ以下と低いことから分かるように、微細化および硬さの強化が不十分である。さらに、１層当たりの厚さが薄いため、硬質めっき層が摩耗し、軟質なめっき層が露出しやすく、摩耗に弱いと考えられる。 In Patent Document 3, the plating layer is hardened by refining the nickel crystal grains, and the abrasive grain fixing layer is multi-layered into 4 to 10 layers, and hard plating and soft plating are alternately laminated. , The flexibility of the wire is ensured. However, in this method, as can be seen from the fact that the nickel crystal grains are as large as 200 nm or more and the Vickers hardness is as low as 450 HV or less, the miniaturization and the strengthening of the hardness are insufficient. Further, since the thickness per layer is thin, it is considered that the hard plating layer is worn and the soft plating layer is easily exposed and is vulnerable to wear.
特許文献４では、主に小径軸付電着砥石の砥粒保持力を高めるために、砥粒保持層へのナノカーボン繊維の複合化を行っている。この手法では、砥粒を保持するめっき層の硬さ、耐摩耗性の強化は可能だが、砥粒を覆うようにめっき被膜を形成する構成でないため、砥粒保持力の強化は不十分である。 In Patent Document 4, nanocarbon fibers are composited in the abrasive grain holding layer mainly in order to enhance the abrasive grain holding force of the electrodeposited grindstone with a small diameter shaft. With this method, it is possible to enhance the hardness and wear resistance of the plating layer that holds the abrasive grains, but since the plating film is not formed so as to cover the abrasive grains, the enhancement of the abrasive grain holding force is insufficient. ..
本発明は、固定砥粒ワイヤーソーにおいて、砥粒の脱落を抑制するため、高い砥粒保持力の結合材層を持つ固定砥粒ワイヤーソー及びその製造方法を提供することを目的とする。 An object of the present invention is to provide a fixed-abrasive wire saw having a binder layer having a high abrasive-holding force and a method for manufacturing the fixed-abrasive wire saw in order to prevent the abrasive grains from falling off.
上記目的を達成するため、請求項１記載の固定砥粒ワイヤーソーは、高強度の芯線の外周面上に、均等な粒度を有する多数の砥粒が、該芯線の外周面を被覆する結合材層により、単層に固着されて成る固定砥粒ワイヤーソーであって、前記金属線材からなる芯線と、前記芯線の外周面上に固着された、加工の際に切れ刃として作用する硬質粒子からなる砥粒と、前記芯線の外周面を被覆し、前記砥粒を固着する少なくとも２層以上のめっき金属層からなる、結合材層と、を備え、前記めっき金属層のうち少なくとも最表面のめっき金属層が純ニッケルを主成分とし、ナノカーボン繊維が分散しているナノカーボン繊維含有ニッケルめっき金属層であり、前記ナノカーボン繊維含有ニッケルめっき金属層のニッケル結晶粒が、５０ｎｍ以下であり、前記ナノカーボン繊維が、グラフェンシートが単層または多層の管状となった、直径３００ｎｍ以下、アスペクト比５〜２００の繊維であり、前記ナノカーボン繊維含有ニッケルめっき金属層のビッカース硬度が３５０〜６００ＨＶである、ことを特徴とする。
ここで、「ナノカーボン繊維」とは、グラフェンシートが単層または多層の管状となっている物質であり、直径３００ｎｍ以下、アスペクト比５〜２００のものと定義する。具体的には、単層あるいは多層のカーボンナノチューブが含まれる。また、「ニッケルめっき金属層」とは、純ニッケルを主成分とするによる金属層のことであり、他の金属元素と合金化していない金属層と定義する。「砥粒」とは、加工の際に切れ刃として作用する硬質粒子と定義する。この硬質粒子には、ダイヤモンド、立方晶窒化ホウ素及びそれ以上の硬度を持つ硬質粒子が含まれる。
In order to achieve the above object, the fixed abrasive grain wire saw according to claim 1 is a binder in which a large number of abrasive grains having an uniform particle size cover the outer peripheral surface of the core wire on the outer peripheral surface of the high-strength core wire. A fixed-abrasive wire saw fixed to a single layer by a layer, from a core wire made of the metal wire and hard particles fixed on the outer peripheral surface of the core wire and acting as a cutting edge during processing. An abrasive grain and a binder layer composed of at least two or more plated metal layers that cover the outer peripheral surface of the core wire and fix the abrasive grains, and at least the outermost surface of the plated metal layer is plated. metal layer is composed mainly of pure nickel, a nanocarbon fiber-containing nickel plating metal layer nanocarbon fibers are dispersed, nickel crystal grains of the nano-carbon fiber-containing nickel plating metal layer has a 50nm or less, the The nanocarbon fiber is a fiber having a diameter of 300 nm or less and an aspect ratio of 5 to 200, in which a graphene sheet is a single layer or a multilayer tubular, and the Vickers hardness of the nanocarbon fiber-containing nickel-plated metal layer is 350 to 600 HV. , Characterized by.
Here, the "nanocarbon fiber" is defined as a substance in which the graphene sheet is a single-layer or multi-layered tubular substance, having a diameter of 300 nm or less and an aspect ratio of 5 to 200. Specifically, it includes single-walled or multi-walled carbon nanotubes. The "nickel-plated metal layer" is a metal layer containing pure nickel as a main component, and is defined as a metal layer that is not alloyed with other metal elements. "Abrasive particles" are defined as hard particles that act as cutting edges during processing. The hard particles include diamond, cubic boron nitride and hard particles having a hardness higher than that.
請求項２記載の固定砥粒ワイヤーソーは、前記結合材層が、前記ナノカーボン繊維含有ニッケルめっき金属層と、ビッカース硬度が４０〜３００ＨＶである少なくとも１層のめっき金属層からなっていることを特徴とする。ナノカーボン繊維含有ニッケルめっき金属層以外のめっき金属層は、ニッケル、銅、錫及び他の金属との合金めっきであってもよい。 The fixed abrasive wire saw according to claim 2 has the binder layer composed of the nanocarbon fiber-containing nickel-plated metal layer and at least one plated metal layer having a Vickers hardness of 40 to 300 HV. It is a feature. The plated metal layer other than the nanocarbon fiber-containing nickel-plated metal layer may be alloy-plated with nickel, copper, tin and other metals.
請求項３記載の砥粒は、表面積を高めたコーティング砥粒であり、前記めっき金属層が前記砥粒を覆っていることを特徴とする。ここで、「コーティング砥粒」とは、砥粒の外周面に金属及び炭素またはその化合物が密着し、被覆している砥粒と定義する。被覆している物質は、チタン、ニッケル及びそれらの化合物あるいはナノカーボン繊維が含まれる。 The abrasive grain according to claim 3 is a coated abrasive grain having an increased surface area, and the plated metal layer covers the abrasive grain. Here, the "coated abrasive grains" are defined as abrasive grains in which metal and carbon or a compound thereof adhere to the outer peripheral surface of the abrasive grains and are coated. The covering material includes titanium, nickel and their compounds or nanocarbon fibers.
