JP6719950B2 - データ送信方法、プログラム、データ送信装置、リソグラフィ装置、及び物品の製造方法 - Google Patents
データ送信方法、プログラム、データ送信装置、リソグラフィ装置、及び物品の製造方法 Download PDFInfo
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Description
物品として、例えば、デバイス(半導体デバイス、磁気記憶媒体、液晶表示素子等)、カラーフィルター、又はハードディスク等の製造方法について説明する。かかる製造方法は、リソグラフィ装置(例えば、露光装置、インプリント装置、描画装置等)を用いてパターンを基板(ウエハ、ガラスプレート、フィルム状基板等)に形成する工程を含む。かかる製造方法は、パターンを形成された基板を処理する工程を更に含む。該処理ステップは、該パターンの残膜を除去するステップを含みうる。また、該パターンをマスクとして基板をエッチングするステップなどの周知の他のステップを含みうる。本実施形態における物品の製造方法は、従来に比べて、物品の性能、品質、生産性及び生産コストの少なくとも1つにおいて有利である。
Claims (11)
- 製造装置のログデータに記録されるログ情報のデータを外部の装置に送信するデータ送信方法であって、
前記製造装置の処理に関するものを識別する識別子であって前記製造装置及び前記外部の装置が共通に使用する第1識別子の情報と前記製造装置の処理に関し前記第1識別子により識別されるものを識別する識別子であって前記製造装置が使用する第2識別子の情報との対応情報を保存する保存工程と、
ログ情報に記録された前記第2識別子の情報に対応した前記第1識別子の情報を前記対応情報に基づいて取得し、前記第1識別子の前記情報を追加した前記ログ情報のデータを送信するデータ送信工程と、
を情報処理装置を用いて実行し、
前記保存工程において、前記第1識別子の前記情報及び前記第2識別子の前記情報に対応したイベント時刻の情報を加えて前記対応情報を保存し、
前記データ送信工程において、前記ログ情報の前記第2識別子の情報が前記対応情報に複数、存在する場合、前記対応情報に基づいて、前記ログ情報のイベント時刻の情報に一番近い前記第2識別子の前記情報に対応するイベント時刻の情報を求め、前記イベント時刻の情報に対応する前記第1識別子の情報を取得する、
ことを特徴とするデータ送信方法。 - 前記第1識別子及び前記第2識別子は、前記製造装置で処理をする材料を識別する識別子、又は前記製造装置に対して動作を指令するためのジョブを識別する識別子であることを特徴とする請求項1に記載のデータ送信方法。
- 前記第2識別子は、一定の番号を超えた場合は先頭に戻る通し番号である
ことを特徴とする、請求項1又は2に記載のデータ送信方法。 - 前記ログ情報は、前記第1識別子の情報を含むログ情報と、前記第1識別子の情報を含まないログ情報とを含む
ことを特徴とする、請求項1乃至請求項3のうちいずれか1項に記載のデータ送信方法。 - 前記データ送信工程において、前記ログ情報を記録する毎に前記ログ情報のデータを送信することを含む
ことを特徴とする請求項1乃至請求項4のうちいずれか1項に記載のデータ送信方法。 - 前記データ送信工程において、前記ログデータから前記ログ情報を読み込んで前記ログ情報のデータを送信することを含む
ことを特徴とする請求項1乃至請求項5のうちいずれか1項に記載のデータ送信方法。 - 前記製造装置は基板にパターンを形成するリソグラフィ装置であることを特徴とする請求項1乃至請求項6のうちいずれか1項に記載のデータ送信方法。
- 請求項1乃至請求項7のうちいずれか1項に記載のデータ送信方法を情報処理装置に実行させるプログラム。
- 請求項1乃至請求項7のうちいずれか1項に記載のデータ送信方法を用いてデータを送信するデータ送信装置。
- 基板にパターンを形成するリソグラフィ装置であって、請求項9に記載のデータ送信装置を有することを特徴とするリソグラフィ装置。
- 請求項10に記載のリソグラフィ装置を用いて、パターンを基板に形成する工程と、
前記工程で前記パターンを形成された前記基板を処理する工程と、
処理された前記基板から物品を製造する工程と、を有する
ことを特徴とする物品の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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JP2016082317A JP6719950B2 (ja) | 2016-04-15 | 2016-04-15 | データ送信方法、プログラム、データ送信装置、リソグラフィ装置、及び物品の製造方法 |
TW106110566A TW201738760A (zh) | 2016-04-15 | 2017-03-29 | 資料傳輸方法、非暫時性儲存媒體、資料傳輸設備、光刻裝置和製造產品的方法 |
US15/482,527 US10394683B2 (en) | 2016-04-15 | 2017-04-07 | Data transmission method, non-transitory storage medium, data transmission device, lithography apparatus, and method of manufacturing product |
KR1020170047134A KR20170118608A (ko) | 2016-04-15 | 2017-04-12 | 데이터 송신 방법, 저장 매체, 데이터 송신 장치, 리소그래피 장치, 및 물품의 제조 방법 |
CN201710243755.8A CN107301117B (zh) | 2016-04-15 | 2017-04-14 | 数据传输方法、非暂时性存储介质、数据传输设备、光刻装置和制造产品的方法 |
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JP2017191289A JP2017191289A (ja) | 2017-10-19 |
JP6719950B2 true JP6719950B2 (ja) | 2020-07-08 |
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US (1) | US10394683B2 (ja) |
JP (1) | JP6719950B2 (ja) |
KR (1) | KR20170118608A (ja) |
CN (1) | CN107301117B (ja) |
TW (1) | TW201738760A (ja) |
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JP2006128447A (ja) * | 2004-10-29 | 2006-05-18 | Nikon Corp | 基板処理装置及び方法並びに情報管理方法 |
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JP4720882B2 (ja) * | 2008-09-16 | 2011-07-13 | コニカミノルタビジネステクノロジーズ株式会社 | 画像処理装置 |
JP2010232291A (ja) * | 2009-03-26 | 2010-10-14 | Canon Inc | 情報処理方法、それを用いた露光処理システム、デバイスの製造方法、情報処理装置、及び情報処理プログラム |
JP2012192575A (ja) * | 2011-03-16 | 2012-10-11 | Brother Industries Ltd | 印刷装置および印刷履歴管理プログラム |
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- 2017-03-29 TW TW106110566A patent/TW201738760A/zh unknown
- 2017-04-07 US US15/482,527 patent/US10394683B2/en active Active
- 2017-04-12 KR KR1020170047134A patent/KR20170118608A/ko not_active Application Discontinuation
- 2017-04-14 CN CN201710243755.8A patent/CN107301117B/zh active Active
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CN107301117B (zh) | 2021-07-13 |
US10394683B2 (en) | 2019-08-27 |
US20170300399A1 (en) | 2017-10-19 |
JP2017191289A (ja) | 2017-10-19 |
TW201738760A (zh) | 2017-11-01 |
CN107301117A (zh) | 2017-10-27 |
KR20170118608A (ko) | 2017-10-25 |
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