JP6446521B2 - 薄膜トランジスタの製造方法 - Google Patents
薄膜トランジスタの製造方法 Download PDFInfo
- Publication number
- JP6446521B2 JP6446521B2 JP2017208972A JP2017208972A JP6446521B2 JP 6446521 B2 JP6446521 B2 JP 6446521B2 JP 2017208972 A JP2017208972 A JP 2017208972A JP 2017208972 A JP2017208972 A JP 2017208972A JP 6446521 B2 JP6446521 B2 JP 6446521B2
- Authority
- JP
- Japan
- Prior art keywords
- carbon nanotube
- film transistor
- thin film
- carbon nanotubes
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000010409 thin film Substances 0.000 title claims description 45
- 238000004519 manufacturing process Methods 0.000 title claims description 28
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 178
- 239000002041 carbon nanotube Substances 0.000 claims description 134
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 122
- 239000004065 semiconductor Substances 0.000 claims description 52
- 239000000758 substrate Substances 0.000 claims description 23
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 19
- 229910021404 metallic carbon Inorganic materials 0.000 claims description 12
- 230000001133 acceleration Effects 0.000 claims description 7
- 239000010410 layer Substances 0.000 description 50
- 239000000463 material Substances 0.000 description 17
- 239000011241 protective layer Substances 0.000 description 14
- 238000000034 method Methods 0.000 description 13
- 239000000956 alloy Substances 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 5
- 229910021417 amorphous silicon Inorganic materials 0.000 description 5
- 239000002238 carbon nanotube film Substances 0.000 description 5
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229920001940 conductive polymer Polymers 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 229920000178 Acrylic resin Polymers 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 229920001225 polyester resin Polymers 0.000 description 2
- 239000004645 polyester resin Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/70—Testing, e.g. accelerated lifetime tests
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/20—Carbon compounds, e.g. carbon nanotubes or fullerenes
- H10K85/221—Carbon nanotubes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2607—Circuits therefor
- G01R31/2621—Circuits therefor for testing field effect transistors, i.e. FET's
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/265—Contactless testing
- G01R31/2653—Contactless testing using electron beams
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/468—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/481—Insulated gate field-effect transistors [IGFETs] characterised by the gate conductors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/484—Insulated gate field-effect transistors [IGFETs] characterised by the channel regions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/491—Vertical transistors, e.g. vertical carbon nanotube field effect transistors [CNT-FETs]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/80—Constructional details
- H10K10/82—Electrodes
- H10K10/84—Ohmic electrodes, e.g. source or drain electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/466—Lateral bottom-gate IGFETs comprising only a single gate
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Nanotechnology (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Crystallography & Structural Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Composite Materials (AREA)
- Thin Film Transistor (AREA)
- Carbon And Carbon Compounds (AREA)
Description
本発明の実施例1は、薄膜トランジスタ100の製造方法を提供する。図1及び図2を参照すると、薄膜トランジスタ100の製造方法は以下のステップを含む。
S1、ゲート電極102を提供し、ゲート電極102の表面に絶縁層104を設置する。
S2、カーボンナノチューブ構造体を提供し、絶縁層104の表面にカーボンナノチューブ構造体を設置する。
S3、走査型電子顕微鏡によって、カーボンナノチューブ構造体における金属型カーボンナノチューブ及び半導体型カーボンナノチューブを区分する。