請求項４記載の固定砥粒ワイヤーソーは、前記砥粒を覆っているめっき金属層のうち、固定砥粒ワイヤーの最外周部となる砥粒先端付近の一部のめっき金属層を除去し、砥粒の一部を露出させたことを特徴とする。 The fixed abrasive grain wire saw according to claim 4 removes a part of the plated metal layer near the tip of the abrasive grain, which is the outermost peripheral portion of the fixed abrasive grain wire, from the plated metal layer covering the abrasive grains. It is characterized in that a part of the abrasive grains is exposed.
請求項５記載の固定砥粒ワイヤーソーの製造方法は、請求項１ないし４のいずれかに記載の固定砥粒ワイヤーソーの製造方法であって、高強度の金属製芯線を母材として、その表面に均等な粒度を有する砥粒を、めっき金属層を形成することにより単層に固着させたのち、母材及び母材に固着させた砥粒を、ナノカーボン繊維を界面活性剤及び超音波振動により分散させためっき浴に浸漬し、前記めっき浴に超音波振動を継続的に与えることによりナノカーボン繊維の分散を維持し、前記めっき浴によりナノカーボン繊維含有ニッケルめっき金属層を形成したことを特徴とする。 The method for manufacturing a fixed-abrasive wire saw according to claim 5 is the method for manufacturing a fixed-abrasive wire saw according to any one of claims 1 to 4, wherein a high-strength metal core wire is used as a base material. Abrasive grains having an uniform particle size on the surface are fixed to a single layer by forming a plated metal layer, and then the base material and the abrasive grains fixed to the base material are made of nanocarbon fibers as a surfactant and ultrasonic waves. By immersing in a plating bath dispersed by vibration and continuously applying ultrasonic vibration to the plating bath, the dispersion of nanocarbon fibers was maintained, and the nanocarbon fiber-containing nickel-plated metal layer was formed by the plating bath. It is characterized by.
請求項１記載の発明によれば、ナノカーボン繊維を、ニッケルを主成分とするめっき金属層に分散させ、ナノカーボン繊維をフィラーとして作用させることで、めっき金属層の硬さ及び機械的強度が向上し、結合材層であるめっき金属層の変形が抑制されるため、砥粒保持力が向上し、高能率加工及び難削材加工において課題となる砥粒の脱落を抑制することができる。さらに、ニッケル結晶粒が５０ｎｍ以下であることにより、細粒化効果により硬度を高めることができる。すなわち、ナノカーボン繊維を分散させることによるオロワン強化機構を発現させるとともに、結晶粒を微細化することができれば、結合材層であるめっき金属層の硬度をさらに高めることができるため、砥粒保持力をさらに向上させることができるようになる。 According to the invention of claim 1, the hardness and mechanical strength of the plated metal layer are increased by dispersing the nanocarbon fibers in the plated metal layer containing nickel as a main component and allowing the nanocarbon fibers to act as a filler. Since it is improved and the deformation of the plated metal layer which is the binder layer is suppressed, the abrasive grain holding force is improved, and it is possible to suppress the falling off of the abrasive grains, which is a problem in high-efficiency machining and difficult-to-cut material machining. Further, when the nickel crystal grains are 50 nm or less, the hardness can be increased by the fine granulation effect. That is, if the Orowan strengthening mechanism by dispersing the nanocarbon fibers can be expressed and the crystal grains can be miniaturized, the hardness of the plated metal layer which is the binder layer can be further increased, so that the abrasive grain holding power can be further increased. Will be able to be further improved.
請求項１及び２記載の発明によれば、高いビッカース硬度を持つナノカーボン繊維含有ニッケルめっき金属層を最表面に、より低い硬度を持つめっき金属層をその内側に配置することにより、硬いめっき金属層により砥粒保持力を維持しつつ、柔らかいめっき金属層により、ワイヤーの屈曲に対する柔軟性を維持することができる。 According to the inventions of claims 1 and 2, a hard plated metal is formed by arranging a nanocarbon fiber-containing nickel-plated metal layer having a high Vickers hardness on the outermost surface and a plated metal layer having a lower hardness on the inner surface. The soft plated metal layer can maintain flexibility against bending of the wire while maintaining the abrasive grain holding power by the layer.
請求項３記載の発明によれば、前記砥粒に微細な凹凸を持つコーティング砥粒を用いることで、砥粒の表面積を高め、砥粒と結合材層のアンカー効果による密着性を高めることができ、砥粒保持力を向上させることができる。 According to the invention of claim 3, by using the coated abrasive grains having fine irregularities on the abrasive grains, the surface area of the abrasive grains can be increased, and the adhesion between the abrasive grains and the binder layer due to the anchor effect can be improved. It is possible to improve the abrasive grain holding power.
請求項４記載の発明によれば、砥粒を覆っている前記めっき金属層のうち、砥粒保持力への寄与の低い、砥粒先端近傍の一部を除去し、砥粒を露出させることで加工初期より、加工能力を発現させることができる。 According to the invention of claim 4, of the plated metal layer covering the abrasive grains, a part near the tip of the abrasive grains, which has a low contribution to the abrasive grain holding force, is removed to expose the abrasive grains. It is possible to develop the processing ability from the initial stage of processing.
請求項５記載の発明によれば、固定砥粒ワイヤーソーの製造方法において、砥粒を芯線に固着させる工程と、比較的軟質なめっき金属層の形成工程と、ナノカーボン繊維含有ニッケルめっき金属層を形成する工程を分離でき、それぞれに合っためっき条件を選択できる。また、ナノカーボン繊維含有ニッケルめっき金属層を形成する工程において、めっき処理中にめっき浴に超音波振動を与えることにより、ナノカーボン繊維の官能基修飾、分散剤などの作用では得られない、ナノカーボン繊維の良好な分散状態を維持し、効率的にナノカーボン繊維をニッケルめっき金属層に含有させることができる。さらに、めっき浴に超音波振動を与えることにより、ニッケルを主成分としためっき金属層にナノカーボン繊維を分散させ、めっき金属層を構成するニッケル結晶粒を微細化することができる。 According to the invention of claim 5, in the method for manufacturing a fixed abrasive grain wire saw, a step of fixing the abrasive grains to the core wire, a step of forming a relatively soft plated metal layer, and a nanocarbon fiber-containing nickel-plated metal layer. The process of forming the above can be separated, and the plating conditions suitable for each can be selected. Further, in the step of forming the nanocarbon fiber-containing nickel-plated metal layer, by applying ultrasonic vibration to the plating bath during the plating process, nanocarbon fibers cannot be obtained by the action of functional group modification, dispersant, etc. It is possible to maintain a good dispersed state of the carbon fibers and efficiently contain the nanocarbon fibers in the nickel-plated metal layer. Further, by applying ultrasonic vibration to the plating bath, the nanocarbon fibers can be dispersed in the plating metal layer containing nickel as a main component, and the nickel crystal grains constituting the plating metal layer can be made finer.
