JP6702955B2 - フィラーセル、タップセル、デキャップセル、スクライブライン及び/又はダミーフィル並びにこれらを内包する製品ICチップのために使用されるはずの領域への、IC試験構造体及び/又はeビーム標的パッドの日和見的配置 - Google Patents
フィラーセル、タップセル、デキャップセル、スクライブライン及び/又はダミーフィル並びにこれらを内包する製品ICチップのために使用されるはずの領域への、IC試験構造体及び/又はeビーム標的パッドの日和見的配置 Download PDFInfo
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- 238000012360 testing method Methods 0.000 title claims description 181
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
- H01L22/34—Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0207—Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
- Semiconductor Integrated Circuits (AREA)
Description
Claims (20)
- 少なくとも以下のステップ:
製品ICウェハを初期製作ステップに供するステップ;
前記ウェハ上に設けられた複数の試験構造体から連続走査を行わずにeビーム励起測定を得るステップであって、前記各試験構造体に関連するeビームパッドであって、複数の電気的に接続された細長い金属セグメントを備えた論理デバイスを含むeビームパッドから10未満のピクセルを選択的にサンプリングすることによって当該eビームパッドを選択的に標的とする、前記測定を得るステップ;及び
前記試験構造体から得られた測定に少なくとも部分的に基づいて、前記ウェハを、追加の製作ステップに選択的に供するステップ
を含む、IC製作プロセス。 - 前記測定を得るステップは、非対称アスペクト比を有するeビーム標的パッドを選択的に標的とするステップを含む、請求項1に記載のIC製作プロセス。
- 前記測定を得るステップは、標的にされた前記各eビームパッドから単一のピクセルの測定のみを得るステップを伴う、請求項1に記載のIC製作プロセス。
- 前記選択的に供するステップは、前記初期製作ステップのうちの1つ又は複数を再実行するかどうかを決定するステップを含む、請求項1に記載のIC製作プロセス。
- 前記選択的に供するステップは、前記追加の製作ステップを実施するかどうかを決定するステップを含む、請求項1に記載のIC製作プロセス。
- 少なくとも以下のステップ:
製品ICウェハを初期製作ステップに供するステップ;
前記ウェハ上に設けられた複数の試験構造体からeビーム励起測定を得るステップであって、細長主軸を有するeビームスポットを用いて、前記各試験構造体に関連するeビームパッドであって、複数の電気的に接続された細長い金属セグメントを備えた論理デバイスを含むeビームパッドを選択的に標的とする、前記測定を得るステップ;及び
前記試験構造体から得られた測定に少なくとも部分的に基づいて、前記ウェハを、追加の製作ステップに選択的に供するステップ
を含む、IC製作プロセス。 - 標的にされた前記各eビームパッドのサイズおよび形状に適合するように、前記各eビームスポットを成形することにより、走査効率を最大化する、請求項6に記載のIC製作プロセス。
- 標的にされた前記各eビームパッドは、前記eビームスポットの前記細長主軸に適合する、該eビームの走査方向の第1の寸法を有し、
標的にされた前記eビームパッドのうちの少なくともいくつかは、前記第1の寸法に対して垂直な第2の寸法が異なっている、請求項6に記載のIC製作プロセス。 - 標的にされた前記各eビームパッドは、直線状の走査ラインに沿って位置決めされ、
前記eビームスポットの前記細長主軸は、前記走査ラインに対して垂直に配向される、請求項6に記載のIC製作プロセス。 - 前記測定を得るステップは、標的にされた前記各eビームパッドから、10未満のピクセルの測定を得るステップを伴う、請求項6に記載のIC製作プロセス。
- 前記測定を得るステップは、標的にされた前記各eビームパッドから、単一のピクセルの測定のみを得るステップを伴う、請求項10に記載のIC製作プロセス。
- 前記選択的に供するステップは、前記初期製作ステップのうちの1つ又は複数を再実行するかどうかを決定するステップを含む、請求項6に記載のIC製作プロセス。
- 前記選択的に供するステップは、前記追加の製作ステップを実施するかどうかを決定するステップを含む、請求項6に記載のIC製作プロセス。
- 少なくとも以下のステップ:
製品ICウェハを初期製作ステップに供するステップ;
前記ウェハ上に設けられた複数の試験構造体からeビーム励起測定を得るステップであって、直線状走査方向に沿って、前記各試験構造体に関連するeビームパッドであって複数の電気的に接続された細長い金属セグメントを備えた論理デバイスを含むeビームパッドを選択的に標的とする、前記測定を得るステップ;及び
前記試験構造体から得られた測定に少なくとも部分的に基づいて、前記ウェハを、追加の製作ステップに選択的に供するステップ
を含む、IC製作プロセス。 - 標的にされた前記各eビームパッドは、サイズ及び形状が同一の少なくとも2つの前記細長い金属セグメントを有する、請求項14に記載のIC製作プロセス。
- 前記測定を得るステップは、標的にされた前記各eビームパッドから、10未満のピクセルの測定を得るステップを伴う、請求項14に記載のIC製作プロセス。
- 前記測定を得るステップは、標的にされた前記各eビームパッドから、単一のピクセルの測定のみを得るステップを伴う、請求項16に記載のIC製作プロセス。
- 前記測定を得るステップは、前記直線状走査方向に対して垂直に配向された細長主軸を有するeビームスポットを用いて、選択的に標的とするステップを伴う、請求項14に記載のIC製作プロセス。
- 前記選択的に供するステップは、前記初期製作ステップのうちの1つ又は複数を再実行するかどうかを決定するステップを含む、請求項14に記載のIC製作プロセス。
- 前記選択的に供するステップは、前記追加の製作ステップを実施するかどうかを決定するステップを含む、請求項14に記載のIC製作プロセス。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201462011161P | 2014-06-12 | 2014-06-12 | |
US201414303578A | 2014-06-12 | 2014-06-12 | |
US62/011,161 | 2014-06-12 | ||
US14/303,578 | 2014-06-12 | ||
PCT/US2015/035647 WO2015192069A1 (en) | 2014-06-12 | 2015-06-12 | Opportunistic placement of ic test structures and/or e-beam target pads in areas otherwise used for filler cells, tap cells, decap cells, scribe lines, and/or dummy fill, as well as product ic chips containing same |
Publications (2)
Publication Number | Publication Date |
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JP2017525160A JP2017525160A (ja) | 2017-08-31 |
JP6702955B2 true JP6702955B2 (ja) | 2020-06-03 |
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JP2017518035A Active JP6702955B2 (ja) | 2014-06-12 | 2015-06-12 | フィラーセル、タップセル、デキャップセル、スクライブライン及び/又はダミーフィル並びにこれらを内包する製品ICチップのために使用されるはずの領域への、IC試験構造体及び/又はeビーム標的パッドの日和見的配置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6702955B2 (ja) |
KR (1) | KR102474252B1 (ja) |
CN (1) | CN106575649A (ja) |
TW (1) | TW201611145A (ja) |
WO (1) | WO2015192069A1 (ja) |
Families Citing this family (20)
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US9799575B2 (en) | 2015-12-16 | 2017-10-24 | Pdf Solutions, Inc. | Integrated circuit containing DOEs of NCEM-enabled fill cells |
