JP6519649B2 - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- JP6519649B2 JP6519649B2 JP2017505779A JP2017505779A JP6519649B2 JP 6519649 B2 JP6519649 B2 JP 6519649B2 JP 2017505779 A JP2017505779 A JP 2017505779A JP 2017505779 A JP2017505779 A JP 2017505779A JP 6519649 B2 JP6519649 B2 JP 6519649B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 38
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- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 40
- 229910052698 phosphorus Inorganic materials 0.000 claims description 40
- 239000011574 phosphorus Substances 0.000 claims description 40
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- 238000000034 method Methods 0.000 claims description 13
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- 238000002513 implantation Methods 0.000 claims description 9
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 31
- 229910052710 silicon Inorganic materials 0.000 description 31
- 239000010703 silicon Substances 0.000 description 31
- 230000000052 comparative effect Effects 0.000 description 12
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- 229910002601 GaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
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Description
図1は、本発明の実施の形態1に係る半導体装置を示す断面図である。この半導体装置はIGBTである。n型シリコン基板1の表面にp型ベース層2が形成されている。p型ベース層2上にn+型エミッタ層3とp+型コンタクト層4が形成されている。p型ベース層2とn+型エミッタ層3を貫通するトレンチ内にゲート絶縁膜を介してトレンチゲート5が形成されている。トレンチゲート5上に層間絶縁膜6が形成されている。エミッタ電極7がn型シリコン基板1の表面に形成され、p+型コンタクト層4に接続されている。
図13は、本発明の実施の形態2に係る半導体装置を示す断面図である。この半導体装置はダイオードである。n型シリコン基板1の表面にp型アノード層13が形成されている。アノード電極14がn型シリコン基板1の表面に形成され、p型アノード層13に接続されている。実施の形態1と同様にn型シリコン基板1の裏面に第1及び第2のn+型バッファ層8,9が形成されている。カソード電極15がn型シリコン基板1の裏面に形成され、第2のn+型バッファ層9に接続されている。
Claims (12)
- 半導体基板と、
前記半導体基板の表面に形成されたp型層と、
前記半導体基板の裏面に形成された第1及び第2のn型バッファ層とを備えた半導体装置であって、
前記第1のn型バッファ層は、前記半導体基板の裏面からの深さが異なり、前記半導体基板の裏面からの深さが深いほど注入量が低い複数のピーク濃度を有するプロトンを含み、
前記第2のn型バッファ層はリンを含み、
前記リンのピーク濃度の位置は前記プロトンのピーク濃度の位置よりも前記半導体基板の裏面から浅く前記半導体基板の裏面から1μmより深く6μmより浅い位置であって、
前記リンのピーク濃度は前記プロトンのピーク濃度よりも高く、
前記プロトンのピーク濃度の位置においてプロトンの濃度がリンの濃度よりも高く、
前記プロトンの前記複数のピーク濃度は、前記半導体基板の裏面から6μm以上30μm以下の深さにおいて3つ以上存在することを特徴とする半導体装置。 - 半導体基板と、
前記半導体基板の表面に形成されたp型層と、
前記半導体基板の裏面に形成された第1及び第2のn型バッファ層とを備えた半導体装置であって、
前記第1のn型バッファ層は、前記半導体基板の裏面からの深さが異なり、前記半導体基板の裏面からの深さが深いほど注入量が低い複数のピーク濃度を有するプロトンを含み、
前記第2のn型バッファ層はリンを含み、
前記リンのピーク濃度の位置は前記プロトンのピーク濃度の位置よりも前記半導体基板の裏面から浅く前記半導体基板の裏面から1μmより深く6μmより浅い位置であって、
前記リンのピーク濃度は前記プロトンのピーク濃度よりも高く、
前記プロトンのピーク濃度の位置においてプロトンの濃度がリンの濃度よりも高く、
前記プロトンの前記複数のピーク濃度は、前記半導体基板の裏面から6μm以上30μm以下の深さのみに位置することを特徴とする半導体装置。 - 前記リンの注入量は前記プロトンの注入量よりも低いことを特徴とする請求項1又は2に記載の半導体装置。
- 請求項1から3の何れか1項に記載の半導体装置の製造方法であって、
半導体製造用イオン注入装置を用いて異なる加速電圧で複数回のプロトン注入を実施して前記第1のn型バッファ層を形成することを特徴とする半導体装置の製造方法。 - 前記複数回のプロトン注入において加速電圧が高くなるほど注入量を下げることを特徴とする請求項4に記載の半導体装置の製造方法。
- 前記複数回のプロトン注入の中で最も加速電圧が高いプロファイルの注入量とその次に加速電圧が高いプロファイルの注入量が同じであることを特徴とする請求項4に記載の半導体装置の製造方法。
- リンの活性化をレーザーアニールで実施することを特徴とする請求項4〜6の何れか1項に記載の半導体装置の製造方法。
- 前記プロトンの活性化を350℃〜450℃のファーネスアニールで実施することを特徴とする請求項4〜7の何れか1項に記載の半導体装置の製造方法。
- 前記リンの注入の加速電圧は1MeV以下であることを特徴とする請求項4〜8の何れか1項に記載の半導体装置の製造方法。
- 前記プロトンの注入の加速電圧は500keV以上1.5MeV以下であることを特徴とする請求項4〜9の何れか1項に記載の半導体装置の製造方法。
- 前記半導体基板の裏面に裏面電極を形成し、
前記プロトンの活性化のための熱処理と前記裏面電極と前記半導体基板のオーミック接触を取るための熱処理を同一工程で実施することを特徴とする請求項4〜10の何れか1項に記載の半導体装置の製造方法。 - 前記第1のn型バッファ層に含まれる前記プロトンの前記複数のピーク濃度は、前記半導体基板の裏面からの距離が大きくなるにつれ小さくなることを特徴とする請求項1から3の何れか1項に記載の半導体装置。
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