JP6458236B2 - アルカリ可溶性樹脂、感光性樹脂組成物及びその用途 - Google Patents

アルカリ可溶性樹脂、感光性樹脂組成物及びその用途 Download PDF

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Publication number: JP6458236B2
Authority: JP; Japan
Prior art keywords: group; alkali; meth; resin composition; photosensitive resin
Prior art date: 2014-09-26
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Active

Application number

JP2014196958A

Other languages

English (en)

Japanese (ja)

Other versions

JP2016069400A (ja

Inventor

昌祥九澤

優太深津

啓雄飯田

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Natoco Co Ltd

Original Assignee

Natoco Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2014-09-26

Filing date

2014-09-26

Publication date

2019-01-30

2014-09-26 Application filed by Natoco Co Ltd filed Critical Natoco Co Ltd

2014-09-26 Priority to JP2014196958A priority Critical patent/JP6458236B2/ja

2015-09-23 Priority to TW104131352A priority patent/TWI669287B/zh

2015-09-24 Priority to PCT/JP2015/076970 priority patent/WO2016047703A1/ja

2015-09-24 Priority to KR1020177010773A priority patent/KR20170063762A/ko

2015-09-24 Priority to CN201580051227.1A priority patent/CN106715598B/zh

2016-05-09 Publication of JP2016069400A publication Critical patent/JP2016069400A/ja

2019-01-30 Application granted granted Critical

2019-01-30 Publication of JP6458236B2 publication Critical patent/JP6458236B2/ja

Status Active legal-status Critical Current

2034-09-26 Anticipated expiration legal-status Critical

Links

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150000003138 primary alcohols Chemical class 0.000 claims description 16
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239000003960 organic solvent Substances 0.000 description 1
AHHWIHXENZJRFG-UHFFFAOYSA-N oxetane Chemical compound C1COC1 AHHWIHXENZJRFG-UHFFFAOYSA-N 0.000 description 1
NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 description 1
125000000913 palmityl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 1
CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
150000002987 phenanthrenes Chemical class 0.000 description 1
229940067265 pigment yellow 138 Drugs 0.000 description 1
229920000767 polyaniline Polymers 0.000 description 1
125000003367 polycyclic group Chemical group 0.000 description 1
229920000647 polyepoxide Polymers 0.000 description 1
229920000728 polyester Polymers 0.000 description 1
238000012545 processing Methods 0.000 description 1
WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical group CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 1
238000010526 radical polymerization reaction Methods 0.000 description 1
WPPDXAHGCGPUPK-UHFFFAOYSA-N red 2 Chemical compound C1=CC=CC=C1C(C1=CC=CC=C11)=C(C=2C=3C4=CC=C5C6=CC=C7C8=C(C=9C=CC=CC=9)C9=CC=CC=C9C(C=9C=CC=CC=9)=C8C8=CC=C(C6=C87)C(C=35)=CC=2)C4=C1C1=CC=CC=C1 WPPDXAHGCGPUPK-UHFFFAOYSA-N 0.000 description 1
239000001054 red pigment Substances 0.000 description 1
230000007261 regionalization Effects 0.000 description 1
230000001105 regulatory effect Effects 0.000 description 1
125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
150000004756 silanes Chemical class 0.000 description 1
229910052710 silicon Inorganic materials 0.000 description 1
239000010703 silicon Substances 0.000 description 1
239000000377 silicon dioxide Substances 0.000 description 1
239000000243 solution Substances 0.000 description 1
239000004094 surface-active agent Substances 0.000 description 1
230000002123 temporal effect Effects 0.000 description 1
UWHCKJMYHZGTIT-UHFFFAOYSA-N tetraethylene glycol Chemical compound OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 description 1
YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
230000036962 time dependent Effects 0.000 description 1
OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 1
LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
125000002889 tridecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
JCVQKRGIASEUKR-UHFFFAOYSA-N triethoxy(phenyl)silane Chemical compound CCO[Si](OCC)(OCC)C1=CC=CC=C1 JCVQKRGIASEUKR-UHFFFAOYSA-N 0.000 description 1
JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 1
SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
ZNOCGWVLWPVKAO-UHFFFAOYSA-N trimethoxy(phenyl)silane Chemical compound CO[Si](OC)(OC)C1=CC=CC=C1 ZNOCGWVLWPVKAO-UHFFFAOYSA-N 0.000 description 1
WLOQLWBIJZDHET-UHFFFAOYSA-N triphenylsulfonium Chemical compound C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 WLOQLWBIJZDHET-UHFFFAOYSA-N 0.000 description 1
239000012953 triphenylsulfonium Substances 0.000 description 1
150000003672 ureas Chemical class 0.000 description 1
238000005406 washing Methods 0.000 description 1
150000007964 xanthones Chemical class 0.000 description 1
239000008096 xylene Substances 0.000 description 1
239000011787 zinc oxide Substances 0.000 description 1
235000014692 zinc oxide Nutrition 0.000 description 1
NDKWCCLKSWNDBG-UHFFFAOYSA-N zinc;dioxido(dioxo)chromium Chemical compound [Zn+2].[O-][Cr]([O-])(=O)=O NDKWCCLKSWNDBG-UHFFFAOYSA-N 0.000 description 1
PAPBSGBWRJIAAV-UHFFFAOYSA-N ε-Caprolactone Chemical compound O=C1CCCCCO1 PAPBSGBWRJIAAV-UHFFFAOYSA-N 0.000 description 1

