JP6391931B2 - 光学式位置測定装置 - Google Patents
光学式位置測定装置 Download PDFInfo
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- JP6391931B2 JP6391931B2 JP2013242727A JP2013242727A JP6391931B2 JP 6391931 B2 JP6391931 B2 JP 6391931B2 JP 2013242727 A JP2013242727 A JP 2013242727A JP 2013242727 A JP2013242727 A JP 2013242727A JP 6391931 B2 JP6391931 B2 JP 6391931B2
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- 230000003287 optical effect Effects 0.000 title claims description 15
- 238000005259 measurement Methods 0.000 claims description 34
- 230000035945 sensitivity Effects 0.000 claims description 22
- 230000003595 spectral effect Effects 0.000 claims description 22
- LFEUVBZXUFMACD-UHFFFAOYSA-H lead(2+);trioxido(oxo)-$l^{5}-arsane Chemical compound [Pb+2].[Pb+2].[Pb+2].[O-][As]([O-])([O-])=O.[O-][As]([O-])([O-])=O LFEUVBZXUFMACD-UHFFFAOYSA-H 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 8
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 6
- 230000000737 periodic effect Effects 0.000 claims description 5
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 4
- 238000005286 illumination Methods 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000003491 array Methods 0.000 description 13
- 230000007704 transition Effects 0.000 description 7
- 230000007423 decrease Effects 0.000 description 4
- 230000001419 dependent effect Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34776—Absolute encoders with analogue or digital scales
- G01D5/34784—Absolute encoders with analogue or digital scales with only analogue scales or both analogue and incremental scales
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
ここで、n:整数0,1,2,...
T1:第一の格子の格子定数
λ:光の波長
このタルボット面の位置が、そのため最適な走査間隔が、一方では第一の格子の格子定数に依存し、他方では使用する光の波長に依存することは明らかである。
ここで、n:整数0,1,2,...
T1:第一の格子G1の格子定数
T2:第二の格子G2の格子定数
λ1:増分走査用の光の波長
T2=2×T1により、
Ln=n×2×T12/λ1
が得られる。
2.1,2.2 走査ユニット
3.1,3.2 第一の光源
4.1,4.2 第二の光源
5.1,5.2 第一の検出器配列
6.1,6.2 第二の検出器配列
7.1,7.2 支持基板
9,10 フィルター
A 走査間隔
E スペクトル感度
G1 第一の格子
G2 第二の格子
GS 送り側格子
R1,R3 絶対マーキング部
R2,R4 絶対マーキング部R1,R3を走査するための構造
S 信号振幅
T1,T2 第一の格子R1,第二の格子R2の格子定数
X 測定方向
λ1,λ3 増分測定用の光の波長
λ2,λ4 絶対測定用の光の波長
Claims (10)
- 基準尺(1.1,1.2)とこの基準尺に対して相対的に測定方向(X)にスライド可能な走査ユニット(2.1,2.2)とを備えた光学式位置測定装置であって、
この基準尺(1.1,1.2)が、周期的な増分目盛の形の第一の格子(G1)を有し、この走査ユニット(2.1,2.2)が、第一の格子(G1)に対して走査間隔(A)を開けて配置された少なくとも一つの第二の格子(G2)を有し、位置測定のために、両方の格子(G1,G2)に第一の波長(λ1,λ3)の光を照射して、第一の検出器配列(5.1,5.2)を用いて、その光から第一の走査信号を取得し、
この基準尺(1.1,1.2)が、更に、絶対マーキング部(R1,R3)を有し、位置測定のために、この絶対マーキング部(R1,R3)に第二の波長(λ2,λ4)の光を照射して、第二の検出器配列(6.1,6.2)を用いて、その光から第二の走査信号を取得し、
第一の波長(λ1,λ3)が、第二の波長(λ2,λ4)よりも短く、
別の格子(GS)を用いた第一の格子(G1)の照明が行なわれ、第二の格子(G2)が、第一の格子(G1)から第一のタルボット間隔に相当する走査間隔(A)を開けて配置されて、第一の格子(G1)によりタルボット効果が生じるように、第一の格子(G1)と第二の格子(G2)の照明と構成が行なわれている、
光学式位置測定装置。 - 第一の検出器配列(5.1,5.2)と第二の検出器配列(6.1,6.2)が、波長(λ)に依存した同様のスペクトル感度(E)を有し、第二の波長(λ2,λ4)に関するスペクトル感度が第一の波長(λ1,λ3)に関するスペクトル感度よりも大きくなるように、第一の波長(λ1,λ3)と第二の波長(λ2,λ4)が選定されている請求項1に記載の光学式位置測定装置。
- 第二の波長(λ2,λ4)が、第二の検出器配列(6.1,6.2)のスペクトル感度が最大になる波長±50nmの範囲内に有る請求項1又は2に記載の光学式位置測定装置。
- 第一の波長(λ1)が520nmよりも短い請求項1から3までのいずれか一つに記載の光学式位置測定装置。
- 第一の検出器配列(5.1)と第二の検出器配列(6.1)がアモルファスシリコンを用いて構成されている請求項1から4までのいずれか一つに記載の光学式位置測定装置。
- 第一の波長(λ1)が430nm〜500nmの範囲内に有り、第二の波長(λ2)が570nm±50nmの範囲内に有る請求項5に記載の光学式位置測定装置。
- 第一の検出器配列(5.2)と第二の検出器配列(6.2)が結晶シリコンを用いて構成されており、第一の波長(λ3)が700nmよりも短く、第二の波長(λ4)が870nm±50nmの範囲内に有る請求項1から3までのいずれか一つに記載の光学式位置測定装置。
- 第一の波長(λ1,λ3)の光を発生するために、第一の光源(3.1,3.2)が配備され、第二の波長(λ2,λ4)の光を発生するために、第二の光源(4.1,4.2)が配備され、第一の光源(3.1,3.2)、第二の光源(4.1,4.2)、第一の検出器配列(5.1,5.2)及び第二の検出器配列(6.1,6.2)が透明な支持基板(7.1,7.2)上に一緒に配置されている請求項1から7までのいずれか一つに記載の光学式位置測定装置。
- 光源(3.1,3.2,4.1,4.2)の光を放出する側と検出器配列(5.1,5.2,6.1,6.2)の光を受信する側が基準尺(1.1,1.2)の方向を向くように、第一の光源(3.1,3.2)、第二の光源(4.1,4.2)、第一の検出器配列(5.1,5.2)及び第二の検出器配列(6.1,6.2)が透明な支持基板(7.1,7.2)の上側に配置されている請求項8に記載の光学式位置測定装置。
- 第一の検出器配列(5.2)に対して、第二の波長(λ4)の光の成分を通過させないフィルター(9)が配備されており、第二の検出器配列(6.2)に対して、第一の波長(λ3)の光の成分を通過させないフィルター(10)が配備されている請求項1から9までのいずれか一つに記載の光学式位置測定装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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DE102012221566.2 | 2012-11-26 | ||
DE102012221566.2A DE102012221566A1 (de) | 2012-11-26 | 2012-11-26 | Optische Positionsmesseinrichtung |
Publications (2)
Publication Number | Publication Date |
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JP2014106232A JP2014106232A (ja) | 2014-06-09 |
JP6391931B2 true JP6391931B2 (ja) | 2018-09-19 |
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US (1) | US9395214B2 (ja) |
EP (1) | EP2735848B1 (ja) |
JP (1) | JP6391931B2 (ja) |
CN (1) | CN103837177B (ja) |
DE (1) | DE102012221566A1 (ja) |
ES (1) | ES2685679T3 (ja) |
Families Citing this family (3)
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EP3255384B1 (de) * | 2016-06-07 | 2018-11-28 | Dr. Johannes Heidenhain GmbH | Massverkörperung sowie positionsmesseinrichtung |
DE102017201257A1 (de) * | 2017-01-26 | 2018-07-26 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
CN110207596B (zh) * | 2019-06-21 | 2021-09-03 | 广东工业大学 | 一种图像编码方法、光栅尺测量装置和测量方法 |
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2012
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- 2013-09-03 EP EP13182830.3A patent/EP2735848B1/de active Active
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Publication number | Publication date |
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CN103837177A (zh) | 2014-06-04 |
ES2685679T3 (es) | 2018-10-10 |
DE102012221566A1 (de) | 2014-05-28 |
EP2735848A3 (de) | 2015-10-28 |
US9395214B2 (en) | 2016-07-19 |
JP2014106232A (ja) | 2014-06-09 |
US20140146326A1 (en) | 2014-05-29 |
EP2735848B1 (de) | 2018-08-15 |
EP2735848A2 (de) | 2014-05-28 |
CN103837177B (zh) | 2018-04-10 |
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