JP6299301B2 - 半導体光変調装置 - Google Patents
半導体光変調装置 Download PDFInfo
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- JP6299301B2 JP6299301B2 JP2014051965A JP2014051965A JP6299301B2 JP 6299301 B2 JP6299301 B2 JP 6299301B2 JP 2014051965 A JP2014051965 A JP 2014051965A JP 2014051965 A JP2014051965 A JP 2014051965A JP 6299301 B2 JP6299301 B2 JP 6299301B2
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- 239000004065 semiconductor Substances 0.000 title claims description 66
- 230000005540 biological transmission Effects 0.000 claims description 73
- 230000003287 optical effect Effects 0.000 claims description 50
- 239000003990 capacitor Substances 0.000 claims description 41
- 239000000758 substrate Substances 0.000 claims description 34
- 239000010409 thin film Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 20
- 230000000694 effects Effects 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0121—Operation of devices; Circuit arrangements, not otherwise provided for in this subclass
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/10—Materials and properties semiconductor
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- H—ELECTRICITY
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- H03H11/00—Networks using active elements
- H03H11/02—Multiple-port networks
- H03H11/28—Impedance matching networks
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- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H5/00—One-port networks comprising only passive electrical elements as network components
- H03H5/12—One-port networks comprising only passive electrical elements as network components with at least one voltage- or current-dependent element
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
- H03H7/38—Impedance-matching networks
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
- H03H7/38—Impedance-matching networks
- H03H7/40—Automatic matching of load impedance to source impedance
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
- H04B1/02—Transmitters
- H04B1/04—Circuits
- H04B1/0475—Circuits with means for limiting noise, interference or distortion
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
- H04B1/38—Transceivers, i.e. devices in which transmitter and receiver form a structural unit and in which at least one part is used for functions of transmitting and receiving
- H04B1/40—Circuits
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/25—Arrangements specific to fibre transmission
- H04B10/2507—Arrangements specific to fibre transmission for the reduction or elimination of distortion or dispersion
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/25—Arrangements specific to fibre transmission
- H04B10/2589—Bidirectional transmission
- H04B10/25891—Transmission components
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/40—Transceivers
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/50—Transmitters
- H04B10/501—Structural aspects
- H04B10/503—Laser transmitters
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/50—Transmitters
- H04B10/516—Details of coding or modulation
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- H—ELECTRICITY
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- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/50—Transmitters
- H04B10/516—Details of coding or modulation
- H04B10/5161—Combination of different modulation schemes
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- H—ELECTRICITY
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- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/50—Transmitters
- H04B10/516—Details of coding or modulation
- H04B10/548—Phase or frequency modulation
- H04B10/556—Digital modulation, e.g. differential phase shift keying [DPSK] or frequency shift keying [FSK]
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/50—Transmitters
- H04B10/516—Details of coding or modulation
- H04B10/548—Phase or frequency modulation
- H04B10/556—Digital modulation, e.g. differential phase shift keying [DPSK] or frequency shift keying [FSK]
- H04B10/5563—Digital frequency modulation
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/50—Transmitters
- H04B10/572—Wavelength control
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/50—Transmitters
- H04B10/58—Compensation for non-linear transmitter output
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/60—Receivers
- H04B10/61—Coherent receivers
- H04B10/616—Details of the electronic signal processing in coherent optical receivers
- H04B10/6164—Estimation or correction of the frequency offset between the received optical signal and the optical local oscillator
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/60—Receivers
- H04B10/66—Non-coherent receivers, e.g. using direct detection
- H04B10/67—Optical arrangements in the receiver
- H04B10/671—Optical arrangements in the receiver for controlling the input optical signal
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B15/00—Suppression or limitation of noise or interference
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L25/00—Baseband systems
- H04L25/02—Details ; arrangements for supplying electrical power along data transmission lines
- H04L25/0264—Arrangements for coupling to transmission lines
- H04L25/0278—Arrangements for impedance matching
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L25/00—Baseband systems
- H04L25/02—Details ; arrangements for supplying electrical power along data transmission lines
- H04L25/0264—Arrangements for coupling to transmission lines
- H04L25/028—Arrangements specific to the transmitter end
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L25/00—Baseband systems
- H04L25/02—Details ; arrangements for supplying electrical power along data transmission lines
- H04L25/03—Shaping networks in transmitter or receiver, e.g. adaptive shaping networks
- H04L25/03006—Arrangements for removing intersymbol interference
- H04L25/03343—Arrangements at the transmitter end
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L25/00—Baseband systems
- H04L25/02—Details ; arrangements for supplying electrical power along data transmission lines
- H04L25/10—Compensating for variations in line balance
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Optical Communication System (AREA)
Description
図1は、本発明の実施の形態1に係る半導体光変調装置を示す回路図である。ダイオードである半導体光変調素子1のカソードが基準電位に接続されている。抵抗2が半導体光変調素子1に並列に接続され、その一端が基準電位に接続されている。伝送線路3の一端が半導体光変調素子1のアノードと抵抗2の他端に接続されている。
2×L1×√εr=1/2×c/f (数式1)
ここで、伝送線路3の長さをL1、比誘電率をεr、周波数をf、電気の速度をcとする。
Z1=R1+1/(2jπfC) (数式2)
図5は、抵抗及び容量の直列回路の特性を示す図である。抵抗の抵抗値を220Ω、容量の容量値を0.1pFとした。
図10は、本発明の実施の形態2に係る半導体光変調装置を示す平面図である。図11は、本発明の実施の形態2に係るフレキシブル基板を示す側面図である。本実施の形態に係る半導体光変調装置の回路構成は図1と同様である。
C=ε×εr×S/d=0.177pF (数式3)
実施の形態2では、フレキシブル基板10上に設けられた伝送線路5、フレキシブル基板10上に抵抗6として設けられたチップ部品、フレキシブル基板10上に容量7として設けられた配線パターンを用いる例を示したが、本実施の形態では、フレキシブル基板10の代わりに誘電体基板を用い、誘電体基板上に抵抗6として設けられた薄膜抵抗、誘電体基板上に容量7として設けられた配線パターンを用いる。なお、配線パターンは図10の矩形形状の代わりに、櫛歯状にしてもよい。
図12は、本発明の実施の形態4に係る半導体光変調装置を示す回路図である。半導体光変調素子1の一端が基準電位に接続されている。抵抗2が半導体光変調素子1に並列に接続され、その一端が基準電位に接続されている。伝送線路15の一端が半導体光変調素子1の他端と抵抗2の他端に接続されている。抵抗6及び容量7が伝送線路15と基準電位との間に直列に接続されている。伝送線路16が伝送線路15に直列に接続され、伝送線路16の一端が伝送線路15の他端に接続されている。抵抗17及びインダクタ18が伝送線路16と基準電位との間に直列に接続されている。
Z2=R2+2jπfL (数式4)
図19は、本発明の実施の形態5に係る半導体光変調装置を示す平面図である。本実施の形態に係る半導体光変調装置の回路構成は図12と同様である。半導体光変調素子1、抵抗2,6、伝送線路15、容量7、及び基準電位を持つ基準電位配線パターン11が誘電体基板12上に設けられている。半導体光変調素子1は、抵抗2と伝送線路3にそれぞれワイヤ13,14により接続されている。抵抗2,6は誘電体基板12上に設けられた薄膜抵抗である。容量7は基準電位配線パターン11と近接しながら誘電体基板12上に設けられた櫛歯状の配線パターンである。なお、伝送線路15に接続された伝送線路16、抵抗17及びインダクタ18は図示していない。
Claims (2)
- 一端が基準電位に接続された半導体光変調素子と、
前記半導体光変調素子に並列に接続され、一端が基準電位に接続された第1の抵抗と、
一端が前記半導体光変調素子の他端と前記第1の抵抗の他端に接続された第1の伝送線路と、
前記第1の伝送線路と基準電位との間に直列に接続された第2の抵抗及び容量と、
前記第1の伝送線路に直列に接続され、前記第2の抵抗及び前記容量に並列に接続され、一端が前記第1の伝送線路の他端に接続された第2の伝送線路と、
前記第2の伝送線路と基準電位との間に直列に接続され、前記第2の抵抗及び前記容量に並列に接続された第3の抵抗及びインダクタとを備えることを特徴とする半導体光変調装置。 - 前記第1の伝送線路は誘電体基板上に設けられ、前記第1及び第2の抵抗は前記誘電体基板上に設けられた薄膜抵抗であり、前記容量は前記誘電体基板上に設けられた配線パターンであることを特徴とする請求項1に記載の半導体光変調装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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JP2014051965A JP6299301B2 (ja) | 2014-03-14 | 2014-03-14 | 半導体光変調装置 |
US14/584,457 US9804422B2 (en) | 2014-03-14 | 2014-12-29 | Semiconductor optical modulation device |
CN201510111864.5A CN104916769B (zh) | 2014-03-14 | 2015-03-13 | 半导体光调制装置 |
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JP2014051965A JP6299301B2 (ja) | 2014-03-14 | 2014-03-14 | 半導体光変調装置 |
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JP2015175960A JP2015175960A (ja) | 2015-10-05 |
JP6299301B2 true JP6299301B2 (ja) | 2018-03-28 |
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US (1) | US9804422B2 (ja) |
JP (1) | JP6299301B2 (ja) |
CN (1) | CN104916769B (ja) |
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JP6614109B2 (ja) * | 2016-11-21 | 2019-12-04 | 株式会社村田製作所 | 無線回路搭載電子機器 |
JP7119119B2 (ja) * | 2018-11-30 | 2022-08-16 | 京セラ株式会社 | 配線基板、電子部品搭載用パッケージおよび電子装置 |
JP7274313B2 (ja) * | 2019-03-12 | 2023-05-16 | 日置電機株式会社 | 電流センサ及び測定装置 |
CN113433758A (zh) * | 2020-03-23 | 2021-09-24 | 华星光通科技股份有限公司 | 增加电致吸收光调变器频宽的方法及其元件结构和制程 |
JP7430569B2 (ja) * | 2020-04-24 | 2024-02-13 | CIG Photonics Japan株式会社 | 光モジュール |
WO2023248360A1 (ja) * | 2022-06-21 | 2023-12-28 | 日本電信電話株式会社 | 光変調器 |
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JP3990674B2 (ja) | 2004-02-10 | 2007-10-17 | 日本オプネクスト株式会社 | 光送信機 |
JP2005286305A (ja) * | 2004-03-02 | 2005-10-13 | Mitsubishi Electric Corp | 光半導体装置 |
JP2005338678A (ja) * | 2004-05-31 | 2005-12-08 | Opnext Japan Inc | 光変調器モジュール |
JP4685410B2 (ja) * | 2004-11-01 | 2011-05-18 | 日本オプネクスト株式会社 | 光モジュール |
US7011458B2 (en) * | 2004-07-12 | 2006-03-14 | Opnext Japan, Inc. | Optical module |
JP4815814B2 (ja) | 2005-02-04 | 2011-11-16 | 三菱電機株式会社 | 光モジュール |
JP2007225904A (ja) * | 2006-02-23 | 2007-09-06 | Mitsubishi Electric Corp | 半導体光変調デバイス |
JP4856465B2 (ja) | 2006-04-19 | 2012-01-18 | 日本オプネクスト株式会社 | 光半導体素子搭載基板、および光送信モジュール |
JP5012329B2 (ja) * | 2007-08-29 | 2012-08-29 | 富士通株式会社 | 光スイッチ |
JP2009105157A (ja) * | 2007-10-22 | 2009-05-14 | Sumitomo Electric Ind Ltd | 光トランシーバ |
JP5313730B2 (ja) * | 2009-03-16 | 2013-10-09 | 日本オクラロ株式会社 | 光送信機及び光送信モジュール |
JP2012042866A (ja) * | 2010-08-23 | 2012-03-01 | Sumitomo Electric Ind Ltd | 光吸収型光変調素子の駆動回路 |
JP2012230176A (ja) * | 2011-04-25 | 2012-11-22 | Mitsubishi Electric Corp | 光モジュール |
JP2013015670A (ja) * | 2011-07-04 | 2013-01-24 | Sumitomo Electric Device Innovations Inc | 光変調装置 |
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- 2014-03-14 JP JP2014051965A patent/JP6299301B2/ja active Active
- 2014-12-29 US US14/584,457 patent/US9804422B2/en active Active
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Also Published As
Publication number | Publication date |
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US9804422B2 (en) | 2017-10-31 |
CN104916769A (zh) | 2015-09-16 |
CN104916769B (zh) | 2018-01-09 |
US20150261016A1 (en) | 2015-09-17 |
JP2015175960A (ja) | 2015-10-05 |
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