JP6211180B2 - 安定性が向上されたcw duvレーザー - Google Patents
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- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
- H01S3/109—Frequency multiplication, e.g. harmonic generation
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- G02F1/35—Non-linear optics
- G02F1/3501—Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
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- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
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- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/3534—Three-wave interaction, e.g. sum-difference frequency generation
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/354—Third or higher harmonic generation
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/355—Non-linear optics characterised by the materials used
- G02F1/3558—Poled materials, e.g. with periodic poling; Fabrication of domain inverted structures, e.g. for quasi-phase-matching [QPM]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0092—Nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/17—Multi-pass arrangements, i.e. arrangements to pass light a plurality of times through the same element, e.g. by using an enhancement cavity
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/15—Function characteristic involving resonance effects, e.g. resonantly enhanced interaction
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Description
本出願は、Chuang et al.によって2013年6月11日に出願された「CW DUV Laser with Improved Stability」と題された米国仮特許出願第61/833,716号の優先権を主張し、同出願は、参照により本明細書に組み込まれる。
Claims (22)
- 深紫外線(DUV)連続波(CW)レーザーであって、
約1μm〜1.1μmの対応する波長を持つ基本波周波数を発生させるように構成された基本波CWレーザーと、
少なくとも1つの第1の周期分極反転非線形光学(NLO)結晶を含み、前記基本波周波数の第1の部分を受け取るように位置付けされ、3次高調波を発生させるように構成された3次高調波発生器モジュールと、
4次高調波発生器モジュールであって、
前記基本波周波数に対応する波長で共振する空洞を形成するように構成された複数の鏡と、
前記空洞内で前記基本波周波数の第2の部分を結合し、前記第2の部分を前記複数の鏡で定義される空洞光路に沿って向かわせる結合器と、
空洞光路内に配置された第2の周期分極反転非線形光学(NLO)結晶と、
前記第2の周期分極反転非線形光学(NLO)結晶内の前記3次高調波を集束し、前記3次高調波は前記第2の周期分極反転非線形光学(NLO)結晶内で前記基本周波数の第2の部分を重ね合わせ、前記第2の周期分極反転非線形光学(NLO)結晶は、前記基本波周波数の第2の部分と前記3次高調波とを組み合わせて4次高調波を発生させる、1以上のレンズと、
前記空洞光路から離間するように前記第2の周期分極反転非線形光学(NLO)結晶から発した前記3次高調波の未消費部分を反射するように構成され、前記未消費部分は前記空洞内で再循環しない、ビームスプリッタと、
を有する4次高調波発生器モジュールと、
を備える、レーザー。 - 前記3次高調波発生器モジュールは、共振空洞を使用しない、請求項1に記載のレーザー。
- 前記3次高調波発生器モジュールは、前記基本波周波数で共振する空洞をさらに備える、請求項1に記載のレーザー。
- 前記少なくとも1つの第1の周期分極反転非線形光学(NLO)結晶は、2次高調波を発生させる、請求項1に記載のレーザー。
- 前記少なくとも1つの第1の周期分極反転非線形光学(NLO)結晶は、3次高調波を発生させる、請求項1に記載のレーザー。
- 前記少なくとも1つの第1の周期分極反転非線形光学(NLO)結晶は、前記3次高調波の直接発生のために二重周期の分極反転結晶を備える、請求項1に記載のレーザー。
- 前記3次高調波発生器モジュールは、2つの周期分極反転非線形光学(NLO)結晶を備える、請求項1に記載のレーザー。
- 前記少なくとも1つの第1の周期分極反転非線形光学(NLO)結晶は、3次高調波発生効率を最大化するために温度制御される、請求項1に記載のレーザー。
- 前記基本波周波数は、前記少なくとも1つの第1の周期分極反転非線形光学(NLO)結晶の分極反転深さに実質的に平行な短軸を有する楕円ビームに集束される、請求項1に記載のレーザー。
- 前記3次高調波発生器モジュールは、前記3次高調波の和周波発生のための3次擬似位相整合を達成するために、2μmより長いドメイン周期を有する第1の周期分極反転非線形光学(NLO)結晶を使用する、請求項1に記載のレーザー。
- 3次高調波変換効率を高めるために電気光学変調が使用される、請求項1に記載のレーザー。
- 深紫外線(DUV)連続波(CW)レーザー照射を発生させる方法であって、
約1μm〜1.1μmの対応する波長を持つ基本波周波数を発生させることと、
前記基本波周波数の一部を、第1の周期分極反転非線形光学(NLO)結晶を使用して、2次高調波に変換することと、
前記基本波周波数の別の一部と前記2次高調波とを組み合わせて3次高調波を発生させることと、
前記基本波周波数に対応する波長で共振する空洞内で前記基本波周波数の第2の部分と前記3次高調波とを組み合わせることによって4次高調波を発生させることであり、前記空洞内に配置された第2の周期分極反転非線形光学(NLO)結晶内で前記3次高調波を集束し、前記基本波周波数の第2の部分と前記3次高調波の和周波発生を実行することを含む、発生させることと、
前記第2の周期分極反転非線形光学(NLO)結晶から発する前記3次高調波の未消費部分を反射することであり、前記未消費部分は前記空洞内で再循環しない、反射することと、
を含む方法。 - 2次高調波発生のための前記第1の周期分極反転非線形光学(NLO)結晶は、いずれの共振空洞内にも設けられない、請求項12に記載の方法。
- 2次高調波発生のための前記第1の周期分極反転非線形光学(NLO)結晶と3次高調波発生のための別の周期分極反転非線形光学(NLO)結晶とは、前記基本波周波数で共振する別の空洞内に収容される、請求項12に記載の方法。
- 前記2次高調波及び前記3次高調波は、二重周期の分極反転結晶を使用して発生する、請求項12に記載の方法。
- 前記2次高調波及び前記3次高調波は、2つの周期分極反転非線形光学(NLO)結晶を使用して発生する、請求項12に記載の方法。
- 2次高調波発生のための前記第1の周期分極反転非線形光学(NLO)結晶は、LiNbO3、SLT、LiTaO3、KTP、KTA、MgO:LiNbO3、及びMgO:SLTのうちの少なくとも1つを含む、請求項12に記載の方法。
- 前記第1の周期分極反転非線形光学(NLO)結晶は、3次高調波発生効率を最大化するために温度制御される、請求項12に記載の方法。
- 前記基本波周波数は、前記第1の周期分極反転非線形光学(NLO)結晶の分極反転深さに実質的に平行な短軸を有する楕円ビームに集束される、請求項12に記載の方法。
- 前記3次高調波の前記発生は、3次擬似位相整合を達成するために、2μmより長いドメイン周期を有する周期分極反転非線形光学(NLO)結晶を使用する、請求項12に記載の方法。
- 3次高調波変換効率を高めるために電気光学変調が使用される、請求項12に記載の方法。
- 前記4次高調波の前記発生は、水素アニールされたCLBO、CBO、LBO、LB4、またはBBOを含むバルク単結晶内の前記3次高調波を集光することをさらに含む、請求項12に記載の方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
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US201361833716P | 2013-06-11 | 2013-06-11 | |
US61/833,716 | 2013-06-11 | ||
US14/294,019 US9509112B2 (en) | 2013-06-11 | 2014-06-02 | CW DUV laser with improved stability |
US14/294,019 | 2014-06-02 | ||
PCT/US2014/041965 WO2014201152A1 (en) | 2013-06-11 | 2014-06-11 | Cw duv laser with improved stability |
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EP (1) | EP3008779B1 (ja) |
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CN (2) | CN114389139A (ja) |
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KR20160018768A (ko) | 2016-02-17 |
CN105379032A (zh) | 2016-03-02 |
CN114389139A (zh) | 2022-04-22 |
TWI614558B (zh) | 2018-02-11 |
CN105379032B (zh) | 2022-03-15 |
US9509112B2 (en) | 2016-11-29 |
EP3008779A4 (en) | 2017-01-18 |
IL264501A (en) | 2019-02-28 |
KR102117566B1 (ko) | 2020-06-01 |
IL264501B (en) | 2021-08-31 |
US20170070025A1 (en) | 2017-03-09 |
KR20200062371A (ko) | 2020-06-03 |
TW201504739A (zh) | 2015-02-01 |
US20140362880A1 (en) | 2014-12-11 |
US10044166B2 (en) | 2018-08-07 |
WO2014201152A1 (en) | 2014-12-18 |
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JP2017219870A (ja) | 2017-12-14 |
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