JP6662897B2 - 窒化クロムコーティングを有する金属ストリップ又はシート、バイポーラプレート及び関連する製造方法 - Google Patents
窒化クロムコーティングを有する金属ストリップ又はシート、バイポーラプレート及び関連する製造方法 Download PDFInfo
- Publication number
- JP6662897B2 JP6662897B2 JP2017549182A JP2017549182A JP6662897B2 JP 6662897 B2 JP6662897 B2 JP 6662897B2 JP 2017549182 A JP2017549182 A JP 2017549182A JP 2017549182 A JP2017549182 A JP 2017549182A JP 6662897 B2 JP6662897 B2 JP 6662897B2
- Authority
- JP
- Japan
- Prior art keywords
- coating layer
- substrate
- metal strip
- deposition
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 229910052751 metal Inorganic materials 0.000 title claims description 70
- 239000002184 metal Substances 0.000 title claims description 70
- CXOWYMLTGOFURZ-UHFFFAOYSA-N azanylidynechromium Chemical compound [Cr]#N CXOWYMLTGOFURZ-UHFFFAOYSA-N 0.000 title claims description 44
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 238000000576 coating method Methods 0.000 title description 13
- 239000011248 coating agent Substances 0.000 title description 12
- 239000011247 coating layer Substances 0.000 claims description 158
- 239000000758 substrate Substances 0.000 claims description 147
- 238000000151 deposition Methods 0.000 claims description 89
- 230000008021 deposition Effects 0.000 claims description 86
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 46
- 239000010410 layer Substances 0.000 claims description 45
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 41
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 38
- 238000000034 method Methods 0.000 claims description 33
- 229910001220 stainless steel Inorganic materials 0.000 claims description 33
- 239000010935 stainless steel Substances 0.000 claims description 32
- 238000002161 passivation Methods 0.000 claims description 25
- 239000011651 chromium Substances 0.000 claims description 24
- 229910052804 chromium Inorganic materials 0.000 claims description 17
- 238000005240 physical vapour deposition Methods 0.000 claims description 17
- 239000000446 fuel Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 11
- 230000003647 oxidation Effects 0.000 claims description 8
- 238000007254 oxidation reaction Methods 0.000 claims description 8
- 239000002245 particle Substances 0.000 claims description 7
- 238000004544 sputter deposition Methods 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 description 17
- 206010040844 Skin exfoliation Diseases 0.000 description 13
- 239000013078 crystal Substances 0.000 description 13
- 229910052757 nitrogen Inorganic materials 0.000 description 11
- 239000007789 gas Substances 0.000 description 10
- 239000012535 impurity Substances 0.000 description 9
- 239000001301 oxygen Substances 0.000 description 9
- 229910052760 oxygen Inorganic materials 0.000 description 9
- 238000009792 diffusion process Methods 0.000 description 7
- 238000001000 micrograph Methods 0.000 description 7
- 238000005520 cutting process Methods 0.000 description 6
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 5
- 238000005137 deposition process Methods 0.000 description 5
- 239000011261 inert gas Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 238000011109 contamination Methods 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 3
- 230000002411 adverse Effects 0.000 description 3
- 229910000423 chromium oxide Inorganic materials 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 239000003792 electrolyte Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000003345 natural gas Substances 0.000 description 3
