JP6732658B2 - 被覆ナノ粒子を含む受動電子部品及びその製造と使用方法 - Google Patents
被覆ナノ粒子を含む受動電子部品及びその製造と使用方法 Download PDFInfo
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- JP6732658B2 JP6732658B2 JP2016560795A JP2016560795A JP6732658B2 JP 6732658 B2 JP6732658 B2 JP 6732658B2 JP 2016560795 A JP2016560795 A JP 2016560795A JP 2016560795 A JP2016560795 A JP 2016560795A JP 6732658 B2 JP6732658 B2 JP 6732658B2
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- thin film
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- nanoparticles
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- 239000002122 magnetic nanoparticle Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002905 metal composite material Substances 0.000 description 1
- 239000002082 metal nanoparticle Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 230000003278 mimic effect Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- BITYAPCSNKJESK-UHFFFAOYSA-N potassiosodium Chemical compound [Na].[K] BITYAPCSNKJESK-UHFFFAOYSA-N 0.000 description 1
- UKDIAJWKFXFVFG-UHFFFAOYSA-N potassium;oxido(dioxo)niobium Chemical compound [K+].[O-][Nb](=O)=O UKDIAJWKFXFVFG-UHFFFAOYSA-N 0.000 description 1
- 238000000634 powder X-ray diffraction Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000012713 reactive precursor Substances 0.000 description 1
- 238000011946 reduction process Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 1
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical class [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- UYLYBEXRJGPQSH-UHFFFAOYSA-N sodium;oxido(dioxo)niobium Chemical compound [Na+].[O-][Nb](=O)=O UYLYBEXRJGPQSH-UHFFFAOYSA-N 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- DKDQMLPMKQLBHQ-UHFFFAOYSA-N strontium;barium(2+);oxido(dioxo)niobium Chemical compound [Sr+2].[Ba+2].[O-][Nb](=O)=O.[O-][Nb](=O)=O.[O-][Nb](=O)=O.[O-][Nb](=O)=O DKDQMLPMKQLBHQ-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006557 surface reaction Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- MNWRORMXBIWXCI-UHFFFAOYSA-N tetrakis(dimethylamido)titanium Chemical compound CN(C)[Ti](N(C)C)(N(C)C)N(C)C MNWRORMXBIWXCI-UHFFFAOYSA-N 0.000 description 1
