JP6529365B2 - Three-dimensional magnetic field magnet device - Google Patents
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Description
本発明は、３軸磁場の制御が可能な３次元磁場電磁石装置に関する。 The present invention relates to a three-dimensional magnetic field electromagnet apparatus capable of controlling a three-axis magnetic field.
従来より、例えば３軸の磁気センサを検査・調整するにあたり、磁気センサに作用させるための磁場を発生させる３次元磁場電磁石装置が用いられている。３次元磁場電磁石装置としては、例えば、特許文献１に示されるような３軸ヘルムホルツコイルを用いたものがある。 2. Description of the Related Art Conventionally, in order to inspect and adjust, for example, a three-axis magnetic sensor, a three-dimensional magnetic field electromagnet apparatus that generates a magnetic field for causing the magnetic sensor to operate is used. As a three-dimensional magnetic field electromagnet apparatus, for example, there is one using a three-axis Helmholtz coil as shown in Patent Document 1.
従来の３軸ヘルムホルツコイルを用いたものは、３軸ヘルムホルツコイルと、磁気センサを載置する載置台と、電流供給部と、制御部とを備え、電流供給部は、３軸ヘルムホルツコイルを構成する個々の１軸ヘルムホルツコイルに電流Ｉを流し、制御部は、電流Ｉによって３軸ヘルムホルツコイル内に生じる磁場と、外部から３軸ヘルムホルツコイル内に作用する外部磁場との合成磁場が、載置台に載置された磁気センサに、予め定められた複数の方向から作用するように、個々の１軸ヘルムホルツコイルに流れる電流を変化させるような構成になっている。 The conventional three-axis Helmholtz coil comprises a three-axis Helmholtz coil, a mounting table on which a magnetic sensor is mounted, a current supply unit, and a control unit, and the current supply unit is a three-axis Helmholtz coil The current I is applied to each of the uniaxial Helmholtz coils, and the control unit is configured to mount the combined magnetic field of the magnetic field generated in the 3-axis Helmholtz coil by the current I and the external magnetic field acting externally in the 3-axis Helmholtz coil. It is configured to change the current flowing in each of the single-axis Helmholtz coils so as to act on the magnetic sensor placed on the magnetic sensor from a plurality of predetermined directions.
しかしながら、従来の３次元磁場電磁石装置のようなヘルムホルツコイルを使用する場合、周辺への漏れ磁場が発生するため、装置全体に漏れ磁場を抑える構成にする必要がある。また、３次元磁場を制御する方法としては、２軸の電磁石によりＸＹ平面の磁場を発生させ、その電磁石のコイルの磁場制御を、対抗軸間で反発する磁界を発生させることによりＺ軸方向の磁界成分を発生させる方法があるが、３次元磁場の制御が困難だという問題がある。 However, in the case of using a Helmholtz coil such as a conventional three-dimensional magnetic field electromagnet apparatus, a leakage magnetic field to the periphery is generated, so that the whole apparatus needs to be configured to suppress the leakage magnetic field. In addition, as a method of controlling a three-dimensional magnetic field, a magnetic field in the XY plane is generated by a two-axis electromagnet, and magnetic field control of coils of the electromagnet is generated by generating a magnetic field repelling between opposing axes. Although there is a method of generating a magnetic field component, there is a problem that control of a three-dimensional magnetic field is difficult.
本発明は、このような事情に鑑みてなされたもので、漏れ磁場を抑え、３次元磁場の制御が容易な３次元磁場電磁石装置を提供することにある。 The present invention has been made in view of such circumstances, and an object thereof is to provide a three-dimensional magnetic field electromagnet apparatus which can suppress a leakage magnetic field and can easily control a three-dimensional magnetic field.
