JP6592941B2 - 単結晶引き上げ用種結晶保持具及びこれを用いたシリコン単結晶の製造方法 - Google Patents
単結晶引き上げ用種結晶保持具及びこれを用いたシリコン単結晶の製造方法 Download PDFInfo
- Publication number
- JP6592941B2 JP6592941B2 JP2015079864A JP2015079864A JP6592941B2 JP 6592941 B2 JP6592941 B2 JP 6592941B2 JP 2015079864 A JP2015079864 A JP 2015079864A JP 2015079864 A JP2015079864 A JP 2015079864A JP 6592941 B2 JP6592941 B2 JP 6592941B2
- Authority
- JP
- Japan
- Prior art keywords
- seed crystal
- crystal holder
- carbon fiber
- cylindrical
- core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/32—Seed holders, e.g. chucks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/71—Ceramic products containing macroscopic reinforcing agents
- C04B35/78—Ceramic products containing macroscopic reinforcing agents containing non-metallic materials
- C04B35/80—Fibres, filaments, whiskers, platelets, or the like
- C04B35/83—Carbon fibres in a carbon matrix
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/007—Pulling on a substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/52—Constituents or additives characterised by their shapes
- C04B2235/5208—Fibers
- C04B2235/5268—Orientation of the fibers
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/38—Fiber or whisker reinforced
- C04B2237/385—Carbon or carbon composite
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/76—Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc
- C04B2237/765—Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc at least one member being a tube
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/84—Joining of a first substrate with a second substrate at least partially inside the first substrate, where the bonding area is at the inside of the first substrate, e.g. one tube inside another tube
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Ceramic Engineering (AREA)
- Metallurgy (AREA)
- Crystallography & Structural Chemistry (AREA)
- Composite Materials (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Structural Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Ceramic Products (AREA)
Description
8f 炭素繊維
9 種結晶
9a 種結晶の上部
9b 種結晶のテーパー部
9c 種結晶の下部
9d 種結晶の下端部
10a 円筒上部
10b 円筒中間部
10c 円筒下部
10d ねじ溝
10f 炭素繊維
10f1 炭素繊維の周方向の繊維成分
10f2 炭素繊維の軸方向と平行な繊維成分
10h 中空部
11 コア部
11f 炭素繊維
12 クラッド部
12f 炭素繊維
12f1 炭素繊維の周方向の繊維成分
12f2 炭素繊維の軸方向と平行な繊維成分
20 シリコン単結晶引き上げ装置
21 チャンバー
22 断熱材
23 石英ルツボ
24 サセプタ
25 回転支持軸
26 ヒーター
27 熱遮蔽体
28 単結晶引き上げ用ワイヤー
29 ワイヤー巻き取り機構
30 種結晶保持具
31 シリコン融液
32 シリコン単結晶
Claims (9)
- 炭素繊維強化炭素複合材料からなり、略棒状の種結晶の外形に合致する形状の中空部を有する略円筒状の単結晶引き上げ用種結晶保持具であって、
少なくとも種結晶の外周面と接触する部分の炭素繊維の方向が前記中空部の中心軸から見て等方性を有し、
前記種結晶の外周面と接触する部分以外の部分の炭素繊維の方向が前記中空部の中心軸から見て異方性を有することを特徴とする種結晶保持具。 - 炭素繊維強化炭素複合材料からなり、略棒状の種結晶の外形に合致する形状の中空部を有する略円筒状の単結晶引き上げ用種結晶保持具であって、
炭素繊維の方向が前記中空部の中心軸から見て等方性を有するコア部と、
炭素繊維の方向が前記中空部の中心軸から見て異方性を有するクラッド部とを有し、
前記コア部は、少なくとも前記種結晶の外周面と接触する部分に設けられていることを特徴とする種結晶保持具。 - 前記コア部の炭素繊維の方向が周方向成分を有する、請求項2に記載の種結晶保持具。
- 前記コア部の炭素繊維の方向が前記中心軸と平行な成分を有する、請求項3に記載の種結晶保持具。
- 第1の口径を有する円筒上部と、
前記円筒上部の下方に位置し、前記第1の口径から第2の口径まで徐々に縮径した円筒中間部と、
前記円筒中間部の下方に位置し、前記第2の口径を有する円筒下部とを有し、
前記コア部は、少なくとも前記円筒中間部の内周側領域に設けられており、
前記クラッド部は、前記コア部の形成領域以外の領域に設けられている、請求項2乃至4のいずれか一項に記載の種結晶保持具。 - 前記コア部は、前記円筒中間部及び前記円筒下部に設けられており、
前記クラッド部は、前記円筒上部に設けられている、請求項5に記載の種結晶保持具。 - 前記コア部は、前記円筒上部、前記円筒中間部及び前記円筒下部の前記内周側領域に設けられており、 前記クラッド部は、前記円筒上部、前記円筒中間部及び前記円筒下部の外周側領域に設けられている、請求項5に記載の種結晶保持具。
- 前記コア部は前記クラッド部に対して着脱自在に設けられている請求項2乃至4のいずれか一項に記載の種結晶保持具。
- 請求項1乃至8のいずれか一項に記載の種結晶保持具を用いて直径450mm以上のシリコン単結晶をCZ法により引き上げることを特徴とするシリコン単結晶の製造方法。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015079864A JP6592941B2 (ja) | 2015-04-09 | 2015-04-09 | 単結晶引き上げ用種結晶保持具及びこれを用いたシリコン単結晶の製造方法 |
CN201680020784.1A CN107429422B (zh) | 2015-04-09 | 2016-02-18 | 单晶提拉用晶种保持器及使用该装置的硅单晶的制造方法 |
KR1020177030409A KR101988655B1 (ko) | 2015-04-09 | 2016-02-18 | 단결정 인상용 시드 결정 유지구 및 이를 이용한 실리콘 단결정의 제조 방법 |
CN201911030127.7A CN110804760B (zh) | 2015-04-09 | 2016-02-18 | 单晶提拉用晶种保持器及使用该装置的硅单晶的制造方法 |
US15/564,080 US10385473B2 (en) | 2015-04-09 | 2016-02-18 | Seed crystal holder for pulling up single crystal and method of manufacturing silicon single crystal using the same |
PCT/JP2016/054653 WO2016163161A1 (ja) | 2015-04-09 | 2016-02-18 | 単結晶引き上げ用種結晶保持具及びこれを用いたシリコン単結晶の製造方法 |
US16/502,383 US10822717B2 (en) | 2015-04-09 | 2019-07-03 | Seed crystal holder for pulling up single crystal and method of manufacturing silicon single crystal using the same |
US17/039,060 US11371160B2 (en) | 2015-04-09 | 2020-09-30 | Seed crystal holder for pulling up single crystal and method of manufacturing silicon single crystal using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015079864A JP6592941B2 (ja) | 2015-04-09 | 2015-04-09 | 単結晶引き上げ用種結晶保持具及びこれを用いたシリコン単結晶の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016199420A JP2016199420A (ja) | 2016-12-01 |
JP6592941B2 true JP6592941B2 (ja) | 2019-10-23 |
Family
ID=57072606
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015079864A Active JP6592941B2 (ja) | 2015-04-09 | 2015-04-09 | 単結晶引き上げ用種結晶保持具及びこれを用いたシリコン単結晶の製造方法 |
Country Status (5)
Country | Link |
---|---|
US (3) | US10385473B2 (ja) |
JP (1) | JP6592941B2 (ja) |
KR (1) | KR101988655B1 (ja) |
CN (2) | CN107429422B (ja) |
WO (1) | WO2016163161A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108203842A (zh) * | 2016-12-20 | 2018-06-26 | 深圳市晶格材料科技有限公司 | 一种晶体生长用易装配低成本籽晶夹头 |
WO2021072239A1 (en) * | 2019-10-09 | 2021-04-15 | Gcl Solar Materials Us Iii, Llc | Method, system and apparatus for growing hollow core silicon single crystals |
CN111826711A (zh) * | 2020-08-21 | 2020-10-27 | 陕西美兰德炭素有限责任公司 | 一种单晶炉用碳碳复合材料籽晶夹头 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2937113B2 (ja) * | 1996-03-15 | 1999-08-23 | 住友金属工業株式会社 | 種結晶保持具 |
JP4358313B2 (ja) * | 1996-05-01 | 2009-11-04 | 東洋炭素株式会社 | 半導体単結晶引き上げ装置のシードチャック |
JP2937120B2 (ja) * | 1996-05-31 | 1999-08-23 | 住友金属工業株式会社 | 単結晶引き上げ用種結晶保持具 |
US6015461A (en) * | 1997-09-12 | 2000-01-18 | Sumitomo Sitix Corporation | Seed crystal holders, for pulling a single crystal |
US6139632A (en) * | 1997-09-15 | 2000-10-31 | Sumitomo Sitix Corporation | Seed crystals, seed crystal holders, and a method for pulling a single crystal |
JP3980136B2 (ja) | 1997-10-20 | 2007-09-26 | Sumco Techxiv株式会社 | 単結晶製造装置及び単結晶製造方法 |
JP3402192B2 (ja) | 1998-04-15 | 2003-04-28 | 信越半導体株式会社 | シリコン単結晶の製造方法および種結晶ならびに種結晶保持具 |
JP5239265B2 (ja) * | 2007-09-07 | 2013-07-17 | 株式会社Sumco | シリコン単結晶引上げ用種結晶及び該種結晶を使用したシリコン単結晶の製造方法 |
KR20090046301A (ko) * | 2007-11-05 | 2009-05-11 | 삼성전기주식회사 | 단결정 기판 제조방법 및 이를 이용한 태양전지 제조방법 |
JP2011010394A (ja) | 2009-06-23 | 2011-01-13 | Sanyo Electric Co Ltd | ドライバ回路 |
CN102057083B (zh) * | 2009-07-21 | 2013-09-11 | 丰田自动车株式会社 | 使用熔液法的单晶生长用籽晶轴 |
CN102492983A (zh) * | 2011-12-22 | 2012-06-13 | 浙江金瑞泓科技股份有限公司 | 用于直拉硅单晶生长的晶种夹头 |
-
2015
- 2015-04-09 JP JP2015079864A patent/JP6592941B2/ja active Active
-
2016
- 2016-02-18 US US15/564,080 patent/US10385473B2/en active Active
- 2016-02-18 KR KR1020177030409A patent/KR101988655B1/ko active IP Right Grant
- 2016-02-18 WO PCT/JP2016/054653 patent/WO2016163161A1/ja active Application Filing
- 2016-02-18 CN CN201680020784.1A patent/CN107429422B/zh active Active
- 2016-02-18 CN CN201911030127.7A patent/CN110804760B/zh active Active
-
2019
- 2019-07-03 US US16/502,383 patent/US10822717B2/en active Active
-
2020
- 2020-09-30 US US17/039,060 patent/US11371160B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20210010156A1 (en) | 2021-01-14 |
CN110804760A (zh) | 2020-02-18 |
US20180135201A1 (en) | 2018-05-17 |
CN107429422A (zh) | 2017-12-01 |
KR20170130521A (ko) | 2017-11-28 |
CN110804760B (zh) | 2021-08-03 |
US11371160B2 (en) | 2022-06-28 |
US10385473B2 (en) | 2019-08-20 |
CN107429422B (zh) | 2019-10-29 |
JP2016199420A (ja) | 2016-12-01 |
US20190323144A1 (en) | 2019-10-24 |
WO2016163161A1 (ja) | 2016-10-13 |
US10822717B2 (en) | 2020-11-03 |
KR101988655B1 (ko) | 2019-06-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US11371160B2 (en) | Seed crystal holder for pulling up single crystal and method of manufacturing silicon single crystal using the same | |
EP2098619A1 (en) | Crucible holding member and method for producing the same | |
EP2206810B1 (en) | Crucible holding member and method for producing the same | |
EP2123800B1 (en) | Crucible holding member and method for producing the same | |
EP2098617A1 (en) | Crucible holding member and method for producing the same | |
EP2098618A1 (en) | Container holding member and method for producing the same | |
JP2012254916A (ja) | 炭素繊維強化炭素複合円筒部材及び炭素繊維強化炭素複合円筒部材の製造方法、並びに炭素繊維強化炭素複合材ルツボ及びこのルツボの製造方法 | |
JP3198914B2 (ja) | 単結晶引き上げ用黒鉛ルツボ及びその製造方法 | |
JPH11255587A (ja) | 単結晶引き上げ用炭素繊維強化炭素材るつぼおよびその製造方法 | |
JPH09315883A (ja) | 単結晶引き上げ用種結晶保持具 | |
JP3734004B2 (ja) | シリコン単結晶引上げ用黒鉛ルツボ | |
JPH09315884A (ja) | 単結晶引き上げ用種結晶保持具及び種結晶 | |
JP2000072588A (ja) | 単結晶引き上げ用炭素ルツボ | |
JP2012076956A (ja) | 炭素ルツボ及びこの炭素ルツボを用いたシリコン単結晶の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20171115 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190205 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190313 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20190827 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20190909 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6592941 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |