JP6719825B2 - 研削装置及びウェーハの加工方法 - Google Patents
研削装置及びウェーハの加工方法 Download PDFInfo
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- JP6719825B2 JP6719825B2 JP2016201092A JP2016201092A JP6719825B2 JP 6719825 B2 JP6719825 B2 JP 6719825B2 JP 2016201092 A JP2016201092 A JP 2016201092A JP 2016201092 A JP2016201092 A JP 2016201092A JP 6719825 B2 JP6719825 B2 JP 6719825B2
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- 238000003672 processing method Methods 0.000 title claims description 10
- 235000012431 wafers Nutrition 0.000 claims description 194
- 238000005452 bending Methods 0.000 claims description 59
- 238000005259 measurement Methods 0.000 claims description 39
- 230000001681 protective effect Effects 0.000 claims description 31
- 238000012545 processing Methods 0.000 claims description 29
- 230000032258 transport Effects 0.000 claims description 15
- 230000007246 mechanism Effects 0.000 description 46
- 239000002390 adhesive tape Substances 0.000 description 18
- 238000005520 cutting process Methods 0.000 description 18
- 238000004140 cleaning Methods 0.000 description 17
- 239000010410 layer Substances 0.000 description 16
- 238000012546 transfer Methods 0.000 description 11
- 238000003754 machining Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 239000003292 glue Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 230000007723 transport mechanism Effects 0.000 description 2
- 238000002679 ablation Methods 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
- H01L21/67219—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one polishing chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Dicing (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Laser Beam Processing (AREA)
Description
4 基台
4a 開口
6 搬送機構
8 カセット
10 カセットテーブル(カセット載置領域)
12 位置調整機構
14 搬入機構(搬入ユニット)
16 ターンテーブル
18 チャックテーブル
18a 保持面
20 支持構造
22 Z軸移動機構
24 Z軸ガイドレール
26 Z軸移動プレート
28 Z軸ボールネジ
30 Z軸パルスモータ
32 固定具
34 研削ユニット
36 スピンドルハウジング
38 スピンドル
40 マウント
42 研削ホイール
44 ホイール基台
46 砥石
48 搬出機構
50 洗浄機構
52 仮置きテーブル
54 搬送機構
56 抗折強度測定ユニット
58 制御ユニット
58a 判定部
62 フレームクランプ
64 ローラ
66 紫外線照射ユニット
68 第1チップ搬送ユニット
68a チップ吸着パッド
70 仮置き領域
72 第2チップ搬送ユニット
72a チップ吸着パッド
74 支持部材
76 支持構造
78 Z軸移動ブロック
80 加圧部材
82 廃棄穴
84 清掃ユニット
92 切削装置
94 チャックテーブル
94a 保持面
96 クランプ
98 切削ユニット
100 スピンドル
102 切削ブレード
112 レーザー加工装置
114 チャックテーブル
114a 保持面
116 クランプ
118 レーザー照射ユニット
11 ウェーハ
11a 表面
11b 裏面
13 分割予定ライン(ストリート)
15 デバイス
17 溝
19 改質層
21 ダイシングテープ
23 フレーム
25 保護部材
31 粘着テープ
33 フレーム
L レーザービーム
Claims (3)
- 表面側に改質層又は仕上げ厚さ以上の深さの溝が形成されたウェーハの該表面側を保持するチャックテーブルと、
該チャックテーブルで保持したウェーハの裏面を研削しウェーハを該改質層又は該溝に沿って複数のチップに分割する研削ユニットと、
複数のウェーハを収容するカセットが載置されるカセット載置領域と、
該カセット載置領域に載置された該カセットから搬出されるウェーハを該チャックテーブルへと搬入する搬入ユニットと、
該研削ユニットでウェーハを分割して得られる該チップの抗折強度を測定する抗折強度測定ユニットと、
該抗折強度測定ユニットの測定結果に基づいて各構成要素を制御する制御ユニットと、を備え、
該制御ユニットは、該測定結果が閾値未満の場合に、該カセットに収容された他のウェーハの研削を実施しないと判定し、該測定結果が閾値以上の場合に、該カセットに収容された他のウェーハの研削を実施すると判定する判定部を有することを特徴とする研削装置。 - 該チャックテーブルは、該表面に貼着された保護部材を介してウェーハの該表面側を保持し、
該保護部材から該チップを剥離して該抗折強度測定ユニットに搬送するチップ搬送ユニットを更に備えることを特徴とする請求項1に記載の研削装置。 - 請求項1又は請求項2に記載の研削装置を用いるウェーハの加工方法であって、
ウェーハの表面側に改質層又は仕上げ厚さ以上の深さの溝を形成する表面側加工ステップと、
