JP6547916B2 - 弾性波装置、高周波フロントエンド回路及び通信装置 - Google Patents
弾性波装置、高周波フロントエンド回路及び通信装置 Download PDFInfo
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- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
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Description
2…圧電基板
3…IDT電極
3a1,3b1…第1,第2のバスバー
3a2,3b2…第1,第2の電極指
3A…金属膜
3A1…IDT電極部
4,5…反射器
6…質量付加膜
6a…中央部
6b,6c…第1,第2の端部
6d,6e…第1,第2の端面
6A…金属膜
6A1…質量付加膜部
7,8…突出部
9A〜9C…第1〜第3のレジストパターン
10B,10C…開口部
17,18…突出部
22…圧電薄膜
23…低音速膜
24…高音速部材
201A,201B…デュプレクサ
202…アンテナ素子
203…RF信号処理回路
211,212…フィルタ
214…ローノイズアンプ回路
221,222…フィルタ
224…ローノイズアンプ回路
225…スイッチ
230…高周波フロントエンド回路
231,232…フィルタ
234a,234b…パワーアンプ回路
240…通信装置
244a,244b…パワーアンプ回路
Claims (7)
- 圧電体と、
前記圧電体上に設けられているIDT電極と、
を備え、
前記IDT電極は、対向し合っている第1のバスバー及び第2のバスバーと、前記第1のバスバーに一端が接続された複数の第1の電極指と、前記第2のバスバーに一端が接続されており、かつ前記複数の第1の電極指と間挿し合っている複数の第2の電極指と、を有し、かつ前記第1の電極指と前記第2の電極指とが弾性波伝搬方向において重なり合っている交叉領域と、第1の高音速領域及び第2の高音速領域と、を有し、
前記交叉領域は、弾性波伝搬方向に直交する方向の中央側に位置している中央領域と、前記中央領域の弾性波伝搬方向に直交する方向の両側に配置されており、かつ前記中央領域よりも音速が低速である第1の低音速領域及び第2の低音速領域と、を有し、
前記第1の高音速領域は、前記第1のバスバーと前記第1の低音速領域との間に位置しており、かつ前記中央領域よりも音速が高速である領域であり、
前記第2の高音速領域は、前記第2のバスバーと前記第2の低音速領域との間に位置しており、かつ前記中央領域よりも音速が高速である領域であり、
前記複数の第1の電極指及び前記複数の第2の電極指における前記第1の低音速領域及び前記第2の低音速領域に位置する部分に、質量付加膜がそれぞれ積層されており、
各前記第1の電極指が延びる方向を各第1の長さ方向とし、各前記第2の電極指が延びる方向を各第2の長さ方向としたときに、各前記質量付加膜は、各前記第1の長さ方向または各前記第2の長さ方向における中央に位置する中央部と、各前記第1の長さ方向または各前記第2の長さ方向における両端に位置する第1の端部及び第2の端部と、を有し、
前記質量付加膜の弾性波伝搬方向に沿う寸法を幅としたときに、少なくとも1つの前記質量付加膜において、前記中央部の幅よりも前記第1の端部の幅及び前記第2の端部の幅が狭く、かつ前記少なくとも1つの質量付加膜が、前記第1の端部及び前記第2の端部のうち少なくとも一方から、前記圧電体側とは反対側に突出している突出部を有する、弾性波装置。 - 圧電体と、
前記圧電体上に設けられているIDT電極と、
を備え、
前記IDT電極は、対向し合っている第1のバスバー及び第2のバスバーと、前記第1のバスバーに一端が接続された複数の第1の電極指と、前記第2のバスバーに一端が接続されており、かつ前記複数の第1の電極指と間挿し合っている複数の第2の電極指と、を有し、かつ前記第1の電極指と前記第2の電極指とが弾性波伝搬方向において重なり合っている交叉領域と、第1の高音速領域と、第2の高音速領域と、を有し、
前記交叉領域は、弾性波伝搬方向に直交する方向の中央側に位置している中央領域と、前記中央領域の弾性波伝搬方向に直交する方向の両側に配置されており、かつ前記中央領域よりも音速が低速である第1の低音速領域及び第2の低音速領域と、を有し、
前記第1の高音速領域は、前記第1のバスバーと前記第1の低音速領域との間に位置しており、かつ前記中央領域よりも音速が高速である領域であり、
前記第2の高音速領域は、前記第2のバスバーと前記第2の低音速領域との間に位置しており、かつ前記中央領域よりも音速が高速である領域であり、
前記複数の第1の電極指及び前記複数の第2の電極指における前記第1の低音速領域及び前記第2の低音速領域に位置する部分に、質量付加膜がそれぞれ積層されており、
各前記第1の電極指が延びる方向を各第1の長さ方向とし、各前記第2の電極指が延びる方向を各第2の長さ方向としたときに、各前記質量付加膜は、各前記第1の長さ方向または各前記第2の長さ方向における中央に位置する中央部と、各前記第1の長さ方向または各前記第2の長さ方向における両端に位置する第1の端部及び第2の端部と、前記第1の端部に位置する端面である第1の端面及び前記第2の端部に位置する端面である第2の端面と、を有し、
少なくとも1つの前記質量付加膜の前記第1の端面と前記第2の端面とが、前記質量付加膜の厚み方向に対して傾斜して延びており、かつ前記少なくとも1つの質量付加膜が、前記第1の端部及び前記第2の端部のうち少なくとも一方から、前記圧電体側とは反対側に突出している突出部を有する、弾性波装置。 - 前記質量付加膜の厚み方向に対して傾斜している角度を傾斜角度としたときに、前記第1の端部及び前記第2の端部のうち前記突出部が突出している端部に位置する端面の傾斜角度より、前記突出部の傾斜角度が小さい、請求項2に記載の弾性波装置。
- 全ての前記質量付加膜が、前記突出部を有する、請求項1〜3のいずれか1項に記載の弾性波装置。
- 前記突出部は、前記質量付加膜における前記第1の端部及び前記第2の端部の両方に設けられている、請求項1〜4のいずれか1項に記載の弾性波装置。
- 請求項1〜5のいずれか1項に記載の弾性波装置と、
パワーアンプと、
を備える、高周波フロントエンド回路。 - 請求項6に記載の高周波フロントエンド回路と、
RF信号処理回路と、
を備える、通信装置。
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Application Number | Priority Date | Filing Date | Title |
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JP2016246674 | 2016-12-20 | ||
JP2016246674 | 2016-12-20 | ||
PCT/JP2017/040358 WO2018116680A1 (ja) | 2016-12-20 | 2017-11-09 | 弾性波装置、高周波フロントエンド回路及び通信装置 |
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