JP6799038B2 - レーザ加工システム、噴流観測装置、レーザ加工方法、及び噴流観測方法 - Google Patents
レーザ加工システム、噴流観測装置、レーザ加工方法、及び噴流観測方法 Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
- B23K26/048—Automatically focusing the laser beam by controlling the distance between laser head and workpiece
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
- B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
- B23K26/0884—Devices involving movement of the laser head in at least one axial direction in at least two axial directions in at least in three axial directions, e.g. manipulators, robots
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/1435—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor involving specially adapted flow control means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/1462—Nozzles; Features related to nozzles
- B23K26/1464—Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
- B23K26/147—Features outside the nozzle for feeding the fluid stream towards the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
- B23K26/354—Working by laser beam, e.g. welding, cutting or boring for surface treatment by melting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Aviation & Aerospace Engineering (AREA)
- Fluid Mechanics (AREA)
- Robotics (AREA)
- Laser Beam Processing (AREA)
Description
ここで、φは、出射口28の開口寸法を示し、ρは、アシストガスの粘性係数を示し、VSは、出力データVVと開口寸法φから求められるアシストガスの流速VSを示す。このように、制御部82は、測定器84の出力データVVから、演算によって、第1の極大点32の位置x1を取得する位置取得部86として機能する。
12 レーザ発振器
14 レーザ加工ヘッド
16 アシストガス供給装置
18 配置装置
24 ノズル
60,70,80 噴流観測装置
62,72,82,102,112,122,132,162 制御部
66,76,84 測定器
140 噴流調整装置
142 囲い
Claims (9)
- レーザ光の光軸に沿ってアシストガスの噴流を出射する出射口を有するノズルであって、前記噴流の速度の極大点を前記出射口から該噴流の下流側へ離れた位置に形成するノズルと、
前記噴流が物体に衝突することによって発生する音を測定する測定器と、
前記測定器の出力データに基づいて、前記極大点の位置を表す情報を取得する位置取得部と、を備える、レーザ加工システム。 - 前記測定器は、前記ノズルを前記物体に対して接近又は離反させる間に連続的に前記音を測定し、
前記位置取得部は、前記測定器が出力する連続した前記出力データのピーク値を前記情報として取得する、請求項1に記載のレーザ加工システム。 - 前記測定器は、前記音を電気信号に変換するマイクロフォン、及び前記電気信号から前記音の周波数特性を取得する周波数取得部を有する、請求項1又は2に記載のレーザ加工システム。
- 前記ノズルと前記物体とを相対的に移動させる移動機構と、
前記移動機構を制御して、前記ノズルを前記物体に対し、前記情報に基づいて定められる目標位置に配置する移動制御部と、をさらに備える、請求項1〜3のいずれか1項に記載のレーザ加工システム。 - 前記目標位置は、前記極大点の位置を含む所定の位置範囲を表す前記情報に基づいて定められる、請求項4に記載のレーザ加工システム。
- 前記移動制御部は、前記目標位置に従って前記移動機構をフィードバック制御する、請求項4又は5に記載のレーザ加工システム。
- レーザ光の光軸に沿ってノズルの出射口から出射されたガスの噴流が、物体に衝突することによって発生する音を、前記ノズルを前記物体に対して接近又は離反させる間に連続的に測定する測定器と、
前記測定器が出力する連続した出力データのピーク値を、前記出射口から前記噴流の下流側へ離れた位置に形成される前記噴流の速度の極大点の位置を表す情報として取得する位置取得部と、を備える、噴流観測装置。 - 請求項1〜6のいずれか1項に記載のレーザ加工システムを用いて物体をレーザ加工する方法であって、
物体の加工部位に対して前記ノズルを、前記情報に基づいて定められる目標位置に配置した状態で、前記ノズルの前記出射口から前記噴流を出射するとともに、前記レーザ光により前記物体を加工する、方法。 - レーザ光の光軸に沿ってノズルの出射口から出射されたガスの噴流が、物体に衝突することによって発生する音を、前記ノズルを前記物体に対して接近又は離反させる間に連続的に測定し、
連続的に測定して得たデータのピーク値を、前記出射口から前記噴流の下流側へ離れた位置に形成される前記噴流の速度の極大点の位置を表す情報として取得する、噴流観測方法。
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JP2018157786A JP6799038B2 (ja) | 2018-08-24 | 2018-08-24 | レーザ加工システム、噴流観測装置、レーザ加工方法、及び噴流観測方法 |
US16/539,352 US11478876B2 (en) | 2018-08-24 | 2019-08-13 | Laser processing system, jet observation apparatus, laser processing method, and jet observation method |
DE102019122238.9A DE102019122238B4 (de) | 2018-08-24 | 2019-08-19 | Laserbearbeitungssystem, strahlüberwachungsvorrichtung, laserbearbeitungsverfahren und strahlüberwachungsverfahren |
CN201910768918.3A CN110893509B (zh) | 2018-08-24 | 2019-08-20 | 激光加工***、喷流观测装置、激光加工方法、以及喷流观测方法 |
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JP6816071B2 (ja) * | 2018-08-24 | 2021-01-20 | ファナック株式会社 | レーザ加工システム、噴流観測装置、レーザ加工方法、及び噴流観測方法 |
JP7347259B2 (ja) | 2020-02-24 | 2023-09-20 | 株式会社デンソー | アクチュエータ |
CN114043073A (zh) * | 2021-11-18 | 2022-02-15 | 哈尔滨工业大学 | 一种基于声学信号实时监测的水助激光加工***及方法 |
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FR2809645B1 (fr) * | 2000-05-31 | 2002-09-27 | Air Liquide | Application d'un procede hybride laser-arc au soudage de tube |
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DE102007029787B3 (de) | 2007-06-27 | 2008-09-11 | Trumpf Werkzeugmaschinen Gmbh + Co. Kg | Verfahren zum Ermitteln eines Berührungspunkts eines Laserstrahls an einer Kante eines Körpers und Laserbearbeitungsmaschine |
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CN102049613B (zh) * | 2010-11-18 | 2013-08-28 | 湖南大学 | 基于特征元素等离子体光信号的镀锌钢激光添粉焊接过程中焊接缺陷的在线诊断方法 |
JP5852829B2 (ja) * | 2011-09-26 | 2016-02-03 | トーカロ株式会社 | 加速ノズル付きプラズマ溶射装置 |
CN103764339B (zh) | 2011-10-07 | 2015-08-19 | 三菱电机株式会社 | 激光加工机 |
JP6018744B2 (ja) | 2011-11-02 | 2016-11-02 | 日酸Tanaka株式会社 | レーザ切断方法及びレーザ切断装置 |
JP2014113597A (ja) * | 2012-12-06 | 2014-06-26 | Panasonic Corp | レーザ加工装置 |
CN103286445B (zh) | 2013-04-03 | 2016-03-16 | 大族激光科技产业集团股份有限公司 | 一种激光精密加工设备除尘*** |
DE102014001661A1 (de) | 2014-02-06 | 2014-08-21 | Daimler Ag | Verfahren zum Vermessen einer Gasströmung |
CN104159390B (zh) | 2014-08-26 | 2016-12-07 | 中国科学院上海光学精密机械研究所 | 高精度可控喷嘴气池 |
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JP6567794B1 (ja) * | 2017-10-19 | 2019-08-28 | 株式会社アマダホールディングス | レーザ加工方法及びレーザ加工機 |
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JP2020028912A (ja) | 2020-02-27 |
US20200061743A1 (en) | 2020-02-27 |
US11478876B2 (en) | 2022-10-25 |
CN110893509A (zh) | 2020-03-20 |
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