JP6539176B2 - 慣性力検出装置 - Google Patents
慣性力検出装置 Download PDFInfo
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- JP6539176B2 JP6539176B2 JP2015192521A JP2015192521A JP6539176B2 JP 6539176 B2 JP6539176 B2 JP 6539176B2 JP 2015192521 A JP2015192521 A JP 2015192521A JP 2015192521 A JP2015192521 A JP 2015192521A JP 6539176 B2 JP6539176 B2 JP 6539176B2
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- vibration
- amplitude
- vibrator
- detection device
- inertial force
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- 238000001514 detection method Methods 0.000 claims description 59
- 238000006073 displacement reaction Methods 0.000 claims description 12
- 230000004044 response Effects 0.000 claims description 4
- 230000001360 synchronised effect Effects 0.000 description 20
- 230000008859 change Effects 0.000 description 4
- 230000004913 activation Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- ORQBXQOJMQIAOY-UHFFFAOYSA-N nobelium Chemical compound [No] ORQBXQOJMQIAOY-UHFFFAOYSA-N 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5726—Signal processing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Signal Processing (AREA)
- Computer Hardware Design (AREA)
- Gyroscopes (AREA)
- Pressure Sensors (AREA)
Description
102 振動子
103,104,105,106,107 固定電極
108,109 容量検出器
110,111 AD変換器
112 同期検波部
113 駆動周波数調整部
114 ボルテージ・コントロール・オシレータ
115 基準値設定部
116 減算器
117 駆動振幅調整部
118 最大振幅設定部
119 スイッチ
120 共振判定部
121 乗算器
122 ローパスフィルタ
123 補正部
124 絶対値化部
301 乗算器
302 ラッチ
303 加算器
304 しきい値設定部
305 絶対値化部
306 比較部
501 カウンタ
502 しきい値設定部
503 温度補正部
504 比較部
Claims (5)
- 振動体を第1の方向に振動させた状態で、角速度の発生により振動体が第1の方向と直交する第2の方向に変位したとき、その変位量を角速度として検出する慣性力検出装置において、
前記第1の方向の振動振幅のゲインと応答速度とを前記振動体の共振周波数に基づいて切り替え、
電源投入後、前記第1の方向の振動周波数が共振周波数に達するまでの期間は、前記振動体を振動させる駆動信号の振幅を固定値とし、
前記振動体の振動振幅が基準値に達する前に振動周波数が前記共振周波数に達した後は、前記第1の方向の振動振幅が基準値に保持されるよう制御することを特徴とする慣性力検出装置。 - 振動体を第1の方向に振動させた状態で、角速度の発生により振動体が第1の方向と直交する第2の方向に変位したとき、その変位量を角速度として検出する慣性力検出装置において、
前記第1の方向の振動振幅のゲインと応答速度とを前記振動体の共振周波数に基づいて切り替え、
電源投入後、予め定められた期間は、前記振動体へ印加する駆動信号の振幅を固定値とし、
前記振動体の振動振幅が基準値に達する前に振動周波数が前記共振周波数に達した後は、前記第1の方向の振動振幅が基準値に保持されるよう制御することを特徴とする慣性力検出装置。 - 請求項1または2に記載の慣性力検出装置において、
前記第1の方向の振動が共振状態にある場合と共振状態にない場合とで前記第1の方向の振動の振幅制御を切り替えることを特徴とする慣性力検出装置。 - 請求項1または2に記載の慣性力検出装置において、
前記共振周波数に達したか否かの検出は、前記振動体へ印加する駆動信号と、前記振動体の第1の方向への振動に相当する信号との位相差が90°であるか否かで判定することを特徴とする慣性力検出装置。 - 請求項2に記載の慣性力検出装置において、
電源投入後、予め定められた期間は、温度による補正を行うことを特徴とする慣性力検出装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015192521A JP6539176B2 (ja) | 2015-09-30 | 2015-09-30 | 慣性力検出装置 |
PCT/JP2016/071953 WO2017056664A1 (ja) | 2015-09-30 | 2016-07-27 | 慣性力検出装置 |
Applications Claiming Priority (1)
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JP2015192521A JP6539176B2 (ja) | 2015-09-30 | 2015-09-30 | 慣性力検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017067581A JP2017067581A (ja) | 2017-04-06 |
JP6539176B2 true JP6539176B2 (ja) | 2019-07-03 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2015192521A Expired - Fee Related JP6539176B2 (ja) | 2015-09-30 | 2015-09-30 | 慣性力検出装置 |
Country Status (2)
Country | Link |
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JP (1) | JP6539176B2 (ja) |
WO (1) | WO2017056664A1 (ja) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4668407B2 (ja) * | 2000-12-08 | 2011-04-13 | 京セラキンセキ株式会社 | 角速度センサ |
JP2004294201A (ja) * | 2003-03-26 | 2004-10-21 | Denso Corp | 振動型角速度センサ |
JP4406863B2 (ja) * | 2003-08-18 | 2010-02-03 | 株式会社デンソー | 振動型角速度センサ装置 |
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2015
- 2015-09-30 JP JP2015192521A patent/JP6539176B2/ja not_active Expired - Fee Related
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2016
- 2016-07-27 WO PCT/JP2016/071953 patent/WO2017056664A1/ja active Application Filing
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Publication number | Publication date |
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WO2017056664A1 (ja) | 2017-04-06 |
JP2017067581A (ja) | 2017-04-06 |
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