JP6816964B2 - 配線基板、半導体装置及び配線基板の製造方法 - Google Patents
配線基板、半導体装置及び配線基板の製造方法 Download PDFInfo
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- JP6816964B2 JP6816964B2 JP2016047204A JP2016047204A JP6816964B2 JP 6816964 B2 JP6816964 B2 JP 6816964B2 JP 2016047204 A JP2016047204 A JP 2016047204A JP 2016047204 A JP2016047204 A JP 2016047204A JP 6816964 B2 JP6816964 B2 JP 6816964B2
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Description
なお、添付図面は、便宜上、特徴を分かりやすくするために特徴となる部分を拡大して示している場合があり、各構成要素の寸法比率などが実際と同じであるとは限らない。また、断面図では、各部材の断面構造を分かりやすくするために、一部の部材のハッチングを梨地模様に代えて示し、一部の部材のハッチングを省略している。
配線層15は、例えば、絶縁層16の下面16Aに形成された金属膜30と、金属膜30上に形成された金属膜31と、金属膜31上に形成された金属層32とを有している。また、ビア配線23は、例えば、金属膜30と金属膜31と金属層33とを有している。具体的には、ビア配線23の充填部23Aは、貫通孔16Xの内側面を被覆する金属膜30と、金属膜30の側面を被覆する金属膜31と、金属膜31よりも内側の貫通孔16Xを充填する金属層33とを有している。また、ビア配線23の突出部23Bは、絶縁層16の上面16Bよりも上方に突出する金属層33と、絶縁層16の上面16Bから露出された金属層33の上面全面及び側面全面を被覆する金属膜31とを有している。換言すると、突出部23Bでは、金属膜31の外表面(側面及び上面)が金属膜30によって被覆されておらず、金属膜31の外表面が金属膜30から露出されている。
図1(b)に示すように、配線層17は、例えば、金属膜40と、金属膜41と、金属層42とを有している。ランド17Lの金属膜40は、絶縁層16の上面16Bと、金属膜30の上端面と、突出部23Bにおける金属膜31の側面及び上面とを連続的に被覆するように形成されている。また、配線パターン17Wの金属膜40は、絶縁層16の上面16Bに形成されている。ランド17Lの金属膜41は、金属膜40の側面及び上面を被覆するように形成されている。また、配線パターン17Wの金属膜41は、金属膜40の上面を被覆するように形成されている。ランド17Lの金属層42は、金属膜41の側面及び上面を被覆するように形成されている。また、配線パターン17Wの金属層42は、金属膜41の上面を被覆するように形成されている。
配線層19は、絶縁層18の上面18Bに形成されている。配線層19は、貫通孔16Xに形成されたビア配線24を介して配線層17と接続されている。ビア配線24は、貫通孔18Xを充填するように形成されている。このため、ビア配線24は、貫通孔18Xと同様に、配線層19側から配線層17側に向かうに連れて径(幅)が小さくなるテーパ状に形成されている。例えば、ビア配線24は、配線層19側の面(ここでは、上面)の面積が配線層17側の面(ここでは、下端面)の面積よりも大きくなる略逆円錐台形状に形成されている。例えば、ビア配線24の下端面の直径は10〜15μm程度とすることができ、ビア配線24の上面の直径は12〜20μm程度とすることができる。
半導体装置60は、配線基板10と、1つ又は複数(図2では、2つ)の半導体チップ70と、封止樹脂80とを有している。
図3(a)に示す工程では、支持体101と、その支持体101の下面に形成された離型層102とを有する支持基板100を準備する。支持体101の材料としては、例えば、シリコン、ガラス、金属(例えば、銅)などの剛性の高い板状材料を用いることができる。離型層102としては、例えば、紫外線による光エネルギーを加えることによって粘着力が低下する紫外線剥離型接着剤や、熱エネルギーを加えることによって粘着力が低下する熱剥離型接着剤を用いることができる。また、離型層102としては、例えば、レーザ光のエネルギーを加えることによって粘着力が低下するレーザ剥離型接着剤を用いることもできる。離型層102は、シート状の接着剤を支持体101の下面に貼着する方法や、ワニス状の接着剤を支持体101の下面に塗布する方法などにより形成することができる。
次に、回路形成面(ここでは、下面)に形成された接続端子71と、その接続端子71の下面に形成された接合部材72とを有する半導体チップ70を準備する。続いて、配線層19上に、半導体チップ70の接続端子71をフリップチップ接合する。例えば、接合部材72がはんだ層である場合には、配線層19と接続端子71とを位置合わせした後に、リフロー処理を行って接合部材72(はんだ層)を溶融させ、接続端子71を配線層19に電気的に接続する。
(1)ビア配線23の上端部(つまり、突出部23B)を絶縁層16の上面16Bから突出させ、その突出部23Bの側面及び上面を被覆するようにランド17Lを形成した。これにより、ランド17Lとビア配線23(突出部23B)とが立体的に接続されるため、ランド17Lの下面とビア配線23の上端面とが平面的に接続される場合に比べて、ランド17Lとビア配線23との接触面積を増大させることができる。この結果、ランド17Lとビア配線23との電気的な接続信頼性を向上させることができる。
(他の実施形態)
なお、上記実施形態は、これを適宜変更した以下の態様にて実施することもできる。
・上記実施形態では、配線基板10に半導体チップ70を実装し、その半導体チップ70を封止する封止樹脂80を形成した後に、支持基板105を除去したが、支持基板105を除去するタイミングはこれに限定されない。すなわち、支持基板105を除去した後の構造体のみで剛性を十分に確保することができれば、支持基板105を除去するタイミングは特に限定されない。例えば、支持基板105上に配線基板10を形成した直後に支持基板105を除去するようにしてもよい。この場合には、支持基板105を除去した後に、半導体チップ70の実装と、封止樹脂80の形成とが行われる。
・上記実施形態では、中央部17Cの側面17Eを、断面視において直線状に傾斜するように形成した。これに限らず、例えば、中央部17Cの側面17Eを曲面に形成してもよい。
・上記実施形態における金属膜30,40,50を省略してもよい。
・上記実施形態では、絶縁層12,14,16の材料として、感光性樹脂を主成分とする絶縁性樹脂を用いるようにした。これに限らず、絶縁層12,14,16の材料として、熱硬化性樹脂を主成分とする絶縁性樹脂を用いるようにしてもよい。
・上記実施形態並びに各変形例は適宜組み合わせてもよい。
15 配線層
16 絶縁層
16X 貫通孔
17 配線層
17A 外周部
17C 中央部
17L ランド
18 絶縁層
18X 貫通孔
19 配線層
23 ビア配線
23A 充填部
23B 突出部
30 金属膜
31 金属膜
32,33 金属層
40,41 金属膜
42 金属層
50,51 金属膜
52,53 金属層
60 半導体装置
70 半導体チップ
80 封止樹脂
100,105 支持基板
Claims (10)
- 第1絶縁層と、
前記第1絶縁層の下面に形成された第1配線層と、
前記第1絶縁層を厚さ方向に貫通する第1貫通孔と、
前記第1貫通孔に充填され前記第1配線層と接続された充填部と、前記第1絶縁層の上面よりも上方に突出する突出部とを有する第1ビア配線と、
前記第1絶縁層の上面を被覆する外周部と、前記外周部と連続して形成され、前記突出部の側面及び上面を被覆するとともに、前記外周部の上面よりも上方に突出する中央部とを有するランドを備えた第2配線層と、
前記第2配線層を被覆するように前記第1絶縁層の上面に形成された第2絶縁層と、
前記第2絶縁層を厚さ方向に貫通し、前記中央部の側面及び上面を露出する第2貫通孔と、
前記第2貫通孔を充填し、前記中央部の側面及び上面を被覆するように形成された第2ビア配線と、
前記第2ビア配線と接続され、前記第2絶縁層の上面に形成された第3配線層と、
を有することを特徴とする配線基板。 - 前記第1貫通孔は、前記第2配線層側の開口端の幅が前記第1配線層側の開口端の幅よりも小さくなるように形成され、
前記第2貫通孔は、前記第2配線層側の開口端の幅が前記第3配線層側の開口端の幅よりも小さくなるように形成されていることを特徴とする請求項1に記載の配線基板。 - 前記充填部は、前記第1貫通孔の内側面を被覆する第1金属膜と、前記第1金属膜の側面を被覆する第2金属膜と、前記第2金属膜よりも内側の前記第1貫通孔を充填する金属層とから構成され、
前記突出部は、前記第1絶縁層の上面よりも上方に突出する前記金属層と、前記第1絶縁層の上面から露出された前記金属層の側面及び上面を被覆する前記第2金属膜とから構成され、
前記第1ビア配線は、前記第1金属膜の上端面と、前記第1金属膜から露出された前記第2金属膜の側面及び上面とに沿って形成された段差を有することを特徴とする請求項1又は2に記載の配線基板。 - 前記第1金属膜の上端面は、前記第1絶縁層の上面と面一になるように形成されていることを特徴とする請求項3に記載の配線基板。
- 前記第1絶縁層の厚さは、前記第2絶縁層の厚さよりも厚いことを特徴とする請求項3又は4に記載の配線基板。
- 前記第2配線層は、前記第1絶縁層の上面と前記突出部の側面及び上面とを被覆する金属膜と、前記金属膜上に形成された金属層とを有することを特徴とする請求項1〜5のいずれか一項に記載の配線基板。
- 前記第2ビア配線は、前記第2貫通孔の内側面と、前記第2貫通孔に露出する前記中央部の側面及び上面とを被覆する金属膜と、前記金属膜よりも内側の前記第2貫通孔を充填する金属層とを有することを特徴とする請求項1〜6のいずれか一項に記載の配線基板。
- 請求項1〜7のいずれか一項に記載の配線基板と、
前記第3配線層に接続された電子部品と、
を有することを特徴とする半導体装置。 - 支持基板を準備する工程と、
前記支持基板の下面に、第1貫通孔を有する第1絶縁層を形成する工程と、
前記第1貫通孔を充填する第1ビア配線を形成するとともに、前記第1ビア配線と接続される第1配線層を前記第1絶縁層の下面に形成する工程と、
前記支持基板を除去する工程と、
前記第1絶縁層を上面側から薄化し、前記第1ビア配線の上端部の側面を前記第1絶縁層から露出させる工程と、
前記第1絶縁層の上面を被覆する外周部と、前記外周部と連続し、前記第1絶縁層の上面よりも上方に突出する前記第1ビア配線の側面全面及び上面全面を被覆するとともに、前記外周部の上面よりも上方に突出する中央部とを有するランドを備えた第2配線層を形成する工程と、
前記第1絶縁層の上面に、前記中央部の側面及び上面を露出する第2貫通孔を有する第2絶縁層を形成する工程と、
前記第2貫通孔を充填する第2ビア配線を形成するとともに、前記第2ビア配線と接続される第3配線層を前記第2絶縁層の上面に形成する工程と、
を有することを特徴とする配線基板の製造方法。 - 前記第1ビア配線を形成する工程は、
前記第1貫通孔の内面全面を被覆する第1金属膜を形成する工程と、
前記第1金属膜の表面全面を被覆する第2金属膜を形成する工程と、
前記第2金属膜よりも内側の前記第1貫通孔を充填する金属層を形成する工程と、を有し、
前記第1絶縁層を上面側から薄化する工程では、前記第1絶縁層の薄化と同時に、前記第1金属膜を上面側から薄化することを特徴とする請求項9に記載の配線基板の製造方法。
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