- LLZRNZOLAXHGLL-UHFFFAOYSA-J titanic acid Chemical compound O[Ti](O)(O)O LLZRNZOLAXHGLL-UHFFFAOYSA-J 0.000 description 1
- JUWGUJSXVOBPHP-UHFFFAOYSA-B titanium(4+);tetraphosphate Chemical compound [Ti+4].[Ti+4].[Ti+4].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O JUWGUJSXVOBPHP-UHFFFAOYSA-B 0.000 description 1
- QORWJWZARLRLPR-UHFFFAOYSA-H tricalcium bis(phosphate) Chemical compound [Ca+2].[Ca+2].[Ca+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O QORWJWZARLRLPR-UHFFFAOYSA-H 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000011882 ultra-fine particle Substances 0.000 description 1
- 229910001935 vanadium oxide Inorganic materials 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4417—Methods specially adapted for coating powder
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/05—Metallic powder characterised by the size or surface area of the particles
- B22F1/054—Nanosized particles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/05—Metallic powder characterised by the size or surface area of the particles
- B22F1/054—Nanosized particles
- B22F1/056—Submicron particles having a size above 100 nm up to 300 nm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/16—Metallic particles coated with a non-metal
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/008—Selection of materials
- H01G4/0085—Fried electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
- H01G4/1209—Ceramic dielectrics characterised by the ceramic dielectric material
- H01G4/1218—Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates
- H01G4/1227—Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates based on alkaline earth titanates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/30—Stacked capacitors
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Inorganic Chemistry (AREA)
- Nanotechnology (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Powder Metallurgy (AREA)
- Ceramic Capacitors (AREA)
- Thermistors And Varistors (AREA)
- Coils Or Transformers For Communication (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Description
本出願は、2014年4月1日に出願された米国仮出願第61/973352号の利益を主張するものであり、その開示内容は参照のためその全体が本明細書に組み込まれる。
連邦政府資金の声明
発明の分野
(1)高温(450℃)で60分間のフォーミングガス暴露。
(2)(1)の工程に続いて、Al2O3の3nmのALD被覆;そして
(3)まず、分子層堆積法(MLD)により5nmのアルミニウムアルコキシド層を被覆して、高温有機バーンアウト工程中にメソポーラスAl2O3被覆を得る。次に、上記(1)の工程を含めて(2)の工程を行う。
A−1とB−1の場合は、粒径分布は劇的に大きな値にシフトし、粒子間焼結が急速に進行していることを明確に示した。B基材を使用するd50粒径は、典型的には同じ金属のバルクのミクロンスケール粉末のd50粒径よりも小さい。空気に24時間暴露した後、XRDを使用して銅酸化物が明確に観察された。A−2とB−2の場合は、処理の態様が同じであるため、同様の粒子径のシフトが生じたが、XRDを使用して銅酸化物が観察されなかったため、Al2O3被覆は下地の銅粉末の酸化を防止した。A−3とB−3の場合は、フォーミングガス処理工程中に、アルミニウムアルコキシドは多孔質Al2O3シェルに変換され、これは、フォーミングガスが粒子の表面に直接接触することを可能にし、還元工程は、最も外側のAl2O3表面のみが粒子床内で互いに接触している間に、完了へと進むことができる。フォーミングガス還元工程の完了後、Al2O3 ALDシェルが適用された。3nmのAl2O3 ALD被覆は、空気に24時間曝した時、再度、銅粒子の酸化を防止するのに十分であった。方法(1)と(2)のみを経る類似体と比較して、A−3とB−3の間の劇的な差異は、粒径がほぼ無変化であったことであり、これは、大幅に異なる温度処理工程を用いる真空流動床反応器中の粒子上の、このような集中的で逐次的な被覆法を実施する際に、通常予想されるものとは異なっていた。
以下に本発明の態様の非限定的な例を示す。
(態様1)
耐酸化材料の薄膜で被覆された導電性ナノ粒子の電極層を含む受動電子部品であって、前記耐酸化材料の薄膜が、前記ナノ粒子の酸化を防止し、かつ前記電極層の機能が、前記耐酸化材料の薄膜の非存在下の導電性ナノ粒子の同様の電極層と実質的に同じである、受動電子部品。
(態様2)
前記耐酸化材料の薄膜が、前記ナノ粒子に有意な追加の抵抗率をもたらさない、態様1に記載の受動電子部品。
(態様3)
前記耐酸化材料の薄膜が、前記ナノ粒子の焼結に有意な影響しない、態様1に記載の受動電子部品。
(態様4)
前記耐酸化材料の薄膜が、ワイドバンドギャップ材料の薄膜を含む、態様1に記載の受動電子部品。
(態様5)
前記ワイドバンドギャップ材料の薄膜が、酸化アルミニウム、酸化ハフニウム、酸化ジルコニウム、酸化ケイ素、酸化ホウ素、窒化アルミニウム、窒化ガリウム、窒化ホウ素、炭化ケイ素、炭化ホウ素、及びこれらの組み合わせからなる群から選択される材料の薄膜を含む、態様4に記載の受動電子部品。
(態様6)
前記ワイドバンドギャップ材料の薄膜の厚さが5.5nm以下である、態様4に記載の受動電子部品。
(態様7)
前記耐酸化材料の薄膜が半導体材料又は導電性材料の薄膜を含む、態様1に記載の受動電子部品。
(態様8)
前記耐酸化材料の薄膜の抵抗率が10,000μΩ−cm以下である、態様2に記載の受動電子部品。
(態様9)
前記耐酸化材料の薄膜が、ドーパント材料が前記耐酸化材料の薄膜の導電率を少なくとも100%増加させるように、前記ドーパント材料を含む、態様1に記載の受動電子部品。
(態様10)
前記ナノ粒子の熱酸化開始温度が、前記耐酸化材料の薄膜の非存在下の同じナノ粒子より少なくとも25℃高い、態様1に記載の受動電子部品。
(態様11)
前記ナノ粒子の平均粒径が500nm以下である、態様1に記載の受動電子部品。
(態様12)
前記耐酸化材料の薄膜が、少なくとも一部は原子層堆積法により製造される、態様1に記載の受動電子部品。
(態様13)
前記受動電子部品が複数の前記電極層を含む、態様1に記載の受動電子部品。
(態様14)
前記受動電子部品が、抵抗器、コンデンサ、インダクタ、変圧器、アクチュエータ、圧電素子、バリスタ、変換器、メモリスタ、センサー、サイリスタ、サーミスタ、及びトランジスタからなる群から選択される、態様1に記載の受動電子部品。
(態様15)
信頼性改善材料の薄膜で被覆された対応するナノ粒子の誘電体層又は圧電体層を含む受動電子部品。
(態様16)
前記信頼性改善材料が、SiO 2 、B 2 O 3 、Li 2 O、又はこれらの混合物を含む、態様15に記載の受動電子部品。
(態様17)
前記薄膜が、前記ナノ粒子材料の融合温度を低下させる、態様15に記載の受動電子部品。
(態様18)
前記ナノ粒子がチタン酸バリウムを含み、前記信頼性改善材料が、ビスマス、亜鉛、チタン、スカンジウム、又はこれらの混合物を含む金属の酸化物を含む、態様15に記載の受動電子部品。
(態様19)
前記信頼性改善材料が、酸化亜鉛チタン、酸化ビスマス亜鉛チタン、又は酸化ビスマススカンジウムを含む、態様18に記載の受動電子部品。
(態様20)
前記ナノ粒子がニオブ酸アルカリペロブスカイトを含み、前記信頼性改善材料が、タンタル、ナトリウム、カリウム、又はこれらの混合物からなる群から選択される金属の酸化物を含む、態様15に記載の受動電子部品。
(態様21)
前記信頼性改善材料がタンタル酸アルカリを含む、態様20に記載の受動電子部品。
(態様22)
前記信頼性改善材料が、平均故障時間を、前記信頼性改善材料の薄膜の非存在下の同じ受動電子部品と比較して、少なくとも10%延長させる、態様15に記載の受動電子部品。
(態様23)
前記信頼性改善材料の薄膜が、前記ナノ粒子の平均粒径を、前記信頼性改善材料の薄膜の非存在下の同じ受動電子部品に対して、焼成された場合に少なくとも50nm減少させる、態様15に記載の受動電子部品。
(態様24)
前記信頼性改善材料の薄膜が、少なくとも一部は原子層堆積法を使用して製造される、態様15に記載の受動電子部品。
(態様25)
前記受動電子部品が複数の前記誘電体層又は前記圧電体層を含む、態様15に記載の受動電子部品。
(態様26)
対応するナノ粒子を含む誘電体層及び/又は圧電体層と
導電性ナノ粒子を含む電極層と、を含む受動電子部品であって、
前記誘電体層及び/又は前記圧電体層の前記ナノ粒子が、信頼性改善材料の薄膜により被覆され、前記導電性ナノ粒子が耐酸化材料の薄膜により被覆される、受動電子部品。
(態様27)
態様1に記載の受動電子部品を含む電子機器。
(態様28)
態様15に記載の受動電子部品を含む電子機器。
(態様29)
態様26に記載の受動電子部品を含む電子機器。
Claims (21)
- 耐酸化材料の薄膜で被覆された導電性ナノ粒子の電極層を含む受動電子部品であって、前記耐酸化材料の薄膜が、前記ナノ粒子の酸化を防止し、かつ前記電極層の機能が、前記耐酸化材料の薄膜の非存在下の導電性ナノ粒子の同様の電極層と実質的に同じであり、
前記耐酸化材料の薄膜が、ワイドバンドギャップ材料の薄膜を含み、前記ワイドバンドギャップ材料の薄膜が、酸化ハフニウム、酸化ジルコニウム、酸化ケイ素、酸化ホウ素、窒化アルミニウム、窒化ガリウム、窒化ホウ素、炭化ケイ素、炭化ホウ素、及びこれらの組み合わせからなる群から選択される材料の薄膜を含む、受動電子部品。 - 前記耐酸化材料の薄膜が、前記ナノ粒子に20%以上の抵抗率をもたらさない、請求項1に記載の受動電子部品。
- 前記耐酸化材料の薄膜の存在において焼結する前記ナノ粒子の量が、前記耐酸化材料の薄膜の不存在において焼結する前記ナノ粒子の量と比べて15%以下で異なる、請求項1に記載の受動電子部品。
- 前記ワイドバンドギャップ材料の薄膜の厚さが5.5nm以下である、請求項1に記載の受動電子部品。
- 前記耐酸化材料の薄膜が半導体材料又は導電性材料の薄膜を含む、請求項1に記載の受動電子部品。
- 前記耐酸化材料の薄膜の抵抗率が5,000μΩ−cm以下である、請求項2に記載の受動電子部品。
- 前記耐酸化材料の薄膜が、ドーパント材料が前記耐酸化材料の薄膜の導電率を少なくとも100%増加させるように、前記ドーパント材料を含む、請求項1に記載の受動電子部品。
- 前記ナノ粒子の平均粒径が500nm以下である、請求項1に記載の受動電子部品。
- 前記耐酸化材料の薄膜が、少なくとも一部は原子層堆積法により製造される、請求項1に記載の受動電子部品。
- 前記受動電子部品が複数の前記電極層を含む、請求項1に記載の受動電子部品。
- 前記受動電子部品が、抵抗器、コンデンサ、インダクタ、変圧器、アクチュエータ、圧電素子、バリスタ、変換器、メモリスタ、センサー、サイリスタ、サーミスタ、及びトランジスタからなる群から選択される、請求項1に記載の受動電子部品。
- 信頼性改善材料の薄膜で被覆された対応するナノ粒子の誘電体層又は圧電体層を含み、
前記信頼性改善材料がタンタル酸アルカリを含む受動電子部品。 - 前記ナノ粒子がニオブ酸アルカリペロブスカイトを含み、前記信頼性改善材料が、タンタル、ナトリウム、カリウム、又はこれらの混合物からなる群から選択される金属の酸化物を含む、請求項12に記載の受動電子部品。
- 前記信頼性改善材料の薄膜が、少なくとも一部は原子層堆積法を使用して製造される、請求項12に記載の受動電子部品。
- 前記受動電子部品が複数の前記誘電体層又は前記圧電体層を含む、請求項12に記載の受動電子部品。
- 対応するナノ粒子を含む誘電体層及び/又は圧電体層と
導電性ナノ粒子を含む電極層と、を含む受動電子部品であって、
前記誘電体層及び/又は前記圧電体層の前記ナノ粒子が、信頼性改善材料の薄膜により被覆され、前記導電性ナノ粒子が耐酸化材料の薄膜により被覆され、
前記信頼性改善材料がタンタル酸アルカリを含む、受動電子部品。 - 請求項1に記載の受動電子部品を含む電子機器。
- 請求項12に記載の受動電子部品を含む電子機器。
- 請求項16に記載の受動電子部品を含む電子機器。
- 耐酸化材料の薄膜で被覆された導電性ナノ粒子の電極層を含む受動電子部品であって、前記耐酸化材料の薄膜が、前記ナノ粒子の酸化を防止し、かつ前記電極層の機能が、前記耐酸化材料の薄膜の非存在下の導電性ナノ粒子の同様の電極層と実質的に同じであり、
前記耐酸化材料の薄膜が、窒化又は炭化物、及びこれらの組み合わせからなる群から選択される材料を含む、受動電子部品。 - 請求項20に記載の受動電子部品を含む電子機器。
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