S4、カーボンナノチューブ構造体における金属型カーボンナノチューブを除去し、半導体層106を形成する。
S5、ソース電極108及びドレイン電極110を半導体層106の表面に間隔をあけて設置し、且つ半導体層106とそれぞれ電気的に接続させ、薄膜トランジスタ100を形成する。
S31、走査型電子顕微鏡の加速電圧は5KV〜20KVであり、滞留時間は6マイクロ秒間〜20マイクロ秒間であり、倍率を1万倍〜10万倍に調整し、カーボンナノチューブ構造体を撮り、カーボンナノチューブ構造体の写真を得る。
S32、得られた写真において、カーボンナノチューブ構造体におけるカーボンナノチューブは基板の表面に分布し、基板の色より薄いカーボンナノチューブは金属型カーボンナノチューブであり、基板の色より濃いカーボンナノチューブは半導体型カーボンナノチューブである。
ステップS32において、得られた写真は図3である。図3は基板及び基板におけるカーボンナノチューブの画像を含む。図3から分かるように、一部のカーボンナノチューブの色は基板の色より薄く、一部のカーボンナノチューブの色は導電基板の色より濃い。基板の色より薄いカーボンナノチューブは金属型カーボンナノチューブであり、基板の色より濃いカーボンナノチューブは半導体型カーボンナノチューブである。
S41、写真に座標系を確立し、スケールを表示し、金属型カーボンナノチューブの座標を読み取る。
S42、写真の割合と同じ割合によって、実物のカーボンナノチューブ構造体に座標系を確立し、写真における金属型カーボンナノチューブの座標によって、実物の前記カーボンナノチューブ構造体における金属型カーボンナノチューブを表示し且つ除去する。
102 ゲート電極
104 絶縁層
106 半導体層
108 ソース電極
110 ドレイン電極
112 絶縁保護層
Claims (3)
- ゲート電極を提供し、前記ゲート電極の表面に絶縁層を設置する第一ステップと、
カーボンナノチューブ構造体を提供し、前記絶縁層の表面に前記カーボンナノチューブ構造体を設置する第二ステップと、
走査型電子顕微鏡によって、前記カーボンナノチューブ構造体における金属型カーボンナノチューブ及び半導体型カーボンナノチューブを区分する第三ステップと、
前記カーボンナノチューブ構造体における前記金属型カーボンナノチューブを除去し、半導体層を形成する第四ステップと、
ソース電極及びドレイン電極を前記半導体層の表面に間隔をあけて設置し、且つ前記半導体層とそれぞれ電気的に接続させ、薄膜トランジスタを形成する第五ステップと、
を含み、
前記第三ステップは、前記走査型電子顕微鏡の加速電圧が5KV〜20KVであり、滞留時間が6マイクロ秒間〜20マイクロ秒間であり、倍率を1万倍〜10万倍に調整し、前記カーボンナノチューブ構造体を撮り、前記カーボンナノチューブ構造体の写真を得るステップを含むことを特徴とする薄膜トランジスタの製造方法。 - 前記第三ステップは、更に、
前記写真において、前記カーボンナノチューブ構造体におけるカーボンナノチューブが基板の表面に分布し、前記基板の色より薄いカーボンナノチューブが前記金属型カーボンナノチューブであること及び前記基板の色より濃いカーボンナノチューブが前記半導体型カーボンナノチューブであることを判断するステップを含むことを特徴とする請求項1に記載の薄膜トランジスタの製造方法。 - 前記第四ステップは、
前記写真に座標系を確立し、スケールを表示し、前記金属型カーボンナノチューブの座標を読み取るステップと、
前記写真の割合と同じ割合によって、実物の前記カーボンナノチューブ構造体に座標系を確立し、前記写真における前記金属型カーボンナノチューブの座標によって、実物の前記カーボンナノチューブ構造体における前記金属型カーボンナノチューブの座標を表示して且つ除去するステップと、
を含むことを特徴とする請求項1又は2に記載の薄膜トランジスタの製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610932307.4A CN108023016B (zh) | 2016-10-31 | 2016-10-31 | 薄膜晶体管的制备方法 |
CN201610932307.4 | 2016-10-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018074158A JP2018074158A (ja) | 2018-05-10 |
JP6446521B2 true JP6446521B2 (ja) | 2018-12-26 |
Family
ID=62013812
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017208972A Active JP6446521B2 (ja) | 2016-10-31 | 2017-10-30 | 薄膜トランジスタの製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9960354B1 (ja) |
JP (1) | JP6446521B2 (ja) |
CN (1) | CN108023016B (ja) |
TW (1) | TWI636575B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI754897B (zh) * | 2020-01-15 | 2022-02-11 | 鴻海精密工業股份有限公司 | 熱電子發射器件 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108020573B (zh) * | 2016-10-31 | 2019-12-17 | 清华大学 | 区分碳纳米管类型的方法 |
CN113120881B (zh) * | 2020-01-15 | 2022-10-18 | 清华大学 | 半导体型碳纳米管的获取方法 |
CN113120882B (zh) * | 2020-01-15 | 2022-10-18 | 清华大学 | 金属型碳纳米管的获取方法 |
US20220231153A1 (en) * | 2021-01-15 | 2022-07-21 | Taiwan Semiconductor Manufacturing Co., Ltd. | CMOS Fabrication Methods for Back-Gate Transistor |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4627206B2 (ja) * | 2005-03-28 | 2011-02-09 | 日本電信電話株式会社 | ナノチューブトランジスタの製造方法 |
JP4899368B2 (ja) * | 2005-07-29 | 2012-03-21 | ソニー株式会社 | 金属的単層カーボンナノチューブの破壊方法、半導体的単層カーボンナノチューブ集合体の製造方法、半導体的単層カーボンナノチューブ薄膜の製造方法、半導体的単層カーボンナノチューブの破壊方法、金属的単層カーボンナノチューブ集合体の製造方法、金属的単層カーボンナノチューブ薄膜の製造方法、電子素子の製造方法およびカーボンナノチューブfetの製造方法 |
JP4988369B2 (ja) * | 2007-02-05 | 2012-08-01 | 日本電信電話株式会社 | カーボンナノチューブトランジスタの製造方法 |
CN101582381B (zh) * | 2008-05-14 | 2011-01-26 | 鸿富锦精密工业(深圳)有限公司 | 薄膜晶体管及其阵列的制备方法 |
CN101625468B (zh) * | 2008-07-09 | 2011-03-23 | 鸿富锦精密工业(深圳)有限公司 | 触摸式液晶屏的制备方法 |
CN101748380A (zh) * | 2008-12-15 | 2010-06-23 | 索尼株式会社 | 制备碳纳米管膜的方法、碳纳米管膜和碳纳米管元件 |
JP2011166070A (ja) * | 2010-02-15 | 2011-08-25 | Nec Corp | 半導体装置の製造方法 |
US9502152B2 (en) * | 2010-11-01 | 2016-11-22 | Samsung Electronics Co., Ltd. | Method of selective separation of semiconducting carbon nanotubes, dispersion of semiconducting carbon nanotubes, and electronic device including carbon nanotubes separated by using the method |
