JP6795978B2 - 実装装置 - Google Patents
実装装置 Download PDFInfo
- Publication number
- JP6795978B2 JP6795978B2 JP2016527832A JP2016527832A JP6795978B2 JP 6795978 B2 JP6795978 B2 JP 6795978B2 JP 2016527832 A JP2016527832 A JP 2016527832A JP 2016527832 A JP2016527832 A JP 2016527832A JP 6795978 B2 JP6795978 B2 JP 6795978B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- mounting device
- pressurizing
- detecting
- joined
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000003825 pressing Methods 0.000 claims description 18
- 239000010453 quartz Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 239000000758 substrate Substances 0.000 description 11
- 238000005452 bending Methods 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 5
- 238000001514 detection method Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/52—Mounting semiconductor bodies in containers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Wire Bonding (AREA)
- Supply And Installment Of Electrical Components (AREA)
- Die Bonding (AREA)
Description
被接合物同士を接合する実装装置であって、
一方の被接合物を保持する保持手段と、
該保持手段を被接合物の接合方向に5N以下の低加圧力をもって加圧可能なシリンダー機構からなる第1の加圧手段と、
前記第1の加圧手段を形成するシリンダー上面に、前記保持手段を介して伝達される加圧力を検出する圧力検出手段を介して接合方向に連結された、50N以上の高加圧力をもって加圧可能な第2の加圧手段と、
前記第1の加圧手段と、前記第2の加圧手段との間に前記保持手段を介して伝達される加圧力を検出する圧力検出手段とを備え、
前記圧力検出手段が、500Nの加圧力での機械的変形が0.1μm以下である、水晶圧電素子からなる圧力検出器である実装装置である。
水晶圧電素子からなる圧力検出器を実装装置の加圧軸を中心に等距離で複数個配置したことを特徴とする。
2 チップ
3 基板
4 ヘッド部
5 ヒートツール
6 ステージ
7 エアベアリングシリンダ
8 ピストン
10 バランス圧ポート
11 取り付けベース
12 連結部材
14 ボールネジ
15 ベース板
16 ボルト受け板
17 圧力センサ
18 固定用ボルト
19 カップリング
20 駆動モータ
21 エンコーダ
30 制御部
Claims (2)
- 被接合物同士を接合する実装装置であって、
一方の被接合物を保持する保持手段と、
該保持手段を被接合物の接合方向に5N以下の低加圧力をもって加圧可能なシリンダー機構からなる第1の加圧手段と、
前記第1の加圧手段を形成するシリンダー上面に、前記保持手段を介して伝達される加圧力を検出する圧力検出手段を介して接合方向に連結された、50N以上の高加圧力をもって加圧可能な第2の加圧手段と、
前記第1の加圧手段と、前記第2の加圧手段との間に前記保持手段を介して伝達される加圧力を検出する圧力検出手段とを備え、
前記圧力検出手段が、500Nの加圧力での機械的変形が0.1μm以下である、水晶圧電素子からなる圧力検出器である実装装置。 - 請求項1の発明において、水晶圧電素子からなる圧力検出器を実装装置の加圧軸を中心に等距離で複数個配置した実装装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014120816 | 2014-06-11 | ||
JP2014120816 | 2014-06-11 | ||
PCT/JP2015/066644 WO2015190496A1 (ja) | 2014-06-11 | 2015-06-09 | 実装装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2015190496A1 JPWO2015190496A1 (ja) | 2017-04-20 |
JP6795978B2 true JP6795978B2 (ja) | 2020-12-02 |
Family
ID=54833586
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016527832A Active JP6795978B2 (ja) | 2014-06-11 | 2015-06-09 | 実装装置 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP6795978B2 (ja) |
WO (1) | WO2015190496A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109461677B (zh) * | 2018-10-19 | 2021-12-28 | 湖南维胜科技电路板有限公司 | 一种集成电路板压合装置 |
JP7116125B2 (ja) * | 2020-08-07 | 2022-08-09 | 株式会社オリジン | 接合装置及び接合方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04231827A (ja) * | 1990-05-31 | 1992-08-20 | Kistler Instr Ag | 薄円板状力センサ |
JP3856375B2 (ja) * | 2002-02-01 | 2006-12-13 | 東レエンジニアリング株式会社 | 実装装置およびその制御方法 |
JP4823801B2 (ja) * | 2006-08-01 | 2011-11-24 | Juki株式会社 | 電子部品実装方法及び装置 |
-
2015
- 2015-06-09 WO PCT/JP2015/066644 patent/WO2015190496A1/ja active Application Filing
- 2015-06-09 JP JP2016527832A patent/JP6795978B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JPWO2015190496A1 (ja) | 2017-04-20 |
WO2015190496A1 (ja) | 2015-12-17 |
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