JP6509315B1 - Work drying judgment method after steam cleaning and steam cleaning vacuum drying apparatus - Google Patents

Work drying judgment method after steam cleaning and steam cleaning vacuum drying apparatus Download PDF

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JP6509315B1
JP6509315B1 JP2017243614A JP2017243614A JP6509315B1 JP 6509315 B1 JP6509315 B1 JP 6509315B1 JP 2017243614 A JP2017243614 A JP 2017243614A JP 2017243614 A JP2017243614 A JP 2017243614A JP 6509315 B1 JP6509315 B1 JP 6509315B1
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JP2019109029A (en
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石川　哲也
哲也 石川
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Act Five Co Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum

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Abstract

【課題】蒸気洗浄後のワークの乾燥不良を検知することができ、それにより蒸気洗浄真空乾燥装置の生産性を高くすることができるワーク乾燥判定方法を提供する。【解決手段】気密にした真空槽内にワークを収容して洗浄液の蒸気を導入することによりワークの蒸気洗浄を行う蒸気洗浄工程の後に、真空槽内を減圧することでワークの表面に残留する洗浄液を突沸させることによりワークを乾燥させる真空乾燥工程におけるワークの乾燥の良否を判定する方法であって、前記真空乾燥工程において、前記真空槽内の圧力が所定の目的圧力に到達し（Ｓ２）、該目的圧力になった時の該真空槽内の温度が所定の目的温度以上であって（Ｓ５）、且つ、真空乾燥工程の開始時から所定の時間が経過するまでの間、真空槽内の温度低下が所定範囲内にある（Ｓ８）ときに、ワークの乾燥が良好であると判定する（Ｓ９）。【選択図】図２An object of the present invention is to provide a workpiece drying determination method capable of detecting a drying defect of a workpiece after steam cleaning, thereby enhancing the productivity of the steam cleaning vacuum drying apparatus. A workpiece is accommodated in a vacuum-tight vacuum chamber and a cleaning solution vapor is introduced to vapor-clean the workpiece. After the steam cleaning step, the pressure in the vacuum chamber is reduced to remain on the surface of the workpiece. It is a method of judging the quality of drying of a work in a vacuum drying process of drying a work by bumping a cleaning liquid, wherein the pressure in the vacuum tank reaches a predetermined target pressure in the vacuum drying process (S2) The temperature in the vacuum chamber when the target pressure is reached is equal to or higher than the predetermined target temperature (S5), and the vacuum chamber is in the vacuum chamber from the start of the vacuum drying process until the predetermined time passes. It is determined that the drying of the work is good (S9), when the temperature drop of the temperature is within the predetermined range (S8). [Selected figure] Figure 2

Description

本発明は、ワークを洗浄液の蒸気で洗浄した後、真空乾燥させる際に該ワークが乾燥したか否かを判定するワーク乾燥判定方法、及び該ワーク乾燥判定方法を用いた蒸気洗浄真空乾燥装置に関する。   The present invention relates to a method for determining whether or not a workpiece has been dried when vacuum drying it after cleaning the workpiece with a cleaning solution vapor, and to a vapor cleaning vacuum drying apparatus using the workpiece drying determination method. .

従来、洗浄液を気化させた蒸気を用いてワークを洗浄した後、ワークに付着した洗浄液を除去するために、真空乾燥が行われている。例えば、特許文献１には、洗浄液を気化させた蒸気を用いたワークの洗浄と、その後のワークの乾燥を同じ真空槽内で行う蒸気洗浄真空乾燥装置が記載されている。この蒸気洗浄真空乾燥装置では、洗浄対象のワークを真空槽に収容した後、真空槽を密閉し、真空槽内の空気を排出したうえで、真空槽内に洗浄液の高温の蒸気を供給する。蒸気が低温のワークに接触したとき、蒸気はワークの表面で液化し、該表面が洗浄される。液化の際に、蒸気はワークと熱交換を行い、ワークが加温される。ワークの表面が十分に洗浄され、ワークが十分加温された後、蒸気の供給を停止し、真空槽内を急激に減圧する。これにより、ワークの表面に付着していた洗浄液が突沸・気化し、該表面が乾燥する。   2. Description of the Related Art Conventionally, vacuum cleaning is performed in order to remove the cleaning liquid adhering to a work after the work is cleaned using the vapor of the cleaning liquid. For example, Patent Document 1 describes a vapor cleaning vacuum drying apparatus that performs cleaning of a work using vapor obtained by vaporizing a cleaning liquid and drying of the work thereafter in the same vacuum tank. In this vapor cleaning vacuum drying apparatus, after the work to be cleaned is accommodated in a vacuum chamber, the vacuum chamber is sealed, the air in the vacuum chamber is exhausted, and the high temperature steam of the cleaning liquid is supplied into the vacuum chamber. When the vapor comes in contact with the low temperature work, the vapor liquefies on the surface of the work and the surface is cleaned. At the time of liquefaction, the steam exchanges heat with the work to heat the work. After the surface of the work is sufficiently cleaned and the work is sufficiently heated, the supply of steam is stopped and the pressure in the vacuum chamber is rapidly reduced. As a result, the cleaning liquid adhering to the surface of the work is bumped and vaporized to dry the surface.

特開2011-242035号公報JP, 2011-242035, A

蒸気洗浄の際に、ワークの加温が不十分であったり、蒸気の供給が過多になって多量の洗浄液がワークの表面に付着した場合には、真空乾燥を行ってもワークの表面が完全には乾燥しないおそれがある。そうなると、ワークの表面に残留した洗浄液によりシミが生じてしまう。そのため、ワークの表面の乾燥の良否を判定することが求められるが、従来の蒸気洗浄真空乾燥装置ではそのような判定を行うことができなかった。   If the workpiece is not sufficiently heated during steam cleaning, or if a large amount of cleaning liquid adheres to the surface of the workpiece due to excessive supply of steam, the surface of the workpiece is complete even if vacuum drying is performed May not dry out. If so, stains will be generated by the cleaning liquid remaining on the surface of the work. Therefore, although it is required to determine the quality of drying of the surface of the work, such determination can not be performed by the conventional vapor cleaning vacuum drying apparatus.

個々の洗浄毎に乾燥の良否を判定する代わりに、確実にワークを乾燥させるために、使用される蒸気洗浄真空乾燥装置毎に、蒸気洗浄真空乾燥装置の販売者が納入先で処理対象として予定される全ての種類のワークを用いて試験を行い、それらが全て十分に乾燥する条件を見出して、蒸気洗浄及び真空乾燥を行う際の条件を設定することが行われている。ここで設定された条件を全ての種類のワークに適用することにより、ワークの種類に関わらず良好な乾燥状態が得られる。しかしながら、この方法では、最も乾燥し難いワークに合わせて条件を設定するため、それ以外のワークでは乾燥に必要以上の時間を要してしまう等、生産性が低下する原因となってしまう。   In order to ensure that the work is dried instead of determining the quality of drying for each cleaning, the seller of the vapor cleaning vacuum drying device is scheduled to be processed at the delivery destination for each vapor cleaning vacuum drying device used. Tests are conducted using all types of workpieces to find conditions under which all of them are sufficiently dried, and conditions for steam cleaning and vacuum drying are set. By applying the conditions set here to all types of work, a good dry state can be obtained regardless of the type of work. However, in this method, since the conditions are set in accordance with the most difficult to dry work, the other works require more time than necessary for drying, which causes a decrease in productivity.

本発明が解決しようとする課題は、蒸気洗浄後のワークの乾燥不良を検知することができ、それにより蒸気洗浄真空乾燥装置の生産性を高くすることができるワーク乾燥判定方法、及び該ワーク乾燥判定方法を用いた蒸気洗浄真空乾燥装置を提供することである。   The problem to be solved by the present invention is a method for determining drying of a workpiece, which can detect poor drying of a workpiece after steam cleaning, thereby enhancing the productivity of the steam cleaning vacuum drying apparatus, and the workpiece drying. It is providing a steam cleaning vacuum drying device using a determination method.

上記課題を解決するために成された本発明に係るワーク乾燥判定方法は、気密にした真空槽内にワークを収容して洗浄液の蒸気を導入することにより該ワークの蒸気洗浄を行う蒸気洗浄工程の後に、該真空槽内を減圧することで該ワークの表面に残留する洗浄液を突沸させることにより該ワークを乾燥させる真空乾燥工程におけるワークの乾燥の良否を判定する方法であって、
前記真空乾燥工程において、
前記真空槽内の圧力が所定の目的圧力に到達し、
該目的圧力になった時の該真空槽内の温度が所定の目的温度以上であって、且つ、
前記真空乾燥工程の開始時から所定の時間が経過するまでの間、該真空槽内の温度低下が所定範囲内にある
ときに、ワークの乾燥が良好であると判定することを特徴とする。 The work drying determination method according to the present invention configured to solve the above-mentioned problems comprises a steam cleaning step of containing the work in an airtight vacuum tank and introducing the steam of the cleaning solution to perform the steam cleaning of the work. After that, by depressurizing the inside of the vacuum chamber, the cleaning liquid remaining on the surface of the work is bumped to determine the quality of the work in the vacuum drying process of drying the work,
In the vacuum drying step,
The pressure in the vacuum chamber reaches a predetermined target pressure,
The temperature in the vacuum chamber when the target pressure is reached is equal to or higher than a predetermined target temperature, and
It is characterized in that the drying of the work is judged to be good when the temperature decrease in the vacuum chamber is within a predetermined range until a predetermined time elapses from the start of the vacuum drying step.

真空乾燥工程では、真空槽内の圧力は、ワークの表面に付着していた洗浄液が蒸発し続けている間には十分に低下せず、蒸発が（ほぼ）止まると、蒸気洗浄真空乾燥装置毎に定まる目的圧力まで到達する。そのため、本発明に係るワーク乾燥判定方法では、真空槽内の圧力がこの目的圧力に到達していることを、ワークの乾燥が良好であることの第１の判定要件とする。この目的圧力は、真空槽の容積、真空槽からの気体のリークの大きさ、真空槽内を減圧する装置（ポンプ）の性能等により定まる。   In the vacuum drying process, the pressure in the vacuum chamber does not decrease sufficiently while the cleaning liquid adhering to the surface of the work continues to evaporate, and when evaporation stops (almost), every vapor cleaning vacuum drying apparatus To reach the target pressure determined in Therefore, in the work drying determination method according to the present invention, the fact that the pressure in the vacuum chamber has reached this target pressure is taken as the first determination requirement for the good drying of the work. The target pressure is determined by the volume of the vacuum chamber, the size of gas leak from the vacuum chamber, the performance of the device (pump) for reducing the pressure in the vacuum chamber, and the like.

但し、真空槽内の圧力が目的圧力に到達したとしても、該圧力における真空槽内の温度が低すぎると、ワークの温度も低く、それにより洗浄液がワークの表面に付着したままの状態で蒸発しなくなっているおそれがある。そのため、本発明に係るワーク乾燥判定方法では、真空槽内の圧力が目的圧力に到達した時の該真空槽内の温度が所定の目的温度以上であることを、ワークの乾燥が良好であることの第２の判定要件とする。この目的温度は、目的圧力に依存して定まる。   However, even if the pressure in the vacuum chamber reaches the target pressure, if the temperature in the vacuum chamber at this pressure is too low, the temperature of the workpiece is also low, and evaporation occurs with the cleaning liquid still adhering to the surface of the workpiece There is a possibility that it is not done. Therefore, in the work drying determination method according to the present invention, the drying of the work is good that the temperature in the vacuum tank is equal to or higher than the predetermined target temperature when the pressure in the vacuum tank reaches the target pressure. As the second judgment requirement of The target temperature is determined depending on the target pressure.

また、真空槽内の圧力が低下（真空度が上昇）して洗浄液が突沸することでワークの表面が乾燥すれば真空乾燥工程の間の温度変化は小さいものとなる。それに対して真空槽内の圧力が低下（真空度が上昇）して洗浄液が突沸した後であっても洗浄液がワークの表面に残存しているという乾燥不良の状態では、突沸後、圧力が（ほとんど）低下しなくなるまでの間、該表面から洗浄液が少量ずつ蒸発し続ける。このような場合には、洗浄液の蒸発に伴ってワークの熱が奪われてゆき（気化熱）、ワークの温度が徐々に低下してゆく。そこで、本発明に係るワーク乾燥判定方法では、真空乾燥工程の開始（すなわち、減圧の開始）時から所定の時間が経過するまでの間の真空槽内の温度低下が所定範囲内にあることを、ワークの乾燥が良好であることの第３の判定要件とする。ここで「所定の時間」は、真空乾燥工程の開始時から圧力が（ほとんど）低下しなくなるまでの時間を勘案して（例えば、そのような時間に、余裕を見た分の時間を追加して）定める。典型的には、この所定の時間を、真空乾燥工程の開始から終了までの時間とする。   In addition, if the pressure in the vacuum tank decreases (the degree of vacuum rises) and the cleaning liquid is bumped to dry the surface of the work, the temperature change during the vacuum drying process becomes small. On the other hand, even if the pressure in the vacuum chamber drops (the degree of vacuum rises) and the washing liquid is bumped, the washing liquid remains on the surface of the work even in the poor drying state, the pressure is The cleaning solution continues to evaporate little by little from the surface until it almost ceases to decline. In such a case, the heat of the work is removed as the cleaning liquid evaporates (heat of vaporization), and the temperature of the work gradually decreases. Therefore, in the work drying determination method according to the present invention, the temperature decrease in the vacuum tank during a predetermined time elapses from the start of the vacuum drying step (that is, the start of the pressure reduction) is within the predetermined range. , And the third judgment requirement that the drying of the work is good. Here, “predetermined time” is the time taken for the pressure to stop decreasing (mostly) from the start of the vacuum drying process (for example, such a time is added to the time for which a margin is seen ). Typically, this predetermined time is the time from the start of the vacuum drying step to the end.

本発明に係るワーク乾燥判定方法では、以上の第１〜第３の判定要件を全て満たした場合には、ワークの乾燥が良好であると判定し、それら判定要件のうちの１つでも満たさないものがあれば、ワークの乾燥が不良であると判定する。   In the work drying determination method according to the present invention, when all the above first to third determination requirements are satisfied, it is determined that the drying of the work is good, and even one of the determination requirements is not satisfied. If there is anything, it is determined that the drying of the work is poor.

本発明に係るワーク乾燥判定方法によれば、乾燥の良否をワークの種類（ワークの材料及び形状）に関わらず判定することができる。   According to the workpiece drying determination method according to the present invention, the quality of the drying can be determined regardless of the type of the workpiece (the material and the shape of the workpiece).

本発明に係るワーク乾燥判定方法は、個々のワークを真空乾燥させる度に、ワークの乾燥が良好であると判定するまで、該真空乾燥の操作を継続しつつ繰り返し行うようにすることができる。これにより、必要以上の時間を掛けることなく、個々のワークを確実に乾燥させることができるため、蒸気洗浄真空乾燥装置の生産性を高くすることができる。   The work drying determination method according to the present invention can be repeatedly performed while continuing the vacuum drying operation until it is determined that the drying of the work is good each time the work is vacuum dried. As a result, the individual works can be reliably dried without spending time more than necessary, and the productivity of the steam cleaning and vacuum drying apparatus can be increased.

一方、同じ種類の複数のワークをそれぞれ同じ条件で蒸気洗浄及び真空乾燥を行うと、通常は各ワークにおける乾燥の良否の判定結果が近いものとなることから、1個のワークに対して蒸気洗浄及び真空乾燥を行って本発明の方法により乾燥が良好であると判定されたときの、蒸気洗浄に蒸気を供給した時間である蒸気供給時間及び真空乾燥において減圧を行った時間である減圧時間を求め、同種の他のワークに対して（本発明に係るワーク乾燥判定方法を実施することなく）該蒸気供給時間だけ蒸気洗浄を行ったうえで該減圧時間だけ真空乾燥を行うようにしてもよい。この場合、ワークの種類に応じた適切な条件で蒸気洗浄及び真空乾燥を行うことができ、且つ、蒸気洗浄真空乾燥装置の生産性を損ねることがない。   On the other hand, if steam cleaning and vacuum drying are performed under the same conditions for a plurality of workpieces of the same type, the result of determination of the quality of drying on each workpiece will usually be close, so steam cleaning on one workpiece is common. And vacuum drying, and when it is determined that the drying is good according to the method of the present invention, a steam supply time which is a time when steam is supplied to steam cleaning and a decompression time which is a time when vacuum is reduced in vacuum drying It is also possible to perform steam cleaning only for the vapor supply time with respect to another work of the same type (without performing the work drying determination method according to the present invention) and then perform vacuum drying only for the decompression time. . In this case, steam cleaning and vacuum drying can be performed under appropriate conditions according to the type of workpiece, and the productivity of the steam cleaning vacuum drying apparatus is not impaired.

本発明に係るワーク乾燥判定方法によってワークの乾燥が不良であると判定されたときには、蒸気洗浄工程におけるワークの加温が不十分であることが原因となっている可能性がある。そこで、前記蒸気洗浄工程において前記真空槽内の温度を測定することが望ましい。この温度を測定しておくことにより、ワークの乾燥が不良であると判定されたときに、蒸気洗浄時のワークの加温が不十分であることが原因になっているか否かを判断する材料とすることができる。   When it is determined by the work drying determination method according to the present invention that the drying of the work is not good, there is a possibility that the heating of the work in the steam cleaning step is insufficient. Therefore, it is desirable to measure the temperature in the vacuum chamber in the steam cleaning step. By measuring this temperature, when it is determined that the drying of the work is poor, it is determined whether the cause of insufficient heating of the work at the time of steam cleaning is the cause. It can be done.

本発明に係る蒸気洗浄真空乾燥装置は、
a) ワークを気密に収容する真空槽と、
b) 前記真空槽に洗浄液の蒸気を供給する蒸気供給部と、
c) 前記真空槽内を減圧する減圧部と、
d) 前記真空槽内の温度を測定する温度測定部と、
e) 前記真空槽内の圧力を測定する圧力測定部と、
f) 前記蒸気供給部から前記真空槽内に洗浄液の蒸気を供給した後に、前記減圧部により前記真空槽内を減圧するよう、該蒸気供給部及び該減圧部を制御する蒸気洗浄真空乾燥制御部と、
g) 前記減圧部により前記真空槽内を減圧する操作の間、前記温度測定部から前記真空槽内の温度を取得すると共に前記圧力測定部から前記真空槽内の圧力を取得し、前記圧力が所定の目的圧力以下に到達し、該目的圧力に到達した時の該真空槽内の温度が所定の目的温度以上であって、且つ、前記真空槽内を減圧する操作の開始時から所定の時間が経過するまでの間、該真空槽内の温度低下が所定範囲内にあるときにワークの乾燥が良好であると判定する乾燥判定部と
を備えることを特徴とする。 The steam cleaning vacuum drying apparatus according to the present invention is
a) A vacuum chamber that contains the work airtightly,
b) a steam supply unit for supplying a cleaning solution vapor to the vacuum chamber;
c) a pressure reducing section for reducing the pressure in the vacuum chamber;
d) a temperature measuring unit for measuring the temperature in the vacuum chamber;
e) a pressure measurement unit that measures the pressure in the vacuum chamber;
f) A vapor cleaning vacuum drying control unit that controls the vapor supply unit and the pressure reducing unit such that the pressure reducing unit reduces the pressure in the vacuum chamber after supplying the cleaning solution vapor from the vapor supply unit into the vacuum chamber. When,
g) During the operation of reducing the pressure in the vacuum chamber by the pressure reducing unit, the temperature in the vacuum chamber is acquired from the temperature measurement unit and the pressure in the vacuum chamber is acquired from the pressure measurement unit, and the pressure is The temperature in the vacuum chamber reached a predetermined target pressure or lower and reached the target pressure is a predetermined target temperature or higher, and a predetermined time from the start of the operation for reducing the pressure in the vacuum chamber The apparatus further comprises: a drying determination unit that determines that the drying of the workpiece is good when the temperature decrease in the vacuum tank is within a predetermined range until the elapse of.

本発明によれば、蒸気洗浄後のワークの乾燥不良を検知することができ、それにより蒸気洗浄真空乾燥装置の生産性を高くすることができる。   According to the present invention, it is possible to detect a drying defect of a work after steam cleaning, thereby making it possible to increase the productivity of the steam cleaning vacuum drying apparatus.

本発明に係る蒸気洗浄真空乾燥装置の一実施形態を示す概略構成図。BRIEF DESCRIPTION OF THE DRAWINGS The schematic block diagram which shows one Embodiment of the vapor | steam cleaning vacuum drying apparatus which concerns on this invention. 本実施形態のワーク乾燥判定方法を示すフローチャート。3 is a flowchart showing a workpiece drying determination method of the present embodiment. ワークの乾燥が良好である場合(a)及び不良である場合(b)における、真空乾燥工程開始からの経過時間と真空槽内の圧力及び温度の関係のモデル例を示すグラフ。The graph which shows the model example of the relationship of the pressure and temperature in the elapsed time from the vacuum drying process start, and the pressure and temperature in a vacuum chamber in (a) and the case (b) when a workpiece | work drying is favorable. 蒸気洗浄工程における真空槽内の温度変化の一例を示すグラフ。The graph which shows an example of the temperature change in the vacuum chamber in a vapor | steam washing | cleaning process.

図１〜図４を用いて、本発明に係るワーク乾燥判定方法を含む蒸気洗浄真空乾燥方法、及び蒸気洗浄真空乾燥装置の実施形態を説明する。   An embodiment of a steam cleaning vacuum drying method and a steam cleaning vacuum drying apparatus including the workpiece drying determination method according to the present invention will be described with reference to FIGS. 1 to 4.

(1) 本実施形態の蒸気洗浄真空乾燥装置の構成
図１は、本実施形態の蒸気洗浄真空乾燥装置１０の構成を示す概略図である。蒸気洗浄真空乾燥装置１０は、真空槽１１と、蒸気供給部１２と、減圧部１３と、温度センサ（温度測定部）１４と、圧力センサ（圧力測定部）１５と、制御部１６と、操作部１７を有する。 (1) Configuration of Steam Cleaning Vacuum Drying Device of the Present Embodiment FIG. 1 is a schematic view showing the configuration of the steam cleaning vacuum drying device 10 of the present embodiment. The vapor cleaning vacuum drying apparatus 10 includes a vacuum tank 11, a vapor supply unit 12, a pressure reducing unit 13, a temperature sensor (temperature measuring unit) 14, a pressure sensor (pressure measuring unit) 15, a control unit 16, and operations. It has a part 17.

真空槽１１は上部に蓋１１１を有する。この蓋１１１を取り外すことで、真空槽１１の内部にワークＷを収容することができる。蓋１１１には、真空槽１１から蓋１１１を取り外す際に真空槽１１の内部を常圧にできるように、大気開放弁Ｖ１及び大気開放口１１２が設けられている、   The vacuum chamber 11 has a lid 111 at the top. The work W can be accommodated inside the vacuum chamber 11 by removing the lid 111. An atmosphere open valve V1 and an atmosphere open port 112 are provided on the lid 111 so that the inside of the vacuum chamber 11 can be brought to normal pressure when the lid 111 is removed from the vacuum chamber 11.

蒸気供給部１２は、洗浄液を貯留する貯留槽１２１、貯留槽１２１内の洗浄液を加熱する蒸気生成ヒータ１２２、並びに貯留槽１２１と真空槽１１を接続する蒸気導入管１２３及び返送管１２４を有する。蒸気導入管１２３には蒸気導入弁Ｖ２が、返送管１２４には返送弁Ｖ３が、それぞれ設けられている。   The steam supply unit 12 includes a storage tank 121 for storing a cleaning liquid, a steam generation heater 122 for heating the cleaning liquid in the storage tank 121, and a steam introducing pipe 123 and a return pipe 124 for connecting the storage tank 121 and the vacuum tank 11. The steam introduction pipe 123 is provided with a steam introduction valve V2, and the return pipe 124 is provided with a return valve V3.

減圧部１３は、真空ポンプ１３１と、真空槽１１と真空ポンプ１３１を接続する排気管１３２と、排気管１３２内を加熱する排気ヒータ１３３を有する。排気管１３２には排気弁Ｖ４が設けられている。排気ヒータ１３３は、真空槽１１から排気された気体中に微小な液滴が含まれている場合にそれを加熱して気化させることで、液滴によって真空ポンプ１３１が故障することを防止する役割を有する。   The pressure reducing unit 13 includes a vacuum pump 131, an exhaust pipe 132 connecting the vacuum chamber 11 and the vacuum pump 131, and an exhaust heater 133 heating the inside of the exhaust pipe 132. The exhaust pipe 132 is provided with an exhaust valve V4. The exhaust heater 133 serves to prevent the vacuum pump 131 from being damaged by droplets by heating and vaporizing minute droplets, if the gas exhausted from the vacuum chamber 11 contains the minute droplets. Have.

温度センサ１４は真空槽１１内の温度を測定するものであり、圧力センサ１５は真空槽１１内の圧力を測定するものである。これら温度及び圧力の測定データは、電気信号で制御部１６に送信される。   The temperature sensor 14 measures the temperature in the vacuum chamber 11, and the pressure sensor 15 measures the pressure in the vacuum chamber 11. The measurement data of the temperature and pressure are transmitted to the control unit 16 as an electrical signal.

制御部１６はマイクロコンピュータ等で構成され、蒸気洗浄真空乾燥制御部１６１と乾燥判定部１６２を機能的に備えている。蒸気洗浄真空乾燥制御部１６１は、真空槽１１内に収容されたワークＷに対して蒸気洗浄及び乾燥を行うよう、後述のように、蒸気供給部１２の蒸気生成ヒータ１２２、蒸気導入弁Ｖ２及び返送弁Ｖ３、並びに減圧部１３の真空ポンプ１３１、排気ヒータ１３３及び排気弁Ｖ４を制御する。乾燥判定部１６２は、温度センサ１４及び圧力センサ１５からの信号を受けて、本発明に係るワーク乾燥判定方法を実行する。   The control unit 16 is configured by a microcomputer or the like, and functionally includes a vapor cleaning vacuum drying control unit 161 and a drying determination unit 162. The steam cleaning and vacuum drying control unit 161 performs the steam cleaning and drying on the work W contained in the vacuum chamber 11, as described later, the steam generation heater 122 of the steam supply unit 12, the steam introduction valve V2, and The return valve V3 and the vacuum pump 131, the exhaust heater 133 and the exhaust valve V4 of the pressure reducing unit 13 are controlled. The drying determination unit 162 receives the signals from the temperature sensor 14 and the pressure sensor 15, and executes the workpiece drying determination method according to the present invention.

操作部１７は、蒸気洗浄真空乾燥装置１０の使用者が蒸気洗浄及び真空乾燥の開始の指示や各種の条件の設定のための入力操作を行うためのものであり、キーボード、マウス、タッチパネル等の通常の入力デバイスから成る。   The operation unit 17 is used by the user of the vapor cleaning and vacuum drying apparatus 10 to input instructions for starting the vapor cleaning and vacuum drying and for setting various conditions, such as a keyboard, a mouse, and a touch panel. It consists of a normal input device.

(2) 本実施形態の蒸気洗浄真空乾燥装置の動作
本実施形態の蒸気洗浄真空乾燥装置１０の動作を説明する。まず、使用者が操作部１７を操作することにより、蒸気洗浄真空乾燥装置１０を起動させる。蒸気洗浄真空乾燥制御部１６１は、蒸気生成ヒータ１２２に通電し、貯留槽１２１内の洗浄液の加熱を開始する。このとき、貯留槽１２１内に洗浄液の量を検出するセンサを設けておき、液量が所定値以下である場合には使用者に洗浄液の補充を求めるよう警告を発するようにしてもよい。 (2) Operation of Steam Cleaning Vacuum Drying Device of This Embodiment The operation of the steam cleaning vacuum drying device 10 of this embodiment will be described. First, the user operates the operation unit 17 to activate the vapor cleaning vacuum drying apparatus 10. The vapor cleaning vacuum drying control unit 161 energizes the vapor generation heater 122 and starts heating of the cleaning liquid in the storage tank 121. At this time, a sensor for detecting the amount of cleaning liquid may be provided in the storage tank 121, and a warning may be issued to request the user to replenish the cleaning liquid if the amount of liquid is equal to or less than a predetermined value.

使用者は真空槽１１の蓋１１１を開け、ワークＷを真空槽１１内に入れた後、蓋１１１を密閉する。そして、使用者が操作部１７に対して所定の操作を行うことにより、ワークＷの蒸気洗浄工程が開始される。以下、蒸気洗浄工程における各部の動作は、蒸気洗浄真空乾燥制御部１６１により制御される。   After the user opens the lid 111 of the vacuum chamber 11 and places the work W in the vacuum chamber 11, the lid 111 is sealed. Then, the user performs a predetermined operation on the operation unit 17 to start the steam cleaning process of the workpiece W. Hereinafter, the operation of each part in the vapor cleaning step is controlled by the vapor cleaning vacuum drying control unit 161.

蒸気洗浄工程では、まず、真空ポンプ１３１を起動し、排気弁Ｖ４を開放することにより真空槽１１内の空気の排気を開始すると共に、排気ヒータ１３３への通電を開始する。圧力センサ１５からの信号を受けて真空槽１１内の圧力が所定値以下になったことを検知したとき、排気弁Ｖ４を閉鎖する。この段階では通常、排気される気体中に液滴はほとんど含まれないため、排気ヒータ１３３による気体の加熱の必要性は低いが、後述の真空乾燥工程に備えて予備的に加熱をしておく。   In the steam cleaning step, first, the vacuum pump 131 is activated, and the exhaust valve V4 is opened to start the exhaust of the air in the vacuum tank 11, and the energization of the exhaust heater 133 is started. When a signal from the pressure sensor 15 is received and it is detected that the pressure in the vacuum chamber 11 becomes lower than a predetermined value, the exhaust valve V4 is closed. At this stage, since almost no droplets are contained in the gas to be exhausted, the necessity of heating the gas by the exhaust heater 133 is low, but preliminary heating is carried out in preparation for the vacuum drying step described later. .

次に、蒸気導入弁Ｖ２を開放する。これにより、貯留槽１２１内で洗浄液が加熱されることにより発生する蒸気が蒸気導入管１２３を通して真空槽１１内に導入される。真空槽１１内に導入された洗浄液の蒸気は、ワークＷの温度よりも高いため、熱交換を行ってワークＷを加温すると共に、ワークＷの表面で凝縮して該表面を洗浄する。また、この蒸気により真空槽１１内が常圧になる程度まで、蒸気導入弁Ｖ２の開放から時間が経過した後、返送弁Ｖ３を開放することにより、余剰の蒸気及び液化した洗浄液を真空槽１１から返送管１２４を通して貯留槽１２１に返送する。なお、蒸気導入弁Ｖ２及び返送弁Ｖ３は、貯留槽１２１内にも温度センサを設けたうえで、洗浄液が十分に加熱されたことを検知した後に開放するようにしてもよい。   Next, the steam introduction valve V2 is opened. Thereby, the steam generated by heating the cleaning liquid in the storage tank 121 is introduced into the vacuum tank 11 through the steam introduction pipe 123. Since the vapor of the cleaning liquid introduced into the vacuum chamber 11 is higher than the temperature of the work W, the heat exchange is performed to heat the work W, and the surface of the work W is condensed to clean the surface. Further, after time elapses from the opening of the steam introduction valve V2 to such an extent that the inside of the vacuum chamber 11 becomes normal pressure by this steam, the excess steam and liquefied cleaning fluid are vacuum chamber 11 by opening the return valve V3. And return to the storage tank 121 through the return pipe 124. The steam introduction valve V2 and the return valve V3 may be opened after a temperature sensor is provided also in the storage tank 121 and it is detected that the cleaning liquid is sufficiently heated.

ワークＷが十分に加温されて蒸気の温度に近づくと、それ以上は蒸気がほとんど凝縮しなくなり、ワークＷを洗浄する作用がほとんどなくなるため、この時点で、蒸気導入弁Ｖ２及び返送弁Ｖ３を閉鎖することにより蒸気洗浄工程を終了する。この終了のタイミングは、温度センサ１４で得られる真空槽１１内の温度に基づいて決定することができる。あるいは、1個のワークＷを用いて蒸気洗浄及び真空乾燥の予備実験を行い、この予備実験における真空乾燥の際に後述するワーク乾燥判定方法を実行し、ワークＷの乾燥が良好であると判定された予備実験で蒸気洗浄の際に蒸気を真空槽１１内に供給した蒸気供給時間を、実際の蒸気洗浄を行う際の蒸気供給時間としてもよい。   When the work W is sufficiently heated and approaches the temperature of the steam, the steam is hardly condensed further and there is almost no effect of cleaning the work W. At this time, the steam introduction valve V2 and the return valve V3 The steam cleaning process is ended by closing. The timing of the end can be determined based on the temperature in the vacuum chamber 11 obtained by the temperature sensor 14. Alternatively, a preliminary experiment of steam cleaning and vacuum drying is performed using one work W, and the work drying determination method described later is executed during vacuum drying in this preliminary experiment, and it is determined that the drying of the work W is good. The steam supply time in which the steam is supplied into the vacuum chamber 11 in the steam cleaning in the preliminary experiment may be set as the steam supply time in actual steam cleaning.

次に、真空乾燥工程を実行する。真空乾燥工程では、真空ポンプ１３１が作動している状態で、排気弁Ｖ４を開放することにより、真空槽１１内を減圧する。これにより、ワークＷの表面に付着していた洗浄液は、減圧によって沸点が急激に低下し、突沸・気化する。気化した洗浄液の成分は、真空ポンプ１３１により真空槽１１の外部に排出される。その際、真空槽１１から排出される気体を排気ヒータ１３３で加熱することにより、気体中に含まれる洗浄液の液滴を気化し、それにより真空ポンプ１３１の故障を防止する。これら真空ポンプ１３１、排気ヒータ１３３及び排気弁Ｖ４の動作は、蒸気洗浄真空乾燥制御部１６１が制御する。   Next, a vacuum drying process is performed. In the vacuum drying step, while the vacuum pump 131 is operating, the inside of the vacuum chamber 11 is depressurized by opening the exhaust valve V4. As a result, the boiling point of the cleaning liquid adhering to the surface of the workpiece W drops sharply due to the pressure reduction and is bumped and vaporized. The components of the vaporized cleaning liquid are discharged to the outside of the vacuum chamber 11 by the vacuum pump 131. At this time, the gas discharged from the vacuum chamber 11 is heated by the exhaust heater 133 to vaporize the droplets of the cleaning liquid contained in the gas, thereby preventing the vacuum pump 131 from malfunctioning. The operations of the vacuum pump 131, the exhaust heater 133 and the exhaust valve V4 are controlled by the vapor cleaning vacuum drying control unit 161.

この真空乾燥工程を実行している間、乾燥判定部１６２は、本発明に係るワーク乾燥判定方法を実行する。あるいは、1個のワークＷを用いて蒸気洗浄及び真空乾燥の予備実験を行い、この予備実験における真空乾燥の際に後述のワーク乾燥判定方法を実行し、ワークＷの乾燥が良好であると判定された予備実験と同じ条件で実際の真空乾燥工程を行ってもよい。予備実験を行った場合には、実際の真空乾燥工程ではワーク乾燥判定方法を実行する必要はない。   While the vacuum drying process is being performed, the drying determination unit 162 executes the workpiece drying determination method according to the present invention. Alternatively, a preliminary experiment of steam cleaning and vacuum drying is performed using one work W, and the work drying determination method described later is executed during vacuum drying in this preliminary experiment, and it is determined that the drying of the work W is good. The actual vacuum drying step may be performed under the same conditions as the preliminary experiment. When the preliminary experiment is performed, it is not necessary to execute the workpiece drying determination method in the actual vacuum drying process.

本発明に係るワーク乾燥判定方法により乾燥が良好であると判定された時点、又は予備実験で定めた条件で真空乾燥工程を実行した後、排気弁Ｖ４を閉鎖し、真空乾燥工程を終了する。その後、大気開放弁Ｖ１を開放することにより真空槽１１内の真空を破り、使用者が蓋１１１を取り外して、真空槽１１内からワークＷを取り出すことにより、一連の操作が完了する。   After the vacuum drying process is performed under the condition determined by the work drying determination method according to the present invention that drying is good or under the conditions determined in the preliminary experiment, the exhaust valve V4 is closed, and the vacuum drying process is completed. Thereafter, the atmosphere release valve V1 is opened to break the vacuum in the vacuum chamber 11, the user removes the lid 111, and the work W is taken out from the vacuum chamber 11, thereby completing a series of operations.

(3) 本実施形態の蒸気洗浄真空乾燥装置で実行するワーク乾燥判定方法
次に、図２及び図３を用いて、本実施形態の蒸気洗浄真空乾燥装置１０で実行するワーク乾燥判定方法を説明する。図２は、本実施形態のワーク乾燥判定方法を示すフローチャートである。 (3) Method of Determining Drying of Workpiece Performed by the Steam Cleaning Vacuum Drying Device of the Present Embodiment Next, the method of determining drying of the work piece executed by the steam cleaning vacuum drying device 10 of the present embodiment will be described using FIGS. Do. FIG. 2 is a flowchart showing the workpiece drying determination method of the present embodiment.

乾燥判定部１６２は、真空乾燥工程の開始後、圧力センサ１５からの信号を受け、真空槽１１内の圧力のデータを取得する（ステップＳ１）。乾燥判定部１６２は、得られた圧力のデータが所定の目的圧力に到達しているか否かを判定する（ステップＳ２）。ここで、目的圧力は、ワークＷの表面に付着していた洗浄液の蒸発が（ほぼ）止まり、それ以上は圧力が（ほとんど）低下しなくなるときの圧力で規定され、真空槽１１の容積や真空槽１１における気体のリークの大きさ、真空ポンプ１３１の性能等により定まる。目的圧力は、予備実験を行い、実際にワークＷが乾燥したときの到達圧力から定めることができる   The drying determination unit 162 receives a signal from the pressure sensor 15 after the start of the vacuum drying process, and acquires data of the pressure in the vacuum chamber 11 (step S1). The drying determination unit 162 determines whether the obtained pressure data has reached a predetermined target pressure (step S2). Here, the target pressure is defined by the pressure at which the evaporation of the cleaning solution adhering to the surface of the work W stops (almost) and the pressure no longer decreases (almost), and the volume of the vacuum chamber 11 and the vacuum It becomes settled by the magnitude | size of the leak of the gas in the tank 11, the performance of the vacuum pump 131, etc. The target pressure can be determined from the ultimate pressure when the workpiece W is actually dried by conducting a preliminary experiment.

ステップＳ２において乾燥判定部１６２がNoと判定した場合には、乾燥判定部１６２は真空乾燥工程の開始から所定時間経過したか否かを判定する（ステップＳ３）。ステップＳ３でYesと判定した場合には、乾燥判定部１６２はワークＷの乾燥が不良と判定し（ステップＳ１０）、ワーク乾燥判定方法を終了する。このようにワークの乾燥が不良であった場合の措置は後述する。一方、ステップＳ３でNoと判定した場合には、減圧を未だ必要な時間だけ行っていないことを意味することから、ステップＳ１に戻り、目的圧力に到達するか又は所定時間が経過するまで、ステップＳ１〜Ｓ３の操作を繰り返す。なお、前記所定時間は、ワークＷに付着した洗浄液の量が多い場合等、通常よりも到達圧力に到達するまでの時間が長い場合を勘案して定める。   If the drying determination unit 162 determines No in step S2, the drying determination unit 162 determines whether a predetermined time has elapsed since the start of the vacuum drying process (step S3). When it is determined as Yes in step S3, the drying determination unit 162 determines that the drying of the workpiece W is not good (step S10), and the workpiece drying determination method ends. The measures in the case where the drying of the work is thus poor will be described later. On the other hand, when the determination in step S3 is No, it means that the pressure reduction has not been performed for only the necessary time, so the process returns to step S1 and the step continues until the target pressure is reached or a predetermined time elapses. The operations of S1 to S3 are repeated. The predetermined time is determined in consideration of the case where the time to reach the ultimate pressure is longer than usual, such as when the amount of the cleaning liquid attached to the work W is large.

ステップＳ２において乾燥判定部１６２がYesと判定した場合には、ステップＳ４に進む。ステップＳ４では、乾燥判定部１６２は、温度センサ１４からの信号を受け、真空槽１１内の温度のデータを取得する。続いて、乾燥判定部１６２は、真空槽１１内の温度が所定の目的温度以上であるか否かを判定する（ステップＳ５）。目的温度は、予備実験を行い、実際にワークＷが乾燥したときの真空槽１１内の温度から定めることができる。ステップＳ５において乾燥判定部１６２がYesと判定した場合にはステップＳ６に進む。一方、ステップＳ５において乾燥判定部１６２がNoと判定した場合には、蒸気洗浄工程においてワークＷが十分に加熱されていなかったか、又はワークＷに付着した洗浄液の量が多すぎることで目的圧力に到達するまでに気化熱によって温度が低下しすぎたことを意味する。いずれの原因であっても、ステップＳ５でNoと判定した場合には、乾燥判定部１６２はワークＷの乾燥が不良と判定し（ステップＳ１０）、ワーク乾燥判定方法を終了する。   When the drying determination unit 162 determines Yes in step S2, the process proceeds to step S4. In step S4, the drying determination unit 162 receives a signal from the temperature sensor 14 and acquires data of the temperature in the vacuum chamber 11. Subsequently, the drying determination unit 162 determines whether the temperature in the vacuum chamber 11 is equal to or higher than a predetermined target temperature (step S5). The target temperature can be determined from the temperature in the vacuum chamber 11 when the workpiece W is actually dried by conducting a preliminary experiment. When the drying determination unit 162 determines Yes in step S5, the process proceeds to step S6. On the other hand, when the drying determination unit 162 determines No in step S5, the work W is not sufficiently heated in the steam cleaning process, or the amount of the cleaning liquid attached to the work W is too large. It means that the temperature has dropped too much due to the heat of vaporization before reaching it. Regardless of the cause, when the determination in step S5 is No, the drying determination unit 162 determines that the drying of the workpiece W is not good (step S10), and the workpiece drying determination method ends.

乾燥判定部１６２は、真空乾燥工程の開始時から所定時間経過していなければそのまま待機し（ステップＳ６でNo）、所定時間経過していれば（ステップＳ６でYes）、真空槽１１内の温度を取得する（ステップＳ７）。続いて、乾燥判定部１６２は、真空乾燥工程の開始時と所定時間が経過した時の真空槽１１内の温度の差、すなわちこれら2つの時の間での真空槽１１内の温度低下の大きさが所定の許容温度低下範囲内にあるか否かを判定する（ステップＳ８）。乾燥判定部１６２は、ステップＳ８においてYesと判定した場合には、乾燥が良好であると判定し（ステップＳ９）、ワーク乾燥判定方法を終了する。一方、ステップＳ８においてNoと判定した場合には、洗浄液がワークＷの表面に付着したままであって且つ該表面から少量ずつ蒸発し続けていると考えられる。そのため、ステップＳ８でNoと判定した場合には、乾燥判定部１６２はワークＷの乾燥が不良と判定し（ステップＳ１０）、ワーク乾燥判定方法を終了する。ここで前記所定時間は、真空乾燥工程の開始時から圧力が（ほとんど）低下しなくなるまでの時間に基づいて定めればよい。許容温度低下範囲は、予備実験により定めることができる。   If the predetermined time has not elapsed from the start of the vacuum drying process (No at step S6), the drying determination unit 162 waits, if the predetermined time has elapsed (Yes at step S6), the temperature in the vacuum chamber 11 Is acquired (step S7). Subsequently, the drying determination unit 162 determines the difference between the temperature in the vacuum chamber 11 at the start of the vacuum drying process and the time when the predetermined time has elapsed, that is, the magnitude of the temperature decrease in the vacuum chamber 11 between these two times. It is determined whether it is within a predetermined allowable temperature reduction range (step S8). If the drying determination unit 162 determines Yes in step S8, it determines that the drying is good (step S9), and ends the workpiece drying determination method. On the other hand, when it determines with No in step S8, it is thought that the washing | cleaning liquid has been adhering to the surface of the workpiece | work W, and is continuing evaporating little by little from this surface. Therefore, when the determination in step S8 is No, the drying determination unit 162 determines that the drying of the workpiece W is not good (step S10), and the workpiece drying determination method ends. Here, the predetermined time may be determined on the basis of the time from the start of the vacuum drying step to the (nearly) decrease in pressure. The allowable temperature drop range can be determined by preliminary experiments.

図３に、ワークＷの乾燥が良好であると判定される場合(a)と、不良であると判定される場合(b)について、真空乾燥工程開始からの圧力及び温度の時間変化のモデル例をグラフで示す。(a)のモデル例では、圧力は真空乾燥工程の開始からおおむね70秒経過後に、目的圧力（450Pa）に到達し、その時の温度は100℃強であって目的温度（95℃）以上となっている。また、真空乾燥工程の開始から115秒間経過するまで、温度の低下はほとんどなく、許容温度低下範囲内にある。そのため、(a)のモデル例では、ワークＷの乾燥は良好であると判定される。一方、(b)のモデル例では、圧力が目的圧力に到達し、且つ、その時の温度も目的温度以上となっているものの、真空乾燥工程の開始から115秒間経過するまで間に温度が5℃以上低下している。そのため、(b)のモデル例では、ワークＷの乾燥は不良であると判定される。   In FIG. 3, in the case where it is judged that the drying of the work W is good (a) and in the case where it is judged that it is defective (b), a model example of time change of pressure and temperature from the start of vacuum drying process Is shown graphically. In the model example of (a), the pressure reaches the target pressure (450 Pa) approximately 70 seconds after the start of the vacuum drying process, the temperature at that time is 100 ° C. or more, and becomes the target temperature (95 ° C.) or more ing. In addition, there is almost no decrease in temperature until 115 seconds have elapsed from the start of the vacuum drying step, and it is within the allowable temperature decrease range. Therefore, in the model example of (a), the drying of the work W is determined to be good. On the other hand, in the model example of (b), although the pressure reaches the target pressure and the temperature at that time is also higher than the target temperature, the temperature is 5 ° C. until 115 seconds elapse from the start of the vacuum drying process. It is falling above. Therefore, in the model example of (b), the drying of the work W is determined to be defective.

(4) 乾燥不良の（真空乾燥工程を中止した）場合の措置
ワークＷの乾燥が不良であると判定された場合には、前述のように蒸気洗浄工程におけるワークＷの加温が不十分であることが原因として考えられる。そこでそのような場合には、温度センサ１４により得られる、蒸気洗浄工程における真空槽１１内の温度を確認する。図４に、蒸気洗浄工程における真空槽１１内の温度の時間変化を測定した結果を示す。この測定結果では、真空槽１１内の温度は、蒸気洗浄工程の開始から約50秒経過したときに、目標昇温温度（この例では104℃）に到達し、その後、蒸気洗浄工程の終了（110秒経過）時まで継続的にこの目標昇温温度を上回っている。このように、目標昇温温度に到達してから十分な時間、その温度が維持されていれば、ワークＷも十分に加温されていると考えられる。そのような場合には、ワークＷの加温以外で乾燥不良の要因を検討する必要がある。一方、目標昇温温度を上回ってから間もなく、あるいは目標昇温温度に到達することなく蒸気洗浄工程を終了している場合には、ワークＷの加温が不十分であると考えられるため、蒸気洗浄工程で蒸気を真空槽１１内に供給する時間がより長くなるように設定する。 (4) Measures in case of poor drying (vacuum drying process is stopped) If it is determined that the drying of the work W is poor, heating of the work W in the steam cleaning process is insufficient as described above. It is thought that there is a cause. Therefore, in such a case, the temperature in the vacuum chamber 11 in the steam cleaning step obtained by the temperature sensor 14 is confirmed. The result of having measured the time change of the temperature in the vacuum chamber 11 in a vapor | steam washing | cleaning process in FIG. 4 is shown. According to this measurement result, the temperature in the vacuum chamber 11 reaches the target temperature rise temperature (104 ° C. in this example) when about 50 seconds have elapsed from the start of the steam cleaning step, and then the end of the steam cleaning step ( The target temperature rise temperature is continuously exceeded until (110 seconds). As described above, if the temperature is maintained for a sufficient time after reaching the target temperature rise, it is considered that the work W is also sufficiently heated. In such a case, it is necessary to examine factors of poor drying other than heating of the work W. On the other hand, if the steam cleaning process is ended soon after the target temperature rise is exceeded or the target temperature rise is not reached, it is considered that the heating of the work W is insufficient. In the cleaning step, the time for supplying the vapor into the vacuum chamber 11 is set to be longer.

本発明は上記実施形態には限定されず、種々の変更が可能である。   The present invention is not limited to the above embodiment, and various modifications are possible.

１０…蒸気洗浄真空乾燥装置
１１…真空槽
１１１…蓋
１１２…大気開放口
１２…蒸気供給部
１２１…貯留槽
１２２…蒸気生成ヒータ
１２３…蒸気導入管
１２４…返送管
１３…減圧部
１３１…真空ポンプ
１３２…排気管
１３３…排気ヒータ
１４…温度センサ
１５…圧力センサ
１６…制御部
１６１…蒸気洗浄真空乾燥制御部
１６２…乾燥判定部
１７…操作部
Ｖ１…大気開放弁
Ｖ２…蒸気導入弁
Ｖ３…返送弁
Ｖ４…排気弁
Ｗ…ワーク DESCRIPTION OF SYMBOLS 10 ... Steam cleaning vacuum drying apparatus 11 ... Vacuum tank 111 ... Lid 112 ... Atmospheric open port 12 ... Steam supply part 121 ... Reservoir 122 ... Steam generation heater 123 ... Steam introduction pipe 124 ... Return pipe 13 ... Decompression part 131 ... Vacuum pump 132: exhaust pipe 133: exhaust heater 14: temperature sensor 15: pressure sensor 16: control unit 161: steam cleaning vacuum drying control unit 162: drying determination unit 17: operation unit V1: air release valve V2: steam introduction valve V3: return Valve V4 ... Exhaust valve W ... Work

Claims (3)

気密にした真空槽内にワークを収容して洗浄液の蒸気を導入することにより該ワークの蒸気洗浄を行う蒸気洗浄工程の後に、該真空槽内を減圧することで該ワークの表面に残留する洗浄液を突沸させることにより該ワークを乾燥させる真空乾燥工程におけるワークの乾燥の良否を判定する方法であって、
前記真空乾燥工程において、
前記真空槽内の圧力が所定の目的圧力に到達し、
該目的圧力になった時の該真空槽内の温度が所定の目的温度以上であって、且つ、
前記真空乾燥工程の開始時から所定の時間が経過するまでの間、該真空槽内の温度低下が所定範囲内にある
ときに、ワークの乾燥が良好であると判定することを特徴とするワーク乾燥判定方法。 A cleaning solution remaining on the surface of the work by depressurizing the inside of the vacuum tank after the vapor cleaning step of carrying out the vapor cleaning of the work by storing the work in a vacuum-tight vacuum vessel and introducing the steam of the cleaning solution. A method of determining the quality of the drying of the work in the vacuum drying step of drying the work by bumping the
In the vacuum drying step,
The pressure in the vacuum chamber reaches a predetermined target pressure,
The temperature in the vacuum chamber when the target pressure is reached is equal to or higher than a predetermined target temperature, and
A workpiece characterized in that the drying of the work is determined to be good when the temperature decrease in the vacuum chamber is within a predetermined range until a predetermined time elapses from the start of the vacuum drying step. Drying judgment method. 前記蒸気洗浄工程において前記真空槽内の温度を測定することを特徴とする請求項１に記載のワーク乾燥判定方法。   The work drying determination method according to claim 1, wherein the temperature in the vacuum chamber is measured in the steam cleaning step. a) ワークを気密に収容する真空槽と、
b) 前記真空槽に洗浄液の蒸気を供給する蒸気供給部と、
c) 前記真空槽内を減圧する減圧部と、
d) 前記真空槽内の温度を測定する温度測定部と、
e) 前記真空槽内の圧力を測定する圧力測定部と、
f) 前記蒸気供給部から前記真空槽内に洗浄液の蒸気を供給した後に、前記減圧部により前記真空槽内を減圧するよう、該蒸気供給部及び該減圧部を制御する蒸気洗浄真空乾燥制御部と、
g) 前記減圧部により前記真空槽内を減圧する操作の間、前記温度測定部から前記真空槽内の温度を取得すると共に前記圧力測定部から前記真空槽内の圧力を取得し、前記圧力が所定の目的圧力以下に到達し、該目的圧力に到達した時の該真空槽内の温度が所定の目的温度以上であって、且つ、前記真空槽内を減圧する操作の開始時から所定の時間が経過するまでの間、該真空槽内の温度低下が所定範囲内にあるときにワークの乾燥が良好であると判定する乾燥判定部と
を備えることを特徴とする蒸気洗浄真空乾燥装置。 a) A vacuum chamber that contains the work airtightly,
b) a steam supply unit for supplying a cleaning solution vapor to the vacuum chamber;
c) a pressure reducing section for reducing the pressure in the vacuum chamber;
d) a temperature measuring unit for measuring the temperature in the vacuum chamber;
e) a pressure measurement unit that measures the pressure in the vacuum chamber;
f) A vapor cleaning vacuum drying control unit that controls the vapor supply unit and the pressure reducing unit such that the pressure reducing unit reduces the pressure in the vacuum chamber after supplying the cleaning solution vapor from the vapor supply unit into the vacuum chamber. When,
g) During the operation of reducing the pressure in the vacuum chamber by the pressure reducing unit, the temperature in the vacuum chamber is acquired from the temperature measurement unit and the pressure in the vacuum chamber is acquired from the pressure measurement unit, and the pressure is The temperature in the vacuum chamber reached a predetermined target pressure or lower and reached the target pressure is a predetermined target temperature or higher, and a predetermined time from the start of the operation for reducing the pressure in the vacuum chamber And a drying determination unit that determines that the drying of the work is good when the temperature decrease in the vacuum tank is within a predetermined range until the lapse of time.
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