JP6195980B2 - 圧力マップを測定する測定装置及び方法 - Google Patents
圧力マップを測定する測定装置及び方法 Download PDFInfo
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Description
・基板の圧力面に沿った圧力分布の現場での測定が可能であり、これにより接合過程前のかつ/又は好適には接合過程中の、特に接合チャンバ内での圧力分布の評価が実行可能である。
・圧力体の間に測定機器を取り付けることなく、直接、接合インターフェースで、若しくは基板積層体の任意の層で、特に例えば接着剤のテンポラリーボンディング層内で、かつ/又は接合中に圧力分布を検出することができる。
・圧力分布の規定された場所の、特に絶対的な圧力値を、十分大きな圧力面にわたっても、高い精度で、大きな温度範囲にわたって、高い空間分解能において検出することができる。
・実用上の材料消費がない。
強度(の変化)
偏光(の変化)
波長又は周波数(の変化)
屈折率(の変化)
モード(の変化)。
複屈折
屈折率
横電磁波として現れる信号のモード
伝播時間
スペクトル符号化。
先行する請求項のいずれか1項記載の測定装置を第1の圧力体(5)と第2の圧力体との間に配置するステップ、
測定層を通って延在する第1の信号伝送路と、前記測定層を通って延在する少なくとも1つの別の信号伝送路とに沿った、電磁波としての信号を、前記測定層の周縁に配置された1つの又は複数の送信機によって送信するステップ、
前記1つ又は複数の送信機から前記測定層を通して送信された、圧力負荷時に変化可能な前記第1の信号伝送路と前記別の信号伝送路の信号を受信するための前記周縁に配置された1つの又は複数の受信機によって信号を受信するステップ。
2 第1の基板
3 測定層
3u 周縁
4 第2の基板
5 第1の圧力体
6 第2の圧力体
7 送信機
8,8´ 受信機
9 信号
12 光ファイバ
13 マトリックス
14 圧力エレメント
15 リフレクタ
D 直径
L 測定システムの部分
t,t´ 測定層厚さ
Claims (7)
- 第1の圧力体(5)と第2の圧力体(6)との間の少なくとも1つの測定層(3)の圧力負荷の際に圧力マップを測定する測定装置であって、
前記測定層(3)を通って延在する第1の信号伝送路と、前記測定層(3)を通って延在する少なくとも1つの別の信号伝送路とに沿った、電磁波としての信号(9)を送信する、前記測定層(3)の周縁(3u)に配置された少なくとも1つの送信機(7)と、
前記送信機(7)から前記測定層(3)を通して送信された、圧力負荷時に変化可能な前記第1の信号伝送路と前記別の信号伝送路の信号(9)を受信する、前記周縁(3u)に配置された少なくとも1つの受信機(8,8´)と、
前記少なくとも1つの受信機(8,8´)によって受信された前記信号(9)に基づいて前記信号伝送路に沿った圧力マップの局所的な圧力値を求め、前記圧力マップを求めるために、前記局所的な圧力値に基づいて前記測定層(3)の画像信号を再構成する評価ユニットと、
を備える測定装置。 - 前記送信機(7)及び/又は前記受信機(8,8´)が前記周縁(3u)に沿って移動可能である、請求項1記載の測定装置。
- 前記周縁(3u)に沿って分散された複数の送信機(7)を有していて、かつ/又は前記周縁(3u)に沿って分散され、それぞれ1つの、対向配置された送信機(7)に配属された複数の受信機(8,8´)を有しており、1つの送信機(7)につき少なくとも2つの受信機(8,8´)を有している、請求項1又は2記載の測定装置。
- 各送信機(7)は複数の信号伝送路を、同時に送信し、かつ/又は各受信機(8,8´)はそれぞれただ1つの信号伝送路に配属されている、請求項1から3までのいずれか1項記載の測定装置。
- 少なくとも1つの前記受信機(8,8´)は、前記信号(9)の光学特性を検出するように形成されており、以下の光学特性、即ち、
複屈折
屈折率
横電磁波として現れる信号のモード
伝播時間
スペクトル符号化
のうちの1つ又は複数を検出するように形成されている、請求項1から4までのいずれか1項記載の測定装置。 - 請求項1から5までのいずれか1項記載の測定装置を備えるウェハ処理装置。
- 第1の圧力体(5)と第2の圧力体(6)との間の測定層(3)の圧力負荷の際に圧力マップを測定する方法であって、以下のステップを有しており、即ち、
請求項1から5までのいずれか1項記載の測定装置を、第1の圧力体(5)と第2の圧力体(6)との間に配置するステップと、
前記測定層(3)を通って延在する第1の信号伝送路と、前記測定層(3)を通って延在する少なくとも1つの別の信号伝送路とに沿った、電磁波としての信号(9)を、前記測定層(3)の周縁(3u)に配置された1つ又は複数の送信機(7)によって送信するステップと、
前記1つ又は複数の送信機(7)から前記測定層(3)を通して送信された、圧力負荷時に変化可能な前記第1の信号伝送路と前記別の信号伝送路の信号を受信するための、前記周縁(3u)に配置された1つ又は複数の受信機(8,8´)によって信号(9)を受信するステップと、
前記少なくとも1つの受信機(8,8´)によって受信された前記信号(9)に基づいて前記信号伝送路に沿った圧力マップの局所的な圧力値を求め、前記圧力マップを求めるために、前記局所的な圧力値に基づいて前記測定層(3)の画像信号を再構成するステップと、
を有している、圧力マップを測定する方法。
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