図１及び図２は、本発明の一実施形態を示し、図１は電着による固定砥粒ワイヤーソーの砥粒と電着層を含む拡大断面図である。図２は、本発明による製造方法を示した図である。 1 and 2 show an embodiment of the present invention, and FIG. 1 is an enlarged cross-sectional view including abrasive grains and an electrodeposited layer of a fixed abrasive grain wire saw by electrodeposition. FIG. 2 is a diagram showing a manufacturing method according to the present invention.
図１において、１は砥粒、２はコーティング砥粒の最表面に形成してある微細な凹凸部を有し導電性のあるコーティング、３はナノカーボン繊維含有ニッケルめっき金属層、４はニッケルめっき金属層、５は芯線となる金属線材、６は結合材層である。図３において１１は前処理槽、１２は砥粒固着層、１３はナノカーボン繊維を分散させためっき浴槽、１４は洗浄槽、１５は直流安定化電源もしくはパルス電源などのめっき電源、１６は陽極電極、１７は巻出し側ドラム、１８は巻取り側ドラム、１９は給電用プーリである。 In FIG. 1, 1 is an abrasive grain, 2 is a conductive coating having fine uneven portions formed on the outermost surface of a coated abrasive grain, 3 is a nickel-plated metal layer containing nanocarbon fibers, and 4 is nickel-plated. Reference numeral 5 denotes a metal wire to be a core wire, and 6 is a binder layer. In FIG. 3, 11 is a pretreatment tank, 12 is an abrasive grain fixing layer, 13 is a plating bath in which nanocarbon fibers are dispersed, 14 is a cleaning tank, 15 is a plating power supply such as a DC stabilized power supply or a pulse power supply, and 16 is an anode. An electrode, 17 is a winding side drum, 18 is a winding side drum, and 19 is a feeding pulley.
電着による固定砥粒ワイヤーの製造では、芯線は主にピアノ線を用いる。 In the production of fixed abrasive grain wire by electrodeposition, a piano wire is mainly used as the core wire.
砥粒は、砥粒径がワイヤー径の５分の１〜２００分の１のダイヤモンドを用いる。加工能力と加工面粗さの両立のためには、ワイヤー径の約１０分の１の砥粒が望ましい。ダイヤモンドへの反応性が高い材料や加工熱が発生する材料の切断にはｃＢＮを用いてもよい。 As the abrasive grains, diamond having an abrasive grain size of 1/5 to 1/200 of the wire diameter is used. In order to achieve both machining capacity and machined surface roughness, abrasive grains having a wire diameter of about 1/10 are desirable. CBN may be used for cutting a material having high reactivity to diamond or a material generating heat of processing.
ナノカーボン繊維は、直径５〜１００ｎｍ、長さ０．０１〜２０μｍの単層カーボンナノチューブまたは多層カーボンナノチューブを用いる。 As the nanocarbon fibers, single-walled carbon nanotubes or multi-walled carbon nanotubes having a diameter of 5 to 100 nm and a length of 0.01 to 20 μm are used.
結合材層の膜厚は、砥粒径に対して５分の１〜５分の４の厚さで形成する。加工能力と砥粒保持力の両立のためには、砥粒径の２分の１の膜厚が望ましい。 The film thickness of the binder layer is formed to be one-fifth to four-fifths of the abrasive particle size. In order to achieve both processing capacity and abrasive grain holding power, it is desirable that the film thickness is half of the abrasive particle size.
各めっき金属層の膜厚は、ナノカーボン繊維含有ニッケルめっき金属層を砥粒径の１０分の１〜１０分の７、その他のめっき金属層の膜厚を砥粒径１０分の１〜１０分の７の割合で形成する。砥粒保持力と固定砥粒ワイヤーの柔軟性の両立のためには、ナノカーボン繊維含有ニッケルめっき金属層の膜厚を砥粒径の５分の１、その他のめっき金属層の膜厚を砥粒径の１０分の３の膜厚で形成することが望ましい The film thickness of each plated metal layer is 1/10 to 7/10 of the abrasive particle size of the nanocarbon fiber-containing nickel-plated metal layer, and the film thickness of the other plated metal layers is 1/10 to 10 of the abrasive particle size. It is formed at a ratio of 7 minutes. In order to achieve both the abrasive grain holding power and the flexibility of the fixed abrasive grain wire, the film thickness of the nanocarbon fiber-containing nickel-plated metal layer should be one-fifth of the abrasive particle size, and the film thickness of other plated metal layers should be abrasive. It is desirable to form with a film thickness of 3/10 of the particle size.
ナノカーボン繊維含有ニッケルめっき金属層は、ニッケル結晶粒径が５０ｎｍ以下となるように形成する。 The nanocarbon fiber-containing nickel-plated metal layer is formed so that the nickel crystal grain size is 50 nm or less.
ナノカーボン繊維含有ニッケルめっき金属層は、硬さ３５０〜６００ＨＶとなるように形成する。また、その他のめっき金属層は硬さ４０〜３００ＨＶとなるように形成する。砥粒保持力と固定砥粒ワイヤーの柔軟性の両立のためには、ナノカーボン繊維含有ニッケルめっき金属層の硬さが５５０ＨＶ、その他のめっき金属層の硬さが２５０ＨＶであることが望ましい。 The nanocarbon fiber-containing nickel-plated metal layer is formed so as to have a hardness of 350 to 600 HV. Further, the other plated metal layer is formed so as to have a hardness of 40 to 300 HV. In order to achieve both the abrasive grain holding power and the flexibility of the fixed abrasive grain wire, it is desirable that the hardness of the nanocarbon fiber-containing nickel-plated metal layer is 550 HV and the hardness of the other plated metal layer is 250 HV.
導電性のコーティング砥粒を用いて電着による固定砥粒ワイヤーを作製する場合、図１Ａのように、砥粒はコーティング及びめっき金属層に覆われている。これらの金属層は、加工能力に寄与しないため、切断加工初期において、切れ味を鈍化させ、被削物にダメージを与える要因となりうる。そのような場合、図１Ｂのように、あらかじめ目出し工程を行うことで、加工初期より加工能力を発現する固定砥粒ワイヤーを提供することが可能となる。 When a fixed abrasive wire by electrodeposition is produced using conductive coated abrasive grains, the abrasive grains are covered with a coating and a plated metal layer as shown in FIG. 1A. Since these metal layers do not contribute to the processing ability, they can slow down the sharpness at the initial stage of cutting and cause damage to the work piece. In such a case, as shown in FIG. 1B, it is possible to provide a fixed abrasive grain wire that exhibits machining ability from the initial stage of machining by performing a blinding step in advance.
次に、本発明の電着による固定砥粒ワイヤーの製造方法を図２及び図３にしたがって説明する。図２の通り、以下の工程は全て連続的に行われる。 Next, the method of manufacturing the fixed abrasive grain wire by electrodeposition of the present invention will be described with reference to FIGS. 2 and 3. As shown in FIG. 2, all of the following steps are continuously performed.
１）芯線を洗浄・脱脂する。必要に応じて、めっき処理などの前処理を行う。２）加工に作用する砥粒を電気めっきにより、芯線に固着する。３）超音波振動及び界面活性剤によりナノカーボン繊維を分散させためっき層に浸漬し、ナノカーボン繊維含有ニッケルめっき金属層を形成する。４）洗浄槽に浸漬し、残留しためっき液などを除去する。５）洗浄液を乾燥後、ドラムに巻き取る。６）必要に応じて、砥粒先端を覆っている結合材層を除去し、砥粒先端を露出した状態にしても良い。 1) Clean and degreas the core wire. If necessary, perform pretreatment such as plating. 2) Abrasive grains acting on the processing are fixed to the core wire by electroplating. 3) Immerse in a plating layer in which nanocarbon fibers are dispersed by ultrasonic vibration and a surfactant to form a nickel-plated metal layer containing nanocarbon fibers. 4) Immerse in a washing tank to remove residual plating solution. 5) After the cleaning liquid is dried, it is wound on a drum. 6) If necessary, the binder layer covering the abrasive grain tip may be removed to expose the abrasive grain tip.
超音波の周波数は、１５ｋＨｚから１００ｋＨｚ程度が好ましい。超音波振動を加える方法としては、超音波振動ホーンをめっき浴内に直接導入し加振する、あるいはめっき浴槽そのものを超音波バスにより加振してもよい。 The frequency of the ultrasonic wave is preferably about 15 kHz to 100 kHz. As a method of applying ultrasonic vibration, an ultrasonic vibration horn may be directly introduced into the plating bath and vibrated, or the plating bath itself may be vibrated by an ultrasonic bath.
電気めっきに用いる浴としては、スルファミン酸浴などのニッケル浴が好ましい。例えば、スルファミン酸ニッケルめっき浴（Ｎｉ（Ｎｉ２ＳＯ３）２・４Ｈ２Ｏ）：５００ｇ／Ｌ、ＮｉＣｌ２・６Ｈ２Ｏ：４ｇ／Ｌ、Ｈ３ＢＯ３：３３ｇ／Ｌ）とカーボンナノチューブを用いて電気めっきを行う場合は、電流密度１０Ａ／ｄｍ２以下、めっき浴温度４０〜６０℃が好ましい。As the bath used for electroplating, a nickel bath such as a sulfamic acid bath is preferable. For example, nickel sulfamate plating bath (Ni (Ni 2 SO 3) 2 · 4H 2 O): 500g / L, NiCl 2 · 6H 2 O: 4g / L, H 3 BO 3: 33g / L) and the carbon nanotube When electroplating is performed using the plating bath temperature, the current density is preferably 10 A / dm 2 or less and the plating bath temperature is 40 to 60 ° C.
図４は、本発明のナノカーボン繊維含有ニッケルめっき金属層の断面の透過型電子顕微鏡写真である。ナノカーボン繊維含有ニッケルめっき金属層は、ナノカーボン繊維として多層カーボンナノチューブ（直径約９．５ｎｍ、長さ約１．５μｍ）を分散させたスルファミン酸ニッケル浴（Ｎｉ（Ｎｉ２ＳＯ３）２・４Ｈ２Ｏ）：５００ｇ／Ｌ、ＮｉＣｌ２・６Ｈ２Ｏ：４ｇ／Ｌ、Ｈ３ＢＯ３：３３ｇ／Ｌ、ＣＮＴ：１．６ｇ／Ｌ）を電流密度５Ａ／ｄｍ２、めっき浴温度４５℃の条件で基板上に形成したものである。写真より、約２５ｎｍの非常に微細なニッケル結晶粒が形成されていることがわかる。Ｘ線回折パターンの半価幅からＳｃｈｅｒｒｅｒの式（Ｄ＝（０．９４×λ）／（β×ｃｏｓθ）：ここで、Ｄは結晶の大きさ、λはＸ線波長、βは回折ピークの半価幅、θは回折線のブラッグ角）を用いて求めたナノカーボン繊維含有ニッケルめっき金属層のニッケル結晶粒の平均値は２４．６ｎｍであり、透過型電子顕微鏡写真から求めた結晶粒径とほぼ一致している。FIG. 4 is a transmission electron micrograph of a cross section of the nanocarbon fiber-containing nickel-plated metal layer of the present invention. Nanocarbon fiber-containing nickel plating metal layer, multi-walled carbon nanotubes as nanocarbon fibers (diameter of about 9.5 nm, a length of about 1.5 [mu] m) nickel sulfamate bath containing dispersed (Ni (Ni 2 SO 3) 2 · 4H 2 O): 500g / L, NiCl 2 · 6H 2 O: 4g / L, H 3 BO 3: 33g / L, CNT: 1.6g / L) current density 5A / dm 2, plating bath temperature 45 ℃ It was formed on the substrate under the conditions. From the photograph, it can be seen that very fine nickel crystal grains of about 25 nm are formed. From the half-value width of the X-ray diffraction pattern, Scherrer's equation (D = (0.94 × λ) / (β × cosθ): where D is the crystal size, λ is the X-ray wavelength, and β is the diffraction peak. The average value of the nickel crystal grains of the nanocarbon fiber-containing nickel-plated metal layer determined using the half-value width and θ is the Bragg angle of the diffraction line) is 24.6 nm, and the crystal grain size determined from the transmission electron micrograph. Is almost the same as.