請求項１記載の３次元磁場電磁石装置は、略水平方向の磁場を発生させるＸ軸用電磁石と、略水平方向でＸ軸用電磁石と略直交する磁場を発生させるＹ軸用電磁石と、略鉛直方向の磁場を発生させるＺ軸用電磁石とを備え、Ｘ軸用電磁石とＹ軸用電磁石とでＸＹ平面の２軸磁場を発生させ、Ｚ軸用電磁石により２軸磁場に１軸分を追加して３次元磁場を発生させ、Ｘ軸用電磁石、Ｙ軸用電磁石及びＺ軸用電磁石を制御することにより、３次元磁場を制御し、Ｘ軸用電磁石が、コイル軸が略鉛直方向に伸びる２つのＸ軸用コイルからなり、Ｙ軸用電磁石が、コイル軸が略鉛直方向に伸びる２つのＹ軸用コイルからなり、２つのＸ軸用コイルと２つのＹ軸用コイルとが、上方のコイル面を略同一平面上に配置され、且つ、上方のコイル面側の平面視で、コイル軸が同一円の円周上に配置されると共に同一円の円周上にＸ軸用コイルとＹ軸用コイルとが交互に配置され、Ｚ軸用電磁石が、コイル軸が略鉛直方向に伸びる１つのＺ軸用コイルからなり、Ｚ軸用コイルが、Ｘ軸用電磁石とＹ軸用電磁石との上方のコイル面側で、Ｚ軸用コイルのコイル軸が、Ｘ軸用電磁石とＹ軸用電磁石とが配置された同一円の中心と略同一位置になるように配置されていることを特徴とする。 The three-dimensional magnetic field electromagnet apparatus according to claim 1 comprises: an X axis electromagnet generating a magnetic field in a substantially horizontal direction; a Y axis electromagnet generating a magnetic field substantially orthogonal to the X axis electromagnet in a substantially horizontal direction; Axis electromagnets to generate a magnetic field in the vertical direction, the X axis electromagnet and the Y axis electromagnet generate a biaxial magnetic field in the XY plane, and the Z axis electromagnet adds one axis to the biaxial magnetic field. The three-dimensional magnetic field is controlled by generating the three-dimensional magnetic field and controlling the X-axis electromagnet, the Y-axis electromagnet, and the Z-axis electromagnet to control the three-dimensional magnetic field. Two X-axis coils, Y-axis electromagnets consist of two Y-axis coils whose coil axes extend in a substantially vertical direction, and two X-axis coils and two Y-axis coils are upper coils The plane is disposed substantially on the same plane, and the plane on the upper coil surface side The coil axis is arranged on the same circle, and the X axis coil and the Y axis coil are alternately arranged on the same circle, and the Z axis electromagnet has the coil axis substantially vertical The Z-axis coil consists of one Z-axis coil extending in the direction, and the coil axis of the Z-axis coil is the X-axis electromagnet on the coil surface side above the X-axis electromagnet and Y-axis electromagnet. The Y axis electromagnet is disposed at substantially the same position as the center of the same circle in which the Y axis electromagnet is disposed .
請求項２記載の３次元磁場電磁石装置は、Ｘ軸用コイル及びＹ軸用コイルの各コアが、Ｘ軸用コイル及びＹ軸用コイルの導線の巻線部よりも上方に突出してＺ軸用コイルのコア又はコアの一部を形成し、コアの巻線部より突出した突出部に、Ｚ軸用コイルの導線が巻装され、Ｚ軸用コイルの巻線部が形成されていることを特徴とする。 In the three-dimensional magnetic field electromagnet apparatus according to claim 2, the respective cores of the X axis coil and the Y axis coil project above the winding portions of the leads of the X axis coil and the Y axis coil and are for the Z axis Forming the core of the coil or a part of the core, the lead of the Z-axis coil is wound around the protruding portion projecting from the winding part of the core, and the winding part of the Z-axis coil is formed It features.
請求項３記載の３次元磁場電磁石装置は、Ｚ軸用コイルのコアが、細巾材を、側方視略Ｌ字状に湾曲させた４つのポールピースからなり、ポールピースの上方突出鍔部側を、同一円の円周に配置された４つのＸ軸用コイル及びＹ軸用コイルの内側方向に向けつつ、ポールピースの底面部の非上方突出鍔部側を、Ｘ軸用コイル及びＹ軸用コイルのコアの上方のコイル面側に固定し、４つの上方突出鍔部に架け渡すようにＺ軸用コイルの導線を巻装させることを特徴とする。 In the three-dimensional magnetic field electromagnet apparatus according to claim 3, the core of the Z axis coil comprises four pole pieces in which a narrow material is curved in a substantially L shape in a side view, and the upper projecting ridge of the pole piece The non-upward protruding ridge portion side of the bottom portion of the pole piece is directed to the X axis coil and Y while the side is directed inward of the four X axis coils and the Y axis coil arranged in the same circle. It is characterized in that it is fixed to the coil surface side above the core of the axial coil, and the lead wire of the Z-axis coil is wound so as to bridge over the four upper projecting ridges .
請求項４記載の３次元磁場電磁石装置は、Ｚ軸用コイルのコアの非Ｘ軸用コイル側の端部に端面を有することを特徴とする。 The three-dimensional magnetic field electromagnet apparatus according to claim 4 is characterized in that the end face on the non-X-axis coil side end of the core of the Z-axis coil is characterized.
本願の発明によれば、漏れ磁場を抑え、３次元磁場の制御が容易である。 According to the invention of the present application, it is possible to suppress the leakage magnetic field and to easily control the three-dimensional magnetic field.
本発明の形態に係る装置は、３軸磁場の制御が可能な３次元磁場電磁石装置に関するものであり、以下、本発明の形態について図面を参照しながら具体的に説明する。図１は、本発明に係る３次元磁場電磁石装置の一例を示す斜視図である。図２は、同３次元磁場電磁石装置の平面図である。図３は、同３次元磁場電磁石装置の縦断面図である。図４は、同３次元磁場電磁石装置のＸ軸方向の磁場の様子を示す説明図である。図５は、同３次元磁場電磁石装置のＸ軸方向の磁場の概念を示す説明図である。図６は、同３次元磁場電磁石装置のＺ軸方向の磁場の様子を示す説明図である。図７は、同３次元磁場電磁石装置のＺ軸方向の磁場の概念を示す説明図である。 An apparatus according to an embodiment of the present invention relates to a three-dimensional magnetic field electromagnet apparatus capable of controlling a three-axis magnetic field, and the embodiment of the present invention will be specifically described below with reference to the drawings. FIG. 1 is a perspective view showing an example of a three-dimensional magnetic field electromagnet apparatus according to the present invention. FIG. 2 is a plan view of the three-dimensional magnetic field electromagnet apparatus. FIG. 3 is a longitudinal sectional view of the same three-dimensional magnetic field electromagnet apparatus. FIG. 4 is an explanatory view showing the state of the magnetic field in the X-axis direction of the three-dimensional magnetic field electromagnet device. FIG. 5 is an explanatory view showing the concept of the magnetic field in the X-axis direction of the three-dimensional magnetic field electromagnet device. FIG. 6 is an explanatory view showing the magnetic field in the Z-axis direction of the three-dimensional magnetic field electromagnet device. FIG. 7 is an explanatory view showing the concept of the magnetic field in the Z-axis direction of the three-dimensional magnetic field electromagnet device.
３次元磁場電磁石装置１は、Ｘ軸用電磁石１０、Ｙ軸用電磁石２０、Ｚ軸用電磁石３０等から構成されている。Ｘ軸用電磁石１０は、略水平方向の磁場を発生させるＸ軸用の電磁石であり、コイル軸が略鉛直方向に伸びる２つのＸ軸用コイル１０ａ，１０ｂからなる。より具体的には、Ｘ軸用コイル１０ａ，１０ｂは、上下に円盤状のＸ軸用コイルケース１６を有するＸ軸用コア１２がボビン状になっており、このＸ軸用コア１２に、導線が巻かれてＸ軸用巻線部１４が形成されている。 The three-dimensional magnetic field electromagnet apparatus 1 includes an X axis electromagnet 10, an Y axis electromagnet 20, a Z axis electromagnet 30, and the like. The X-axis electromagnet 10 is an X-axis electromagnet that generates a magnetic field in a substantially horizontal direction, and includes two X-axis coils 10a and 10b whose coil axes extend in a substantially vertical direction. More specifically, in the X-axis coils 10a and 10b, the X-axis core 12 having the disk-shaped X-axis coil case 16 at the top and bottom is a bobbin shape, and the X-axis core 12 Is wound to form an X-axis winding portion 14.
また、Ｙ軸用電磁石２０は、略水平方向でＸ軸用電磁石１０と略直交する磁場を発生させる電磁石であり、コイル軸が略鉛直方向に伸びる２つのＹ軸用コイル２０ａ，２０ｂからなる。より具体的には、Ｙ軸用コイル２０ａ，２０ｂは、上下に円盤状のＹ軸用コイルケース２６を有するＹ軸用コア２２がボビン状になっており、このＹ軸用コア２２に、導線が巻かれてＹ軸用巻線部２４が形成されている。 The Y-axis electromagnet 20 is an electromagnet that generates a magnetic field substantially orthogonal to the X-axis electromagnet 10 in the substantially horizontal direction, and includes two Y-axis coils 20a and 20b whose coil axes extend in the substantially vertical direction. More specifically, in the Y-axis coils 20a and 20b, the Y-axis core 22 having a disk-shaped Y-axis coil case 26 at the top and bottom is a bobbin shape, and the Y-axis core 22 Is wound to form a Y-axis winding portion 24.
そして、２つのＸ軸用コイル１０ａ，１０ｂと２つのＹ軸用コイル２０ａ，２０ｂとが、上方のコイル面を略同一平面上に配置され、且つ、上方のコイル面側の平面視で、コイル軸が同一円の円周上に配置されると共に同一円の円周上にＸ軸用コイル１０ａ，１０ｂとＹ軸用コイル２０ａ，２０ｂとが交互に配置されるように、２つのＸ軸用コイル１０ａ，１０ｂと２つのＹ軸用コイル２０ａ，２０ｂとが、下方を薄板円環状のバックコア４０に固定されている。 The two X-axis coils 10a and 10b and the two Y-axis coils 20a and 20b are disposed such that the upper coil surfaces are substantially on the same plane, and in plan view on the upper coil surface side The two X-axis coils are arranged such that the X-axis coils 10a and 10b and the Y-axis coils 20a and 20b are alternately arranged on the same circle while the axes are arranged on the same circle. The coils 10a and 10b and the two Y-axis coils 20a and 20b are fixed to the thin-plate annular back core 40 at the lower side.
Ｚ軸用電磁石３０は、略鉛直方向の磁場を発生させる電磁石であり、薄板円環状のＺ軸用コイルケース３６の上にコイル軸が略鉛直方向に伸びるように導線が巻かれてＺ軸用巻線部３４が形成された１つのＺ軸用コイル３０からなる。そして、Ｚ軸用コイル３０が、Ｘ軸用電磁石１０とＹ軸用電磁石２０との上方のコイル面側で、Ｚ軸用コイル３０のコイル軸が、Ｘ軸用電磁石１０とＹ軸用電磁石２０とが配置された同一円の中心と略同一位置になるように配置されている。 The Z-axis electromagnet 30 is an electromagnet that generates a magnetic field in a substantially vertical direction, and a lead wire is wound around the thin-plate annular Z-axis coil case 36 so that the coil axis extends in a substantially vertical direction. It consists of one coil 30 for Z-axis in which the winding part 34 was formed. The coil axis of the Z-axis coil 30 corresponds to the X-axis electromagnet 10 and the Y-axis electromagnet 20 on the coil surface side of the Z-axis coil 30 above the X-axis electromagnet 10 and the Y-axis electromagnet 20. Are arranged at substantially the same position as the center of the same circle.
そして、３次元磁場電磁石装置１は、Ｘ軸用コイル１０ａ，１０ｂ及びＹ軸用コイル２０ａ，２０ｂの各コア（Ｘ軸用コア１２及びＹ軸用コア２２）が、Ｘ軸用コイル１０ａ，１０ｂ及びＹ軸用コイル２０ａ，２０ｂのＸ軸用巻線部１４及びＹ軸用巻線部２４よりも上方に突出してＺ軸用コイル３０のコア又はコアの一部を形成し、Ｘ軸用コア１２及びＹ軸用コア２２のＸ軸用巻線部１４及びＹ軸用巻線部２４より突出した突出部に、Ｚ軸用コイル３０の導線が巻装され、Ｚ軸用コイル３０のＺ軸用巻線部３４が形成されている。 In the three-dimensional magnetic field electromagnet apparatus 1, the X-axis coils 10a and 10b and the Y-axis coils 20a and 20b (X-axis core 12 and Y-axis core 22) are formed by the X-axis coils 10a and 10b. And a portion of the core or core of the Z-axis coil 30 by projecting upward from the X-axis winding portion 14 of the Y-axis coils 20a and 20b and the Y-axis winding portion 24; The lead of the Z-axis coil 30 is wound around the protruding portions of the 12 and Y-axis cores 22 protruding from the X-axis winding portion 14 and the Y-axis winding portion 24, and the Z axis of the Z-axis coil 30 A winding portion 34 is formed.
