JP6440163B2

JP6440163B2 - Cylindrical chemical filter case

Info

Publication number: JP6440163B2
Application number: JP2015033669A
Authority: JP
Inventors: 佳一上村; 義彦清水
Original assignee: 株式会社上村工業
Priority date: 2015-02-24
Filing date: 2015-02-24
Publication date: 2018-12-19
Anticipated expiration: 2035-02-24
Also published as: JP2016155059A

Description

この発明は窒素ガス，圧縮エアー，ドライエアーなどの供給ガスの供給路中に設置する筒形ケミカルフィルターケースであって、供給ガスの入口と出口を直列に有す筒形ケース内にケミカル物質を高度に浄化するフィルター材を充填して、該供給ガスを筒形ケース内を通すことでケミカル物質を除去して、ケミカル物質を含まないきれいな供給ガスを必要とする部署に供給するようにした供給ガスの筒形ケミカルフィルターケースに関するものである。 The present invention is a cylindrical chemical filter case installed in a supply path of supply gas such as nitrogen gas, compressed air, dry air, etc., and a chemical substance is placed in a cylindrical case having a supply gas inlet and outlet in series. Supply that is filled with filter material to be highly purified, removes chemical substances by passing the supply gas through the cylindrical case, and supplies clean supply gas that does not contain chemical substances to departments that need it The present invention relates to a gas cylindrical chemical filter case.

半導体集積回路、液晶パネル等の製造装置などは塵埃などを除去し浄化したクリーンガスを供給されるクリーンルーム内に設置されているが、通常のエアフィルターでは除去することができないケミカル物質を含むときは、露光装置，検査装置等のレンズ，ミラーにくもり現象が現れるため、ケミカル物質を除去する特殊なフィルター材を内装したケミカルフィルターケースを供給路中に設置してケミカル物質を除去している。そしてケミカルフィルターケースは溶接個所より溶接滓などの四散を完全に解消することが求められている。 When manufacturing equipment such as semiconductor integrated circuits and liquid crystal panels is installed in a clean room where dust is removed and purified gas is supplied, but it contains chemical substances that cannot be removed by ordinary air filters Since a clouding phenomenon appears in lenses and mirrors of exposure apparatuses and inspection apparatuses, a chemical filter case with a special filter material for removing chemical substances is installed in the supply path to remove the chemical substances. The chemical filter case is required to completely eliminate the spread of welding rods and the like from the welding point.

このケミカルフィルターケースとして、例えば特許文献１に記載されているように筒形ケースの入口側の前盤と出口側の後盤を開閉クランプを被せてネジ止めする構造のもの、このクランプネジ止めよりも構造を簡易に接続するものとして筒形ケースと後盤を凹凸の噛み合わせと噛み合わせ部を外側から溶接により接続し、入口側の前盤をネジ嵌め付けするようにしたものがある。 As this chemical filter case, for example, as described in Patent Document 1, a structure in which the front panel on the inlet side and the rear panel on the outlet side of the cylindrical case are screwed by covering with an open / close clamp, there is also a tubular case and a rear panel connected by welding engagement with meshing ridges of irregularities from the outside as to connect the structure simple, and the inlet side of the front panel to be attached because fitting screws.

特開２００２−１０２６３８号公報JP 2002-102638 A

しかしながら、筒形ケースと後盤を凹凸の噛み合わせにて溶接する接続は図７に示すように噛み合わせを容易にするために雄側の凸部に先細のテーパーをつけることで筒形ケースとテーパー面との間で隙間Ｓが生じ、この隙間Ｓに溶接滓，擦り滓，塵埃等が溜まり、これが四散するという課題がある。また溶接個所に溶接痕が残るときも同様に溶接滓が四散して供給ガスを汚損するという課題があった。 However, the connection for welding the cylindrical case and the rear panel by engaging the concave and convex portions is as follows. As shown in FIG. There is a problem that a gap S is formed between the taper surface, and welding flaws, rubbing flaws, dust, and the like accumulate in the gap S and are scattered all over. In addition, when welding marks remain at the welding location, there is a problem that the welding rods are scattered in a similar manner and the supply gas is fouled.

また、筒形ケースは入口より広がって流れる供給ガスを出口に寄せて流出させるために脚付の誘導部材を嵌め付けているが、嵌め付けを容易にするために該部材を筒形ケースより小径に形成していることから、筒形ケース内でずれ動き，搖動，震動などが生じて耳ざわりな騒音を発生しているという課題があった。 Further, the cylindrical case the member to the tubular casing although with fit fitting induction member with legs in order to flow out Intention feed gas flow spreads from the inlet to the outlet, to facilitate the fitting fit with Since it is formed with a smaller diameter, there is a problem that an unpleasant noise is generated due to the occurrence of displacement, peristalsis, vibration, etc. in the cylindrical case.

本発明は、筒形ケースと後盤を平面突合わせ形とし、この突合せ部に外広のＶ形カット部を設けて、これを埋める溶接とおよび内外面の溶接痕を除去する仕上げ研磨にて接続するようにして、筒形ケース内に凹凸の嵌合によって生じていた隙間の発生と溶接痕を解消し，また出口側に嵌め付ける供給ガスの脚付の誘導部材を筒形ケース内に動かないように強固に固定して、該部材のずれ動き，震動等による騒音の発生を解消するようにして課題を解決する。 In the present invention, the cylindrical case and the rear panel are flat-butted, and a wide V-shaped cut portion is provided at the butted portion, and welding is performed to fill the surface and finish polishing to remove the weld traces on the inner and outer surfaces. so as to connect, to eliminate the occurrence and welding marks the gap which occurs by engagement of irregularities in the tubular casing and the induction member with the leg of the feed gas to give fit fitting on the outlet side into the tubular casing The problem is solved by fixing firmly so as not to move, and eliminating the occurrence of noise due to the displacement movement, vibration, etc. of the member.

本発明のケミカルフィルターケースは、筒形ケースの出口側と後盤を平面突合わせ形にしてＶ形カット部の埋め溶接と仕上げ研磨にて接続するようにしたので、大小径いずれの筒形ケースも後盤との間の接続部分に隙間が生ずることと溶接痕が一切なくなり、隙間と溶接痕の存在によって生じていた溶接滓，擦り傷，塵埃等の四散を完全になくすことができるという効果を生ずる。 In the chemical filter case of the present invention, since the outlet side of the cylindrical case and the rear panel are flat-butted and connected by filling welding and finish polishing of the V-shaped cut portion, the cylindrical case of either large or small diameter There is also an effect that a gap is generated in the connection part between the rear panel and the weld trace is completely eliminated, and the four spots such as welding flaws, scratches and dust caused by the presence of the gap and the weld trace can be completely eliminated. Arise.

脚付の誘導部材を筒形ケース内に動かないように強固に固定するので、誘導部材のずれ動き，震動などによって生じていた耳ざわりな騒音を解消するという効果を生ずる。 Since the guide member with legs is firmly fixed so as not to move in the cylindrical case, there is an effect of eliminating the unpleasant noise generated by the displacement movement, vibration, etc. of the guide member.

筒形ケースと前盤および後盤を組付け前の状態にて示す正面図Front view showing the cylindrical case, front panel and rear panel in the state before assembly （ａ）は後盤の短環と筒形ケースの突合わせ前の状態、（ｂ）は同、Ｖ形カット部を溶接した状態を示す部分断面図、（ｃ）は同、内外の溶接痕を仕上げ研磨して接続した状態を示す部分断面図(A) is a state before the short ring of the rear panel and the cylindrical case are butted together, (b) is a partial cross-sectional view showing a state where the V-shaped cut portion is welded, and (c) is a welding mark inside and outside the same. Is a partial cross-sectional view showing the state after finishing polishing and connecting 脚付の誘導部材の１例を筒形ケースへの嵌め入れ前の状態にて示す斜視図Perspective view showing an example of a guide member equipped with legs with mating fit insertion state before the tubular casing （ａ）乃至（ｄ）は脚付の誘導部材の筒形ケース内への嵌め入れと押し当て付け固定する過程を示す説明図(A) to (d) are explanatory view showing the process of fixing abutting push the fit-insertion fitting into the tubular casing of the induction member with legs 筒形ケース内にケミカルフィルター材を充填し、前盤をボルト取付けした状態を示す断面図Cross-sectional view showing a state where the chemical filter material is filled in the cylindrical case and the front panel is bolted クリーンルーム内での設置例を示す説明図Explanatory drawing showing an installation example in a clean room 従来例図を示す断面図Sectional view showing a conventional example

１は筒形ケース
２は後盤
２ａは円盤
２ｂは供給ガスの出口孔
２ｃは筒部
２ｄは短環
３は前盤
３ａは円盤
３ｂは供給ガスの入口孔
３ｃは筒部
３ｄは供給ガスの拡散部材
４はＶ形カット部
５ａはボルト
５ｂはナット
６は脚付の誘導部材
６ａは主板
６ｂは脚
６ｃは誘導孔
７はクリーンルーム
８は供給ガスを供給する装置
Ｓは隙間
Ｗは溶接部
Ｗ１，Ｗ２は平滑面
Ｆはフィルター材
Ｙは誘導空間
Ｋは供給ガス 1 is a cylindrical case 2 is a rear panel 2a is a disk 2b is a supply gas outlet hole 2c is a cylindrical part 2d is a short ring 3 is a front panel 3a is a disk 3b is a supply gas inlet hole 3c is a cylindrical part 3d is a supply gas Diffusion member 4 is a V-shaped cut portion 5a is a bolt 5b is a nut 6 is a guide member with a leg 6a is a main plate 6b is a leg 6c is a guide hole 7 is a clean room 8 is a device for supplying a supply gas S is a gap W is a weld W1 , W2 is smooth surface F is filter material Y is induction space K is supply gas

本発明は、筒形ケースの出口側端と後盤間を隙間が生じない平面突合わせ形にしてそこに形成する外広のＶ形カット部の埋め溶接と溶接痕を取除く仕上げ研磨とにて接続して、筒形ケースの内面に従来生じていた隙間Ｓと溶接痕を解消し、溶接滓等の隙間溜まりと溶接痕への付着四散を完全に生じないようにする。
また、脚付の誘導部材は筒形ケースに当て嵌まる大きさの平面視四角形にして且つ縦横いずれかの一辺を僅かに長くするとともに四周等に設ける嵌付け脚の１本に外開き傾斜を附して形成して、該外開き傾斜脚側を前傾して筒形ケース内に嵌め付け、終盤の押し均しにより誘導部材を筒形ケースの内壁に強く押し当て付けして固定して動かないようにしてずれ動き，震動等による騒音を一切生じないようにする。 In the present invention, the outer side V-shaped cut portion formed in a flat-butt-butted shape in which no gap is generated between the outlet side end of the cylindrical case and the rear panel, and finish polishing to remove the welding traces are formed. The gap S and the welding traces that have conventionally occurred on the inner surface of the cylindrical case are eliminated, and the gap accumulation such as the welding rod and the adhesion spread to the welding traces are not generated completely.
In addition, the guide member with the leg is a quadrangle in plan view that is large enough to fit the cylindrical case, and one of the vertical and horizontal sides is slightly elongated, and one of the fitting legs provided on the four circumferences is provided with an outward opening inclination. and to form, with order fitting the outer opening inclined leg side tilted forward to the cylinder-shaped case, and fixed by abutting strongly pressed to the inner wall of the guide member of the tubular casing by smoothing press late Make sure that it does not move so that it does not generate any noise due to misalignment or vibration.

図１に示すように、ステンレス鋼にて入口と出口を直列の両端に有す筒形ケース１と出口側に接続する後盤２と入口側に接続する前盤３を個別に形成する。
後盤２は筒形ケース１の径より大きい円盤２ａの中心に供給ガスの出口孔２ｂを設けた小筒部２ｃを外側に向けて設け、円盤２ａの内側に筒形ケース１に平面突合せする同径の短環２ｄを設けている。筒形ケース１と短環２ｄは同径によって突合わされ、図２に示すように外周に大きく深いＶ形カット部４を設けて、Ｖ形カット部４を埋める溶接Ｗをして両者を接続し、内外面の溶接痕を仕上げ研磨にて削り落として平滑面Ｗ１、Ｗ２にする。 As shown in FIG. 1, a cylindrical case 1 having an inlet and an outlet at both ends in series, a rear panel 2 connected to the outlet side, and a front panel 3 connected to the inlet side are individually formed of stainless steel.
The rear panel 2 is provided with a small cylindrical part 2c provided with an outlet hole 2b for supply gas at the center of a disk 2a larger than the diameter of the cylindrical case 1 facing outward, and is flush with the cylindrical case 1 on the inner side of the disk 2a. A short ring 2d having the same diameter is provided. The cylindrical case 1 and the short ring 2d are abutted by the same diameter, and as shown in FIG. 2, a large and deep V-shaped cut portion 4 is provided on the outer periphery, and welding W is buried to fill the V-shaped cut portion 4 to connect the two. The weld marks on the inner and outer surfaces are scraped off by finish polishing to form smooth surfaces W1 and W2.

前盤３は図１から明らかなように円盤３ａの中心に供給ガスＫの入口孔３ｂを設けた筒部３ｃを外側に突出し、円盤３ａと筒形ケース１端のフランジ１ａとの間で取外し自在においてボルト５ａ・ナット５ｂ止め取付けする。３ｄは供給ガスＫを筒体ケース１内に拡散させるカップ形をした多孔の拡散部材であって、円盤３ａの内面中心に溶接する。 As apparent from FIG. 1, the front plate 3 protrudes outwardly from a cylindrical portion 3c provided with an inlet hole 3b for the supply gas K at the center of the circular plate 3a, and is removed between the circular plate 3a and the flange 1a at the end of the cylindrical case 1. The bolt 5a and nut 5b are fixed and attached freely. 3d is a cup-shaped porous diffusion member that diffuses the supply gas K into the cylindrical case 1, and is welded to the center of the inner surface of the disk 3a.

図３は同質製の脚付の誘導部材６を示し、筒形ケース１に当て嵌まる大きさの角取り四角形をして且つ縦横いずれかの一辺を１ｍｍ以下にて僅かに長くした主板６ａと、その四周に４本の嵌付け脚６ｂを設け、僅かに長くした側の嵌付け脚の１本を外側に開き傾斜させて対面する脚を内側に閉じ傾斜させて形成している。なお主板６ａは誘導孔６ｃを多数設けている。 FIG. 3 shows a homogeneous guiding member 6 with legs, a main plate 6a having a square shape of a size that fits into the cylindrical case 1 and slightly longer than 1 mm in either length or width, Four fitting legs 6b are provided around the four circumferences, and one of the slightly longer fitting legs is opened and inclined outward, and the facing leg is closed and inclined. The main plate 6a has a large number of guide holes 6c.

脚付の誘導部材６は図４（ａ）乃至（ｄ）に示すように、前盤３をボルト５ａ止めする前、即ち筒形ケース１の入口を開放した状態下において外側に開き傾斜した嵌付け脚６ｂ側を前傾させて且つ他側の嵌め付け脚６ｂを内側に弾性曲げして筒形ケース１内に入口側から嵌め入れるのである。傾斜させることによって嵌入することができる嵌め入れの最終段階で図４（ｃ）に示すように先行の嵌付け脚６ｂが後盤２に当接した時点で主板６ａの後端側を押棒などにて押して図４（ｄ）に示すように主板６ａを斜め状態から平らに押し均しする。その過程で主板６ａの長尺側は筒形ケース１の内壁に強よく押し当たり固定することとなる。主板６ａの強よい押し当たりにて脚付の誘導部材６は筒形ケース１を倒すなどして動かしても一切動かないものとなる。弾性曲げしていた後側の嵌付け脚６ｂは元形に復帰する。
As shown in FIGS. 4 (a) to 4 (d), the legged guide member 6 is fitted outwardly and inclined before the front panel 3 is fastened with the bolt 5a, that is, in a state where the inlet of the cylindrical case 1 is opened. with it's fitted into the leg 6b side from the inlet side to the forward inclination is allowed by and the other side of the fitting because with legs 6b elastic bending inward to the tubular casing 1. The final stage of the fit-insertion fitting can be fitted by tilting in FIG 4 (c) to the fitting with the leg 6b is after Release 2 prior to indicate the rear end side of the main plate 6a when the contact with such push rod To push the main plate 6a flat from an oblique state as shown in FIG. 4 (d). In the process, the long side of the main plate 6a is firmly pressed against and fixed to the inner wall of the cylindrical case 1. Even if the guiding member 6 with legs is moved by defeating the cylindrical case 1 by the strong contact of the main plate 6a, it does not move at all. The rear fitting leg 6b that has been elastically bent returns to its original shape.

次いで筒形ケース１内に入口側から図５に示す特殊な繊維からなる高精度のケミカルフィルター材Ｆを誘導部材６に接面するまで充填する。出口前には供給ガスＫの誘導空間Ｙが形成される。充填後に前盤３をボルト５ａ・ナット５ｂ止めして筒形ケース１を閉じ、図６に示すように入口側の短筒３ｃを例えばクリーンルーム７内の窒素ガス，圧縮エアーなどの供給路に接続し、出口側の筒部２ｃをクリーンガスを必要とする露光装置，検査装置８などに供給する供給路に接続するのである。 Next, the cylindrical case 1 is filled from the inlet side with a high-precision chemical filter material F made of special fibers shown in FIG. An induction space Y for the supply gas K is formed before the outlet. After filling, the front panel 3 is fastened with bolts 5a and nuts 5b to close the cylindrical case 1, and the short cylinder 3c on the inlet side is connected to a supply path such as nitrogen gas or compressed air in the clean room 7 as shown in FIG. Then, the cylindrical portion 2c on the outlet side is connected to a supply path that supplies the exposure apparatus that requires clean gas, the inspection apparatus 8, and the like.

筒形ケース１内に入る供給ガスＫは拡散部材３ｄによって筒形ケース１内に広く広がって流れ、誘導部材６によって誘導空間Ｙ内に寄せられて出口より流出することとなる。
このようにして供給される供給ガスＫはフィルター材Ｆによって窒素ガスまたは圧縮エアー，ドライエアーなどの供給ガスＫに混在する塩化水素，硫化水素，ＳＯｘ，ＮＯｘ，フッ素等の酸性物質，アンモニア，アミン等のアルカリ物質，ボロン，リン等のドーパント物質，ＤＰＯなどのシロキサンフタレート類，ＢＨＴ，ＨＭＤＳ，ＴＭＳ等の有機物質などのケミカル汚染物質を吸着し、分子汚染物を精度高く除去するので、露光装置・検査装置などのレンズ・ミラーのくもりの防止、露光装置内の循環部内の汚染防止，基盤表面の薄膜密着不良等を防止して、製造歩留り・製品の品質の向上，光学部品・フォトマスク等の汚染防止に効果を奏すこととなる。 The supply gas K entering the cylindrical case 1 flows widely in the cylindrical case 1 by the diffusion member 3d, flows into the induction space Y by the guide member 6, and flows out from the outlet.
The supply gas K supplied in this way is an acidic substance such as hydrogen chloride, hydrogen sulfide, SOx, NOx, fluorine, ammonia, amine, etc. mixed in the supply gas K such as nitrogen gas or compressed air or dry air by the filter material F It adsorbs chemical contaminants such as alkaline substances such as boron, dopant substances such as boron, siloxane phthalates such as DPO, and organic substances such as BHT, HMDS, and TMS, and removes molecular contaminants with high accuracy.・ Prevents fogging of lenses and mirrors in inspection equipment, etc., prevents contamination in the circulation part of the exposure equipment, and prevents thin film adhesion on the substrate surface to improve manufacturing yield, product quality, optical parts, photomasks, etc. It will be effective in preventing pollution.

本発明の筒形ケミカルフィルターケースは後盤との間の接続部分の内側に生じていた隙間をなくしたので溶接滓等の溜まりがなく、さらに仕上げ研磨にて溶接痕も削り取って平滑にするので溶接痕より溶接滓等の四散も防止されることになる。特にケミカルフィルター材によってケミカル物質を含まない高精度に清浄された供給ガスにして各種装置に供給することができることとなる。また脚付の誘導部材は筒形ケース内に強く押し当たり固定することで、ずれ動き，搖動，震動などが全く生じないので耳ざわりな騒音の発生を解消することとなる。 Since the cylindrical chemical filter case of the present invention eliminates the gap generated inside the connection part between the rear panel, there is no accumulation of welding rods, etc. It is possible to prevent the welding rods from being scattered from the welding marks. In particular, the supply gas can be supplied to various apparatuses by using a chemical filter material as a supply gas which is purified with high accuracy and does not contain a chemical substance. In addition, the guiding member with legs is strongly pressed against and fixed in the cylindrical case, so that no shifting movement, peristalsis, vibration, etc. occur at all, so that generation of an unpleasant noise is eliminated.

本発明の筒形ケミカルフィルターケースは、ケミカル物質を高精度に除去した供給ガスを必要とする各種の製造装置等に設備負担なく供給し得ることで広く利用されるものである。 The cylindrical chemical filter case of the present invention is widely used because it can be supplied to various manufacturing apparatuses and the like that require a supply gas from which a chemical substance has been removed with high precision without any equipment burden.

Claims

供給ガスの入口と出口を有す筒形ケースと該筒形ケースの出口側に後盤を平面突合せとＶ形カット部の埋め溶接および内外面の溶接痕を除去する仕上げ研磨にて接続し、且つ該筒形ケースの前盤をボルト止めする前の開放された入口側より出口側に嵌入する誘導孔多設の主板からなる脚付の誘導部材を該筒形ケースの内径に当て嵌まる四角形の大きさにして且つ縦横いずれかの一辺を他辺より僅かに長くして、該筒形ケースに傾斜嵌め入れと傾斜嵌め入れの終盤の押し均らしにより該誘導部材の長尺辺を該筒形ケースの内面に強く押し当てしてずれ動き，揺動，震動等が生じないように固定することを特徴とする筒形ケミカルフィルターケースの製造方法。 A cylindrical case having an inlet and an outlet for the supply gas, and a rear panel on the outlet side of the cylindrical case are connected to each other by plane butting, filling welding of the V-shaped cut portion, and finishing polishing to remove welding marks on the inner and outer surfaces, In addition, a square-shaped guide member fitted with an inner diameter of the cylindrical case is fitted with a legged guide member made of a main plate with a plurality of guide holes inserted from the opened inlet side to the outlet side before bolting the front plate of the cylindrical case. The long side of the guide member is made into the cylindrical shape by making the size and either one of the vertical and horizontal sides slightly longer than the other side, and tilting the cylindrical case and leveling the end of the inclined fitting. A method of manufacturing a cylindrical chemical filter case, wherein the case is firmly pressed against the inner surface of the case and fixed so as not to be displaced, oscillated, shaken, or the like.