JP6739759B2 - 圧電振動子 - Google Patents
圧電振動子 Download PDFInfo
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- JP6739759B2 JP6739759B2 JP2017546418A JP2017546418A JP6739759B2 JP 6739759 B2 JP6739759 B2 JP 6739759B2 JP 2017546418 A JP2017546418 A JP 2017546418A JP 2017546418 A JP2017546418 A JP 2017546418A JP 6739759 B2 JP6739759 B2 JP 6739759B2
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- 238000000605 extraction Methods 0.000 claims description 20
- 239000013078 crystal Substances 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000000758 substrate Substances 0.000 description 85
- 230000005284 excitation Effects 0.000 description 16
- 239000000463 material Substances 0.000 description 14
- 230000000694 effects Effects 0.000 description 8
- 239000010410 layer Substances 0.000 description 8
- 239000010453 quartz Substances 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 239000004020 conductor Substances 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 238000005304 joining Methods 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
- H03H9/02023—Characteristics of piezoelectric layers, e.g. cutting angles consisting of quartz
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0504—Holders; Supports for bulk acoustic wave devices
- H03H9/0509—Holders; Supports for bulk acoustic wave devices consisting of adhesive elements
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0504—Holders; Supports for bulk acoustic wave devices
- H03H9/0514—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps
- H03H9/0519—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps for cantilever
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
- H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
100 圧電振動素子
200 キャップ(リッド部材)
300,400 基板(ベース部材)
310,311 電極パターン
312 ダミーパターン
320,322,380 接続電極
320a,322a,360a,362a,364a,366a 引出電極
350 接合材
360,362,460,462 信号電極
364,366,464,466 接地電極
490,492 貫通電極
Claims (6)
- 圧電振動素子と、
前記圧電振動素子が搭載された搭載面及び前記搭載面とは反対の実装面を有し、前記実装面に形成された電極パターンを有するベース部材と、
を備え、
前記電極パターンは、矩形状に形成された第1及び第2の接地電極と、前記圧電振動素子に電気的に接続されかつ矩形状に形成された第1及び第2の信号電極と、前記実装面において前記第1の接地電極と前記第2の接地電極を接続する接続電極と、を有し、
前記ベース部材の前記実装面は矩形状に形成され、
前記第1及び第2の信号電極は、前記実装面の対向する一対のコーナー部側の領域に配置され、
前記第1及び第2の信号電極の外形のサイズは、前記第1及び第2の接地電極の外形のサイズと同じであるか、又は前記第1及び第2の接地電極の外形のサイズより小さく、
前記第1及び第2の接地電極は、前記実装面の対向する他の一対のコーナー部側の領域に配置され、
前記接続電極は、前記実装面上において前記第1の信号電極と前記第2の信号電極の間を横切るように、前記第1及び第2の接地電極と一体的に形成され、
前記第1の信号電極及び前記第1の接地電極は、前記実装面の外縁のうちいずれか一辺側の領域に配置され、
前記第1の信号電極の外縁から前記実装面の前記一辺までの距離が、前記第1の接地電極の外縁から前記実装面の前記一辺までの距離よりも長い、
圧電振動子。 - 前記電極パターンは、前記第1及び第2の接地電極と前記第1及び第2の信号電極のうち、少なくとも一つの電極に電気的に接続された引出電極をさらに有する、
請求項1に記載の圧電振動子。 - 前記電極パターンは、前記第1及び第2の接地電極と前記第1及び第2の信号電極のうち、少なくとも一つの電極を、前記ベース部材の前記搭載面側に電気的に導通させる貫通電極をさらに有する、
請求項1に記載の圧電振動子。 - 前記圧電振動素子を封止するように前記ベース部材の前記搭載面に接合されたリッド部材をさらに備えた、
請求項1〜3のいずれか一項に記載の圧電振動子。 - 前記リッド部材は金属によって形成され、
前記第1及び第2の接地電極は、前記リッド部材に電気的に接続された、
請求項4に記載の圧電振動子。 - 前記圧電振動素子は水晶振動素子である、
請求項1〜5のいずれか一項に記載の圧電振動子。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015207239 | 2015-10-21 | ||
JP2015207239 | 2015-10-21 | ||
PCT/JP2016/066781 WO2017068809A1 (ja) | 2015-10-21 | 2016-06-06 | 圧電振動子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2017068809A1 JPWO2017068809A1 (ja) | 2018-08-09 |
JP6739759B2 true JP6739759B2 (ja) | 2020-08-12 |
Family
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Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017546418A Active JP6739759B2 (ja) | 2015-10-21 | 2016-06-06 | 圧電振動子 |
Country Status (3)
Country | Link |
---|---|
US (1) | US10985727B2 (ja) |
JP (1) | JP6739759B2 (ja) |
WO (1) | WO2017068809A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6075701B1 (ja) * | 2015-09-11 | 2017-02-08 | 株式会社安川電機 | 電気機器及び電力変換装置 |
CN113654583B (zh) * | 2021-08-31 | 2022-05-06 | 西安交通大学 | 剪切式振动-超声复合传感器及测量装置 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11298281A (ja) * | 1998-04-16 | 1999-10-29 | Toyo Commun Equip Co Ltd | 表面実装型圧電デバイス及び圧電ユニット |
JP2000165086A (ja) * | 1998-11-30 | 2000-06-16 | Kinseki Ltd | 電子部品容器 |
JP2008104095A (ja) * | 2006-10-20 | 2008-05-01 | Epson Toyocom Corp | 圧電振動子、圧電デバイスおよび電子機器 |
JP5446863B2 (ja) * | 2007-08-23 | 2014-03-19 | 株式会社大真空 | 電子部品用パッケージ及び電子部品用パッケージのベース |
JP2010073907A (ja) * | 2008-09-19 | 2010-04-02 | Daishinku Corp | 電子部品用パッケージ、電子部品用パッケージのベース |
JP4744578B2 (ja) | 2008-09-24 | 2011-08-10 | 日本電波工業株式会社 | 恒温型の水晶発振器 |
JP2013192052A (ja) * | 2012-03-14 | 2013-09-26 | Nippon Dempa Kogyo Co Ltd | 水晶デバイス及びその製造方法。 |
JP6137442B2 (ja) * | 2012-07-31 | 2017-05-31 | 株式会社大真空 | 圧電発振器 |
JP2015128276A (ja) * | 2013-11-29 | 2015-07-09 | 日本電波工業株式会社 | 表面実装水晶振動子及びその製造方法 |
JP6309757B2 (ja) * | 2013-12-26 | 2018-04-11 | 京セラ株式会社 | 水晶デバイス |
JP6819528B2 (ja) * | 2017-09-26 | 2021-01-27 | トヨタ自動車株式会社 | ロータ |
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2016
- 2016-06-06 WO PCT/JP2016/066781 patent/WO2017068809A1/ja active Application Filing
- 2016-06-06 JP JP2017546418A patent/JP6739759B2/ja active Active
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2018
- 2018-04-09 US US15/948,228 patent/US10985727B2/en active Active
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Publication number | Publication date |
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US10985727B2 (en) | 2021-04-20 |
WO2017068809A1 (ja) | 2017-04-27 |
US20180234077A1 (en) | 2018-08-16 |
JPWO2017068809A1 (ja) | 2018-08-09 |
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