- 238000010943 off-gassing Methods 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000003795 desorption Methods 0.000 description 2
- 238000004299 exfoliation Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000003917 TEM image Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 229910000963 austenitic stainless steel Inorganic materials 0.000 description 1
- SJKRCWUQJZIWQB-UHFFFAOYSA-N azane;chromium Chemical group N.[Cr] SJKRCWUQJZIWQB-UHFFFAOYSA-N 0.000 description 1
- 229910052729 chemical element Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005098 hot rolling Methods 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 238000009628 steelmaking Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/02—Details
- H01M8/0202—Collectors; Separators, e.g. bipolar separators; Interconnectors
- H01M8/0204—Non-porous and characterised by the material
- H01M8/0223—Composites
- H01M8/0228—Composites in the form of layered or coated products
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0068—Reactive sputtering characterised by means for confinement of gases or sputtered material, e.g. screens, baffles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/028—Physical treatment to alter the texture of the substrate surface, e.g. grinding, polishing
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
- C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/225—Oblique incidence of vaporised material on substrate
- C23C14/226—Oblique incidence of vaporised material on substrate in order to form films with columnar structure
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/548—Controlling the composition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
- C30B23/025—Epitaxial-layer growth characterised by the substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/38—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/02—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/02—Details
- H01M8/0202—Collectors; Separators, e.g. bipolar separators; Interconnectors
- H01M8/0204—Non-porous and characterised by the material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/02—Details
- H01M8/0202—Collectors; Separators, e.g. bipolar separators; Interconnectors
- H01M8/0204—Non-porous and characterised by the material
- H01M8/0206—Metals or alloys
- H01M8/0208—Alloys
- H01M8/021—Alloys based on iron
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/02—Details
- H01M8/0202—Collectors; Separators, e.g. bipolar separators; Interconnectors
- H01M8/0204—Non-porous and characterised by the material
- H01M8/0215—Glass; Ceramic materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/10—Fuel cells with solid electrolytes
- H01M2008/1095—Fuel cells with polymeric electrolytes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Sustainable Energy (AREA)
- Manufacturing & Machinery (AREA)
- Sustainable Development (AREA)
- Life Sciences & Earth Sciences (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Composite Materials (AREA)
- Crystallography & Structural Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Fuel Cell (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Photovoltaic Devices (AREA)
- Chemical Vapour Deposition (AREA)
Description
基材のステンレス鋼の自然酸化により形成された不動態層を表面上に含むステンレス鋼の基材を提供する工程と、
基材の少なくとも特定の領域において、不動態層を完全に剥離する剥離工程と、
不動態層が剥離された基材の領域上に窒化クロムを堆積して、不動態層の介在なく、ステンレス鋼の基材上に窒化クロムコーティング層を直接形成する工程であって、こうして形成されたコーティング層がテクスチャ加工されている工程と
を含む、金属ストリップ又はシートを製造するための方法に関する。
こうして形成されたコーティング層が、基材とエピタキシャル関係を有する。
剥離工程が物理的剥離である。
窒化クロムコーティング層が、物理気相堆積法を使用して、特にカソードスパッタリングによって堆積される。
堆積チャンバーと、堆積チャンバー内に配置されたクロムターゲットとを含む堆積設備において窒化クロムが基材上に堆積され、基材が、長手方向において堆積チャンバーを通過し、堆積チャンバーが、長手方向に沿って考えた場合に、堆積チャンバーの長さより短い長さを持つ堆積領域と、少なくとも、長手方向において堆積領域と隣接している第1禁止領域とを含み、堆積中に、堆積領域においてのみ窒化クロムが基材上に堆積され、第1禁止領域において窒化クロムが基材上に堆積されない。
上で説明したように、少なくとも1つのクロム系コーティング層5でコーティングされたステンレス鋼の基材3を含むプレート13を提供する工程と、
このプレート13を、別のプレート、有利には別の同様のプレート13に固定して、バイポーラプレート11を形成する工程と
を含む、金属ストリップ1からバイポーラプレート11を製造するための方法に関する。
金属ストリップ1を切断して、少なくとも1つのブランクを形成することと、
このブランクを、特にスタンピングによって変形して、プレート13を形成することとを含む。
Claims (20)
- 少なくとも1つの窒化クロム系コーティング層(5;5’)で被覆されたステンレス鋼から作られた基材(3;3’)を含む金属ストリップ(1;1’)又はシートであって、前記窒化クロム系コーティング層(5;5’)がテクスチャ加工されており、前記コーティング層(5’)が、物理気相堆積(PVD)により得られ、前記コーティング層(5’)が、表面上に、原子窒素含有量より少ない原子酸素含有量を含む表面領域(8)を有し、前記コーティング層(5’)が、前記基材(3’)との界面に、原子窒素含有量より少ない原子酸素含有量を含む界面領域(6)を含むことを特徴とする、金属ストリップ(1;1’)又はシート(ただし、少なくとも1つの窒化クロム系コーティング層上に導電性炭素層を含む金属ストリップ又はシートを除く)。
- 前記コーティング層(5;5’)が、前記基材(3;3’)とエピタキシャル関係を有する、請求項1に記載の金属ストリップ(1;1’)又はシート。
- 前記窒化クロム系コーティング層(5;5’)が、不動態層(10)の介在なく、ステンレス鋼の前記基材(3;3’)上に直接形成されている、請求項1又は2に記載の金属ストリップ(1;1’)又はシート。
- 前記基材(3;3’)が、75〜200マイクロメートルに含まれる厚さを有する、請求項1〜3のいずれか1項に記載の金属ストリップ(1;1’)又はシート。
- 前記基材(3;3’)の粒子が、50マイクロメートル未満のサイズを有する、請求項1〜4のいずれか1項に記載の金属ストリップ(1;1’)又はシート。
- 前記コーティング層(5;5’)がカラム構造を有する、請求項1〜5のいずれか1項に記載の金属ストリップ(1;1’)又はシート。
- 前記表面領域(8)が、前記コーティング層(5’)の全体厚さの15%以下の高さを有する、請求項1〜6のいずれか1項に記載の金属ストリップ(1;1’)又はシート。
- 前記界面領域(6)が、前記コーティング層(5;5’)の全体厚さの15%以下の高さを有する、請求項1〜7のいずれか1項に記載の金属ストリップ(1’)又はシート。
- 前記基材(3’)から出発して前記コーティング層(5’)の表面に向けて移動した場合に、前記界面領域(6)と、コア領域(7)と、前記表面領域(8)とからなり、かつ、前記領域(6、7、8)が、前記基材(3’)の平均平面と垂直な方向に沿って重ねられている、請求項1〜8のいずれか1項に記載の金属ストリップ(1’)又はシート。
- 請求項1〜9のいずれか1項に記載のストリップ(1;1’)又はシートを変形することによって得られたプレート(13)。
- 請求項10に記載の少なくとも1つのプレート(13)を含む、燃料電池のためのバイポーラプレート(11)。
- 以下の工程:
基材(3;3’)のステンレス鋼の自然酸化により形成された不動態層(10)を表面上に含むステンレス鋼の基材(3;3’)を提供する工程と、
前記基材(3;3’)の少なくとも特定の領域において、前記不動態層(10)を完全に剥離する剥離工程と、
前記不動態層(10)が剥離された前記基材(3;3’)の前記領域上に窒化クロムを堆積して、不動態層(10)の介在なく、ステンレス鋼の前記基材(3;3’)上に窒化クロム系コーティング層(5;5’)を直接形成する工程であって、形成された前記コーティング層(5;5)がテクスチャ加工されている工程と
を含む、請求項1〜11のいずれか1項に記載の金属ストリップ(1;1’)又はシートを製造するための方法。 - 得られた前記コーティング層(5;5’)が、前記基材(3;3’)とエピタキシャル関係を有する、請求項12に記載の方法。
- 前記剥離工程が物理的な剥離である、請求項12又は13に記載の方法。
- 堆積チャンバー(20)と、前記堆積チャンバー(20)内に配置されたクロムターゲット(22)とを含む堆積設備において、窒化クロムが前記基材(3’)上に堆積され、前記基材(3’)が長手方向において前記堆積チャンバー(20)を通過し、
前記堆積チャンバー(20)が、長手方向に沿って考えた場合に、前記堆積チャンバー(20)の長さより短い長さを持つ堆積領域(30;30’)と、少なくとも、長手方向において前記堆積領域(30;30’)と隣接している第1禁止領域(32)とを含み、
堆積中に、前記堆積領域(30;30’)においてのみ窒化クロムが前記基材(3’)上に堆積され、前記第1禁止領域(32)において窒化クロムが前記基材(3’)上に堆積されない、請求項12〜14のいずれか1項に記載の方法。 - 前記窒化クロム系コーティング層(5;5’)が、カソードスパッタリングによって堆積された、請求項1又は2に記載の金属ストリップ(1;1’)又はシート。
- 前記カラムの幅が、前記コーティング層(5;5’)の厚さの10〜20%に含まれる、請求項6に記載の金属ストリップ(1;1’)又はシート。
- 前記基材(3;3’)が、100マイクロメートル以下の厚さを有する、請求項4に記載の金属ストリップ(1;1’)又はシート。
- 前記基材(3;3’)の粒子が、10〜30マイクロメートルに含まれるサイズを有する、請求項5に記載の金属ストリップ(1;1’)又はシート。
- 前記窒化クロム系コーティング層(5;5’)が、カソードスパッタリングによって堆積される、請求項12〜14のいずれか1項に記載の方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/IB2015/052062 WO2016151358A1 (fr) | 2015-03-20 | 2015-03-20 | Bande ou feuille métallique présentant un revêtement à base de nitrure de chrome, plaque bipolaire et procédé de fabrication associé |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018514647A JP2018514647A (ja) | 2018-06-07 |
JP6662897B2 true JP6662897B2 (ja) | 2020-03-11 |
Family
ID=52829249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017549182A Active JP6662897B2 (ja) | 2015-03-20 | 2015-03-20 | 窒化クロムコーティングを有する金属ストリップ又はシート、バイポーラプレート及び関連する製造方法 |
Country Status (11)
Country | Link |
---|---|
US (1) | US20180047998A1 (ja) |
EP (1) | EP3271493B1 (ja) |
JP (1) | JP6662897B2 (ja) |
KR (1) | KR102336207B1 (ja) |
CN (1) | CN107406961A (ja) |
BR (1) | BR112017019895A2 (ja) |
CA (1) | CA2979099A1 (ja) |
MX (1) | MX2017012154A (ja) |
RU (1) | RU2698243C2 (ja) |
UA (1) | UA118513C2 (ja) |
WO (1) | WO2016151358A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102016106679A1 (de) * | 2016-04-12 | 2017-10-12 | Thyssenkrupp Ag | Vorrichtung und Verfahren zur Herstellung eines korrosionsgeschützten Stahlprodukts |
MX2019010310A (es) | 2017-03-03 | 2019-10-21 | Thyssenkrupp Steel Europe Ag | Material compuesto para un paquete de estator y de rotor. |
WO2019086939A1 (fr) | 2017-11-06 | 2019-05-09 | Aperam | Plaque bipolaire pour l'assemblage des éléments d'une unité de pile à combustible et son procédé de fabrication, unité de pile à combustible la comportant et pile à combustible comportant cette unité |
KR20200111242A (ko) | 2018-01-29 | 2020-09-28 | 아뻬랑 | 연료 전지 단위 요소용 양극판, 상기 양극판의 제조 방법, 이를 포함하는 연료 전지 단위, 및 상기 단위를 포함하는 연료 전지 |
CN111933965A (zh) * | 2020-07-24 | 2020-11-13 | 苏州敦胜新能源科技有限公司 | 一种高温燃料电池双极板抗氧化镀层 |
CN112952130B (zh) * | 2021-03-12 | 2023-08-29 | 大连交通大学 | 一种表面具有铬氮化物功能涂层的金属双极板及其制备方法 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5709938A (en) * | 1991-11-29 | 1998-01-20 | Ppg Industries, Inc. | Cathode targets of silicon and transition metal |
JP3498077B2 (ja) * | 2001-10-10 | 2004-02-16 | 日本金属工業株式会社 | 固体高分子電解質型燃料電池用セパレータ |
DE10248962B4 (de) * | 2002-10-21 | 2007-10-25 | THEVA DüNNSCHICHTTECHNIK GMBH | Verfahren zur Herstellung einer Hochtemperatur-Supraleiterschicht |
US7247403B2 (en) * | 2004-04-21 | 2007-07-24 | Ut-Battelle, Llc | Surface modified stainless steels for PEM fuel cell bipolar plates |
US8387228B2 (en) * | 2004-06-10 | 2013-03-05 | Ati Properties, Inc. | Clad alloy substrates and method for making same |
FR2890785A1 (fr) * | 2005-09-15 | 2007-03-16 | Batscap Sa | Dispositif de stockage d'energie electrique comprenant une couche barriere de protection du collecteur |
US7934765B2 (en) * | 2006-09-08 | 2011-05-03 | Dr. Ing. H.C. F. Porsche Aktiengesellschaft | Top for a convertible |
JP5319295B2 (ja) * | 2006-11-14 | 2013-10-16 | 株式会社リケン | 窒化クロムイオンプレーティング皮膜及びその製造方法並びに内燃機関用ピストンリング |
CN101092688A (zh) * | 2007-05-28 | 2007-12-26 | 大连理工大学 | 质子交换膜燃料电池不锈钢双极板离子镀膜改性方法 |
KR100791274B1 (ko) * | 2007-06-20 | 2008-01-04 | 현대하이스코 주식회사 | 금속층/금속질화물층과 금속산질화물층을 포함하는 연료전지용 스테인리스 |
JP5560533B2 (ja) | 2008-03-27 | 2014-07-30 | Jfeスチール株式会社 | 固体高分子形燃料電池セパレータ用ステンレス鋼およびそれを用いた固体高分子形燃料電池 |
JP2010001565A (ja) * | 2008-05-20 | 2010-01-07 | Canon Anelva Corp | スパッタリング装置、それを用いた太陽電池及び画像表示装置の製造方法 |
KR101000697B1 (ko) * | 2008-07-17 | 2010-12-10 | 현대자동차주식회사 | 연료전지용 금속분리판 및 이의 표면층 형성 방법 |
JP5391855B2 (ja) * | 2009-06-15 | 2014-01-15 | 日産自動車株式会社 | 導電部材、その製造方法、並びにこれを用いた燃料電池用セパレータおよび固体高分子形燃料電池 |
KR20130079555A (ko) * | 2010-10-06 | 2013-07-10 | 가부시키가이샤 알박 | 진공 처리 장치 |
KR101273936B1 (ko) * | 2011-08-12 | 2013-06-11 | 한국과학기술연구원 | 내산화성 페라이트계 스테인리스강, 그 제조 방법 및 이를 사용한 연료 전지 접속자 |
CN102958311A (zh) * | 2011-08-25 | 2013-03-06 | 深圳富泰宏精密工业有限公司 | 装饰性外壳及其制作方法 |
GB201203219D0 (en) * | 2012-02-24 | 2012-04-11 | Teer Coatings Ltd | Coating with conductive and corrosion resistance characteristics |
CN102931421B (zh) * | 2012-11-06 | 2015-01-28 | 上海交通大学 | 带有导电耐腐蚀镀层的燃料电池金属双极板及其制备方法 |
KR101446411B1 (ko) * | 2013-01-22 | 2014-10-07 | (주)제이 앤 엘 테크 | 스테인레스스틸을 모재로 한 내식성 및 전도성 나노 카본 코팅 방법 및 그에 따른 연료전지분리판 |
-
2015
- 2015-03-20 RU RU2017132486A patent/RU2698243C2/ru active
- 2015-03-20 CN CN201580078004.4A patent/CN107406961A/zh active Pending
- 2015-03-20 KR KR1020177026567A patent/KR102336207B1/ko active IP Right Grant
- 2015-03-20 UA UAA201709234A patent/UA118513C2/uk unknown
- 2015-03-20 WO PCT/IB2015/052062 patent/WO2016151358A1/fr active Application Filing
- 2015-03-20 EP EP15716141.5A patent/EP3271493B1/fr active Active
- 2015-03-20 MX MX2017012154A patent/MX2017012154A/es unknown
- 2015-03-20 US US15/559,746 patent/US20180047998A1/en not_active Abandoned
- 2015-03-20 CA CA2979099A patent/CA2979099A1/fr not_active Abandoned
- 2015-03-20 BR BR112017019895-9A patent/BR112017019895A2/pt not_active Application Discontinuation
- 2015-03-20 JP JP2017549182A patent/JP6662897B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
KR20170129763A (ko) | 2017-11-27 |
JP2018514647A (ja) | 2018-06-07 |
RU2017132486A3 (ja) | 2019-03-18 |
EP3271493A1 (fr) | 2018-01-24 |
WO2016151358A1 (fr) | 2016-09-29 |
RU2017132486A (ru) | 2019-03-18 |
CN107406961A (zh) | 2017-11-28 |
KR102336207B1 (ko) | 2021-12-08 |
US20180047998A1 (en) | 2018-02-15 |
BR112017019895A2 (pt) | 2018-06-05 |
MX2017012154A (es) | 2018-02-09 |
UA118513C2 (uk) | 2019-01-25 |
RU2698243C2 (ru) | 2019-08-23 |
EP3271493B1 (fr) | 2021-03-03 |
CA2979099A1 (fr) | 2016-09-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6662897B2 (ja) | 窒化クロムコーティングを有する金属ストリップ又はシート、バイポーラプレート及び関連する製造方法 | |
KR101077046B1 (ko) | 신규한 금속 스트립 제품 | |
CN107210457B (zh) | 用于低温固体氧化物燃料电池的互连件 | |
US8338058B2 (en) | Separator for fuel cell having intermediate layer and method for manufacturing same | |
KR101302381B1 (ko) | 페로브스카이트 또는 스피넬 표면 코팅을 갖는 전기접촉자용 스트립 제품 | |
US8088536B2 (en) | Fuel cell separator and method for manufacturing the same | |
Tian | Chromium nitride/Cr coated 316L stainless steel as bipolar plate for proton exchange membrane fuel cell | |
JP2007523997A (ja) | 新規な金属ストリップ材料 | |
JP6510672B2 (ja) | 金属ストリップ、バイポーラプレート、及び関連する製造方法 | |
Goebel et al. | Self-healing properties of Ce/Co-coated stainless steel under simulated intermediate temperature solid oxide fuel cell conditions | |
JP2007323988A (ja) | 燃料電池用金属セパレータ、燃料電池用金属セパレータの製造方法及び燃料電池 | |
JP2018006300A (ja) | 燃料電池用金属セパレータ及びこれを用いた燃料電池 | |
Kim et al. | Titanium oxynitride films for a bipolar plate of polymer electrolyte membrane fuel cell prepared by inductively coupled plasma assisted reactive sputtering | |
KR20200092977A (ko) | 연료 전지 유닛의 요소를 조립하기 위한 양극판 및 양극판을 제조하기 위한 방법, 양극판을 포함하는 연료 전지 유닛 및 상기 유닛을 포함하는 연료 전지 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180220 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180220 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20180907 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20181016 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20190115 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190219 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190604 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190904 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200114 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200213 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6662897 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |