JP6523840B2 - ガス成分検出装置 - Google Patents
ガス成分検出装置 Download PDFInfo
- Publication number
- JP6523840B2 JP6523840B2 JP2015142206A JP2015142206A JP6523840B2 JP 6523840 B2 JP6523840 B2 JP 6523840B2 JP 2015142206 A JP2015142206 A JP 2015142206A JP 2015142206 A JP2015142206 A JP 2015142206A JP 6523840 B2 JP6523840 B2 JP 6523840B2
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- JP
- Japan
- Prior art keywords
- light
- detection
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- gas
- intensity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000001514 detection method Methods 0.000 claims description 147
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical group [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 58
- 229910052753 mercury Inorganic materials 0.000 claims description 58
- 238000005259 measurement Methods 0.000 claims description 47
- 230000003993 interaction Effects 0.000 claims description 19
- 238000000149 argon plasma sintering Methods 0.000 claims description 10
- 239000002245 particle Substances 0.000 claims description 10
- 230000008859 change Effects 0.000 claims description 9
- 230000002123 temporal effect Effects 0.000 claims description 7
- 229910052724 xenon Inorganic materials 0.000 claims description 6
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 6
- 239000007789 gas Substances 0.000 description 88
- 230000003287 optical effect Effects 0.000 description 20
- 238000010926 purge Methods 0.000 description 7
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 4
- 230000031700 light absorption Effects 0.000 description 4
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- TXKMVPPZCYKFAC-UHFFFAOYSA-N disulfur monoxide Inorganic materials O=S=S TXKMVPPZCYKFAC-UHFFFAOYSA-N 0.000 description 2
- 238000000295 emission spectrum Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical compound S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 description 2
- 238000002835 absorbance Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 206010022000 influenza Diseases 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/33—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N2021/3129—Determining multicomponents by multiwavelength light
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015142206A JP6523840B2 (ja) | 2015-07-16 | 2015-07-16 | ガス成分検出装置 |
CN201610550431.4A CN106353263A (zh) | 2015-07-16 | 2016-07-13 | 气体成分检测装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015142206A JP6523840B2 (ja) | 2015-07-16 | 2015-07-16 | ガス成分検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017026345A JP2017026345A (ja) | 2017-02-02 |
JP6523840B2 true JP6523840B2 (ja) | 2019-06-05 |
Family
ID=57843189
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015142206A Expired - Fee Related JP6523840B2 (ja) | 2015-07-16 | 2015-07-16 | ガス成分検出装置 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP6523840B2 (zh) |
CN (1) | CN106353263A (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6965654B2 (ja) * | 2017-09-19 | 2021-11-10 | 横河電機株式会社 | フーリエ分光分析装置 |
CN108562540A (zh) * | 2017-12-29 | 2018-09-21 | 深圳市华星光电技术有限公司 | 光学测试装置 |
CN109596541A (zh) * | 2018-11-07 | 2019-04-09 | 北京东方安杰科技有限公司 | 一种光源状态检测***及其检测方法 |
JPWO2022220145A1 (zh) * | 2021-04-13 | 2022-10-20 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS509482A (zh) * | 1973-05-22 | 1975-01-30 | ||
JPS63259438A (ja) * | 1987-04-15 | 1988-10-26 | Osaka Gas Co Ltd | 管内の水または水蒸気の測定装置 |
JPH0628720U (ja) * | 1992-09-17 | 1994-04-15 | 関西電力株式会社 | ガス総量測定装置 |
US5679957A (en) * | 1996-01-04 | 1997-10-21 | Ada Technologies, Inc. | Method and apparatus for monitoring mercury emissions |
JP4227991B2 (ja) * | 2005-12-28 | 2009-02-18 | トヨタ自動車株式会社 | 排ガス分析装置および排ガス分析方法 |
JP2008175611A (ja) * | 2007-01-17 | 2008-07-31 | Fuji Electric Systems Co Ltd | ガス濃度測定装置およびガス濃度測定方法 |
JP2009036714A (ja) * | 2007-08-03 | 2009-02-19 | Canon Inc | 光学濃度センサー及び光学濃度センサーを搭載した画像形成装置 |
CN101290283B (zh) * | 2008-06-04 | 2010-07-14 | 太原中绿环保技术有限公司 | 激光后向散射测尘设备的探头装置 |
KR101947004B1 (ko) * | 2008-06-10 | 2019-02-12 | 엑스트랄리스 테크놀로지 리미티드 | 입자 검출 |
JP5190700B2 (ja) * | 2008-11-14 | 2013-04-24 | 株式会社Ihi | 気体成分濃度測定装置 |
WO2010102375A1 (en) * | 2009-03-11 | 2010-09-16 | Thiebaeud Jerome | Apparatus for continuous in situ monitoring of elemental mercury vapour, and method of using same |
EP2430423B1 (en) * | 2009-05-11 | 2017-08-02 | GasPorOx AB | Apparatus and method for non-intrusive assessment of gas in packages |
CN101694460B (zh) * | 2009-10-16 | 2011-02-09 | 东南大学 | 烟气污染物浓度的自适应差分吸收光谱测量方法及装置 |
CN102639983A (zh) * | 2009-12-04 | 2012-08-15 | 西门子公司 | 用于在管道气体监控***中确定光学测量路径长度的方法 |
EP2405254B1 (de) * | 2010-07-05 | 2014-06-04 | Sick Ag | Optoelektronisches Verfahren zur Gasanalyse |
EP2525210B1 (de) * | 2011-05-16 | 2014-06-04 | Sick Ag | Vorrichtung und Verfahren zur Bestimmung einer Konzentration einer Messkomponente in einem Gas |
EP2711688B1 (en) * | 2011-05-20 | 2020-09-02 | HORIBA, Ltd. | Measuring unit and gas analyzing apparatus |
US20130015362A1 (en) * | 2011-07-12 | 2013-01-17 | Sharp Kabushiki Kaisha | Fluid purification and sensor system |
JP6416453B2 (ja) * | 2011-08-12 | 2018-10-31 | 株式会社堀場製作所 | ガス分析装置 |
EP2587154A1 (en) * | 2011-10-24 | 2013-05-01 | Alstom Technology Ltd | Method for data acquisition from a combustion process |
JP2013127385A (ja) * | 2011-12-19 | 2013-06-27 | Fuji Electric Co Ltd | レーザ式ガス分析計 |
CN203324177U (zh) * | 2013-02-01 | 2013-12-04 | 深圳市理邦精密仪器股份有限公司 | 一种测量气体浓度的装置 |
JP6271139B2 (ja) * | 2013-03-21 | 2018-01-31 | 株式会社堀場製作所 | 温度計 |
CN103543124A (zh) * | 2013-06-26 | 2014-01-29 | 天津大学 | 一种基于软件锁相的可调激光吸收光谱气体检测方法 |
CN103528983B (zh) * | 2013-10-23 | 2016-01-20 | 山东省科学院海洋仪器仪表研究所 | 一种气体检测装置及气体检测方法 |
CN203616250U (zh) * | 2013-12-18 | 2014-05-28 | 天津科技大学 | 一种用于监测农产品运输车车厢中氨气含量的装置 |
CN203772736U (zh) * | 2014-04-18 | 2014-08-13 | 廊坊开元高技术开发公司 | 一种抗干扰汞蒸气测量装置 |
-
2015
- 2015-07-16 JP JP2015142206A patent/JP6523840B2/ja not_active Expired - Fee Related
-
2016
- 2016-07-13 CN CN201610550431.4A patent/CN106353263A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2017026345A (ja) | 2017-02-02 |
CN106353263A (zh) | 2017-01-25 |
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