JP6752163B2 - 基板処理システム及び基板搬送方法 - Google Patents
基板処理システム及び基板搬送方法 Download PDFInfo
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- JP6752163B2 JP6752163B2 JP2017024176A JP2017024176A JP6752163B2 JP 6752163 B2 JP6752163 B2 JP 6752163B2 JP 2017024176 A JP2017024176 A JP 2017024176A JP 2017024176 A JP2017024176 A JP 2017024176A JP 6752163 B2 JP6752163 B2 JP 6752163B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
- H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
2 隔壁
5 開閉ドア
20 搬送口
22 熱処理炉
54 閉塞空間
80A〜D 同圧化手段
81 接続配管
82 開閉弁
83 フィルタ
84 オリフィス
85 逆止弁
86 差圧計
91a,91b 不活性ガス供給装置
93a,93b 排気調整弁
94a,94b 排気ポンプ
S1 キャリア搬送領域
S2 ウエハ搬送領域
C キャリア
W ウエハ
Claims (8)
- 基板を収容するキャリアを基板処理装置に対して搬送するためのキャリア搬送領域と、
前記キャリア搬送領域と隔壁により仕切られ、前記キャリアに収容される前記基板を処理炉に搬送するための基板搬送領域と、
前記隔壁に形成され、前記キャリア搬送領域と前記基板搬送領域との間で前記基板を搬送するための搬送口と、
前記搬送口を開閉する開閉ドアと、
前記基板搬送領域の圧力と、前記キャリアと前記開閉ドアとに囲まれる空間の圧力と、を略同圧にする同圧化手段と、
を備え、
前記同圧化手段は、第1の接続配管と第2の接続配管とを含み、
前記第1の接続配管は、前記基板搬送領域と前記空間とを接続し、前記基板搬送領域の圧力が前記空間の圧力よりも高い場合に前記基板搬送領域のガスを前記空間に通流させ、
前記第2の接続配管は、前記基板搬送領域と前記空間とを接続し、前記基板搬送領域の圧力が前記空間の圧力よりも低い場合に前記空間のガスを前記基板搬送領域に通流させる、
基板処理システム。 - 前記同圧化手段は、前記第1の接続配管に設けられる開閉弁と、前記第2の接続配管に設けられる開閉弁と、を含む、
請求項1に記載の基板処理システム。 - 前記同圧化手段は、前記第1の接続配管に設けられるオリフィスと、前記第2の接続配管に設けられるオリフィスと、を更に含む、
請求項2に記載の基板処理システム。 - 前記同圧化手段は、前記第1の接続配管に設けられるフィルタと、前記第2の接続配管に設けられるフィルタと、を更に含む、
請求項2又は3に記載の基板処理システム。 - 前記同圧化手段は、前記第1の接続配管に設けられる逆止弁と、前記第2の接続配管に設けられる逆止弁と、を更に含む、
請求項2又は3に記載の基板処理システム。 - 前記第1の接続配管及び前記第2の接続配管は、フッ素樹脂により形成されている、
請求項2乃至5のいずれか一項に記載の基板処理システム。 - 基板を収容するキャリアを基板処理装置に対して搬送するためのキャリア搬送領域と、
前記キャリア搬送領域と隔壁により仕切られ、前記キャリアに収容される前記基板を処理炉に搬送するための基板搬送領域と、
前記隔壁に形成され、前記キャリア搬送領域と前記基板搬送領域との間で前記基板を搬送するための搬送口と、
前記搬送口を開閉する開閉ドアと、
前記基板搬送領域の圧力と、前記キャリアと前記開閉ドアとに囲まれる空間の圧力と、を略同圧にする同圧化手段と、
を備える基板処理システムにおける基板搬送方法であって、
前記同圧化手段は、前記基板搬送領域と前記空間とを接続する第1の接続配管及び第2の接続配管を含み、
前記基板搬送領域と前記空間とを連通させる前に、前記基板搬送領域の圧力が前記空間の圧力よりも高い場合には前記第1の接続配管を介して前記基板搬送領域のガスを前記空間に通流させ、前記基板搬送領域の圧力が前記空間の圧力よりも低い場合には前記第2の接続配管を介して前記空間のガスを前記基板搬送領域に通流させることにより、前記基板搬送領域の圧力と前記空間の圧力とを略同圧にする、
基板搬送方法。 - 前記基板搬送領域及び前記空間に不活性ガスを供給した状態で、前記基板搬送領域の圧力と前記空間の圧力とを略同圧にする、
請求項7に記載の基板搬送方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017024176A JP6752163B2 (ja) | 2017-02-13 | 2017-02-13 | 基板処理システム及び基板搬送方法 |
TW107103347A TWI707422B (zh) | 2017-02-13 | 2018-01-31 | 基板處理系統及基板搬送方法 |
KR1020180015758A KR102239201B1 (ko) | 2017-02-13 | 2018-02-08 | 기판 처리 시스템 및 기판 반송 방법 |
US15/893,490 US10784138B2 (en) | 2017-02-13 | 2018-02-09 | Substrate processing system and substrate transfer method |
CN201810135324.4A CN108428654B (zh) | 2017-02-13 | 2018-02-09 | 基板处理***和基板输送方法 |
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JP2017024176A JP6752163B2 (ja) | 2017-02-13 | 2017-02-13 | 基板処理システム及び基板搬送方法 |
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JP6752163B2 true JP6752163B2 (ja) | 2020-09-09 |
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US (1) | US10784138B2 (ja) |
JP (1) | JP6752163B2 (ja) |
KR (1) | KR102239201B1 (ja) |
CN (1) | CN108428654B (ja) |
TW (1) | TWI707422B (ja) |
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TWI788061B (zh) * | 2015-08-04 | 2022-12-21 | 日商昕芙旎雅股份有限公司 | 門開閉系統及具備門開閉系統之載入埠 |
TWI727562B (zh) * | 2015-08-04 | 2021-05-11 | 日商昕芙旎雅股份有限公司 | 裝載埠 |
US10403514B1 (en) * | 2018-04-12 | 2019-09-03 | Asm Ip Holding B.V. | Substrate transporting system, storage medium and substrate transporting method |
JP7234527B2 (ja) * | 2018-07-30 | 2023-03-08 | Tdk株式会社 | センサー内蔵フィルタ構造体及びウエハ収容容器 |
JP7090513B2 (ja) * | 2018-09-06 | 2022-06-24 | 東京エレクトロン株式会社 | 基板処理装置及びパージ方法 |
CN112011831B (zh) * | 2019-05-30 | 2022-03-22 | 北京北方华创微电子装备有限公司 | 一种用于立式热处理炉的开关门组件及立式热处理炉 |
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KR100271758B1 (ko) * | 1997-06-25 | 2001-01-15 | 윤종용 | 반도체장치 제조설비 및 이의 구동방법 |
JPH11214479A (ja) * | 1998-01-23 | 1999-08-06 | Tokyo Electron Ltd | 基板処理装置及びその方法並びに基板搬送装置 |
FR2874744B1 (fr) | 2004-08-30 | 2006-11-24 | Cit Alcatel | Interface sous vide entre une boite de mini-environnement et un equipement |
JP4516966B2 (ja) | 2004-09-15 | 2010-08-04 | 株式会社日立国際電気 | 半導体製造装置、基板の装填脱装方法および半導体装置の製造方法 |
JP2009026779A (ja) * | 2007-07-17 | 2009-02-05 | Hitachi High-Technologies Corp | 真空処理装置 |
JP5597433B2 (ja) * | 2010-04-16 | 2014-10-01 | 株式会社日立ハイテクノロジーズ | 真空処理装置 |
JP6106501B2 (ja) * | 2013-04-12 | 2017-04-05 | 東京エレクトロン株式会社 | 収納容器内の雰囲気管理方法 |
KR101791490B1 (ko) * | 2013-07-23 | 2017-10-30 | 쿠리타 고교 가부시키가이샤 | 전산화성 물질 농도의 측정 방법, 기판 세정 방법 및 기판 세정 시스템 |
KR102400424B1 (ko) * | 2014-09-05 | 2022-05-19 | 로제 가부시키가이샤 | 로드 포트 및 로드 포트의 분위기 치환 방법 |
TWI788061B (zh) * | 2015-08-04 | 2022-12-21 | 日商昕芙旎雅股份有限公司 | 門開閉系統及具備門開閉系統之載入埠 |
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- 2018-01-31 TW TW107103347A patent/TWI707422B/zh active
- 2018-02-08 KR KR1020180015758A patent/KR102239201B1/ko active IP Right Grant
- 2018-02-09 US US15/893,490 patent/US10784138B2/en active Active
- 2018-02-09 CN CN201810135324.4A patent/CN108428654B/zh active Active
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Publication number | Publication date |
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TWI707422B (zh) | 2020-10-11 |
KR20180093804A (ko) | 2018-08-22 |
US10784138B2 (en) | 2020-09-22 |
CN108428654A (zh) | 2018-08-21 |
JP2018133364A (ja) | 2018-08-23 |
US20180233392A1 (en) | 2018-08-16 |
KR102239201B1 (ko) | 2021-04-09 |
TW201841288A (zh) | 2018-11-16 |
CN108428654B (zh) | 2023-05-09 |
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