図５は、本発明のナノカーボン繊維含有ニッケルめっき金属層がナノカーボン繊維として含有する多層カーボンナノチューブ含有量とビッカース硬さとの関係を示したグラフである。ナノカーボン繊維含有ニッケルめっき金属層は、ナノカーボン繊維として多層カーボンナノチューブ（Ｎｉ（Ｎｉ２ＳＯ３）２・４Ｈ２Ｏ）：５００ｇ／Ｌ、ＮｉＣｌ２・６Ｈ２Ｏ：４ｇ／Ｌ、Ｈ３ＢＯ３：３３ｇ／Ｌ、ＣＮＴ：０−５ｇ／Ｌ）を電流密度５Ａ／ｄｍ２、めっき浴温度４５℃の条件で基板上に形成したものである。金属層のビッカース硬さは、カーボンナノチューブ含有量が１．０ｇ／Ｌの場合、約６００ＨＶとなり、通常のニッケルめっき金属層のビッカース硬さと比較して約２．５倍となることがわかる。FIG. 5 is a graph showing the relationship between the multi-walled carbon nanotube content contained as nanocarbon fibers in the nanocarbon fiber-containing nickel-plated metal layer of the present invention and Vickers hardness. Nanocarbon fiber-containing nickel plating metal layer, multi-walled carbon nanotubes as nanocarbon fibers (Ni (Ni 2 SO 3) 2 · 4H 2 O): 500g / L, NiCl 2 · 6H 2 O: 4g / L, H 3 BO 3 : 33 g / L, CNT: 0-5 g / L) was formed on the substrate under the conditions of a current density of 5 A / dm 2 and a plating bath temperature of 45 ° C. It can be seen that the Vickers hardness of the metal layer is about 600 HV when the carbon nanotube content is 1.0 g / L, which is about 2.5 times that of the Vickers hardness of a normal nickel-plated metal layer.
図６は、本発明によるナノカーボン繊維含有ニッケルめっき金属層のニッケル結晶粒径とビッカース硬さとの関係を図示したものである。図における点線は、ナノカーボン繊維を含まない通常のニッケルめっき金属層の硬さとニッケル結晶粒径の測定値から求めた回帰曲線であり、ホール・ペッチ則に従ってニッケル結晶粒径の平方根の逆数に比例している。一方、本発明によるナノカーボン繊維含有ニッケルめっき金属層の硬さは、ホール・ペッチ則により計算される硬さの２倍以上である。これは、本発明のナノカーボン繊維含有ニッケルめっき金属層の硬さの向上が、ホール・ペッチ則に基づく細粒化効果と、ナノカーボン繊維の含有によるオロワン強化機構の発現などの効果によるものである。つまり、単なるニッケル結晶粒の細粒化だけでは得られない効果をナノカーボン繊維が生み出しているといえる。 FIG. 6 illustrates the relationship between the nickel crystal grain size and the Vickers hardness of the nanocarbon fiber-containing nickel-plated metal layer according to the present invention. The dotted line in the figure is a regression curve obtained from the measured values of the hardness and nickel crystal grain size of a normal nickel-plated metal layer containing no nanocarbon fibers, and is proportional to the reciprocal of the square root of the nickel crystal grain size according to Hall Petch's law. doing. On the other hand, the hardness of the nanocarbon fiber-containing nickel-plated metal layer according to the present invention is more than twice the hardness calculated by the Hall-Petch rule. This is because the improvement in the hardness of the nanocarbon fiber-containing nickel-plated metal layer of the present invention is due to the effect of granulation based on the Hall-Petch law and the effect of the inclusion of nanocarbon fiber such as the expression of the Orowan strengthening mechanism. is there. In other words, it can be said that the nanocarbon fibers produce effects that cannot be obtained by simply refining the nickel crystal grains.
図７は、本発明のナノカーボン繊維含有ニッケルめっき金属層（約１６．６μｍ、砥粒径比６分の１）と通常のニッケルめっき金属層（約３３．４μｍ、砥粒径比３分の１）で成膜した複合めっき結合材層（約５０μｍ、砥粒径比２分の１）に保持された単粒砥粒のサンプルと、通常のニッケルめっき金属層（約５０μｍ、砥粒径比２分の１）による結合材層に保持された単粒砥粒のサンプルとのシェア試験による破壊強度（シェア強度）の比較図である。ナノカーボン繊維含有ニッケルめっき金属層は、ナノカーボン繊維として多層カーボンナノチューブ（直径約９．５ｎｍ、長さ約１．５μｍ）を分散させたスルファミン酸ニッケル浴（Ｎｉ（Ｎｉ２ＳＯ３）２・４Ｈ２Ｏ）：５００ｇ／Ｌ、ＮｉＣｌ２・６Ｈ２Ｏ：４ｇ／Ｌ、Ｈ３ＢＯ３：３３ｇ／Ｌ、ＣＮＴ：１．０ｇ／Ｌ）を電流密度５Ａ／ｄｍ２、めっき浴温度４５℃の条件で基板上に形成したものである。また、通常のニッケルめっき金属層は、スルファミン酸ニッケル浴（Ｎｉ（Ｎｉ２ＳＯ３）２・４Ｈ２Ｏ）：５００ｇ／Ｌ、ＮｉＣｌ２・６Ｈ２Ｏ：４ｇ／Ｌ、Ｈ３ＢＯ３：３３ｇ／Ｌ）を電流密度５Ａ／ｄｍ２、めっき浴温度４５℃の条件で基板上に形成したものである。シェア試験には、テスト面の幅１５０μｍの超硬合金製測定子及び最大５Ｎのロードセルを取り付けたＤａｇｅ社製ボンドテスターＳｅｒｉｅｓ４０００を用いた。測定子先端は、結合材層の表面から１０μｍの高さとした。測定子は結合材層の表面に平行に速度１００μｍ／ｓｅｃで動かし、結合材層から露出したダイヤモンド砥粒を押し、砥粒が脱落するときの強度を測定し、これを破壊強度とした。シェア試験の試料は、金属製の平面形状台金に、平均粒径１００μｍのニッケルコーティングダイヤモンド砥粒（トーメイダイヤ製ＩＲＶ−ＮＰ２００／２３０、ニッケル５５ｗｔ％）を前記の結合材層で固着し、突き出し量を約５０μｍ（砥粒径の２分の１）とした。図７より、ナノカーボン繊維含有ニッケルめっき金属層を最表面に配置した結合材層は、通常のニッケルめっき金属層による結合材層と比較して、約１．５倍のシェア強度を有していることがわかる。FIG. 7 shows a nanocarbon fiber-containing nickel-plated metal layer (about 16.6 μm, abrasive particle size ratio 1/6) and a normal nickel-plated metal layer (about 33.4 μm, abrasive particle size ratio 3 minutes) of the present invention. A sample of single-grain abrasive grains held in the composite plating binder layer (about 50 μm, abrasive particle size ratio 1/2) formed in 1) and a normal nickel-plated metal layer (about 50 μm, abrasive particle size ratio). It is a comparative figure of the fracture strength (share strength) by the share test with the sample of the single grain abrasive grain held in the binder layer by 1/2). Nanocarbon fiber-containing nickel plating metal layer, multi-walled carbon nanotubes as nanocarbon fibers (diameter of about 9.5 nm, a length of about 1.5 [mu] m) nickel sulfamate bath containing dispersed (Ni (Ni 2 SO 3) 2 · 4H 2 O): 500g / L, NiCl 2 · 6H 2 O: 4g / L, H 3 BO 3: 33g / L, CNT: 1.0g / L) current density 5A / dm 2, plating bath temperature 45 ℃ It was formed on the substrate under the conditions. Further, conventional nickel plating metal layer is nickel sulfamate bath (Ni (Ni 2 SO 3) 2 · 4H 2 O): 500g / L, NiCl 2 · 6H 2 O: 4g / L, H 3 BO 3: 33g / L) was formed on the substrate under the conditions of a current density of 5 A / dm 2 and a plating bath temperature of 45 ° C. For the share test, a Cemented Carbide stylus with a width of 150 μm on the test surface and a Dage bond tester Series 4000 equipped with a load cell having a maximum of 5 N were used. The tip of the stylus was set to a height of 10 μm from the surface of the binder layer. The stylus was moved parallel to the surface of the binder layer at a speed of 100 μm / sec, pushed the diamond abrasive grains exposed from the binder layer, and measured the strength at which the abrasive grains fell off, which was defined as the fracture strength. For the sample of the share test, nickel-coated diamond abrasive grains (IRV-NP200 / 230 made by Tomei Diamond, 55 wt% nickel) having an average particle size of 100 μm were fixed to a metal flat base metal with the above-mentioned binder layer and protruded. The amount was set to about 50 μm (half of the abrasive particle size). From FIG. 7, the binder layer in which the nanocarbon fiber-containing nickel-plated metal layer is arranged on the outermost surface has about 1.5 times the share strength as compared with the binder layer made of a normal nickel-plated metal layer. You can see that there is.
ナノカーボン繊維含有ニッケルめっき金属層を電着による固定砥粒ワイヤーに応用した際の効果を確認するために、固定砥粒ワイヤーを試作し、通常のニッケル金属層による結合材層の固定砥粒ワイヤーと切断加工試験により比較した。ナノカーボン繊維含有ニッケルめっき金属層は、ナノカーボン繊維として多層カーボンナノチューブ（直径約９．５ｎｍ、長さ約１．５μｍ）を分散させたスルファミン酸ニッケル浴（（Ｎｉ（Ｎｉ２ＳＯ３）２・４Ｈ２Ｏ）：５００ｇ／Ｌ、ＮｉＣｌ２・６Ｈ２Ｏ：４ｇ／Ｌ、Ｈ３ＢＯ３：３３ｇ／Ｌ、ＣＮＴ：１．０ｇ／Ｌ）を電流密度１０Ａ／ｄｍ２、めっき浴温度４５℃の条件で基板上に形成したものである。通常のめっき金属層は、スルファミン酸ニッケル浴（（Ｎｉ（Ｎｉ２ＳＯ３）２・４Ｈ２Ｏ）：５００ｇ／Ｌ、ＮｉＣｌ２・６Ｈ２Ｏ：４ｇ／Ｌ、Ｈ３ＢＯ３：３３ｇ／Ｌ）を電流密度１０Ａ／ｄｍ２、めっき浴温度４５℃の条件で基板上に形成したものである。加工試験には、φ０．１ｍｍのピアノ線の芯線に、平均粒径１５μｍのニッケルコーティングダイヤモンド砥粒（トーメイダイヤ製ＩＲＭ−ＮＰ１０−２０、ニッケル５５ｗｔ％）を厚さ２μｍのナノカーボン繊維含有ニッケルめっき金属層を最表面に、その内側に厚さ４μｍの通常のニッケルめっき金属層を配置した結合材層（厚さの合計が砥粒径の５分の２）で固着した固定砥粒ワイヤー及び厚さ６μｍの通常のニッケルめっき金属層による結合材層（厚さが砥粒径の５分の２）で固着した固定砥粒ワイヤーを用いた。In order to confirm the effect of applying the nanocarbon fiber-containing nickel-plated metal layer to the fixed abrasive wire by electrodeposition, we made a prototype of the fixed abrasive wire and fixed the abrasive wire of the binder layer by the normal nickel metal layer. Was compared by a cutting process test. The nanocarbon fiber-containing nickel-plated metal layer is a nickel sulfamate bath ((Ni (Ni 2 SO 3 )) 2 in which multi-walled carbon nanotubes (diameter: about 9.5 nm, length: about 1.5 μm) are dispersed as nanocarbon fibers. 4H 2 O): 500g / L , NiCl 2 · 6H 2 O: 4g / L, H 3 BO 3: 33g / L, CNT: 1.0g / L) current density 10A / dm 2, plating bath temperature 45 ° C. It was formed on the substrate under the conditions of. Normal plating metal layer is nickel sulfamate bath ((Ni (Ni 2 SO 3 ) 2 · 4H 2 O): 500g / L, NiCl 2 · 6H 2 O: 4g / L, H 3 BO 3: 33g / L ) Was formed on the substrate under the conditions of a current density of 10 A / dm 2 and a plating bath temperature of 45 ° C. For the processing test, nickel-coated diamond abrasive grains (IM-NP10-20 manufactured by Tomei Diamond, 55 wt% nickel) with an average particle size of 15 μm were plated on the core wire of a φ0.1 mm piano wire with a thickness of 2 μm containing nanocarbon fibers. Fixed abrasive wire and thickness fixed with a binder layer (total thickness is two-fifths of the abrasive particle size) in which a normal nickel-plated metal layer with a thickness of 4 μm is arranged on the outermost surface of the metal layer. A fixed abrasive grain wire fixed with a binder layer (thickness is two-fifths of the abrasive particle size) made of a normal nickel-plated metal layer having a size of 6 μm was used.
前記の２種類の固定砥粒ワイヤーを用いて、切断加工試験を行った。固定砥粒ワイヤーに張力５Ｎをかけた状態で線方向に速度１３．５ｍ／ｍｉｎで往復運動させながら、幅１０ｍｍの単結晶シリコンのインゴットに対して、切断速度０．６ｍｍ／ｍｉｎで切断加工を行った。約０．５ｍｍ切断した後のシリコンインゴット切断面の電子顕微鏡写真を図８Ａ、図８Ｂに示す。図８Ａは本発明による固定砥粒ワイヤーによる切断加工面、図８Ｂは通常のニッケルめっき金属層を結合材層に持つ固定砥粒ワイヤーによる切断加工面である。図８Ａより、本発明による固定砥粒ワイヤーでは、ほぼ全面が延性的に研削されている。一方で、図８Ｂより、通常のニッケル金属層を結合材層に持つ固定砥粒ワイヤーでは、脆性破壊による欠けが多く、粗い加工面となっている。 A cutting test was performed using the above two types of fixed abrasive wire. A single crystal silicon ingot with a width of 10 mm is cut at a cutting speed of 0.6 mm / min while reciprocating in the linear direction at a speed of 13.5 m / min with a tension of 5 N applied to the fixed abrasive grain wire. went. The electron micrographs of the cut surface of the silicon ingot after cutting about 0.5 mm are shown in FIGS. 8A and 8B. FIG. 8A is a surface cut by a fixed abrasive wire according to the present invention, and FIG. 8B is a surface cut by a fixed abrasive wire having a normal nickel-plated metal layer as a binder layer. From FIG. 8A, in the fixed abrasive grain wire according to the present invention, almost the entire surface is ductilely ground. On the other hand, as shown in FIG. 8B, the fixed abrasive wire having a normal nickel metal layer as a binder layer has many chips due to brittle fracture and has a rough processed surface.
図９Ａ、図９Ｂに、前記２種類の固定砥粒ワイヤーによる、切断加工試験における単結晶シリコンの切断面の表面粗さ曲線を示す。横軸は切断距離であり、図９Ａは本発明による固定砥粒ワイヤーによる切断加工面の切断距離０．４〜０．９ｍｍにおける表面粗さ曲線、図９Ｂは通常のニッケルめっき金属層を結合材層に持つ固定砥粒ワイヤーによる切断加工面の切断距離０．４〜０．９ｍｍにおける表面粗さ曲線である。図９Ａにおけるａ点は図８Ａの切断加工面に対応する切断距離を、図９Ｂにおけるｂ点は図８Ｂの切断加工面に対応する切断距離を示している。図９Ａでは、非常に平滑な面となった一方で、図９Ｂでは、粗さが大きい結果となった。急激に粗さが大きくなるのは、砥粒が磨滅及び脱落して切れ味が落ち、加工くずを挟み込んだ状態で摺動するためであり、この時点で固定砥粒ワイヤーは工具寿命に至っている。 9A and 9B show the surface roughness curves of the cut surface of single crystal silicon in the cutting process test using the two types of fixed abrasive wire. The horizontal axis is the cutting distance, FIG. 9A shows the surface roughness curve at a cutting distance of 0.4 to 0.9 mm on the cut surface by the fixed abrasive grain wire according to the present invention, and FIG. 9B shows a normal nickel-plated metal layer as a binder. It is a surface roughness curve at a cutting distance of 0.4 to 0.9 mm of a cut surface by a fixed abrasive grain wire held in a layer. Point a in FIG. 9A indicates a cutting distance corresponding to the cut surface of FIG. 8A, and point b in FIG. 9B indicates a cutting distance corresponding to the cut surface of FIG. 8B. In FIG. 9A, the surface was very smooth, while in FIG. 9B, the roughness was large. The reason why the roughness suddenly increases is that the abrasive grains are worn out and fall off, the sharpness is reduced, and the fixed abrasive grain wire has reached the end of the tool life at this point.
工具寿命の指標として、延性的に加工された切断距離で比較すると、本発明による固定砥粒ワイヤーは、約７００μｍであるのに対し、通常のニッケルめっき金属層を結合材層にもつ固定砥粒ワイヤーは約５０μｍであった。したがって、本発明による固定砥粒ワイヤーは、通常のニッケルめっき金属層を結合材層に持つ固定砥粒ワイヤーの１０倍以上の工具寿命を持っている。 As an index of tool life, when compared in terms of ductile cutting distance, the fixed abrasive wire according to the present invention is about 700 μm, whereas the fixed abrasive wire having a normal nickel-plated metal layer as a binder layer. The wire was about 50 μm. Therefore, the fixed-abrasive wire according to the present invention has a tool life of 10 times or more that of the fixed-abrasive wire having a normal nickel-plated metal layer as a binder layer.
１ 砥粒
２ コーティング砥粒の最表面に形成してある微細な凹凸部を有し、導電性のある コーティング
３ ナノカーボン繊維含有ニッケルめっき金属層
４ めっき金属層
５ 芯線となる金属線材
６ 結合剤層
１１ 前処理槽
１２ 砥粒固着槽
１３ ナノカーボン繊維を分散させためっき浴槽
１４ 洗浄槽
１５ 直流安定化電源もしくはパルス電源などのめっき電源
１６ 陽極電極
１７ 巻出し側ドラム
１８ 巻取り側ドラム
１９ 給電用プーリ1 Abrasive grain 2 Coating Abrasive grain having fine irregularities formed on the outermost surface and having a conductive coating 3 Nanocarbon fiber-containing nickel-plated metal layer 4 Plated metal layer 5 Core wire metal wire 6 Binder Layer 11 Pretreatment tank 12 Abrasive grain fixing tank 13 Plating bath in which nanocarbon fibers are dispersed 14 Cleaning tank 15 Plating power supply such as DC stabilized power supply or pulse power supply 16 Anodic electrode 17 Unwinding side drum 18 Winding side drum 19 Power supply Pulley for
Claims (5)
前記金属線材からなる芯線と、前記芯線の外周面上に固着された、加工の際に切れ刃として作用する硬質粒子からなる砥粒と、前記芯線の外周面を被覆し、前記砥粒を固着する少なくとも２層以上のめっき金属層からなる、結合材層と、
を備え、
前記めっき金属層のうち少なくとも最表面のめっき金属層が、
純ニッケルを主成分とし、ナノカーボン繊維が分散しているナノカーボン繊維含有ニッケルめっき金属層であり、前記ナノカーボン繊維含有ニッケルめっき金属層のニッケル結晶粒が、５０ｎｍ以下であり、前記ナノカーボン繊維が、グラフェンシートが単層または多層の管状となった、直径３００ｎｍ以下、アスペクト比５〜２００の繊維であり、前記ナノカーボン繊維含有ニッケルめっき金属層のビッカース硬度が３５０〜６００ＨＶである、
ことを特徴とする固定砥粒ワイヤーソー。 A fixed abrasive wire saw in which a large number of abrasive grains having an uniform particle size are fixed to a single layer on the outer peripheral surface of a high-strength core wire by a binder layer covering the outer peripheral surface of the core wire.
The core wire made of the metal wire, the abrasive grains made of hard particles fixed on the outer peripheral surface of the core wire and acting as a cutting edge during processing, and the outer peripheral surface of the core wire are covered and the abrasive grains are fixed. A binder layer composed of at least two or more plated metal layers and
With
Of the plated metal layers, at least the outermost plated metal layer is
It is a nanocarbon fiber-containing nickel-plated metal layer containing pure nickel as a main component and in which nanocarbon fibers are dispersed. The nickel crystal grains of the nanocarbon fiber-containing nickel-plated metal layer are 50 nm or less, and the nanocarbon fibers. However, the graphene sheet is a single-layer or multi-layered tubular fiber having a diameter of 300 nm or less and an aspect ratio of 5 to 200, and the Vickers hardness of the nanocarbon fiber-containing nickel-plated metal layer is 350 to 600 HV.
