JP6420172B2 - Sheet feeding apparatus and feeding method - Google Patents

Sheet feeding apparatus and feeding method Download PDF

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JP6420172B2
JP6420172B2 JP2015032239A JP2015032239A JP6420172B2 JP 6420172 B2 JP6420172 B2 JP 6420172B2 JP 2015032239 A JP2015032239 A JP 2015032239A JP 2015032239 A JP2015032239 A JP 2015032239A JP 6420172 B2 JP6420172 B2 JP 6420172B2
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sheet
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JP2016153324A (en
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芳昭 杉下
芳昭 杉下
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Lintec Corp
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本発明は、シート供給装置および供給方法に関する。   The present invention relates to a sheet supply apparatus and a supply method.

従来、被着体に接着シートを貼付するシート貼付装置が利用されている（例えば、特許文献１参照）。   Conventionally, a sheet sticking device for sticking an adhesive sheet to an adherend has been used (see, for example, Patent Document 1).

特開２００６−１８２３９６号公報JP 2006-182396 A

しかしながら、特許文献１に記載されたような従来の装置に、閉ループ状の切込の内側が貼付用シートとされ、外側が帯状の不要シートとされた接着シートの一方の面に、帯状の剥離シートが仮着された原反が採用されると、図１のＡＡで示した図の二点鎖線で示すように、剥離手段の折曲部で、不要シートが剥離シートから剥がれてしまう現象（以下、「トンネリング現象」という場合がある）が発生する場合がある。このようなトンネリング現象は、接着シートと剥離シートとの巻回径や折曲径の相違が起因しており、巻回された原反が当該巻回から解かれたときや、原反がローラやガイド等によって折り曲げられたときに発生し易い。そして、このようなトンネリング現象を放置して原反を繰り出し続けると、当該トンネリング現象を起こしている不要シート部分がどんどん大きくなり、当該不要シート部分が貼付ローラ（押圧手段）と半導体ウエハ（以下、単に「ウエハ」という場合がある）（被着体）との間に入ってしまい、貼付用シートの貼付不良や被着体の損傷等を招来するという不都合がある。   However, in a conventional apparatus as described in Patent Document 1, a strip-like peel is formed on one surface of an adhesive sheet in which the inside of a closed loop-shaped cut is a sticking sheet and the outside is a strip-like unnecessary sheet. When the original fabric on which the sheet is temporarily attached is adopted, as shown by the two-dot chain line in the diagram shown by AA in FIG. 1, the phenomenon that the unnecessary sheet is peeled off from the release sheet at the bent portion of the release means ( In some cases, this may be referred to as a “tunneling phenomenon”. Such a tunneling phenomenon is caused by a difference in winding diameter or bending diameter between the adhesive sheet and the release sheet, and when the wound original fabric is unwound from the winding, or the original fabric is a roller. It is likely to occur when bent by a guide or the like. Then, if such a tunneling phenomenon is left and the raw material is continuously fed out, the unnecessary sheet portion causing the tunneling phenomenon becomes larger and larger, and the unnecessary sheet portion becomes a sticking roller (pressing means) and a semiconductor wafer (hereinafter, referred to as “unnecessary sheet portion”). (It may be simply referred to as a “wafer”) (adhered body), leading to inconvenience of defective pasting of the sticking sheet and damage to the adherend.

本発明の目的は、トンネリング現象を抑制することができるシート供給装置および供給方法を提供することにある。   An object of the present invention is to provide a sheet feeding apparatus and a feeding method that can suppress a tunneling phenomenon.

前記目的を達成するために、本発明のシート供給装置は、閉ループ状の切込の内側が貼付用シートとされ、当該切込の外側が帯状の不要シートとされた接着シートの一方の面に、帯状の剥離シートが仮着された原反を繰り出し可能な繰出手段と、前記繰出手段で繰り出される原反から前記貼付用シートを剥離する剥離手段とを備え、前記不要シートおよび剥離シートに凹部および凸部の少なくとも一方を形成し、これら不要シートと剥離シートとの仮着状態を強化させる仮着強化手段を有する、という構成を採用している。   In order to achieve the above object, the sheet feeding device of the present invention is provided on one surface of an adhesive sheet in which the inside of a closed loop-shaped cut is an adhesive sheet and the outside of the cut is a strip-shaped unnecessary sheet. A feeding means capable of feeding the raw material temporarily attached with a strip-shaped release sheet; and a peeling means for peeling the sticking sheet from the raw material fed by the feeding means, wherein the unnecessary sheet and the release sheet are recessed. And the structure of forming at least one of a convex part and having the temporary attachment reinforcement | strengthening means which reinforces the temporary attachment state of these unnecessary sheets and a peeling sheet is employ | adopted.

この際、前記不要シートが前記剥離シートから剥がれるトンネリング現象を検知可能な検知手段を有する、ことが好ましい。   At this time, it is preferable to have a detecting means capable of detecting a tunneling phenomenon in which the unnecessary sheet is peeled off from the release sheet.

一方、本発明のシート供給方法は、閉ループ状の切込の内側が貼付用シートとされ、当該切込の外側が帯状の不要シートとされた接着シートの一方の面に、帯状の剥離シートが仮着された原反を繰り出す工程と、前記不要シートおよび剥離シートに凹部および凸部の少なくとも一方を形成し、これら不要シートと剥離シートとの仮着状態を強化させる工程と、前記繰り出される原反から前記貼付用シートを剥離する工程とを備えている、という構成を採用している。   On the other hand, in the sheet supply method of the present invention, the strip-shaped release sheet is formed on one surface of the adhesive sheet in which the inside of the closed loop-shaped cut is an adhesive sheet and the outside of the cut is a strip-shaped unnecessary sheet. A step of paying out the temporarily attached original fabric, a step of forming at least one of a concave portion and a convex portion in the unnecessary sheet and the release sheet, and strengthening a temporary attachment state between the unnecessary sheet and the release sheet; And a step of peeling the sticking sheet from the opposite side.

以上のような本発明によれば、不要シートと剥離シートとに凹部および凸部の少なくとも一方を形成するので、これら不要シートと剥離シートとの仮着状態が強化されるため、トンネリング現象を抑制することができる。   According to the present invention as described above, since at least one of the concave portion and the convex portion is formed on the unnecessary sheet and the release sheet, the temporary attachment state between the unnecessary sheet and the release sheet is strengthened, so that the tunneling phenomenon is suppressed. can do.

この際、トンネリング現象を検知可能な検知手段を備えれば、当該検知手段がトンネリング現象を検知したときに凹部および凸部の少なくとも一方を形成することができ、凹部や凸部を形成する頻度を低減し、仮着強化手段の寿命を延ばすことができる。   At this time, if a detection means capable of detecting the tunneling phenomenon is provided, at least one of the concave portion and the convex portion can be formed when the detection means detects the tunneling phenomenon, and the frequency of forming the concave portion and the convex portion can be increased. This can reduce the life of the temporary attachment strengthening means.

本発明の一実施形態に係るシート貼付装置の側面図。The side view of the sheet sticking apparatus which concerns on one Embodiment of this invention.

以下、本発明の一実施形態を図面に基づいて説明する。
なお、本実施形態におけるＸ軸、Ｙ軸、Ｚ軸は、それぞれが直交する関係にあり、Ｘ軸およびＹ軸は、所定平面内の軸とし、Ｚ軸は、前記所定平面に直交する軸とする。さらに、本実施形態では、Ｙ軸と平行な図１中手前側から観た場合を基準とし、方向を示した場合、「上」がＺ軸の矢印方向で「下」がその逆方向、「左」がＸ軸の矢印方向で「右」がその逆方向、「前」が図１中手前方向であるＹ軸の矢印方向で「後」がその逆方向とする。 Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In this embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis that is orthogonal to the predetermined plane. To do. Further, in this embodiment, when viewed from the front side in FIG. 1 parallel to the Y axis, the direction is indicated by “up” being the arrow direction of the Z axis and “down” being the opposite direction, “ The “left” is the X-axis arrow direction, “right” is the opposite direction, “front” is the Y-axis arrow direction, which is the front direction in FIG. 1, and “rear” is the opposite direction.

図１において、シート貼付装置１０は、閉ループ状の切込ＣＵの内側が貼付用シートＳＳとされ、当該切込ＣＵの外側が帯状の不要シートＵＳとされた接着シートＡＳの一方の面ＡＳ１に、帯状の剥離シートＲＬが仮着された原反ＲＳを繰り出し可能な繰出手段２０と、繰出手段２０で繰り出される原反ＲＳから貼付用シートＳＳを剥離する剥離手段としての剥離板３０と、不要シートＵＳおよび剥離シートＲＬに凹部ＣＣを形成し、これら不要シートＵＳと剥離シートＲＬとの仮着状態を強化させる仮着強化手段４０と、不要シートＵＳが剥離シートＲＬから剥がれるトンネリング現象ＴＰを検知可能な光学センサや撮像手段等の検知手段５０と、剥離板３０で剥離された貼付用シートＳＳを被着体としてのウエハＷＦの被着面に押圧して貼付する押圧手段としての押圧ローラ６０と、ウエハＷＦを支持し、当該ウエハＷＦと押圧ローラ６０とを相対移動させる支持手段７０とを備えている。なお、本実施形態の繰出手段２０と剥離板３０と仮着強化手段４０とで本願発明のシート供給装置が構成される。   In FIG. 1, the sheet sticking device 10 has an adhesive sheet AS on one side AS <b> 1 of which the inside of the closed-loop cut CU is a sticking sheet SS and the outside of the cut CU is a strip-like unnecessary sheet US. , A feeding means 20 capable of feeding out the original fabric RS temporarily attached with the strip-shaped release sheet RL, a peeling plate 30 as a peeling means for peeling the adhesive sheet SS from the original fabric RS fed out by the feeding means 20, and unnecessary Forming recesses CC in the sheet US and the release sheet RL, and detecting a tunneling phenomenon TP in which the unnecessary sheet US is peeled off from the release sheet RL, and temporary attachment strengthening means 40 for strengthening the temporary attachment state between the unnecessary sheet US and the release sheet RL. A detection means 50 such as a possible optical sensor or an imaging means, and a sticking sheet SS peeled off by the peeling plate 30 are pressed against the adherend surface of the wafer WF as an adherend. A pressing roller 60 as a pressing means for subjecting the wafer WF is supported, and a support means 70 for relatively moving the said wafer WF and the pressing roller 60. In addition, the sheet supply apparatus of the present invention is configured by the feeding means 20, the peeling plate 30, and the temporary attachment strengthening means 40 of the present embodiment.

繰出手段２０は、原反ＲＳを支持する支持ローラ２１と、原反ＲＳを案内する複数のガイドローラ２２と、駆動機器としての回動モータ２３Ａによって駆動する駆動ローラ２３と、剥離シートＲＬおよび不要シートＵＳを駆動ローラ２３との間に挟み込むピンチローラ２４と、図示しない駆動機器によって駆動し、剥離シートＲＬおよび不要シートＵＳを回収する回収ローラ２５とを備えている。   The feeding means 20 includes a support roller 21 that supports the original fabric RS, a plurality of guide rollers 22 that guide the original fabric RS, a driving roller 23 that is driven by a rotation motor 23A as a drive device, a release sheet RL, and an unnecessary sheet. A pinch roller 24 that sandwiches the sheet US with the drive roller 23 and a collection roller 25 that is driven by a drive device (not shown) and collects the release sheet RL and the unnecessary sheet US are provided.

仮着強化手段４０は、原反ＲＳの繰出方向に直交する方向に１対設けられ、各仮着強化手段４０は、図１のＢＢで示した図のように、駆動機器としての直動モータ４１と、直動モータ４１の出力軸４１Ａに支持され、複数の凸部４２Ａが設けられた凹部形成部材４２と、凹部形成部材４２の押圧を受け止める凹部が形成された受け部材４３とを備えている。なお、剥離板３０の折曲部３１や原反ＲＳを案内する案内面３２には、原反ＲＳに形成された凹部ＣＣにより剥離シートＲＬ側から飛び出した凸部が通る位置に切欠があるとよい。   A pair of temporary attachment strengthening means 40 is provided in a direction orthogonal to the feeding direction of the original fabric RS, and each temporary attachment reinforcing means 40 is a linear motion motor as a drive device as shown in the diagram indicated by BB in FIG. 41, a concave portion forming member 42 supported by the output shaft 41A of the linear motor 41 and provided with a plurality of convex portions 42A, and a receiving member 43 having a concave portion for receiving the pressing of the concave portion forming member 42. Yes. In addition, when the bent surface 31 of the peeling plate 30 or the guide surface 32 that guides the raw fabric RS has a notch at a position where the convex portion that protrudes from the peeling sheet RL side by the concave portion CC formed in the raw fabric RS passes. Good.

支持手段７０は、駆動機器としてのリニアモータ７１のスライダ７１Ａに支持されるとともに、減圧ポンプや真空エジェクタ等の図示しない減圧手段に連通された支持面７２Ａを有するテーブル７２を備えている。   The support means 70 includes a table 72 having a support surface 72A that is supported by a slider 71A of a linear motor 71 as a driving device and communicated with a decompression means (not shown) such as a decompression pump or a vacuum ejector.

以上のシート貼付装置１０において、ウエハＷＦに貼付用シートＳＳを貼付する手順について説明する。
先ず、作業者が原反ＲＳを図１に示すようにセットした後、図示しない操作パネルやパーソナルコンピュータ等の入力手段を介して自動運転開始の信号を入力すると、繰出手段２０が回動モータ２３Ａおよび図示しない駆動機器を駆動し、原反ＲＳを繰り出す。次いで、仮着強化手段４０が直動モータ４１を駆動し、時間的または距離的な所定の間隔で不要シートＵＳおよび剥離シートＲＬに凹部形成部材４２を押圧し、凹部ＣＣを形成する。これにより、不要シートＵＳと剥離シートＲＬとの仮着状態が強化されることとなる。そして、剥離板３０上に位置する先頭の貼付用シートＳＳの繰出方向先端部が折曲部３１によって所定量剥離されたことが図示しない検知手段に検知されると、繰出手段２０が回動モータ２３Ａおよび図示しない駆動機器の駆動を停止し、スタンバイ状態となる。なお、仮着強化手段４０で凹部ＣＣを形成する所定の間隔は、作業者が任意に決定することができる。 The procedure for sticking the sticking sheet SS to the wafer WF in the sheet sticking apparatus 10 will be described.
First, after an operator sets the original fabric RS as shown in FIG. 1, when an automatic operation start signal is input via an input means such as an operation panel or a personal computer (not shown), the feeding means 20 causes the rotation motor 23A. And the drive apparatus which is not shown in figure is driven, and unwinds raw material RS. Next, the temporary strengthening means 40 drives the linear motion motor 41 to press the recessed portion forming member 42 against the unnecessary sheet US and the release sheet RL at a predetermined time or distance interval, thereby forming the recessed portion CC. Thereby, the temporary attachment state of the unnecessary sheet US and the release sheet RL is strengthened. Then, when the detection means (not shown) detects that the leading end of the sticking sheet SS positioned on the peeling plate 30 has been peeled off by the bent portion 31 by a predetermined amount, the feeding means 20 turns the rotation motor. The driving of the driving device 23A and a driving device (not shown) is stopped, and a standby state is set. In addition, the operator can arbitrarily determine the predetermined interval at which the recesses CC are formed by the temporary attachment reinforcing means 40.

そして、人手または多関節ロボットやベルトコンベア等の図示しない搬送手段が支持面７２Ａ上にウエハＷＦを載置すると、支持手段７０が図示しない減圧手段を駆動し、ウエハＷＦを吸着保持した後、リニアモータ７１を駆動し、テーブル７２を図１中実線で示す初期位置から左方向に搬送する。そして、ウエハＷＦが所定の位置に到達したことが図示しない検知手段に検知されると、繰出手段２０が回動モータ２３Ａおよび図示しない駆動機器を駆動し、ウエハＷＦの搬送速度に合わせた速度で原反ＲＳを繰り出す。このときも上述と同様にして、仮着強化手段４０が直動モータ４１を駆動し、所定の間隔で不要シートＵＳおよび剥離シートＲＬに凹部ＣＣを形成する。これにより、トンネリング現象ＴＰの発生を抑制しつつ、貼付用シートＳＳが剥離シートＲＬから剥離され、押圧ローラ６０によってウエハＷＦに押圧されて貼付される。そして、剥離板３０上に位置する次の貼付用シートＳＳの繰出方向先端部が折曲部３１によって所定量剥離されたことが図示しない検知手段に検知されると、繰出手段２０が回動モータ２３Ａおよび図示しない駆動機器の駆動を停止し、再びスタンバイ状態となる。
ウエハＷＦに貼付用シートＳＳが貼付され、テーブル７２が所定の位置に到達すると、支持手段７０がリニアモータ７１および図示しない減圧手段の駆動を停止し、人手または図示しない搬送手段によってウエハＷＦが次工程へ搬送され、テーブル７２を初期位置に復帰させ、以降上述と同様の動作が繰り返される。 Then, when a transport unit (not shown) such as a human hand or an articulated robot or a belt conveyor places the wafer WF on the support surface 72A, the support unit 70 drives the decompression unit (not shown) to hold the wafer WF by suction, and then linearly The motor 71 is driven, and the table 72 is conveyed leftward from the initial position indicated by the solid line in FIG. When the detection unit (not shown) detects that the wafer WF has reached a predetermined position, the feeding unit 20 drives the rotation motor 23A and a driving device (not shown) at a speed that matches the transfer speed of the wafer WF. Feed out the raw fabric RS. Also at this time, in the same manner as described above, the temporary attachment reinforcing means 40 drives the linear motion motor 41 to form the recesses CC in the unnecessary sheet US and the release sheet RL at predetermined intervals. As a result, while the occurrence of the tunneling phenomenon TP is suppressed, the sticking sheet SS is peeled off from the release sheet RL, and is pressed and attached to the wafer WF by the pressing roller 60. When the detecting means (not shown) detects that the leading end portion of the next sticking sheet SS positioned on the peeling plate 30 has been peeled off by the bent portion 31, the feeding means 20 turns the rotation motor. The driving of the driving device 23A and the driving device (not shown) is stopped, and the standby state is set again.
When the application sheet SS is attached to the wafer WF and the table 72 reaches a predetermined position, the support means 70 stops driving the linear motor 71 and the decompression means (not shown), and the wafer WF is next transferred manually or by a conveyance means (not shown). It is conveyed to the process, the table 72 is returned to the initial position, and thereafter the same operation as described above is repeated.

以上のような実施形態によれば、不要シートＵＳおよび剥離シートＲＬに凹部ＣＣを形成するので、これら不要シートＵＳと剥離シートＲＬとの仮着状態が強化されるため、トンネリング現象ＴＰを抑制することができる。   According to the embodiment as described above, since the concave portion CC is formed in the unnecessary sheet US and the release sheet RL, the temporary attachment state between the unnecessary sheet US and the release sheet RL is strengthened, and thus the tunneling phenomenon TP is suppressed. be able to.

以上のように、本発明を実施するための最良の構成、方法等は、前記記載で開示されているが、本発明は、これに限定されるものではない。すなわち、本発明は、主に特定の実施形態に関して特に図示され、かつ説明されているが、本発明の技術的思想および目的の範囲から逸脱することなく、以上述べた実施形態に対し、形状、材質、数量、その他の詳細な構成において、当業者が様々な変形を加えることができるものである。また、上記に開示した形状、材質などを限定した記載は、本発明の理解を容易にするために例示的に記載したものであり、本発明を限定するものではないから、それらの形状、材質などの限定の一部もしくは全部の限定を外した部材の名称での記載は、本発明に含まれる。   As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of some or all of such restrictions is included in this invention.

たとえば、繰出手段２０は、接着シートＡＳに切込ＣＵが形成されていない原反を採用し、図１中二点鎖線で示すように、折曲部３１までの間で例えば切断手段としてのロータリカッタ８０で接着シートに切込ＣＵを形成するように構成してもよい。なお、切断手段としては、ダイカッタ、レーザカッタ、駆動機器にカッタ刃を支持させたもの等なんら限定されることはない。
剥離手段は、丸棒やローラ等で構成してもよい。 For example, the feeding means 20 adopts a raw material in which the cut CU is not formed in the adhesive sheet AS, and as shown by a two-dot chain line in FIG. The cutter CU may be configured to form the cut CU in the adhesive sheet. Note that the cutting means is not limited in any way, such as a die cutter, a laser cutter, or a drive device that supports a cutter blade.
The peeling means may be composed of a round bar or a roller.

仮着強化手段４０は、前記実施形態のように、所定の間隔で不要シートＵＳと剥離シートＲＬとに凹部ＣＣを形成しつつ、または、所定の間隔で不要シートＵＳと剥離シートＲＬとに凹部ＣＣを形成することなく、検知手段５０がトンネリング現象ＴＰを検知したときに、不要シートＵＳおよび剥離シートＲＬに凹部ＣＣを形成してもよい。
仮着強化手段４０は、１体でもよいし、３体以上でもよく、凹部ＣＣを形成する位置は、不要シートＵＳおよび剥離シートＲＬに凹部ＣＣを形成できればどこでもよい。
仮着強化手段４０が形成する凹部ＣＣや凸部の形状は、平面視で円形、楕円形、三角形や四角形以上の多角形、Ｘ形状、＋形状、Ｖ形状、波型形状、それら形状を適宜に組み合わせた形状等何ら限定されることはないし、側面視で三角形形状、台形形状、矩形形状、円弧形状、それら形状を適宜に組み合わせた形状等何ら限定されることもない。
仮着強化手段４０は、上記実施形態における直動モータ４１および凹部形成部材４２の位置と、受け部材４３との位置を入れ替えてもよい。
仮着強化手段４０は、受け部材４３側に駆動機器を設け、凹部形成部材４２に対して受け部材４３を離間接近させてもよいし、凹部形成部材４２および受け部材４３の両方を移動させて離間接近させてもよい。
仮着強化手段４０を設ける位置は、支持ローラ２１と折曲部３１との間でもよいし、折曲部３１と回収ローラ２５との間でもよいし、支持ローラ２１と回収ローラ２５との間の原反繰出方向に沿う複数の位置に配置してもよく、トンネリング現象ＴＰを防止できるのであれば（不要シートＵＳと剥離シートＲＬとの仮着状態を強化できるのであれば）どの位置に設けてもよい。
受け部材４３は、凹部形成部材４２の凸部４２Ａに対応した凹部を備えていてもよいし、凸部に対応していない凹部を備えていてもよいし、凹部がなくてもよいし、金属や陶器等の非弾性部材で構成してもよいし、樹脂やゴム等の弾性部材で構成してもよい。
仮着強化手段４０は、凹部形成部材４２と受け部材４３との代わりに、または、それらと併用して、複数の凹部が設けられた凸部形成部材と、凸部形成部材の押圧を受け止める凸部が形成された受け部材とを備えてもよい。
仮着強化手段４０は、外周に凹部形成部材や凸部形成部材が設けられた凸ローラや凹ローラを採用してもよく、このような凸ローラや凹ローラは、駆動機器で駆動してもよいし、原反ＲＳの繰り出しに追従して回転する構成でもよいし、原反ＲＳに離間接近する構成であってもよい。
凹部形成部材や凸部形成部材に設けられる凸部や凹部、不要シートＵＳおよび剥離シートＲＬに形成する凹部ＣＣや凸部は、単数でも複数でもよいし、凹部形成部材や凸部形成部材に設けられる凸部や凹部は、不要シートＵＳおよび剥離シートＲＬを突き抜けることで凹部ＣＣや凸部を形成してもよい。 As in the above-described embodiment, the temporary attachment strengthening unit 40 forms the recesses CC in the unnecessary sheet US and the release sheet RL at a predetermined interval, or recesses in the unnecessary sheet US and the release sheet RL at a predetermined interval. When the detection unit 50 detects the tunneling phenomenon TP without forming the CC, the concave portion CC may be formed in the unnecessary sheet US and the release sheet RL.
The temporary strengthening means 40 may be one or more than three, and the position where the concave portion CC is formed may be anywhere as long as the concave portion CC can be formed in the unnecessary sheet US and the release sheet RL.
The shape of the concave portion CC or the convex portion formed by the temporary attachment strengthening means 40 is appropriately selected from a circular shape, an elliptical shape, a triangular shape or a polygon shape equal to or more than a quadrilateral shape, an X shape, a + shape, a V shape, a corrugated shape, and the like. There is no limitation on the shape combined with each other, and there is no limitation on a triangular shape, a trapezoidal shape, a rectangular shape, an arc shape, or a shape obtained by appropriately combining these shapes in a side view.
The temporary strengthening means 40 may exchange the positions of the linear motion motor 41 and the recess forming member 42 and the receiving member 43 in the above embodiment.
The temporary attachment strengthening means 40 may be provided with a driving device on the receiving member 43 side to move the receiving member 43 away from and close to the recessed portion forming member 42, or move both the recessed portion forming member 42 and the receiving member 43. You may make it approach apart.
The temporary attachment reinforcing means 40 may be provided between the support roller 21 and the bent portion 31, between the bent portion 31 and the collection roller 25, or between the support roller 21 and the collection roller 25. It may be arranged at a plurality of positions along the feed direction of the film, and provided at any position as long as the tunneling phenomenon TP can be prevented (if the temporary attachment state between the unnecessary sheet US and the release sheet RL can be strengthened). May be.
The receiving member 43 may be provided with a concave portion corresponding to the convex portion 42A of the concave portion forming member 42, or may be provided with a concave portion that does not correspond to the convex portion, or may have no concave portion, or metal. Or an inelastic member such as ceramics or an elastic member such as resin or rubber.
The temporary strengthening means 40 includes a convex portion forming member having a plurality of concave portions and a convex portion that receives the pressing of the convex portion forming member, instead of or in combination with the concave portion forming member 42 and the receiving member 43. And a receiving member having a portion formed thereon.
The temporary strengthening means 40 may employ a convex roller or a concave roller having a concave portion forming member or a convex portion forming member provided on the outer periphery, and such convex roller or concave roller may be driven by a driving device. It may be configured to follow the feed of the original RS and rotate, or may be configured to approach and close to the original RS.
The convex portion and concave portion provided on the concave portion forming member and the convex portion forming member, the concave portion CC and the convex portion formed on the unnecessary sheet US and the release sheet RL may be single or plural, and provided on the concave portion forming member and the convex portion forming member. The convex part and the concave part to be formed may form the concave part CC and the convex part by penetrating the unnecessary sheet US and the release sheet RL.

検知手段は、リミットスイッチや圧力センサ等の接触型のセンサであってもよい。
検知手段５０は、なくてもよく、この場合、トンネリング現象ＴＰが発生したことを認識した作業者が仮着強化手段４０を操作して、凹部ＣＣを形成してもよい。 The detecting means may be a contact type sensor such as a limit switch or a pressure sensor.
The detecting means 50 may not be provided. In this case, an operator who recognizes that the tunneling phenomenon TP has occurred may operate the temporary attachment reinforcing means 40 to form the recess CC.

押圧手段は、ブレード材、ゴム、樹脂、スポンジ、エアの吹き付け等による押圧部材を採用してもよいし、剥離手段で剥離された貼付用シートＳＳを保持する保持手段と、当該保持手段をウエハＷＦ方向に移動させることで貼付用シートＳＳをウエハＷＦに押圧して貼付する駆動機器とを備えたものでもよい。
押圧手段は、ウエハＷＦの全面または一部に貼付用シートＳＳを貼付してもよい。 The pressing means may employ a pressing member by blade material, rubber, resin, sponge, air spraying, etc., holding means for holding the adhesive sheet SS peeled by the peeling means, and the holding means as a wafer It may be provided with a drive device for pressing and sticking the sticking sheet SS to the wafer WF by moving in the WF direction.
The pressing means may attach the application sheet SS to the entire surface or a part of the wafer WF.

支持手段７０は、ウエハＷＦを停止させておき繰出手段２０および押圧ローラ６０を移動させてもよいし、ウエハＷＦと繰出手段２０および押圧ローラ６０との両方を移動させてもよい。
他の装置でウエハＷＦと繰出手段２０および押圧ローラ６０とを相対移動させる場合、本発明において支持手段７０はなくてもよい。 The support unit 70 may stop the wafer WF and move the feeding unit 20 and the pressing roller 60, or may move both the wafer WF, the feeding unit 20, and the pressing roller 60.
When the wafer WF, the feeding unit 20 and the pressing roller 60 are moved relative to each other in another apparatus, the supporting unit 70 may not be provided in the present invention.

本発明における接着シートＡＳ、貼付用シートＳＳおよび被着体の材質、種別、形状等は、特に限定されることはない。例えば、貼付用シートＳＳは、円形、楕円形、三角形や四角形等の多角形、その他の形状であってもよいし、感圧接着性、感熱接着性等の接着形態のものであってもよく、感熱接着性の接着シートＡＳが採用された場合は、貼付用シートＳＳを加熱する適宜なコイルヒータやヒートパイプの加熱側等の加熱手段を設けるといった適宜な方法で接着されればよい。また、このような接着シートＡＳは、例えば、接着剤層だけの単層のもの、基材と接着剤層との間に中間層を有するもの、基材の上面にカバー層を有する等３層以上のもの、更には、基材を接着剤層から剥離することのできる所謂両面接着シートのようなものであってもよく、両面接着シートは、単層又は複層の中間層を有するものや、中間層のない単層又は複層のものであってよい。また、被着体としては、例えば、食品、樹脂容器、シリコン半導体ウエハや化合物半導体ウエハ等の半導体ウエハ、回路基板、光ディスク等の情報記録基板、ガラス板、鋼板、陶器、木板または樹脂板等、任意の形態の部材や物品なども対象とすることができる。なお、接着シートＡＳや貼付用シートＳＳを機能的、用途的な読み方に換え、例えば、情報記載用ラベル、装飾用ラベル、保護シート、ダイシングテープ、ダイアタッチフィルム、ダイボンディングテープ、記録層形成樹脂シート等の任意の形状の任意のシート、フィルム、テープ等を前述のような任意の被着体に貼付することができる。   The material, type, shape and the like of the adhesive sheet AS, the sticking sheet SS, and the adherend in the present invention are not particularly limited. For example, the sticking sheet SS may be a circle, an ellipse, a polygon such as a triangle or a quadrangle, or other shapes, or may be of an adhesive form such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. When the heat-sensitive adhesive sheet AS is employed, it may be bonded by an appropriate method such as providing an appropriate coil heater for heating the sticking sheet SS or a heating means such as the heating side of the heat pipe. Such an adhesive sheet AS is, for example, a single layer having only an adhesive layer, a layer having an intermediate layer between the base material and the adhesive layer, and a cover layer on the upper surface of the base material. The above-described ones, and further, a so-called double-sided adhesive sheet that can peel the substrate from the adhesive layer may be used, and the double-sided adhesive sheet has a single-layer or multi-layer intermediate layer, It may be a single layer or multiple layers without an intermediate layer. Examples of the adherend include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit board, information recording substrates such as optical disks, glass plates, steel plates, ceramics, wood plates or resin plates, Arbitrary forms of members and articles can also be targeted. In addition, the adhesive sheet AS and the sticking sheet SS are replaced with functional and application readings, for example, information description labels, decorative labels, protective sheets, dicing tapes, die attach films, die bonding tapes, recording layer forming resins. Arbitrary sheets, films, tapes, etc. of arbitrary shapes, such as a sheet | seat, can be stuck on arbitrary adherends as above-mentioned.

本発明における手段および工程は、それら手段および工程について説明した動作、機能または工程を果たすことができる限りなんら限定されることはなく、まして、前記実施形態で示した単なる一実施形態の構成物や工程に全く限定されることはない。例えば、剥離手段は、繰出手段で繰り出される原反から貼付用シートを剥離可能なものであれば、出願当初の技術常識に照らし合わせ、その技術範囲内のものであればなんら限定されることはない（他の手段および工程についての説明は省略する）。
また、前記実施形態における駆動機器は、回動モータ、直動モータ、リニアモータ、単軸ロボット、多関節ロボット等の電動機器、エアシリンダ、油圧シリンダ、ロッドレスシリンダおよびロータリシリンダ等のアクチュエータ等を採用することができる上、それらを直接的又は間接的に組み合せたものを採用することもできる（実施形態で例示したものと重複するものもある）。 The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, as long as the peeling means can peel the sticking sheet from the raw material fed by the feeding means, it may be limited in any way as long as it is within the technical scope in light of the technical common sense at the beginning of the application. There is no explanation of other means and processes.
The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

２０…繰出手段
３０…剥離板（剥離手段）
４０…仮着強化手段
５０…検知手段
ＡＳ…接着シート
ＡＳ１…一方の面
ＣＣ…凹部
ＣＵ…切込
ＲＬ…剥離シート
ＲＳ…原反
ＳＳ…貼付用シート
ＴＰ…トンネリング現象
ＵＳ…不要シート 20 ... Feeding means 30 ... Peeling plate (peeling means)
40 ... Temporary attachment strengthening means 50 ... Detection means AS ... Adhesive sheet AS1 ... One side CC ... Concave part CU ... Notch RL ... Release sheet RS ... Raw material SS ... Sheet for sticking TP ... Tunneling phenomenon US ... Unnecessary sheet

Claims (3)

閉ループ状の切込の内側が貼付用シートとされ、当該切込の外側が帯状の不要シートとされた接着シートの一方の面に、帯状の剥離シートが仮着された原反を繰り出し可能な繰出手段と、
前記繰出手段で繰り出される原反から前記貼付用シートを剥離する剥離手段とを備え、
前記不要シートおよび剥離シートに凹部および凸部の少なくとも一方を形成し、これら不要シートと剥離シートとの仮着状態を強化させる仮着強化手段を有することを特徴とするシート供給装置。 The inner side of the closed loop-shaped cut is used as an adhesive sheet, and the outer side of the cut is used as a belt-like unnecessary sheet. Feeding means;
A peeling means for peeling the sticking sheet from the raw material fed by the feeding means,
A sheet supply apparatus comprising: a temporary attachment reinforcing means for forming at least one of a concave portion and a convex portion on the unnecessary sheet and the release sheet, and strengthening a temporary attachment state between the unnecessary sheet and the release sheet. 前記不要シートが前記剥離シートから剥がれるトンネリング現象を検知可能な検知手段を有することを特徴とする請求項１に記載のシート供給装置。   The sheet feeding apparatus according to claim 1, further comprising a detection unit capable of detecting a tunneling phenomenon in which the unnecessary sheet is peeled off from the release sheet. 閉ループ状の切込の内側が貼付用シートとされ、当該切込の外側が帯状の不要シートとされた接着シートの一方の面に、帯状の剥離シートが仮着された原反を繰り出す工程と、
前記不要シートおよび剥離シートに凹部および凸部の少なくとも一方を形成し、これら不要シートと剥離シートとの仮着状態を強化させる工程と、
前記繰り出される原反から前記貼付用シートを剥離する工程とを備えていることを特徴とするシート供給方法。 A step of feeding out the raw material in which the strip-shaped release sheet is temporarily attached to one surface of the adhesive sheet in which the inside of the closed-loop cut is an adhesive sheet and the outside of the cut is a strip-shaped unnecessary sheet; ,
Forming at least one of a concave portion and a convex portion on the unnecessary sheet and the release sheet, and strengthening a temporary attachment state between the unnecessary sheet and the release sheet;
And a step of peeling the sticking sheet from the unwound original fabric.
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