Ｚ軸用コイル３０のコアの構造を説明すると、Ｚ軸用コイル３０のコアは、細巾材を、側方視略Ｌ字状に湾曲させた２つのＸ軸用ポールピース１８と２つのＹ軸用ポールピース２８とから構成されている。さらに、より具体的に説明すると、Ｘ軸用ポールピース１８及びＹ軸用ポールピース２８の上方突出鍔部１８ｂ，２８ｂ側を、同一円の円周に配置された４つのＸ軸用コイル１０ａ，１０ｂ及びＹ軸用コイル２０ａ，２０ｂの内側方向に向けつつ、Ｘ軸用ポールピース１８及びＹ軸用ポールピース２８の底面部１８ａ，２８ａの非上方突出鍔部側を、Ｘ軸用コイル１０ａ，１０ｂ及びＹ軸用コイル２０ａ，２０ｂのＸ軸用コア１２及びＹ軸用コア２２の上方のコイル面側に固定し、４つの上方突出鍔部１８ｂ，２８ｂに架け渡すようにＺ軸用コイル３０の導線を巻装させている。尚、Ｚ軸用コイル３０のコアであるＸ軸用ポールピース１８及びＹ軸用ポールピース２８の非Ｘ軸用コイル１０ａ，１０ｂ側の端部すなわち上方突出鍔部１８ｂ，２８ｂの上端に端面１８ｃ，２８ｃを有している。 To explain the structure of the core of the Z-axis coil 30, the core of the Z-axis coil 30 has two narrow X-axis pole pieces 18 and two Y-axis poles in which the narrow material is curved in an L-shape in side view. It is composed of a shaft pole piece 28. Furthermore, if it demonstrates more concretely, the coil 10a for four X-axes arrange | positioned around the circle of the same circle at the side of upper protrusion collar part 18b, 28b of the pole piece 18 for X-axes and the pole piece 28 for Y-axes. The X-axis coil 10a, 10b and the non-protruding ridge portion side of the bottom portions 18a, 28a of the X-axis pole piece 18 and the Y-axis pole piece 28 while facing inward directions of the Y-axis coils 20a, 20b. The Z-axis coil 30 is fixed to the coil surface side above the X-axis core 12 and the Y-axis core 22 of the 10b and Y-axis coils 20a and 20b, and is bridged over the four upward projecting flanges 18b and 28b. The conductor wire is wound. The end of the X-axis pole piece 18 and the Y-axis pole piece 28 that are cores of the Z-axis coil 30 on the non-X-axis coil 10a and 10b side, that is, the upper end of the upper projecting flanges 18b and 28b is an end face 18c. , 28c.
３次元磁場電磁石装置１は、このような構造により、Ｘ軸用電磁石１０とＹ軸用電磁石２０とでＸＹ平面の２軸磁場を発生させ、Ｚ軸用電磁石３０により２軸磁場に１軸分を追加して３次元磁場を発生させる。また、Ｘ軸用電磁石１０、Ｙ軸用電磁石２０及びＺ軸用電磁石３０を制御することにより、３次元磁場を制御する。尚、図に示す３次元磁場電磁石装置１の形態は、あくまでも一例であり、本願発明の技術的思想を満たす構成であり、同様な作用・効果を奏するものであればよい。 With such a structure, the three-dimensional magnetic field electromagnet apparatus 1 generates a biaxial magnetic field in the XY plane with the electromagnet 10 for X axis and the electromagnet 20 for Y axis, and the electromagnet 30 for Z axis generates one axis for the biaxial magnetic field. To generate a three-dimensional magnetic field. Further, the three-dimensional magnetic field is controlled by controlling the X axis electromagnet 10, the Y axis electromagnet 20 and the Z axis electromagnet 30. The form of the three-dimensional magnetic field electromagnet device 1 shown in the figure is merely an example, and it is a configuration that satisfies the technical idea of the present invention, and it may be the one having the same operation and effect.