US10199283B1 (en) | 2015-02-03 | 2019-02-05 | Pdf Solutions, Inc. | Method for processing a semiconductor wager using non-contact electrical measurements indicative of a resistance through a stitch, where such measurements are obtained by scanning a pad comprised of at least three parallel conductive stripes using a moving stage with beam deflection to account for motion of the stage |
US9805994B1 (en) | 2015-02-03 | 2017-10-31 | Pdf Solutions, Inc. | Mesh-style NCEM pads, and process for making semiconductor dies, chips, and wafers using in-line measurements from such pads |
US10593604B1 (en) | 2015-12-16 | 2020-03-17 | Pdf Solutions, Inc. | Process for making semiconductor dies, chips, and wafers using in-line measurements obtained from DOEs of NCEM-enabled fill cells |
US10978438B1 (en) | 2015-12-16 | 2021-04-13 | Pdf Solutions, Inc. | IC with test structures and E-beam pads embedded within a contiguous standard cell area |
US9929063B1 (en) | 2016-04-04 | 2018-03-27 | Pdf Solutions, Inc. | Process for making an integrated circuit that includes NCEM-Enabled, tip-to-side gap-configured fill cells, with NCEM pads formed from at least three conductive stripes positioned between adjacent gates |
US9905553B1 (en) | 2016-04-04 | 2018-02-27 | Pdf Solutions, Inc. | Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least via-open-configured, AACNT-short-configured, GATECNT-short-configured, and metal-short-configured, NCEM-enabled fill cells |
US9653446B1 (en) | 2016-04-04 | 2017-05-16 | Pdf Solutions, Inc. | Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least via-open-configured, AACNT-short-configured, TS-short-configured, and AA-short-configured, NCEM-enabled fill cells |
US10283496B2 (en) * | 2016-06-30 | 2019-05-07 | Taiwan Semiconductor Manufacturing Co., Ltd. | Integrated circuit filler and method thereof |
US9748153B1 (en) | 2017-03-29 | 2017-08-29 | Pdf Solutions, Inc. | Process for making and using a semiconductor wafer containing first and second does of standard cell compatible, NCEM-enabled fill cells, with the first DOE including side-to-side short configured fill cells, and the second DOE including tip-to-side short configure |
US9773774B1 (en) | 2017-03-30 | 2017-09-26 | Pdf Solutions, Inc. | Process for making and using a semiconductor wafer containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including chamfer short configured fill cells, and the second DOE including corner short configured fill cells |
US9768083B1 (en) | 2017-06-27 | 2017-09-19 | Pdf Solutions, Inc. | Process for making and using a semiconductor wafer containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including merged-via open configured fill cells, and the second DOE including snake open configured fill cells |
US9786649B1 (en) | 2017-06-27 | 2017-10-10 | Pdf Solutions, Inc. | Process for making and using a semiconductor wafer containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including via open configured fill cells, and the second DOE including stitch open configured fill cells |
US10096530B1 (en) | 2017-06-28 | 2018-10-09 | Pdf Solutions, Inc. | Process for making and using a semiconductor wafer containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including merged-via open configured fill cells, and the second DOE including stitch open configured fill cells |
US9865583B1 (en) | 2017-06-28 | 2018-01-09 | Pdf Solutions, Inc. | Process for making and using a semiconductor wafer containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including snake open configured fill cells, and the second DOE including stitch open configured fill cells |
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-
2015
- 2015-06-12 JP JP2017518035A patent/JP6702955B2/ja active Active
- 2015-06-12 WO PCT/US2015/035647 patent/WO2015192069A1/en active Application Filing
- 2015-06-12 CN CN201580043425.3A patent/CN106575649A/zh active Pending
- 2015-06-12 KR KR1020177000797A patent/KR102474252B1/ko active IP Right Grant
- 2015-06-12 TW TW104119143A patent/TW201611145A/zh unknown
Also Published As
Publication number | Publication date |
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WO2015192069A1 (en) | 2015-12-17 |
TW201611145A (zh) | 2016-03-16 |
KR102474252B1 (ko) | 2022-12-05 |
CN106575649A (zh) | 2017-04-19 |
KR20170018027A (ko) | 2017-02-15 |
JP2017525160A (ja) | 2017-08-31 |
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