A fixed-abrasive wire saw characterized by this .
前記ナノカーボン繊維含有ニッケルめっき金属層の芯線側に形成された前記めっき金属層が、前記砥粒および前記芯線の外周部を連続的に覆い、
前記砥粒を覆う前記めっき金属層が、砥粒表面の微細な凹凸に入り込んでいることを特徴とする請求項１または請求項２に記載の固定砥粒ワイヤーソー。 The abrasive grains have fine irregularities on the surface and are conductive coated abrasive grains.
Wherein the plating metal layer formed on the core side of the nanocarbon fibers containing nickel metal layer is continuously covering the outer periphery of the abrasive grains and the core wire,
Wherein the plating metal layer abrasive grains covering is bonded abrasive wire saw according to claim 1 or claim 2, characterized in that enters the fine irregularities of the abrasive surface.
高強度の金属製芯線を母材として、その表面に均等な粒度を有する砥粒を、めっき金属層を形成することにより単層に固着させたのち、
母材及び母材に固着させた砥粒を、ナノカーボン繊維を界面活性剤及び超音波振動により分散させためっき浴に浸漬し、前記めっき浴に超音波振動を継続的に与えることによりナノカーボン繊維の分散を維持し、前記めっき浴によりナノカーボン繊維含有ニッケルめっき金属層を形成する、
ことを特徴とする固定砥粒ワイヤーソーの製造方法。 The method for manufacturing a fixed-abrasive wire saw according to any one of claims 1 to 4.
Using a high-strength metal core wire as a base material, abrasive grains with uniform particle size are fixed to a single layer by forming a plated metal layer, and then fixed to a single layer.
The base metal and the abrasive grains fixed to the base metal are immersed in a plating bath in which nanocarbon fibers are dispersed by a surfactant and ultrasonic vibration, and the plating bath is continuously subjected to ultrasonic vibration to obtain nanocarbon. The dispersion of the fibers is maintained, and the nanocarbon fiber-containing nickel-plated metal layer is formed by the plating bath.
A method for manufacturing a fixed- abrasive wire saw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016182270A JP6839434B2 (en) | 2016-08-31 | 2016-08-31 | Nanocarbon fiber-containing fixed abrasive wire saw and its manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016182270A JP6839434B2 (en) | 2016-08-31 | 2016-08-31 | Nanocarbon fiber-containing fixed abrasive wire saw and its manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2018034294A JP2018034294A (en) | 2018-03-08 |
| JP6839434B2 true JP6839434B2 (en) | 2021-03-10 |
Family
ID=61566878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016182270A Active JP6839434B2 (en) | 2016-08-31 | 2016-08-31 | Nanocarbon fiber-containing fixed abrasive wire saw and its manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6839434B2 (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4998778B2 (en) * | 2006-02-27 | 2012-08-15 | 山形県 | Nanocarbon fiber-containing electrodeposition tool and method for producing the same |
| JP4900622B2 (en) * | 2009-05-26 | 2012-03-21 | 新東工業株式会社 | Polishing brush |
| EP2464485A2 (en) * | 2009-08-14 | 2012-06-20 | Saint-Gobain Abrasives, Inc. | Abrasive articles including abrasive particles bonded to an elongated body |
| US20150040884A1 (en) * | 2012-05-31 | 2015-02-12 | Read Co., Ltd. | Fixed abrasive grain wire saw, its manufacturing method, and method of cutting workpiece by using it |
| JP2016010841A (en) * | 2014-06-30 | 2016-01-21 | 株式会社ノリタケカンパニーリミテド | Electro-deposition wire tool and manufacturing method of electro-deposition wire tool |
-
2016
- 2016-08-31 JP JP2016182270A patent/JP6839434B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2018034294A (en) | 2018-03-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4139810B2 (en) | Electrodeposition wire tool | |
| RU2570256C2 (en) | Abrasive article | |
| JP4538049B2 (en) | Abrasive electrodeposition wire | |
| JP5356071B2 (en) | Diamond wire saw, diamond wire saw manufacturing method | |
| TWI507269B (en) | Abrasive articles including abrasive particles bonded to an elongated substrate body having a barrier layer, and methods of forming thereof | |
| JP4998778B2 (en) | Nanocarbon fiber-containing electrodeposition tool and method for producing the same | |
| JP4729648B2 (en) | Electrodeposition wire tool | |
| JP2009066689A (en) | Fixed abrasive grain wire saw | |
| JP2014530770A (en) | Abrasive article and forming method | |
| WO2013179434A1 (en) | Fixed-abrasive-grain wire-saw, method for manufacturing same, and method for cutting workpiece using same | |
| JP5066508B2 (en) | Fixed abrasive wire saw | |
| WO2011042931A1 (en) | Fixed abrasive grain wire, process for producing the fixed abrasive grain wire, and abrasive grains for use in fixed abrasive grain wire | |
| JP4073328B2 (en) | Single layer fixed abrasive wire saw, manufacturing method thereof and cutting method | |
| KR20180063168A (en) | Diamond abrasive and wire tools for wire tools | |
| JP6839434B2 (en) | Nanocarbon fiber-containing fixed abrasive wire saw and its manufacturing method | |
| KR20100113578A (en) | Sharp-edge grinding wheel | |
| JP5863170B2 (en) | Method for manufacturing fixed abrasive wire | |
| JP2013532227A (en) | Coated object and method for coating an object | |
| JP2010036298A (en) | Abrasive grain, electroplated tool, method for manufacturing abrasive grain,and method for manufacturing electroplated tool | |
| JP5470713B2 (en) | Electroformed thin blade whetstone and manufacturing method thereof | |
| JP4852078B2 (en) | Electrodeposition fixed abrasive tool, method for manufacturing the same, and abrasive used for manufacturing the electrodeposition fixed abrasive tool | |
| RU2432248C1 (en) | Diamond tool on electroplating binder | |
| TWI533960B (en) | A fixed abrasive sawing wire and a method to produce such wire | |
| KR101277468B1 (en) | Wire cutting tool and method of fabricating the same | |
| JP6578525B2 (en) | Abrasive |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A80 | Written request to apply exceptions to lack of novelty of invention |
Free format text: JAPANESE INTERMEDIATE CODE: A80 Effective date: 20160928 |
|
| RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20190808 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190816 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20190808 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20200828 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200901 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20201020 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210126 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210129 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 6839434 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |