JP6797514B2 - シリカ薄膜形成用リンス液、これを用いたシリカ前駆体薄膜およびシリカ薄膜の製造方法、ならびにこれらを用いて製造されるシリカ薄膜前駆体およびシリカ薄膜 - Google Patents
シリカ薄膜形成用リンス液、これを用いたシリカ前駆体薄膜およびシリカ薄膜の製造方法、ならびにこれらを用いて製造されるシリカ薄膜前駆体およびシリカ薄膜 Download PDFInfo
- Publication number
- JP6797514B2 JP6797514B2 JP2015150089A JP2015150089A JP6797514B2 JP 6797514 B2 JP6797514 B2 JP 6797514B2 JP 2015150089 A JP2015150089 A JP 2015150089A JP 2015150089 A JP2015150089 A JP 2015150089A JP 6797514 B2 JP6797514 B2 JP 6797514B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- silica
- silica thin
- forming
- precursor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims description 190
- 239000000377 silicon dioxide Substances 0.000 title claims description 95
- 239000010409 thin film Substances 0.000 title claims description 91
- 239000002243 precursor Substances 0.000 title claims description 35
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 239000000243 solution Substances 0.000 claims description 31
- 239000000758 substrate Substances 0.000 claims description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 20
- 150000001875 compounds Chemical class 0.000 claims description 20
- 239000000203 mixture Substances 0.000 claims description 20
- 229910052710 silicon Inorganic materials 0.000 claims description 20
- 239000010703 silicon Substances 0.000 claims description 20
- 239000012487 rinsing solution Substances 0.000 claims description 19
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 15
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 15
- 229920001709 polysilazane Polymers 0.000 claims description 9
- KVNYFPKFSJIPBJ-UHFFFAOYSA-N 1,2-diethylbenzene Chemical compound CCC1=CC=CC=C1CC KVNYFPKFSJIPBJ-UHFFFAOYSA-N 0.000 claims description 8
- YBYIRNPNPLQARY-UHFFFAOYSA-N 1H-indene Chemical compound C1=CC=C2CC=CC2=C1 YBYIRNPNPLQARY-UHFFFAOYSA-N 0.000 claims description 8
- PQNFLJBBNBOBRQ-UHFFFAOYSA-N indane Chemical compound C1=CC=C2CCCC2=C1 PQNFLJBBNBOBRQ-UHFFFAOYSA-N 0.000 claims description 8
- XSIFPSYPOVKYCO-UHFFFAOYSA-N butyl benzoate Chemical compound CCCCOC(=O)C1=CC=CC=C1 XSIFPSYPOVKYCO-UHFFFAOYSA-N 0.000 claims description 6
- USIUVYZYUHIAEV-UHFFFAOYSA-N diphenyl ether Chemical compound C=1C=CC=CC=1OC1=CC=CC=C1 USIUVYZYUHIAEV-UHFFFAOYSA-N 0.000 claims description 6
- -1 hetero hydrocarbon compound Chemical class 0.000 claims description 6
- DTFKRVXLBCAIOZ-UHFFFAOYSA-N 2-methylanisole Chemical compound COC1=CC=CC=C1C DTFKRVXLBCAIOZ-UHFFFAOYSA-N 0.000 claims description 3
- YFNONBGXNFCTMM-UHFFFAOYSA-N butoxybenzene Chemical compound CCCCOC1=CC=CC=C1 YFNONBGXNFCTMM-UHFFFAOYSA-N 0.000 claims description 3
- YGCZTXZTJXYWCO-UHFFFAOYSA-N 3-phenylpropanal Chemical compound O=CCCC1=CC=CC=C1 YGCZTXZTJXYWCO-UHFFFAOYSA-N 0.000 claims description 2
- KRIOVPPHQSLHCZ-UHFFFAOYSA-N phenyl propionaldehyde Natural products CCC(=O)C1=CC=CC=C1 KRIOVPPHQSLHCZ-UHFFFAOYSA-N 0.000 claims description 2
- XATKXLVWAMCDRC-UHFFFAOYSA-N CC(C)(C)CC1=CC=CC=C1.CC(C)(C)CC1=CC=CC=C1 Chemical compound CC(C)(C)CC1=CC=CC=C1.CC(C)(C)CC1=CC=CC=C1 XATKXLVWAMCDRC-UHFFFAOYSA-N 0.000 claims 1
- 239000010408 film Substances 0.000 description 28
- 125000004432 carbon atom Chemical group C* 0.000 description 17
- 238000000034 method Methods 0.000 description 9
- 125000000217 alkyl group Chemical group 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 238000011156 evaluation Methods 0.000 description 7
- 239000007788 liquid Substances 0.000 description 7
- QPUYECUOLPXSFR-UHFFFAOYSA-N 1-methylnaphthalene Chemical compound C1=CC=C2C(C)=CC=CC2=C1 QPUYECUOLPXSFR-UHFFFAOYSA-N 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 239000002904 solvent Substances 0.000 description 6
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 5
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- FYGHSUNMUKGBRK-UHFFFAOYSA-N 1,2,3-trimethylbenzene Chemical compound CC1=CC=CC(C)=C1C FYGHSUNMUKGBRK-UHFFFAOYSA-N 0.000 description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 239000002210 silicon-based material Substances 0.000 description 4
- 125000001424 substituent group Chemical group 0.000 description 4
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052801 chlorine Inorganic materials 0.000 description 3
- 239000000460 chlorine Substances 0.000 description 3
- 238000001879 gelation Methods 0.000 description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 238000002161 passivation Methods 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- 239000008096 xylene Substances 0.000 description 3
- DURPTKYDGMDSBL-UHFFFAOYSA-N 1-butoxybutane Chemical compound CCCCOCCCC DURPTKYDGMDSBL-UHFFFAOYSA-N 0.000 description 2
- AXHVNJGQOJFMHT-UHFFFAOYSA-N 1-tert-butyl-2-methylbenzene Chemical compound CC1=CC=CC=C1C(C)(C)C AXHVNJGQOJFMHT-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 150000001299 aldehydes Chemical class 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 150000002576 ketones Chemical class 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- GZAIBSUKJNVESM-UHFFFAOYSA-N 2,4-dimethyl-2-phenylpentanal Chemical compound CC(C)CC(C)(C=O)C1=CC=CC=C1 GZAIBSUKJNVESM-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- DRLVMOAWNVOSPE-UHFFFAOYSA-N 2-phenylcyclohexan-1-one Chemical compound O=C1CCCCC1C1=CC=CC=C1 DRLVMOAWNVOSPE-UHFFFAOYSA-N 0.000 description 1
- CIJZNDGJBIWFHF-UHFFFAOYSA-N C1(=CC=CC=C1)C1C(CCCC1)=O.C1(=CC=CC=C1)C1C(CCCC1)=O Chemical compound C1(=CC=CC=C1)C1C(CCCC1)=O.C1(=CC=CC=C1)C1C(CCCC1)=O CIJZNDGJBIWFHF-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 125000003739 carbamimidoyl group Chemical group C(N)(=N)* 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 125000004093 cyano group Chemical group *C#N 0.000 description 1
- 125000000753 cycloalkyl group Chemical group 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- 239000000706 filtrate Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 125000004404 heteroalkyl group Chemical group 0.000 description 1
- 125000001072 heteroaryl group Chemical group 0.000 description 1
- 125000000592 heterocycloalkyl group Chemical group 0.000 description 1
- 125000005597 hydrazone group Chemical group 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 125000001841 imino group Chemical group [H]N=* 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000007761 roller coating Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/113—Silicon oxides; Hydrates thereof
- C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02082—Cleaning product to be cleaned
- H01L21/02087—Cleaning of wafer edges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02299—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment
- H01L21/02301—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment in-situ cleaning
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Formation Of Insulating Films (AREA)
- Weting (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Description
容量2Lの攪拌、温度制御装置付き反応器の内部を乾燥窒素で置換した。そして、乾燥ピリジン1,500gを注入して十分に混合した後に反応器に入れ、これを20℃に保温した。次いで、ジクロロシラン100gを1時間にかけて徐々に注入した。そして、攪拌しながらここにアンモニア70gを3時間にかけて徐々に注入した。次いで、乾燥窒素を30分間注入して反応器内に残存するアンモニアを除去した。得られた白色のスラリー状の生成物を乾燥窒素雰囲気中で1μmのテフロン(登録商標)製の濾過器を用いて濾過したところ、濾液1,000gを得た。ここに乾燥キシレン1,000gを添加した後、ロータリーエバポレーターを用いて溶媒をピリジンからキシレンで置換する操作を総3回繰り返しながら固形分濃度を20%に調整し、最後に、ポアサイズ0.03μmのテフロン(登録商標)製の濾過器で濾過した。得られたペルヒドロポリシラザンの酸素含有量は3.8%、SiH3/SiH(total)は0.22、重量平均分子量は4,000、塩素含有量は0.9ppmであった。
下記表1のような組成でシリカ薄膜形成用リンス液を準備した。
前記合成例で得られた化合物をジ−n−ブチルエーテル溶媒と混合してケイ素含有溶液(20重量%)を準備した。前記ケイ素含有溶液3ccをスピンコーターにセッティングし、直径8インチのベアシリコンウエハーの中央部分に回転数1500rpmで20秒間スピン塗布して厚さ約500nmの膜を形成した。次いで、ウエハー外周部から約3mm離れた位置の上部で参考例1、11、実施例2〜10、および比較例1〜4によるシリカ薄膜形成用リンス液を流量10mL/minで5秒間噴射した。その後、150℃のホットプレートで3分間加熱乾燥させた。
100gのガラス瓶に評価1で用いた前記ケイ素含有溶液2.3gと参考例1、11、実施例2〜10、および比較例1〜4によるシリカ薄膜形成用リンス液23gを入れて混合し、蓋を開けた状態で22℃、50%RHの室内に放置して、ゲル化するまでの日数を肉眼で観察した。
Claims (5)
- ジエチルベンゼン(diethylbenzene)、インダン(indane)、インデン(indene)、tert−ブチルトルエン(tert−butyl toluene)、フェニル基および酸素原子を含むヘテロ炭化水素化合物を含有する混合物、またはこれらの組み合わせを含み、
前記フェニル基および酸素原子を含むヘテロ炭化水素化合物は、メチルアニソール(methylanisole)、ジフェニルエーテル(diphenyl ether)、ブチルベンゾエート(butyl benzoate)、ブチルフェニルエーテル(Butyl phenyl ether)、アリルメチルフェノール(allylmethylphenol)、イソブチルフェニルプロピオンアルデヒド(isobutylphenyl propionaldehyde)、フェニルシクロヘキサノン(phenylcyclohexanone)またはこれらの組み合わせを含むシリカ薄膜形成用リンス液。 - 水素化ポリシラザン、水素化ポリシロキサザン、またはこれらの組み合わせを含むシリカ薄膜前駆体を剥離する機能を有する、請求項1に記載のシリカ薄膜形成用リンス液。
- 前記フェニル基および酸素原子を含むヘテロ炭化水素化合物を含有する混合物は、前記フェニル基および酸素原子を含むヘテロ炭化水素化合物を10重量%以上70重量%以下の含量で含むものである、請求項1に記載のシリカ薄膜形成用リンス液。
- 基板を準備する段階と、
前記基板上にケイ素含有溶液を塗布する段階と、
請求項1〜3のいずれか一項に記載のシリカ薄膜形成用リンス液を前記ケイ素含有溶液が塗布された基板に部分的に噴射する段階と、
を含むシリカ前駆体薄膜の製造方法。 - 請求項4に記載の製造方法によって製造されたシリカ前駆体薄膜を硬化する段階を含むシリカ薄膜の製造方法。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20140181864 | 2014-12-16 | ||
KR10-2014-0181864 | 2014-12-16 | ||
KR1020150079441A KR101879414B1 (ko) | 2014-12-16 | 2015-06-04 | 실리카 박막용 린스액, 실리카 박막의 제조방법, 및 실리카 박막 |
KR10-2015-0079441 | 2015-06-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016115916A JP2016115916A (ja) | 2016-06-23 |
JP6797514B2 true JP6797514B2 (ja) | 2020-12-09 |
Family
ID=56111856
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015150089A Active JP6797514B2 (ja) | 2014-12-16 | 2015-07-29 | シリカ薄膜形成用リンス液、これを用いたシリカ前駆体薄膜およびシリカ薄膜の製造方法、ならびにこれらを用いて製造されるシリカ薄膜前駆体およびシリカ薄膜 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20160172188A1 (ja) |
JP (1) | JP6797514B2 (ja) |
CN (1) | CN105695165A (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10275062B2 (en) * | 2016-10-14 | 2019-04-30 | Industrial Technology Research Institute | Flexible electronic device having barrier planarization layer including nitrogen-rich region and oxygen-rich region |
WO2023157619A1 (ja) * | 2022-02-18 | 2023-08-24 | 富士フイルム株式会社 | 薬液、修飾基板の製造方法、積層体の製造方法 |
Family Cites Families (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3758624A (en) * | 1971-05-26 | 1973-09-11 | Ethyl Corp | Gasoline compositions |
US4992108A (en) * | 1990-01-18 | 1991-02-12 | Ward Irl E | Photoresist stripping compositions |
KR20000053521A (ko) * | 1999-01-20 | 2000-08-25 | 고사이 아끼오 | 금속 부식 방지제 및 세척액 |
US6413202B1 (en) * | 1999-01-21 | 2002-07-02 | Alliedsignal, Inc. | Solvent systems for polymeric dielectric materials |
KR100797202B1 (ko) * | 2000-06-23 | 2008-01-23 | 허니웰 인터내셔널 인코포레이티드 | 손상된 실리카 유전 필름에 소수성을 부여하는 방법 및 손상된 실리카 유전 필름 처리 방법 |
WO2002078842A1 (en) * | 2001-03-30 | 2002-10-10 | Council Of Scientific And Industrial Research | A novel catalytic formulation and its preparation |
US7413849B2 (en) * | 2004-09-10 | 2008-08-19 | Nupro Technologies | Substituted benzene developing solvent for photopolymerizable printing plates |
JP3479648B2 (ja) * | 2001-12-27 | 2003-12-15 | クラリアント インターナショナル リミテッド | ポリシラザン処理溶剤およびこの溶剤を用いるポリシラザンの処理方法 |
KR100574174B1 (ko) * | 2003-10-01 | 2006-04-27 | 동부일렉트로닉스 주식회사 | 웨이퍼의 에지 비이드 제거 장치 및 방법 |
TWI276929B (en) * | 2003-12-16 | 2007-03-21 | Showa Denko Kk | Photosensitive composition remover |
JP2005260040A (ja) * | 2004-02-12 | 2005-09-22 | Sony Corp | ドーピング方法、半導体装置の製造方法および電子応用装置の製造方法 |
JP2005307183A (ja) * | 2004-03-23 | 2005-11-04 | Fuji Photo Film Co Ltd | 膜形成用組成物、それを含有する塗布液及びその塗布液を用いて得られる絶縁膜を有する電子デバイス |
KR100619660B1 (ko) * | 2004-04-27 | 2006-09-06 | 캐논 가부시끼가이샤 | 현상 방법 및 이를 이용한 현상 장치 |
JP4578993B2 (ja) * | 2005-02-02 | 2010-11-10 | Azエレクトロニックマテリアルズ株式会社 | ポリシラザン処理溶剤およびこの溶剤を用いるポリシラザンの処理方法 |
JP2007002101A (ja) * | 2005-06-23 | 2007-01-11 | Tokyo Ohka Kogyo Co Ltd | 洗浄剤 |
AU2006283664B2 (en) * | 2005-08-19 | 2012-04-12 | Houghton Technical Corp. | Methods and compositions for acid treatment of a metal surface |
GT200600381A (es) * | 2005-08-25 | 2007-03-28 | Compuestos organicos | |
JP4812667B2 (ja) * | 2007-03-19 | 2011-11-09 | 富士通株式会社 | 半導体装置の製造方法 |
WO2009004823A1 (ja) * | 2007-07-05 | 2009-01-08 | Nippon Soda Co., Ltd. | 有機薄膜洗浄用溶剤 |
US8858720B2 (en) * | 2008-12-09 | 2014-10-14 | Chevron Belgium Nv | Method for cleaning deposits from turbocharger and supercharger compressors |
JP2010171362A (ja) * | 2008-12-26 | 2010-08-05 | Fujifilm Corp | 半導体デバイス用洗浄剤及びそれを用いた半導体デバイスの製造方法 |
US8193027B2 (en) * | 2010-02-23 | 2012-06-05 | Air Products And Chemicals, Inc. | Method of making a multicomponent film |
CN103210047B (zh) * | 2010-09-08 | 2018-07-17 | 巴斯夫欧洲公司 | 含n取代的二氮烯*二氧化物和/或n’-羟基-二氮烯*氧化物盐的含水抛光组合物 |
JP5405437B2 (ja) * | 2010-11-05 | 2014-02-05 | AzエレクトロニックマテリアルズIp株式会社 | アイソレーション構造の形成方法 |
US8252101B1 (en) * | 2011-11-11 | 2012-08-28 | Glemba Jr Roman A | Method and composition for polishing surfaces |
IN2014DN07698A (ja) * | 2012-03-26 | 2015-05-15 | Procter & Gamble | |
ITRM20120162A1 (it) * | 2012-04-16 | 2013-10-17 | Marcello Ferrara | Metodo e impianto per il trattamento di apparecchiature petrolifere |
US20140057003A1 (en) * | 2012-08-24 | 2014-02-27 | Raymond C. Johnson | Augmenting Cleaning Chemicals |
US20140099510A1 (en) * | 2012-10-04 | 2014-04-10 | Hendrich Chiong | Methods of manufacture of bis(phthalimide)s and polyetherimides, and bis(phthalimide)s, and polyetherimides formed therefrom |
JP2014203858A (ja) * | 2013-04-01 | 2014-10-27 | 株式会社Adeka | ポリシラザンの処理用溶剤およびこれを用いたポリシラザンの処理方法 |
KR101692757B1 (ko) * | 2013-04-18 | 2017-01-04 | 제일모직 주식회사 | 절연막용 린스액 및 절연막의 린스 방법 |
JP6267533B2 (ja) * | 2014-02-14 | 2018-01-24 | 信越化学工業株式会社 | パターン形成方法 |
-
2015
- 2015-06-29 US US14/754,346 patent/US20160172188A1/en not_active Abandoned
- 2015-07-28 CN CN201510452174.6A patent/CN105695165A/zh active Pending
- 2015-07-29 JP JP2015150089A patent/JP6797514B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
US20160172188A1 (en) | 2016-06-16 |
JP2016115916A (ja) | 2016-06-23 |
CN105695165A (zh) | 2016-06-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI601764B (zh) | 全氫聚矽氮烷、及含其之組成物、以及使用其之矽石質膜之形成方法 | |
TWI586715B (zh) | 用於形成二氧化矽類層的組成物、二氧化矽類層及電子裝置 | |
JP6687418B2 (ja) | シリカ膜形成用組成物、シリカ膜の製造方法およびシリカ膜 | |
KR101833800B1 (ko) | 실리카계 막 형성용 조성물, 실리카계 막의 제조방법 및 상기 실리카계 막을 포함하는 전자 소자 | |
TW559946B (en) | Process for producing semiconductor substrates and semiconductor substrates | |
CN107778876B (zh) | 用于形成二氧化硅层的组成物、二氧化硅层和电子装置 | |
JP6599640B2 (ja) | シリカ系膜形成用組成物、シリカ系膜、および電子デバイス | |
KR101692757B1 (ko) | 절연막용 린스액 및 절연막의 린스 방법 | |
JP6797514B2 (ja) | シリカ薄膜形成用リンス液、これを用いたシリカ前駆体薄膜およびシリカ薄膜の製造方法、ならびにこれらを用いて製造されるシリカ薄膜前駆体およびシリカ薄膜 | |
JP6795331B2 (ja) | シリカ膜の製造方法、シリカ膜および電子素子 | |
KR20150039084A (ko) | 실리카계 막 형성용 조성물, 실리카계 막 및 실리카계 막의 제조방법 | |
TW201811671A (zh) | 用於形成二氧化矽層的組成物、二氧化矽層和電子裝置 | |
KR101879414B1 (ko) | 실리카 박막용 린스액, 실리카 박막의 제조방법, 및 실리카 박막 | |
KR101367252B1 (ko) | 수소화폴리실록사잔 박막용 린스액 및 이를 이용한 수소화폴리실록사잔 박막의 패턴 형성 방법 | |
TWI653304B (zh) | 用於形成矽氧層的組成物、製造矽氧層的方法以及電子裝置 | |
CN111944320B (zh) | 用于形成二氧化硅层的组成物、二氧化硅层及电子装置 | |
KR102255103B1 (ko) | 실리카 막 제조방법, 실리카 막 및 전자소자 | |
KR20230020810A (ko) | 실리카 막 형성용 조성물, 실리카 막, 및 전자소자 | |
KR20160036328A (ko) | 실리카 박막용 린스액, 및 이를 이용하여 제조된 실리카 박막 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180510 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190702 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20190628 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190927 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200204 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200501 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20201027 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20201118 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6797514 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |