JP6265776B2 - 半導体発光装置 - Google Patents
半導体発光装置 Download PDFInfo
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- JP6265776B2 JP6265776B2 JP2014031218A JP2014031218A JP6265776B2 JP 6265776 B2 JP6265776 B2 JP 6265776B2 JP 2014031218 A JP2014031218 A JP 2014031218A JP 2014031218 A JP2014031218 A JP 2014031218A JP 6265776 B2 JP6265776 B2 JP 6265776B2
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- 239000004065 semiconductor Substances 0.000 title claims description 127
- 239000000758 substrate Substances 0.000 claims description 202
- 230000003287 optical effect Effects 0.000 claims description 39
- 239000003302 ferromagnetic material Substances 0.000 claims description 17
- 230000002093 peripheral effect Effects 0.000 claims description 11
- 239000004020 conductor Substances 0.000 claims description 8
- 239000002889 diamagnetic material Substances 0.000 claims description 7
- 239000002907 paramagnetic material Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 description 24
- 238000000926 separation method Methods 0.000 description 21
- 229910002601 GaN Inorganic materials 0.000 description 12
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 12
- 239000003960 organic solvent Substances 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 11
- 230000005291 magnetic effect Effects 0.000 description 10
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 8
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- 238000001312 dry etching Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 229910002704 AlGaN Inorganic materials 0.000 description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 230000005294 ferromagnetic effect Effects 0.000 description 4
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 4
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 229910052594 sapphire Inorganic materials 0.000 description 3
- 239000010980 sapphire Substances 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 3
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 3
- 239000012670 alkaline solution Substances 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- QBJCZLXULXFYCK-UHFFFAOYSA-N magnesium;cyclopenta-1,3-diene Chemical compound [Mg+2].C1C=CC=[C-]1.C1C=CC=[C-]1 QBJCZLXULXFYCK-UHFFFAOYSA-N 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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Description
Claims (6)
- 実装基板と、該実装基板上に実装される半導体発光素子と、を含む半導体発光装置であって、
前記実装基板は、
支持基板と、
前記支持基板上に一方向に延在して形成される導線部材と、
前記支持基板上に前記導線部材の終端部分に接続して形成され、該支持基板表面からの高さが該導線部材よりも高い第1基板電極と、
前記支持基板上に、前記第1基板電極と間隙を空けて、かつ、前記導線部材を避けて該第1基板電極を囲うように形成され、該支持基板表面からの高さが該導線部材よりも高い第2基板電極と、
を備え、
前記半導体発光素子は、
前記第1基板電極および前記第2基板電極の上方に配置され、発光性を有する光半導体積層と、
前記光半導体積層の下面中央に形成され、前記第1基板電極に接触する中央電極と、
前記光半導体積層の下面周縁に、前記中央電極と間隙を空けて該中央電極を囲うように形成され、前記導線部材には接触せずに前記第2基板電極と接触する周縁電極と、
を備え、
前記第1基板電極および前記中央電極は強磁性体材料を含み、該第1基板電極または該中央電極のどちらか一方は自発磁化されている半導体発光装置。 - 前記第1基板電極は、前記導線部材よりも高い位置に配置される部分に、強磁性体材料を含む請求項1記載の半導体発光装置。
- 前記導線部材、前記第2基板電極および前記周縁電極は、反磁性体材料または常磁性体材料を含む請求項1または2記載の半導体発光装置。
- 前記半導体発光素子は、さらに、前記中央電極および前記周縁電極の間隙に沿って形成され、前記第1基板電極および前記第2基板電極の間隙に挿入されるガイド部材と、備える請求項1〜3いずれか1項記載の半導体発光装置。
- 前記半導体発光素子において、
前記光半導体積層は、前記実装基板側から、p型半導体層、発光性を有する活性層、および、n型半導体層、が積層する構成を有し、さらに、該p型半導体層側表面の中央領域において、該p型半導体層および該活性層が除去され、該n型半導体層が表出する穴部を備え、
前記中央電極は、前記穴部を通って、前記n型半導体層と電気的に接続し、
前記周縁電極は、前記p型半導体層の表面において該p型半導体層と電気的に接続する、
請求項1〜4いずれか1項記載の半導体発光装置。 - 前記半導体発光素子において、
前記光半導体積層は、前記実装基板側から、p型半導体層、発光性を有する活性層、および、n型半導体層、が積層する構成を有し、
前記中央電極は、前記p型半導体層の表面において該p型半導体層と電気的に接続し、
前記周縁電極は、前記p型半導体層および前記活性層の側面を通って、前記n型半導体層と電気的に接続する、
請求項1〜4いずれか1項記載の半導体発光装置。
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JP6265776B2 true JP6265776B2 (ja) | 2018-01-24 |
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Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6887321B2 (ja) * | 2017-06-14 | 2021-06-16 | スタンレー電気株式会社 | 発光装置、および、その製造方法 |
JP7381937B2 (ja) | 2021-12-24 | 2023-11-16 | 日亜化学工業株式会社 | 発光モジュールおよび発光モジュールの製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5633891A (en) * | 1979-08-29 | 1981-04-04 | Hitachi Ltd | Light emitting semiconductor device |
JPS5870584A (ja) * | 1981-10-23 | 1983-04-27 | Hitachi Ltd | 半導体装置 |
JPH0778828A (ja) * | 1993-09-08 | 1995-03-20 | Toshiba Corp | 半導体装置 |
JPH10112477A (ja) * | 1996-10-04 | 1998-04-28 | Fuji Xerox Co Ltd | 半導体装置の製造方法及び半導体装置 |
JP4082031B2 (ja) * | 2002-01-17 | 2008-04-30 | ソニー株式会社 | 素子の配列方法、及び表示装置 |
US20050133806A1 (en) * | 2003-12-17 | 2005-06-23 | Hui Peng | P and N contact pad layout designs of GaN based LEDs for flip chip packaging |
JP5417850B2 (ja) * | 2009-01-05 | 2014-02-19 | 住友電気工業株式会社 | 検出装置およびその製造方法 |
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