Classifications

- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/04—Oxygen-containing compounds
- C08K5/05—Alcohols; Metal alcoholates
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L101/00—Compositions of unspecified macromolecular compounds
- C08L101/02—Compositions of unspecified macromolecular compounds characterised by the presence of specified groups, e.g. terminal or pendant functional groups
- C08L101/10—Compositions of unspecified macromolecular compounds characterised by the presence of specified groups, e.g. terminal or pendant functional groups containing hydrolysable silane groups
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds

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Chemical & Material Sciences (AREA)
Health & Medical Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Medicinal Chemistry (AREA)
Polymers & Plastics (AREA)
Organic Chemistry (AREA)
Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Materials For Photolithography (AREA)
Compositions Of Macromolecular Compounds (AREA)
Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)

JP2014196958A 2014-09-26 2014-09-26 アルカリ可溶性樹脂、感光性樹脂組成物及びその用途 Active JP6458236B2 (ja)

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TW104131352A TWI669287B (zh)	2014-09-26	2015-09-23	Alkali-soluble resin, photosensitive resin composition and use thereof
PCT/JP2015/076970 WO2016047703A1 (ja)	2014-09-26	2015-09-24	アルカリ可溶性樹脂、感光性樹脂組成物及びその用途
KR1020177010773A KR20170063762A (ko)	2014-09-26	2015-09-24	알칼리 가용성 수지, 감광성 수지 조성물 및 그 용도
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WO2017056928A1 (ja) *	2015-09-30	2017-04-06	富士フイルム株式会社	レジスト組成物、並びに、これを用いたレジスト膜、パターン形成方法及び電子デバイスの製造方法
KR102658153B1 (ko) *	2017-09-28	2024-04-16	제이에스알 가부시끼가이샤	감방사선성 수지 조성물 및 그의 용도
JP7035889B2 (ja) *	2017-09-28	2022-03-15	Jsr株式会社	感放射線性樹脂組成物およびその用途
JP7047652B2 (ja) *	2017-09-28	2022-04-05	Jsr株式会社	感放射線性樹脂組成物およびその用途
JP7392719B2 (ja)	2019-06-25	2023-12-06	株式会社レゾナック	感光性樹脂組成物、樹脂硬化膜及び画像表示素子
TW202204475A (zh) *	2020-06-03	2022-02-01	日商富士軟片股份有限公司	硬化性樹脂組成物、硬化膜、積層體、硬化膜之製造方法及半導體器件
WO2024042107A1 (en)	2022-08-26	2024-02-29	Merck Patent Gmbh	Composition
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Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4526856A (en) *	1983-05-23	1985-07-02	Allied Corporation	Low striation positive diazoketone resist composition with cyclic ketone(s) and aliphatic alcohol as solvents
JPS60206802A (ja) *	1984-03-30	1985-10-18	Dainippon Ink & Chem Inc	改良された加水分解性シリル基含有ビニル系重合体の製造法
JPS60206812A (ja) *	1984-03-31	1985-10-18	Dainippon Ink & Chem Inc	改良された加水分解性シリル基含有ビニル系重合体を含む常温硬化性樹脂組成物
JPH02233709A (ja) *	1989-03-08	1990-09-17	Kansai Paint Co Ltd	樹脂、有機液体、非水分散液、水性液体、硬化性組成物及び塗料組成物
KR101068111B1 (ko) *	2005-01-27	2011-09-27	주식회사 동진쎄미켐	감광성 수지 조성물
JP2006337567A (ja) *	2005-05-31	2006-12-14	Sekisui Chem Co Ltd	フォトレジスト用光硬化性樹脂組成物、カラムスペーサ及び液晶表示素子
JP5135820B2 (ja) *	2007-02-20	2013-02-06	Ｊｓｒ株式会社	アルカリ可溶性重合体、着色層形成用感放射線性組成物、カラーフィルタおよび液晶表示素子
JP5108480B2 (ja) *	2007-11-28	2012-12-26	東京応化工業株式会社	層間絶縁膜用感光性樹脂組成物
JP5375412B2 (ja) *	2009-07-30	2013-12-25	Ｊｓｒ株式会社	微細パターン形成用樹脂組成物および微細パターン形成方法
JP5413666B2 (ja) *	2009-11-20	2014-02-12	Ｄｉｃ株式会社	複合樹脂組成物、それを含むプライマーコート剤、及び積層体
TW201310166A (zh) *	2011-08-31	2013-03-01	Everlight Chem Ind Corp	層間絕緣膜暨保護膜用之樹脂及感光樹脂組成物
JP5935297B2 (ja) *	2011-11-09	2016-06-15	Jnc株式会社	ポジ型感光性組成物
JP6218393B2 (ja) *	2013-02-28	2017-10-25	東京応化工業株式会社	層間絶縁膜用感光性樹脂組成物

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