CN103325662B (zh) * | 2012-03-21 | 2016-03-30 | 清华大学 | 半导体性单壁碳纳米管的制备方法 |
CN104103695B (zh) * | 2013-04-02 | 2017-01-25 | 清华大学 | 薄膜晶体管及其制备方法 |
CN104576394B (zh) * | 2013-10-22 | 2017-08-08 | 中国科学院苏州纳米技术与纳米仿生研究所 | 一种大面积印刷独立碳纳米管薄膜晶体管的制备方法 |
CN105097428B (zh) * | 2014-04-24 | 2017-12-01 | 清华大学 | 碳纳米管复合膜 |
CN105448674B (zh) * | 2014-06-11 | 2018-12-21 | 清华大学 | N型半导体层以及n型薄膜晶体管的制备方法 |
TWI686239B (zh) * | 2014-09-23 | 2020-03-01 | 德商巴斯夫歐洲公司 | 使用聚鎢酸鹽分離半導性與金屬性單層壁奈米碳管 |
CN105810587B (zh) * | 2014-12-31 | 2019-07-12 | 清华大学 | N型薄膜晶体管的制备方法 |
CN105810748B (zh) * | 2014-12-31 | 2018-12-21 | 清华大学 | N型薄膜晶体管 |
-
2016
- 2016-10-31 CN CN201610932307.4A patent/CN108023016B/zh active Active
- 2016-11-24 TW TW105138581A patent/TWI636575B/zh active
-
2017
- 2017-07-27 US US15/662,253 patent/US9960354B1/en active Active
- 2017-10-30 JP JP2017208972A patent/JP6446521B2/ja active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI754897B (zh) * | 2020-01-15 | 2022-02-11 | 鴻海精密工業股份有限公司 | 熱電子發射器件 |
Also Published As
Publication number | Publication date |
---|---|
TW201818552A (zh) | 2018-05-16 |
US20180123046A1 (en) | 2018-05-03 |
US9960354B1 (en) | 2018-05-01 |
CN108023016B (zh) | 2020-07-10 |
TWI636575B (zh) | 2018-09-21 |
JP2018074158A (ja) | 2018-05-10 |
CN108023016A (zh) | 2018-05-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6446521B2 (ja) | 薄膜トランジスタの製造方法 | |
CN107845687B (zh) | 薄膜晶体管及其制备方法、电子设备 | |
Liu et al. | Ultratransparent and stretchable graphene electrodes | |
Zhu et al. | Spin on dopants for high-performance single-crystal silicon transistors on flexible plastic substrates | |
TWI222742B (en) | Fabrication and structure of carbon nanotube-gate transistor | |
US8471237B2 (en) | Circuit board including a graphene film having contact region covering a recessed region and a patterned metal film covering the contact region and in direct electrical contact therewith, and device including same | |
CN108172612B (zh) | 一种薄膜晶体管及其制备方法 | |
CN104103696A (zh) | 双极性薄膜晶体管 | |
Yoo et al. | Microstructural defects in GaN thin films grown on chemically vapor-deposited graphene layers | |
Chung et al. | Low-voltage and short-channel pentacene field-effect transistors with top-contact geometry using parylene-C shadow masks | |
Kusaka et al. | Fabrication of embedded electrodes by reverse offset printing | |
Seo et al. | Manipulation of graphene work function using a self-assembled monolayer | |
US8906787B2 (en) | Thin film compositions and methods | |
Wang et al. | Photocurrent generation of a single-gate graphene p–n junction fabricated by interfacial modification | |
CN108172626B (zh) | 一种薄膜晶体管及其制备方法 | |
JP6397980B2 (ja) | 半導体層の製造方法 | |
Sun et al. | Characteristics of a pentacene thin film transistor with periodic groove patterned poly (methylmethacrylate) dielectrics | |
US10121564B2 (en) | Method for making transparent conductive layer | |
CN108172627B (zh) | 一种薄膜晶体管及其制备方法 | |
JP2018075708A (ja) | カーボンナノチューブの種類を区別する方法 | |
Hong et al. | Fabrication and independent control of patterned polymer gate for a few-layer WSe2 field-effect transistor | |
Kawanishi et al. | High-mobility organic single crystal transistors with submicrometer channels | |
JP2018098499A (ja) | デジタル回路 | |
Oberbeck et al. | Imaging of buried phosphorus nanostructures in silicon using scanning tunneling microscopy | |
JP6444480B2 (ja) | デジタル回路 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20180813 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20180820 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20181030 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20181114 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20181203 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6446521 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |