JP6361448B2 - 半導体モジュール - Google Patents
半導体モジュール Download PDFInfo
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- JP6361448B2 JP6361448B2 JP2014211111A JP2014211111A JP6361448B2 JP 6361448 B2 JP6361448 B2 JP 6361448B2 JP 2014211111 A JP2014211111 A JP 2014211111A JP 2014211111 A JP2014211111 A JP 2014211111A JP 6361448 B2 JP6361448 B2 JP 6361448B2
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Description
最初に、本発明の実施形態の内容を列記して説明する。
本発明の実施形態に係る半導体モジュールの具体例を、以下に図面を参照しつつ説明する。本発明はこれらの例示に限定されるものではなく、特許請求の範囲によって示され、特許請求の範囲と均等の意味及び範囲内でのすべての変更が含まれることが意図される。図面の説明においては同一要素には同一符号を付し、重複する説明を省略する。図面の寸法比率は、説明のものと必ずしも一致していない。
第1実施形態に係る半導体モジュール10Aは、図1及び図2に示したように、複数の第1トランジスタチップ12A(図1では、3個)と、複数の第2トランジスタチップ12B(図1では、3個)と、第1抵抗部13Aと、第2抵抗部13Bと、配線基板14と、を備える。半導体モジュール10Aは、電力変換装置としての単相インバータである。図2では、後述する配線用のワイヤの図示を省略している。
図3、図4(a)、図4(b)及び図4(c)を利用して、第1及び第2トランジスタチップ12A,12Bについて説明する。第1及び第2トランジスタチップ12A,12Bの構成は同じである。そのため、第1及び第2トランジスタチップ12A,12Bをトランジスタチップ12と称して、第1及び第2トランジスタチップ12A,12Bの構成を説明する。
次に、第1及び第2抵抗部13A,13Bについて説明する。第1抵抗部13Aは、図1に示したように、複数の第1トランジスタチップ12Aに対応した複数の第1抵抗素子72Aと、それらを連結する絶縁性の連結部としての第1樹脂部74Aとを有する。同様に、第2抵抗部13Bは、図1に示したように、複数の第2トランジスタチップ12Bに対応した複数の第2抵抗素子72Bと、それらを連結する絶縁性の連結部としての第2樹脂部74Bとを有する。
図1及び図2を利用して、配線基板14について説明する。配線基板14は、絶縁基板90を有しており、絶縁基板90の表面(主面)90a上には、第1ドレイン用配線パターン92、第1ゲート用配線パターン94、第2ドレイン用配線パターン96、第2ゲート用配線パターン98、第1ソース用配線パターン100、第2ソース用配線パターン102及び第3ソース用配線パターン104が形成されている。
次に、図1及び図2を利用して、半導体モジュール10Aの具体的な構成について説明する。
半導体モジュール10Aでは、各第1トランジスタチップ12Aのドレイン電極パッド(第2主電極パッド)20は第1チップ搭載領域92Aに接続され、ソース電極パッド18は、第2ワイヤW2を介して接続されている。従って、複数の第1トランジスタチップ12Aは、電気的に並列接続されている。そして、各第1トランジスタチップ12Aのゲート電極パッド16は、第1抵抗部13Aが有する第1抵抗素子72Aを介して第1ゲート用配線パターン94に接続されている。
第2実施形態に係る半導体モジュール10Bについて説明する。半導体モジュール10Bは、図11及び図12に示したように、第1の実施形態に係る半導体モジュール10Aと、半導体モジュール10Aを収容する筐体110と、外部接続用の7本のバスバー112を備えてもよい。7本のバスバー112を区別して説明する場合、7本のバスバー112をそれぞれバスバー112O,112N,112P,112G1,112S1,112S2,112G2と称す。
図13を利用して第3実施形態に係る半導体モジュールについて説明する。図13に示した半導体モジュール10Cは、複数のトランジスタチップ12と、抵抗部13と、配線基板122とを備える。半導体モジュール10Cは、半導体スイッチとして機能する半導体モジュールである。
Claims (11)
- 基板と、
前記基板に搭載される複数の第1トランジスタチップと、
前記基板に搭載される複数の第2トランジスタチップと、
を備え、
前記第1トランジスタチップ及び前記第2トランジスタチップのそれぞれは、
第1及び第2主電極パッドと、
前記第1及び第2主電極パッド間の導通を制御する制御電圧が供給される制御電極パッドと、
を有し、
前記基板の主面には、第1制御電極用配線パターン及び第2制御電極用配線パターンが形成されており、
複数の前記第1トランジスタチップの前記第1主電極パッドは電気的に接続されており、
複数の前記第1トランジスタチップの前記第2主電極パッドは電気的に接続されており、
複数の前記第2トランジスタチップの前記第1主電極パッドは電気的に接続されており、
複数の前記第2トランジスタチップの前記第2主電極パッドは電気的に接続されており、
複数の前記第1トランジスタチップの前記第2主電極パッドは、複数の前記第2トランジスタチップの前記第1主電極パッドに電気的に接続されており、
複数の前記第1トランジスタチップの前記制御電極パッドは、第1抵抗部を介して前記第1制御電極用配線パターンに接続されており、
複数の前記第2トランジスタチップの前記制御電極パッドは、第2抵抗部を介して前記第2制御電極用配線パターンに接続されており、
前記第1抵抗部は、各前記第1トランジスタチップの前記制御電極パッドと接続される複数の第1抵抗素子と、
複数の前記第1抵抗素子を連結する第1連結部と、
を有し、
前記第2抵抗部は、各前記第2トランジスタチップの前記制御電極パッドと接続される複数の第2抵抗素子と、
複数の前記第2抵抗素子を連結する第2連結部と、
を有し、
複数の前記第1トランジスタチップは、前記基板上において、第1所定方向に配置されており、
各前記第1トランジスタチップの前記制御電極パッドは前記第1所定方向に延在しており、
前記第1抵抗素子と、対応する前記制御電極パッドとが物理的に接続されており、
前記第1抵抗素子と、前記第1制御電極用配線パターンとが物理的に接続されている、
半導体モジュール。 - 前記第1トランジスタチップの前記第1主電極パッド及び前記制御電極パッドは、前記第1トランジスタチップの表面に形成されており、
前記第1トランジスタチップの前記第2主電極パッドは、前記第1トランジスタチップの裏面に形成されており、
前記第2トランジスタチップの前記第1主電極パッド及び前記制御電極パッドは、前記第2トランジスタチップの表面に形成されており、
前記第2トランジスタチップの前記第2主電極パッドは、前記第2トランジスタチップの裏面に形成されており、
前記主面には、第1チップ用配線パターン及び第2チップ用配線パターンが更に形成されており、
複数の前記第1トランジスタチップのそれぞれは、前記第2主電極パッドが前記主面と対向するように、前記第1チップ用配線パターンに搭載され、且つ、前記第2主電極パッドが前記第1チップ用配線パターンに接続されており、
複数の前記第2トランジスタチップのそれぞれは、前記第2主電極パッドが前記主面と対向するように、前記第2チップ用配線パターンに搭載され、且つ、前記第2主電極パッドが前記第2チップ用配線パターンに接続されており、
複数の前記第2トランジスタチップの前記第1主電極パッドは、前記第1チップ用配線パターンに電気的に接続されている、
請求項1に記載の半導体モジュール。 - 前記第1トランジスタチップは、
前記第1トランジスタチップが有する第1及び第2主電極パッドに電気的に接続される第1及び第2主電極と、前記第1トランジスタチップが有する前記制御電極パッドに電気的に接続される制御電極を含むトランジスタ構造を有するセル部と、
前記セル部を取り囲んでいると共に、前記セル部を電気的に保護する外周部と、
を有し、
前記第1トランジスタチップが有する前記制御電極パッドの少なくとも一部は、前記外周部に設けられている、
請求項1又は2に記載の半導体モジュール。 - 複数の前記第2トランジスタチップは、前記基板上において、第2所定方向に配置されており、
各前記第2トランジスタチップの前記制御電極パッドは前記第2所定方向に延在している、
請求項1〜3の何れか一項に記載の半導体モジュール。 - 前記第2トランジスタチップは、
前記第2トランジスタチップが有する前記第1及び第2主電極パッドに電気的に接続される第1及び第2主電極と、前記第2トランジスタチップが有する前記制御電極パッドに電気的に接続される制御電極を含むトランジスタ構造を有するセル部と、
前記セル部を取り囲んでいると共に、前記セル部を電気的に保護する外周部と、
を有し、
前記第2トランジスタチップが有する前記制御電極パッドの少なくとも一部は、前記外周部に設けられている、
請求項4に記載の半導体モジュール。 - 前記第2抵抗素子と、対応する前記制御電極パッドとが物理的に接続されており、
前記第2抵抗素子と、前記第2制御電極用配線パターンとが物理的に接続されている、
請求項1〜5の何れか一項に記載の半導体モジュール。 - 前記第1及び第2トランジスタチップは、ワイドバンドギャップ半導体を含む、
請求項1〜6の何れか一項に記載の半導体モジュール。 - 基板と、
前記基板に搭載される複数のトランジスタチップと、
を備え、
前記トランジスタチップは、
第1及び第2主電極パッドと、
前記第1及び第2主電極パッド間の導通を制御する制御電圧が供給される制御電極パッドと、
を有し、
前記基板の主面には、制御電極用配線パターンが形成されており、
複数の前記トランジスタチップの前記第1主電極パッドは電気的に接続されており、
複数の前記トランジスタチップの前記第2主電極パッドは電気的に接続されており、
複数の前記トランジスタチップの前記制御電極パッドは、抵抗部を介して前記制御電極用配線パターンに接続されており、
前記抵抗部は、各前記トランジスタチップの前記制御電極パッドと接続される複数の抵抗素子と、
複数の前記抵抗素子を連結する連結部と、
を有し、
複数の前記トランジスタチップは、前記基板上において、所定方向に配置されており、
各前記トランジスタチップの前記制御電極パッドは前記所定方向に延在しており、
前記抵抗素子と、対応する前記制御電極パッドとが物理的に接続されており、
前記抵抗素子と、前記制御電極用配線パターンとが物理的に接続されている、
半導体モジュール。 - 前記トランジスタチップの前記第1主電極パッド及び前記制御電極パッドは、前記トランジスタチップの表面に形成されており、
前記トランジスタチップの前記第2主電極パッドは、前記トランジスタチップの裏面に形成されており、
前記主面には、複数の前記トランジスタチップが搭載されるチップ用配線パターンが更に形成されており、
複数の前記トランジスタチップのそれぞれは、前記第2主電極パッドが前記主面と対向するように、前記チップ用配線パターンに搭載されている、
請求項8に記載の半導体モジュール。 - 前記トランジスタチップは、
前記第1及び第2主電極パッドに電気的に接続される第1及び第2主電極と、前記制御電極パッドに電気的に接続される制御電極を含むトランジスタ構造を有するセル部と、
前記セル部を取り囲んでいると共に、前記セル部を電気的に保護する外周部と、
を有し、
前記制御電極パッドの少なくとも一部は、前記外周部に設けられている、
請求項8又は9に記載の半導体モジュール。 - 前記トランジスタチップは、ワイドバンドギャップ半導体を含む、
請求項8〜10の何れか一項に記載の半導体モジュール。
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