JP6166185B2 - Memsセンサ - Google Patents
Memsセンサ Download PDFInfo
- Publication number
- JP6166185B2 JP6166185B2 JP2014000093A JP2014000093A JP6166185B2 JP 6166185 B2 JP6166185 B2 JP 6166185B2 JP 2014000093 A JP2014000093 A JP 2014000093A JP 2014000093 A JP2014000093 A JP 2014000093A JP 6166185 B2 JP6166185 B2 JP 6166185B2
- Authority
- JP
- Japan
- Prior art keywords
- wiring layer
- substrate
- mems sensor
- layer
- connection wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- A—HUMAN NECESSITIES
- A63—SPORTS; GAMES; AMUSEMENTS
- A63H—TOYS, e.g. TOPS, DOLLS, HOOPS OR BUILDING BLOCKS
- A63H33/00—Other toys
- A63H33/04—Building blocks, strips, or similar building parts
-
- A—HUMAN NECESSITIES
- A63—SPORTS; GAMES; AMUSEMENTS
- A63H—TOYS, e.g. TOPS, DOLLS, HOOPS OR BUILDING BLOCKS
- A63H33/00—Other toys
- A63H33/04—Building blocks, strips, or similar building parts
- A63H33/046—Building blocks, strips, or similar building parts comprising magnetic interaction means, e.g. holding together by magnetic attraction
-
- A—HUMAN NECESSITIES
- A63—SPORTS; GAMES; AMUSEMENTS
- A63H—TOYS, e.g. TOPS, DOLLS, HOOPS OR BUILDING BLOCKS
- A63H33/00—Other toys
- A63H33/04—Building blocks, strips, or similar building parts
- A63H33/06—Building blocks, strips, or similar building parts to be assembled without the use of additional elements
- A63H33/08—Building blocks, strips, or similar building parts to be assembled without the use of additional elements provided with complementary holes, grooves, or protuberances, e.g. dovetails
-
- A—HUMAN NECESSITIES
- A63—SPORTS; GAMES; AMUSEMENTS
- A63H—TOYS, e.g. TOPS, DOLLS, HOOPS OR BUILDING BLOCKS
- A63H33/00—Other toys
- A63H33/04—Building blocks, strips, or similar building parts
- A63H33/10—Building blocks, strips, or similar building parts to be assembled by means of additional non-adhesive elements
- A63H33/101—Building blocks, strips, or similar building parts to be assembled by means of additional non-adhesive elements with clip or snap mechanism
-
- A—HUMAN NECESSITIES
- A63—SPORTS; GAMES; AMUSEMENTS
- A63H—TOYS, e.g. TOPS, DOLLS, HOOPS OR BUILDING BLOCKS
- A63H33/00—Other toys
- A63H33/04—Building blocks, strips, or similar building parts
- A63H33/10—Building blocks, strips, or similar building parts to be assembled by means of additional non-adhesive elements
- A63H33/108—Building blocks, strips, or similar building parts to be assembled by means of additional non-adhesive elements with holes
Landscapes
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Pressure Sensors (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Ceramic Engineering (AREA)
- Micromachines (AREA)
- Measuring Fluid Pressure (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014000093A JP6166185B2 (ja) | 2014-01-06 | 2014-01-06 | Memsセンサ |
CN201410806304.7A CN104760923B (zh) | 2014-01-06 | 2014-12-22 | Mems传感器 |
KR1020150000652A KR101633027B1 (ko) | 2014-01-06 | 2015-01-05 | Mems 센서 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014000093A JP6166185B2 (ja) | 2014-01-06 | 2014-01-06 | Memsセンサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015129643A JP2015129643A (ja) | 2015-07-16 |
JP6166185B2 true JP6166185B2 (ja) | 2017-07-19 |
Family
ID=53643094
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014000093A Active JP6166185B2 (ja) | 2014-01-06 | 2014-01-06 | Memsセンサ |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6166185B2 (ko) |
KR (1) | KR101633027B1 (ko) |
CN (1) | CN104760923B (ko) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101928264B1 (ko) | 2017-02-28 | 2018-12-13 | 주식회사 필옵틱스 | 레이저빔 성형 장치 |
JP6919964B2 (ja) * | 2018-01-29 | 2021-08-18 | ミネベアミツミ株式会社 | センサチップ及び力覚センサ装置 |
DE102021211561A1 (de) * | 2020-11-19 | 2022-05-19 | Vitesco Technologies USA, LLC | Mems-druckerfassungselement mit spannungsjustierern |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62291072A (ja) * | 1986-06-10 | 1987-12-17 | Toshiba Corp | 半導体圧センサ |
JP3873454B2 (ja) * | 1998-05-29 | 2007-01-24 | 株式会社デンソー | 半導体圧力センサ |
US20040016981A1 (en) * | 2002-07-26 | 2004-01-29 | Matsushita Electric Works, Ltd. | Semiconductor acceleration sensor using doped semiconductor layer as wiring |
US7538401B2 (en) * | 2005-05-03 | 2009-05-26 | Rosemount Aerospace Inc. | Transducer for use in harsh environments |
JP4740678B2 (ja) * | 2005-07-27 | 2011-08-03 | Okiセミコンダクタ株式会社 | 半導体装置 |
JP2007171040A (ja) * | 2005-12-22 | 2007-07-05 | Matsushita Electric Works Ltd | 物理量センサ |
JP5092462B2 (ja) * | 2006-06-13 | 2012-12-05 | 株式会社デンソー | 力学量センサ |
JP2010139496A (ja) * | 2008-11-13 | 2010-06-24 | Yamaha Corp | Memsセンサおよびmemsセンサの固定方法 |
JP5200919B2 (ja) * | 2008-12-25 | 2013-06-05 | 株式会社デンソー | センサチップおよびその製造方法並びに圧力センサ |
JP2010210402A (ja) * | 2009-03-10 | 2010-09-24 | Alps Electric Co Ltd | Memsセンサ |
WO2011010571A1 (ja) * | 2009-07-24 | 2011-01-27 | ローム株式会社 | 半導体圧力センサ、圧力センサ装置、電子機器、および半導体圧力センサの製造方法 |
FR2983955B1 (fr) * | 2011-12-09 | 2014-10-03 | Openfield | Capteur de pression pour fluide |
KR101288338B1 (ko) * | 2012-02-10 | 2013-07-22 | 대양전기공업 주식회사 | 반도체 압력소자와 금속 다이아프램 구조를 이용한 압력센서 제조방법 |
-
2014
- 2014-01-06 JP JP2014000093A patent/JP6166185B2/ja active Active
- 2014-12-22 CN CN201410806304.7A patent/CN104760923B/zh active Active
-
2015
- 2015-01-05 KR KR1020150000652A patent/KR101633027B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR101633027B1 (ko) | 2016-06-23 |
JP2015129643A (ja) | 2015-07-16 |
CN104760923A (zh) | 2015-07-08 |
KR20150082119A (ko) | 2015-07-15 |
CN104760923B (zh) | 2017-01-11 |
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