次に、３次元磁場電磁石装置１の動作・作用を図４〜図７も用いて説明する。まず、図４及び図５は、Ｘ軸方向の磁場の様子をシミュレーションして示したものである。Ｘ軸用コイル１０ａとＸ軸用コイル１０ｂのそれぞれに電流の向きが違うＸ軸励磁電流Ｘｉを流すと、Ｘ軸用コイル１０ｂからＸ軸用コイル１０ａに向かう（図５に示す電流の方向において）磁界が発生する。このＸ軸方向の磁界は、Ｘ軸用コア１２が上方に伸びたような形状になるようにＸ軸用ポールピース１８が設けられ、さらに、Ｘ軸用ポールピース１８の上方突出鍔部１８ｂが、Ｚ軸用コイル３０の内側を抜けて上方に突出し、上端に端面１８ｃを有して伸びていることから、Ｚ軸用コイル３０の内側で且つＺ軸用コイル３０の上方のコイル面よりも上に、磁界印加点Ｐを設定できることになる。このＸ軸励磁電流Ｘｉを制御することにより、Ｘ軸方向の磁界の強さを制御する。尚、Ｙ軸方向の磁場に関しては、Ｘ軸方向の磁場に対して直交する方向でＸ軸方向の磁場と同様であるので、説明を省略する。 Next, the operation and action of the three-dimensional magnetic field electromagnet apparatus 1 will be described using FIGS. 4 to 7 as well. First, FIGS. 4 and 5 show simulation of the magnetic field in the X-axis direction. When an X-axis excitation current Xi having different current directions is applied to each of the X-axis coil 10a and the X-axis coil 10b, the X-axis coil 10b is directed from the X-axis coil 10b to the X-axis coil 10a (in the direction of the current shown in FIG. ) A magnetic field is generated. The X-axis pole piece 18 is provided such that the magnetic field in the X-axis direction has a shape in which the X-axis core 12 extends upward, and the upper protruding flange portion 18 b of the X-axis pole piece 18 , And protrudes from the inside of the Z-axis coil 30 and extends upward with the end face 18c at the upper end, so that it is inside the Z-axis coil 30 and above the coil surface above the Z-axis coil 30. The magnetic field application point P can be set on the upper side. By controlling this X-axis excitation current Xi, the strength of the magnetic field in the X-axis direction is controlled. The magnetic field in the Y-axis direction is the same as the magnetic field in the X-axis direction in the direction orthogonal to the magnetic field in the X-axis direction, so the description will be omitted.
図６及び図７は、Ｚ軸方向の磁場の様子をシミュレーションして示したものである。Ｚ軸用コイル３０にＺ軸励磁電流Ｚｉを流すと、Ｚ軸用コイル３０に図７の矢線に示す向き（図７に示す電流の方向において）の磁界が発生する。特に、Ｘ軸用ポールピース１８とＹ軸用ポールピース２８が、Ｚ軸用コイル３０のコアとして機能し、且つ、Ｘ軸用ポールピース１８及びＹ軸用ポールピース２８の上方突出鍔部１８ｂ，２８ｂが、Ｚ軸用コイル３０の内側を抜けて上方に突出し、上端に端面１８ｃ，２８ｃを有して伸びていることから、Ｚ軸用コイル３０の内側で且つＺ軸用コイル３０の上方のコイル面よりも上に、Ｘ軸方向及びＹ軸方向とあいまった磁界印加点Ｐを設定できることになる。これにより、３軸磁場の制御が可能な磁界印加点Ｐが、形成されることになる。このＸ軸励磁電流Ｘｉを制御することにより、Ｘ軸方向の磁界の強さを制御する。 6 and 7 show simulation of the magnetic field in the Z-axis direction. When the Z-axis excitation current Zi is supplied to the Z-axis coil 30, a magnetic field is generated in the Z-axis coil 30 in the direction (in the direction of the current shown in FIG. 7) shown by the arrow in FIG. In particular, the X-axis pole piece 18 and the Y-axis pole piece 28 function as the core of the Z-axis coil 30, and the upper projecting flange 18b of the X-axis pole piece 18 and the Y-axis pole piece 28 28b projects upward from the inside of the Z-axis coil 30 and extends with end faces 18c and 28c at the upper end, so that it is inside the Z-axis coil 30 and above the Z-axis coil 30. A magnetic field application point P in which the X axis direction and the Y axis direction are in balance can be set above the coil surface. As a result, a magnetic field application point P capable of controlling the three-axis magnetic field is formed. By controlling this X-axis excitation current Xi, the strength of the magnetic field in the X-axis direction is controlled.
すなわち、本実施の形態の３次元磁場電磁石装置１は、Ｘ軸励磁電流Ｘｉ、Ｙ軸励磁電流Ｙｉ及びＺ軸励磁電流Ｚｉを制御することにより、Ｘ軸用電磁石１０、Ｙ軸用電磁石２０及びＺ軸用電磁石３０を制御し、磁界印加点Ｐの３次元磁場を制御する。 That is, the three-dimensional magnetic field electromagnet apparatus 1 of the present embodiment controls the X axis excitation current Xi, the Y axis excitation current Yi, and the Z axis excitation current Zi to thereby obtain the X axis electromagnet 10, the Y axis electromagnet 20 and The Z-axis electromagnet 30 is controlled to control the three-dimensional magnetic field of the magnetic field application point P.
以上のような構成の本実施の形態の３次元磁場電磁石装置１によれば、Ｘ軸用電磁石１０とＹ軸用電磁石２０とでＸＹ平面の２軸磁場を発生させ、Ｚ軸用電磁石３０により２軸磁場に１軸分を追加して３次元磁場を発生させることにより、３次元磁場の制御が容易である。また、３次元磁場電磁石装置１のＸ軸用電磁石１０、Ｙ軸用電磁石２０及びＺ軸用電磁石３０の構造及び配置により、漏れ磁場を抑えることも可能である。 According to the three-dimensional magnetic field electromagnet apparatus 1 of the present embodiment configured as described above, the X axis electromagnet 10 and the Y axis electromagnet 20 generate a biaxial magnetic field in the XY plane, and the Z axis electromagnet 30 Control of a three-dimensional magnetic field is facilitated by generating a three-dimensional magnetic field by adding one axis to the two-axis magnetic field. Further, it is also possible to suppress the leakage magnetic field by the structure and arrangement of the X axis electromagnet 10, the Y axis electromagnet 20 and the Z axis electromagnet 30 of the three-dimensional magnetic field electromagnet apparatus 1.
以上のように、本発明によれば、漏れ磁場を抑え、３次元磁場の制御が容易な３次元磁場電磁石装置を提供することができる。 As described above, according to the present invention, it is possible to provide a three-dimensional magnetic field electromagnet apparatus capable of suppressing a leakage magnetic field and facilitating control of a three-dimensional magnetic field.
１・・・・・３次元磁場電磁石装置
１０・・・・Ｘ軸用電磁石
１０ａ・・・Ｘ軸用コイル
１０ｂ・・・Ｘ軸用コイル
１２・・・・Ｘ軸用コア
１４・・・・Ｘ軸用巻線部
１６・・・・Ｘ軸用コイルケース
１８・・・・Ｘ軸用ポールピース
１８ａ・・・底面部
１８ｂ・・・上方突出鍔部
１８ｃ・・・端面
２０・・・・Ｙ軸用電磁石
２０ａ・・・Ｙ軸用コイル
２０ｂ・・・Ｙ軸用コイル
２２Ｙ・・・軸用コア
２４・・・・Ｙ軸用巻線部
２６・・・・Ｙ軸用コイルケース
２８・・・・Ｙ軸用ポールピース
２８ａ・・・底面部
２８ｂ・・・上方突出鍔部
２８ｃ・・・端面
３０・・・・Ｚ軸用電磁石（Ｚ軸用コイル）
３４・・・・Ｚ軸用巻線部
３６・・・・Ｚ軸用コイルケース
４０・・・・バックコア
1: Three-dimensional magnetic field electromagnet device 10: X axis electromagnet 10a: X axis coil 10b: X axis coil 12: X axis core 14: Winding portion 16 for X axis ··· Coil case 18 for X axis · · · Pole piece 18a for X axis · · · Bottom portion 18b ··· Top protruding flange portion 18c · · · End surface 20 · · · Y axis electromagnet 20a ... Y axis coil 20b ... Y axis coil 22 Y ... axis core 24 ... Y axis winding part 26 ... Y axis coil case 28 ... ... Pole piece 28a for Y axis ··· Bottom surface portion 28b ··· Upper protruding flange portion 28c ··· End surface 30 ··· Z axis electromagnet (Z axis coil)
34 · · · Z-axis winding portion 36 · · · Z-axis coil case 40 · · · back core
Claims (4)
略水平方向の磁場を発生させるＸ軸用電磁石と、
略水平方向で該Ｘ軸用電磁石と略直交する磁場を発生させるＹ軸用電磁石と、
略鉛直方向の磁場を発生させるＺ軸用電磁石とを備え、
該Ｘ軸用電磁石と該Ｙ軸用電磁石とでＸＹ平面の２軸磁場を発生させ、
該Ｚ軸用電磁石により該２軸磁場に１軸分を追加して３次元磁場を発生させ、
該Ｘ軸用電磁石、該Ｙ軸用電磁石及び該Ｚ軸用電磁石を制御することにより、該３次元磁場を制御し、
該Ｘ軸用電磁石が、コイル軸が略鉛直方向に伸びる２つのＸ軸用コイルからなり、
該Ｙ軸用電磁石が、コイル軸が略鉛直方向に伸びる２つのＹ軸用コイルからなり、
該２つのＸ軸用コイルと該２つのＹ軸用コイルとが、上方のコイル面を略同一平面上に配置され、且つ、該上方のコイル面側の平面視で、該コイル軸が同一円の円周上に配置されると共に該同一円の円周上に該Ｘ軸用コイルと該Ｙ軸用コイルとが交互に配置され、
該Ｚ軸用電磁石が、コイル軸が略鉛直方向に伸びる１つのＺ軸用コイルからなり、
該Ｚ軸用コイルが、該Ｘ軸用電磁石と該Ｙ軸用電磁石との該上方のコイル面側で、該Ｚ軸用コイルのコイル軸が、該Ｘ軸用電磁石と該Ｙ軸用電磁石とが配置された該同一円の中心と略同一位置になるように配置されていることを特徴とする３次元磁場電磁石装置。 In a three-dimensional magnetic field electromagnet apparatus capable of controlling a three-axis magnetic field,
An X-axis electromagnet that generates a substantially horizontal magnetic field;
A Y-axis electromagnet that generates a magnetic field substantially orthogonal to the X-axis electromagnet in a substantially horizontal direction;
A Z-axis electromagnet for generating a substantially vertical magnetic field;
The X-axis electromagnet and the Y-axis electromagnet generate a biaxial magnetic field in the XY plane,
A three-dimensional magnetic field is generated by adding one axis to the two axis magnetic field by the electromagnet for Z axis,
The three-dimensional magnetic field is controlled by controlling the X axis electromagnet, the Y axis electromagnet, and the Z axis electromagnet .
The X axis electromagnet comprises two X axis coils in which a coil axis extends in a substantially vertical direction,
The Y axis electromagnet comprises two Y axis coils in which the coil axis extends in a substantially vertical direction,
The two X-axis coils and the two Y-axis coils are arranged such that the upper coil surfaces are on substantially the same plane, and the coil axes have the same circle in plan view on the upper coil surface side The X-axis coil and the Y-axis coil are alternately arranged on the circumference of the same circle,
The Z-axis electromagnet comprises one Z-axis coil in which a coil axis extends in a substantially vertical direction,
The coil axis of the coil for Z-axis is the electromagnet for X-axis and the electromagnet for Y-axis, and the coil for Z-axis is the coil surface side of the coil on the upper side of the electromagnet for X-axis and the electromagnet for Y-axis. A three-dimensional magnetic field electromagnet apparatus, wherein the three-dimensional magnetic field electromagnet apparatus is disposed at substantially the same position as the center of the same circle .
該コアの該巻線部より突出した突出部に、前記Ｚ軸用コイルの導線が巻装され、該Ｚ軸用コイルの巻線部が形成されていることを特徴とする請求項１記載の３次元磁場電磁石装置。 Each of the cores of the X-axis coil and the Y-axis coil protrudes above the winding portion of the X-axis coil and the lead of the Y-axis coil, and the core or core of the Z-axis coil is Form a part,
The lead of the Z-axis coil is wound around a protruding portion of the core which protrudes from the winding portion, and the winding portion of the Z-axis coil is formed . Three-dimensional magnetic field electromagnet device.
該ポールピースの上方突出鍔部側を、前記同一円の円周に配置された４つの前記Ｘ軸用コイル及び前記Ｙ軸用コイルの内側方向に向けつつ、該ポールピースの底面部の非上方突出鍔部側を、該Ｘ軸用コイル及び該Ｙ軸用コイルのコアの前記上方のコイル面側に固定し、
該４つの上方突出鍔部に架け渡すように該Ｚ軸用コイルの導線を巻装させることを特徴とする請求項１記載の３次元磁場電磁石装置。 The core of the Z-axis coil comprises four pole pieces in which a narrow material is curved in a substantially L-shape in a side view,
The upper protruding ridge portion side of the pole piece is directed to the inner direction of the four X-axis coils and the Y-axis coil disposed around the same circle, and the non-upper side of the bottom portion of the pole piece Fixing the protruding ridge portion side to the coil surface side above the core of the X axis coil and the Y axis coil;
The three-dimensional magnetic field electromagnet apparatus according to claim 1 , wherein the lead wire of the Z-axis coil is wound so as to bridge over the four upper projecting ridges .
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