JP6330549B2 - 光半導体素子およびその製造方法 - Google Patents
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
- G02F1/2257—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure the optical waveguides being made of semiconducting material
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
- G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction in an optical waveguide structure
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
- G02F1/2255—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure controlled by a high-frequency electromagnetic component in an electric waveguide structure
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/212—Mach-Zehnder type
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Optical Integrated Circuits (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
Description
前記光導波路に接続された信号電極と、前記光導波路および前記信号電極を埋め込むように設けられた樹脂層と、終端抵抗を介して前記信号電極と接続され、前記樹脂層上に設けられたキャパシタとを備える、光半導体素子である。
最初に本願発明の実施形態の内容を列記して説明する。
(2)前記キャパシタは、前記樹脂層上に絶縁膜を介して設けられていることが好ましい。キャパシタと樹脂層との密着性が向上するからである。
(3)前記樹脂層は、第1樹脂層上に絶縁膜を介して第2樹脂層が積層された構成を有し、前記第1樹脂層は、前記光導波路よりも高く形成され、前記第2樹脂層は、前記信号電極よりも高く形成されていることが好ましい。
(4)前記光導波路は、マッハツェンダ変調器のアームであり、前記信号電極は、前記アームに接続された信号電極としてもよい。
(5)前記キャパシタは、MIMキャパシタとしてもよい。
(6)前記基板は裏面電極とビアとを備え、前記キャパシタは、前記ビアを介して前記裏面電極と電気的に接続されていてもよい。
本願発明は、(7)基板上に、メサ状の光導波路を形成する工程と、前記光導波路上に信号電極を接続する工程と、前記光導波路および前記信号電極を樹脂層で埋め込む工程と、前記樹脂層上に、終端抵抗を介して前記信号電極と接続されたキャパシタを形成する工程とを含む、光半導体素子の製造方法である。樹脂層上にキャパシタが形成されることから、素子面積の増大化を抑制しつつ高容量の容量素子を集積することができる。
本発明の実施形態に係る光半導体素子およびその製造方法の具体例を、以下に図面を参照しつつ説明する。なお、本発明はこれらの例示に限定されるものではなく、特許請求の範囲によって示され、特許請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。
Claims (7)
- 基板上に形成されたメサ状の光導波路と、
前記光導波路に接続された信号電極と、
前記光導波路および前記信号電極を埋め込むように設けられた樹脂層と、
終端抵抗を介して前記信号電極と接続され、前記樹脂層上に設けられたキャパシタとを備える、光半導体素子。 - 前記キャパシタは、前記樹脂層上に絶縁膜を介して設けられている、請求項1記載の光半導体素子。
- 前記樹脂層は、第1樹脂層上に絶縁膜を介して第2樹脂層が積層された構成を有し、
前記第1樹脂層は、前記光導波路よりも高く形成され、
前記第2樹脂層は、前記信号電極よりも高く形成されている、請求項1または2記載の光半導体素子。 - 前記光導波路は、マッハツェンダ変調器のアームであり、前記信号電極は、前記アームに接続された信号電極である、請求項1〜3のいずれか一項に記載の光半導体素子。
- 前記キャパシタは、MIMキャパシタである、請求項1〜4のいずれか一項に記載の光半導体素子。
- 前記基板は裏面電極とビアとを備え、
前記キャパシタは、前記ビアを介して前記裏面電極と電気的に接続されている、請求項1〜5のいずれか一項に記載の光半導体素子。 - 基板上に、メサ状の光導波路を形成する工程と、
前記光導波路上に信号電極を接続する工程と、
前記光導波路および前記信号電極を樹脂層で埋め込む工程と、
前記樹脂層上に、終端抵抗を介して前記信号電極と接続されたキャパシタを形成する工程とを含む、光半導体素子の製造方法。
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JP2014152004A JP6330549B2 (ja) | 2014-07-25 | 2014-07-25 | 光半導体素子およびその製造方法 |
US14/807,501 US9563100B2 (en) | 2014-07-25 | 2015-07-23 | Optical semiconductor device and method of producing the same |
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JP6330548B2 (ja) * | 2014-07-23 | 2018-05-30 | 住友電気工業株式会社 | 変調器およびその製造方法 |
SG11201807456SA (en) * | 2016-03-18 | 2018-09-27 | Nippon Telegraph & Telephone | Optical modulator |
KR102606279B1 (ko) * | 2016-04-04 | 2023-11-27 | 삼성디스플레이 주식회사 | 디스플레이 장치 |
JP6703102B2 (ja) * | 2016-06-03 | 2020-06-03 | 三菱電機株式会社 | 光変調器 |
JP6957825B2 (ja) * | 2017-03-03 | 2021-11-02 | 住友電工デバイス・イノベーション株式会社 | コヒーレント光通信用受光デバイス |
JP6862983B2 (ja) * | 2017-03-23 | 2021-04-21 | 住友電気工業株式会社 | 半導体光素子及びその製造方法 |
JP7037958B2 (ja) * | 2018-02-27 | 2022-03-17 | 住友電気工業株式会社 | 半導体光集積デバイス |
JP7067258B2 (ja) * | 2018-05-18 | 2022-05-16 | 住友電気工業株式会社 | マッハツェンダ変調器 |
JP2020003600A (ja) * | 2018-06-27 | 2020-01-09 | 住友電気工業株式会社 | マッハツェンダ変調器 |
JP7110879B2 (ja) * | 2018-09-28 | 2022-08-02 | 住友電気工業株式会社 | 半導体装置およびその製造方法 |
JP7434843B2 (ja) * | 2019-11-28 | 2024-02-21 | 住友大阪セメント株式会社 | 光導波路素子、光変調器、光変調モジュール、及び光送信装置 |
US11688680B2 (en) * | 2020-11-05 | 2023-06-27 | International Business Machines Corporation | MIM capacitor structures |
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GB8822288D0 (en) * | 1988-09-22 | 1988-10-26 | Bt & D Technologies Ltd | Electro-optic device |
CA2083219C (en) * | 1991-11-19 | 1999-01-05 | Hiroshi Nishimoto | Optical transmitter having optical modulator |
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JP5052007B2 (ja) | 2005-12-28 | 2012-10-17 | 住友電工デバイス・イノベーション株式会社 | 半導体装置 |
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JP2009139587A (ja) * | 2007-12-05 | 2009-06-25 | Rohm Co Ltd | 光制御装置 |
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JP6610044B2 (ja) * | 2014-07-14 | 2019-11-27 | 住友電気工業株式会社 | 半導体光変調器および半導体光変調器の製造方法 |
JP6330548B2 (ja) * | 2014-07-23 | 2018-05-30 | 住友電気工業株式会社 | 変調器およびその製造方法 |
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