該表面側加工ステップを実施した後、該ウェーハの該表面に保護部材を貼着する保護部材貼着ステップと、
該保護部材貼着ステップを実施した後、該保護部材を介して該チャックテーブルに保持された該ウェーハの裏面を該研削ユニットで研削し該ウェーハを該改質層又は該溝に沿って複数のチップに分割する研削ステップと、
該研削ステップを実施した後、該ウェーハを分割して得られる該チップの抗折強度を測定し、測定結果が閾値未満の場合に、該ウェーハとは別のウェーハの研削を続けて実施しないと判定し、該測定結果が閾値以上の場合に、該ウェーハとは別のウェーハの研削を続けて実施すると判定する判定ステップと、を備えることを特徴とするウェーハの加工方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016201092A JP6719825B2 (ja) | 2016-10-12 | 2016-10-12 | 研削装置及びウェーハの加工方法 |
US15/729,922 US10328547B2 (en) | 2016-10-12 | 2017-10-11 | Grinding apparatus and wafer processing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016201092A JP6719825B2 (ja) | 2016-10-12 | 2016-10-12 | 研削装置及びウェーハの加工方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018064021A JP2018064021A (ja) | 2018-04-19 |
JP6719825B2 true JP6719825B2 (ja) | 2020-07-08 |
Family
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Family Applications (1)
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JP2016201092A Active JP6719825B2 (ja) | 2016-10-12 | 2016-10-12 | 研削装置及びウェーハの加工方法 |
Country Status (2)
Country | Link |
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US (1) | US10328547B2 (ja) |
JP (1) | JP6719825B2 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6887722B2 (ja) * | 2016-10-25 | 2021-06-16 | 株式会社ディスコ | ウェーハの加工方法及び切削装置 |
CN108555735B (zh) * | 2018-05-02 | 2020-10-16 | 中住信资产管理有限责任公司 | 一种用于石墨烯芯片加工的高效瑕疵处理*** |
CN109648459A (zh) * | 2019-02-28 | 2019-04-19 | 广州哲野超硬材料磨削技术有限公司 | 自动研磨机 |
JP7216613B2 (ja) * | 2019-05-16 | 2023-02-01 | 株式会社ディスコ | 加工装置 |
JP7254002B2 (ja) * | 2019-08-20 | 2023-04-07 | 株式会社ディスコ | 測定方法及び試験装置 |
JP7296835B2 (ja) | 2019-09-19 | 2023-06-23 | 株式会社ディスコ | ウェーハの処理方法、及び、チップ測定装置 |
JP2021048287A (ja) * | 2019-09-19 | 2021-03-25 | 株式会社ディスコ | ウエーハの加工方法 |
JP2022077172A (ja) * | 2020-11-11 | 2022-05-23 | 株式会社ディスコ | 研削装置 |
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JPH05335411A (ja) | 1992-06-02 | 1993-12-17 | Toshiba Corp | ペレットの製造方法 |
US6245677B1 (en) * | 1999-07-28 | 2001-06-12 | Noor Haq | Backside chemical etching and polishing |
JP2004153193A (ja) * | 2002-11-01 | 2004-05-27 | Disco Abrasive Syst Ltd | 半導体ウエーハの処理方法 |
JP2009094326A (ja) * | 2007-10-10 | 2009-04-30 | Disco Abrasive Syst Ltd | ウェーハの研削方法 |
JP2009246098A (ja) * | 2008-03-31 | 2009-10-22 | Disco Abrasive Syst Ltd | ウエーハの研削方法 |
JP5231136B2 (ja) * | 2008-08-22 | 2013-07-10 | 株式会社ディスコ | 光デバイスウエーハの加工方法 |
JP2012089709A (ja) * | 2010-10-20 | 2012-05-10 | Disco Abrasive Syst Ltd | ワークの分割方法 |
JP5933189B2 (ja) * | 2011-05-12 | 2016-06-08 | 株式会社ディスコ | デバイスの加工方法 |
JP6166034B2 (ja) * | 2012-11-22 | 2017-07-19 | 株式会社ディスコ | ウエーハの加工方法 |
US9373524B2 (en) * | 2014-04-23 | 2016-06-21 | International Business Machines Corporation | Die level chemical mechanical polishing |
-
2016
- 2016-10-12 JP JP2016201092A patent/JP6719825B2/ja active Active
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Publication number | Publication date |
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JP2018064021A (ja) | 2018-04-19 |
US10328547B2 (en) | 2019-06-25 |
US20180099373A1 (en) | 2018-04-12 |
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