JP6628544B2 - 配線基板の製造方法 - Google Patents
配線基板の製造方法 Download PDFInfo
- Publication number
- JP6628544B2 JP6628544B2 JP2015199256A JP2015199256A JP6628544B2 JP 6628544 B2 JP6628544 B2 JP 6628544B2 JP 2015199256 A JP2015199256 A JP 2015199256A JP 2015199256 A JP2015199256 A JP 2015199256A JP 6628544 B2 JP6628544 B2 JP 6628544B2
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- Prior art keywords
- layer
- conductor
- laminated sheet
- forming
- conductor pattern
- Prior art date
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- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
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- FFQALBCXGPYQGT-UHFFFAOYSA-N 2,4-difluoro-5-(trifluoromethyl)aniline Chemical compound NC1=CC(C(F)(F)F)=C(F)C=C1F FFQALBCXGPYQGT-UHFFFAOYSA-N 0.000 description 1
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- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
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- H01L21/486—Via connections through the substrate with or without pins
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- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
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- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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Description
図1〜図15は、本実施形態に係る配線基板の製造途中の断面図である。
図20は、本実施形態に係る配線基板の断面図である。
図21は、本実施形態に係る配線基板の断面図である。
前記第1の導体パターンが複数の領域に分割されたことを特徴とする配線基板。
前記第2の導体パターン側の前記積層シートの上に形成され、第2の配線層と第2の絶縁層の一方を少なくとも一層以上備えた第2の多層配線層と、
前記第1の多層配線層における前記第1の配線層のいずれかと、前記積層シートの前記第1の導体パターンとを接続する第1のビア導電体と、
前記第2の多層配線層における前記第2の配線層のいずれかと、前記積層シートの前記第1の導体パターンとを接続する第2のビア導電体と、
前記第1の多層配線層における前記第1の配線層のいずれかと、前記積層シートの前記第2の導体パターンとを接続する第3のビア導電体と、
前記第2の多層配線層における前記第2の配線層のいずれかと、前記積層シートの前記第2の導体パターンとを接続する第4のビア導電体とを有し、
前記第1のビア導電体と前記第2のビア導電体との間に前記第1の導体パターンが介在し、
前記第3のビア導電体と前記第4のビア導電体との間に前記第2の導体パターンが介在することを特徴とする付記1又は付記2に記載の配線基板。
前記第2のビア導電体は、前記第2の導体パターン側に設けられた回路基板の第2の電源端子と電気的に接続され、
前記第3のビア導電体は、前記半導体素子の第1のグランド端子と電気的に接続され、
前記第4のビア導電体は、前記回路基板の第2のグランド端子と電気的に接続されたことを特徴とする付記3に記載の配線基板。
前記第4のビア導電体が前記導体層と接続されたことを特徴とする付記3乃至付記6のいずれかに記載の配線基板。
前記無機誘電体層の材料は、チタン酸バリウム、チタン酸ストロンチウム、チタン酸ジルコン酸鉛、チタン酸ジルコン酸ランタン鉛、チタン酸ジルコン酸ニオブ鉛、チタン酸ジルコン酸カルシウム鉛、チタン酸ジルコン酸ストロンチウム鉛、及び酸化タンタルのいずれかであることを特徴とする付記1乃至付記8のいずれかに記載の配線基板。
前記導体層の前記表面の上に前記無機誘電体層が形成されたことを特徴とする付記1乃至付記9のいずれかに記載の配線基板。
支持基板の表面に設けられた樹脂層に、前記積層シートの前記第1の導体パターン側を貼付する工程と、
前記積層シートを貼付した後、前記積層シートの前記第2の導体層をパターニングして第2の導体パターンにする工程と、
前記第2の導体パターンを形成した後、前記支持基板から前記積層シートを剥離する工程と、
を有することを特徴とする配線基板の製造方法。
前記第1の導体パターンの上の前記第1の絶縁層と前記無機誘電体層とに第1のビアホールを形成する工程と、
前記第1のビアホールに、前記第1の導体パターンに接続された第1のビア導電体を形成する工程とを更に有することを特徴とする付記12に記載の配線基板の製造方法。
前記第2のビアホールに、前記第2の導体パターンに接続された第2のビア導電体を形成する工程を更に有することを特徴とする付記13に記載の配線基板の製造方法。
前記第1の多層配線層の最上層に第1のソルダレジスト層を形成する工程とを更に有することを特徴とする付記12乃至付記15のいずれかに記載の配線基板の製造方法。
前記第2の導体パターンの上の前記第2の絶縁層と前記無機誘電体層とに第3のビアホールを形成する工程と、
前記第3のビアホールに、前記第2の導体パターンに接続された第3のビア導電体を形成する工程とを更に有することを特徴とする付記12乃至付記16のいずれかに記載の配線基板の製造方法。
前記第4のビアホールに、前記第1の導体パターンに接続された第4のビア導電体を形成する工程を更に有することを特徴とする付記17に記載の配線基板の製造方法。
前記第2の多層配線層の最上層に第2のソルダレジスト層を形成する工程とを更に有することを特徴とする付記17又は付記18に記載の配線基板の製造方法。
前記樹脂層の上に熱硬化性樹脂の被覆層を形成し、前記樹脂層と前記被覆層とを前記第2の絶縁層にする工程と、
前記被覆層を加熱することにより、前記熱硬化性樹脂を途中まで硬化させる工程と、
前記熱硬化性樹脂を途中まで硬化させた後、前記被覆層の表層部分をエッチングすることにより、前記被覆層の表面に凹凸を形成する工程とを更に有することを特徴とする付記17乃至付記19のいずれかに記載の配線基板の製造方法。
Claims (6)
- 第1の導体層、無機誘電体層、及び第2の導体層が順に積層された積層シートのうち、前記第1の導体層をパターニングして複数の領域に分割された第1の導体パターンにする工程と、
支持基板の表面に設けられた樹脂層に、前記積層シートの前記第1の導体パターン側を貼付する工程と、
前記積層シートを貼付した後、前記積層シートの前記第2の導体層をパターニングして複数の領域に分割されていない第2の導体パターンにする工程と、
前記第2の導体パターンを形成した後、前記支持基板から前記積層シートを剥離する工程と、
を有し、
前記第2の導体パターンは、前記第1の導体パターンよりもヤング率が高いことを特徴とする配線基板の製造方法。 - 前記支持基板から前記積層シートを剥離する前に、前記第2の導体パターンの上に第1の絶縁層を形成する工程と、
前記第1の導体パターンの上の前記第1の絶縁層と前記無機誘電体層とに第1のビアホールを形成する工程と、
前記第1のビアホールに、前記第1の導体パターンに接続された第1のビア導電体を形成する工程とを更に有することを特徴とする請求項1に記載の配線基板の製造方法。 - 前記第1の絶縁層と第1の配線層の各々が少なくとも一層以上積層された第1の多層配線層を前記第1のビア導電体の上に形成する工程と、
前記第1の多層配線層の最上層に第1のソルダレジスト層を形成する工程とを更に有することを特徴とする請求項2に記載の配線基板の製造方法。 - 前記支持基板から前記積層シートを剥離した後、前記第1の導体パターンの上に第2の絶縁層を形成する工程と、
前記第2の導体パターンの上の前記第2の絶縁層と前記無機誘電体層とに第3のビアホールを形成する工程と、
前記第3のビアホールに、前記第2の導体パターンに接続された第3のビア導電体を形成する工程とを更に有することを特徴とする請求項1乃至請求項3のいずれか1項に記載の配線基板の製造方法。 - 第1の導体層、無機誘電体層、及び第2の導体層が順に積層された積層シートのうち、前記第1の導体層をパターニングして第1の導体パターンにする工程と、
支持基板の表面に設けられた樹脂層に、前記積層シートの前記第1の導体パターン側を貼付する工程と、
前記積層シートを貼付した後、前記積層シートの前記第2の導体層をパターニングして第2の導体パターンにする工程と、
前記第2の導体パターンの上に第1の絶縁層を形成する工程と、
前記第1の導体パターンの上の前記第1の絶縁層と前記無機誘電体層とに第1のビアホールを形成する工程と、
前記第1のビアホールに、前記第1の導体パターンに接続された第1のビア導電体を形成する工程と、
前記第1のビア導電体を形成した後、前記支持基板から前記積層シートを剥離する工程と、
前記支持基板から前記積層シートを剥離した後、前記第1の導体パターンの上に第2の絶縁層を形成する工程と、
前記第2の導体パターンの上の前記第2の絶縁層と前記無機誘電体層とに第3のビアホールを形成する工程と、
前記第3のビアホールに、前記第2の導体パターンに接続された第3のビア導電体を形成する工程と、
を有することを特徴とする配線基板の製造方法。 - 前記第1の絶縁層と第1の配線層の各々が少なくとも一層以上積層された第1の多層配線層を前記第1のビア導電体の上に形成する工程と、
前記第1の多層配線層の最上層に第1のソルダレジスト層を形成する工程とを更に有することを特徴とする請求項5に記載の配線基板の製造方法。
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