JP6588557B2 - フェムト秒紫外線レーザー - Google Patents
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- 230000003287 optical effect Effects 0.000 claims description 97
- 238000000034 method Methods 0.000 claims description 37
- 239000000463 material Substances 0.000 claims description 10
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims description 5
- BRZHTGSJWOHHEQ-UHFFFAOYSA-N [Ge]=O.[Ba].[La] Chemical compound [Ge]=O.[Ba].[La] BRZHTGSJWOHHEQ-UHFFFAOYSA-N 0.000 claims description 5
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 5
- 239000000395 magnesium oxide Substances 0.000 claims description 5
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 5
- 230000000737 periodic effect Effects 0.000 claims description 3
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- XBJJRSFLZVLCSE-UHFFFAOYSA-N barium(2+);diborate Chemical compound [Ba+2].[Ba+2].[Ba+2].[O-]B([O-])[O-].[O-]B([O-])[O-] XBJJRSFLZVLCSE-UHFFFAOYSA-N 0.000 description 2
- VCZFPTGOQQOZGI-UHFFFAOYSA-N lithium bis(oxoboranyloxy)borinate Chemical compound [Li+].[O-]B(OB=O)OB=O VCZFPTGOQQOZGI-UHFFFAOYSA-N 0.000 description 2
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- 239000004065 semiconductor Substances 0.000 description 1
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- 239000013077 target material Substances 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/355—Non-linear optics characterised by the materials used
- G02F1/3551—Crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
- H01S3/109—Frequency multiplication, e.g. harmonic generation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/3534—Three-wave interaction, e.g. sum-difference frequency generation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/3544—Particular phase matching techniques
- G02F1/3548—Quasi phase matching [QPM], e.g. using a periodic domain inverted structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/37—Non-linear optics for second-harmonic generation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/16—Solid materials
- H01S3/163—Solid materials characterised by a crystal matrix
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/16—Solid materials
- H01S3/1688—Stoichiometric laser compounds, i.e. in which the active element forms one component of a stoichiometric formula rather than being merely a dopant
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/354—Third or higher harmonic generation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/16—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 series; tandem
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/20—LiNbO3, LiTaO3
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- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Lasers (AREA)
Description
Claims (16)
- フェムト秒紫外線レーザーパルスを生成する方法であって、
レーザー源からの第1レーザーパルスを非線形光学結晶に対して導波するステップであって、前記第1レーザーパルスは、電磁スペクトルの近赤外線部分内の基本波長を有し、前記第1レーザーパルスは、1000フェムト秒未満のパルス持続時間を有する、ステップと、
前記非線形光学結晶内において第2レーザーパルスを生成するべく、前記非線形光学結晶の第1部分において、前記第1レーザーパルスの少なくともいくつかの光子を前記基本波長の第2高調波波長に変換するステップと、
前記非線形光学結晶内において第3レーザーパルスを生成するべく、前記非線形光学結晶の第2部分において、前記第1レーザーパルス及び前記第2レーザーパルスの少なくともいくつかの光子を前記基本波長の第3高調波波長に変換するステップと、
前記非線形光学結晶から前記第3レーザーパルスを出力するステップであって、前記第3レーザーパルスは、前記パルス持続時間を有する、ステップと、
を有し、
前記非線形光学結晶は、周期分極疑似位相整合結晶を有し、
前記非線形光学結晶の前記第1部分及び前記非線形光学結晶の前記第2部分は、単一の一体的材料として形成されており、
前記第1部分の全体的な厚さの範囲は、100〜1000ミクロンであり、前記第2部分の全体的な厚さの範囲は、100〜1000ミクロンである、方法。 - 前記非線形光学結晶から前記第1レーザーパルス及び前記第2レーザーパルスを出力するステップを更に有する請求項1に記載の方法。
- 前記非線形光学結晶の前記第1部分は、周期分極酸化マグネシウムドープ化学量論タンタル酸リチウム結晶を有する請求項1に記載の方法。
- 前記非線形光学結晶の前記第2部分は、周期分極ランタンバリウム酸化ゲルマニウム結晶を有する請求項1に記載の方法。
- 前記第1レーザーパルスを導波するステップは、前記第1レーザーパルスを前記非線形光学結晶に対して合焦するステップを更に有する請求項1に記載の方法。
- 前記非線形光学結晶の出力において、前記第1レーザーパルス及び前記第2レーザーパルスから前記第3レーザーパルスをスペクトル的にフィルタリングするステップを更に有する請求項1に記載の方法。
- 前記非線形光学結晶は、前記基本波長に従ってチューニングされた周期分極層を含む請求項1に記載の方法。
- 前記第1レーザーパルスの第1断面強度パターンは、前記第3レーザーパルスの第2断面強度パターンと整合している請求項1に記載の方法。
- フェムト秒紫外線レーザー供給源であって、
フェムト秒近赤外線パルスレーザーを有するレーザー供給源であって、1000フェムト秒未満のパルス持続時間を有し、且つ、基本波長を有するレーザー供給源と、
前記レーザー供給源からの入射第1光子の向きとの関係において連続的に方向付けされた第1部分及び第2部分を有する非線形光学結晶と、
を有し、
前記非線形光学結晶の前記第1部分は、第2レーザーパルスを生成するべく、前記レーザー供給源から前記第1光子を受け取り、且つ、前記第1光子の少なくともいくつかを前記基本波長の第2高調波波長を有する第2光子に変換し、
前記非線形光学結晶の前記第2部分は、前記パルス持続時間を有する第3レーザーパルスを生成するべく、前記第1光子及び前記第2光子の少なくともいくつかを受け取り、且つ、前記第1光子及び前記第2光子の少なくともいくつかを前記基本波長の第3高調波波長を有する第3光子に変換し、
前記非線形光学結晶は、周期分極疑似位相整合結晶を有し、
前記非線形光学結晶の前記第1部分及び前記非線形光学結晶の前記第2部分は、単一の一体的材料として形成されており、
前記第1部分の全体的な厚さの範囲は、100〜1000ミクロンであり、前記第2部分の全体的な厚さの範囲は、100〜1000ミクロンである、フェムト秒紫外線レーザー供給源。 - 前記第2部分は、前記非線形光学結晶から、前記第1レーザーパルス、前記第2レーザーパルス、及び前記第3レーザーパルスを出力する請求項9に記載のフェムト秒紫外線レーザー供給源。
- 前記非線形光学結晶の前記第1部分は、周期分極酸化マグネシウムドープ化学量論タンタル酸リチウム結晶を有する請求項9に記載のフェムト秒紫外線レーザー供給源。
- 前記非線形光学結晶の前記第2部分は、周期分極ランタンバリウム酸化ゲルマニウム結晶を有する請求項9に記載のフェムト秒紫外線レーザー供給源。
- 前記第1レーザーパルスを前記非線形光学結晶に対して合焦するための合焦要素を更に有する請求項9に記載のフェムト秒紫外線レーザー供給源。
- 前記非線形光学結晶の前記出力において、前記第1レーザーパルス及び前記第2レーザーパルスから前記第3レーザーパルスをスペクトル的に分離するための光学フィルタを更に有する請求項9に記載のフェムト秒紫外線レーザー供給源。
- 前記非線形光学結晶は、前記基本波長に従ってチューニングされた周期分極層を含む請求項9に記載のフェムト秒紫外線レーザー供給源。
- 前記第1レーザーパルスの第1断面強度パターンは、前記第3レーザーパルスの第2断面強度パターンと整合している請求項9に記載のフェムト秒紫外線レーザー供給源。
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PCT/EP2015/053272 WO2016131474A1 (en) | 2015-02-17 | 2015-02-17 | Femtosecond ultraviolet laser |
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US (1) | US9660412B2 (ja) |
EP (2) | EP3259642B1 (ja) |
JP (1) | JP6588557B2 (ja) |
KR (2) | KR20170096191A (ja) |
CN (2) | CN114122892A (ja) |
AU (1) | AU2015383603B2 (ja) |
BR (1) | BR112017017300A2 (ja) |
CA (1) | CA2970059C (ja) |
ES (2) | ES2938569T3 (ja) |
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CN111741794B (zh) * | 2018-01-24 | 2023-07-28 | 新加坡国立大学 | 光动力疗法***及其发射器和可植入照明装置 |
US11719993B2 (en) * | 2018-12-18 | 2023-08-08 | Ipg Photonics Corporation | High power laser converter based on patterned SRB4B07 or PBB407 crystal |
CN109638624A (zh) * | 2019-01-24 | 2019-04-16 | 南京大学 | 一种基于超短脉冲激光的高效率且波长连续可调的极紫外光产生*** |
US11237455B2 (en) | 2020-06-12 | 2022-02-01 | Kla Corporation | Frequency conversion using stacked strontium tetraborate plates |
US20220399694A1 (en) * | 2021-06-11 | 2022-12-15 | Kla Corporation | Tunable duv laser assembly |
US11567391B1 (en) * | 2021-11-24 | 2023-01-31 | Kla Corporation | Frequency conversion using interdigitated nonlinear crystal gratings |
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US6856737B1 (en) * | 2003-08-27 | 2005-02-15 | Mesophotonics Limited | Nonlinear optical device |
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CN101777725A (zh) * | 2009-01-14 | 2010-07-14 | 镭射谷科技(深圳)有限公司 | 二极管泵浦腔内三次谐波全固态紫外激光器 |
CN202014023U (zh) * | 2011-04-14 | 2011-10-19 | 朱建英 | 陶瓷激光器 |
JP2015165260A (ja) * | 2014-03-02 | 2015-09-17 | 株式会社オキサイド | 波長変換レーザ装置 |
CN104184026A (zh) * | 2014-08-01 | 2014-12-03 | 中国人民解放军63892部队 | 一种时域脉宽可调的飞秒激光器及方法 |
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CA2970059A1 (en) | 2016-08-25 |
EP3259642A1 (en) | 2017-12-27 |
TWI594745B (zh) | 2017-08-11 |
TW201630577A (zh) | 2016-09-01 |
EP3783428A1 (en) | 2021-02-24 |
AU2015383603A1 (en) | 2017-06-29 |
AU2015383603B2 (en) | 2018-10-25 |
ES2836324T3 (es) | 2021-06-24 |
CN114122892A (zh) | 2022-03-01 |
EP3783428B1 (en) | 2022-12-21 |
JP2018503879A (ja) | 2018-02-08 |
BR112017017300A2 (pt) | 2018-04-10 |
CN107210579A (zh) | 2017-09-26 |
KR20190091390A (ko) | 2019-08-05 |
ES2938569T3 (es) | 2023-04-12 |
MX2017009080A (es) | 2017-11-23 |
CA2970059C (en) | 2019-07-09 |
RU2666345C1 (ru) | 2018-09-10 |
KR20170096191A (ko) | 2017-08-23 |
US9660412B2 (en) | 2017-05-23 |
US20160240996A1 (en) | 2016-08-18 |
WO2016131474A1 (en) | 2016-08-25 |
EP3259642B1 (en) | 2020-10-21 |
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