JP6164797B2 - 信号受信部テスト回路、撮像装置、信号受信部テスト方法、撮像装置のテスト方法 - Google Patents
信号受信部テスト回路、撮像装置、信号受信部テスト方法、撮像装置のテスト方法 Download PDFInfo
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Description
特許文献1には、画素からのアナログ信号をデジタル信号に変換するAD変換器の特性を測定するため、テスト信号発生回路を垂直信号線に接続する構成が開示されている。この構成は、テスト信号発生回路から電流を垂直信号線に流し、垂直信号線に接続されたAD変換器の特性を測定するものである。
101 フォトダイオード
102 転送MOSトランジスタ
103 フローティングディフージョン部
104 信号出力部(増幅MOSトランジスタ)
105 リセット部(リセットMOSトランジスタ)
106 選択MOSトランジスタ
107 垂直信号線
108 定電流源
112 VSR
113 列読み出し回路
113−1 信号受信部
114 HSR
115 出力アンプ
116 バッファ(テスト信号供給部)
117 テスト選択MOSトランジスタ
118 電源回路
Claims (16)
- 複数の画素と、
前記複数の画素の各々に、それぞれが接続された複数の信号線と、
前記複数の信号線に対応して配された複数の信号受信部と、
前記複数の信号受信部に対応して配されるとともに、電圧バッファもしくは電流バッファであって、対応する前記信号受信部に、対応する前記信号線を介して信号を供給する複数の信号供給部と、
を有する撮像装置であって、
前記複数の信号受信部の各々は第1ゲインと第2ゲインとで、前記信号を増幅する増幅部を備え、
供給された前記信号によって前記複数の信号受信部が生成した信号を用いた前記複数の信号受信部の検査を、前記第1ゲインと前記第2ゲインとのそれぞれで行う検査部を、前記撮像装置がさらに備えることを特徴とする撮像装置。 - 前記検査を、前記第1ゲインと前記第2ゲインとで、前記信号の値を異ならせて行うことを特徴とする請求項1に記載の撮像装置。
- 前記画素信号が前記信号受信部に出力される場合、前記電流源が供給する電流値の変動を抑制するように前記信号線に電圧あるいは電流を前記信号供給部が供給することを特徴とする請求項1または2に記載の撮像装置。
- 前記信号供給部が、前記信号として第1信号と第2信号とを前記信号受信部に供給し、
前記第1信号によって前記信号受信部が生成した信号と、前記第2信号によって前記信号受信部が生成した信号との差を得る差分処理部を有することを特徴とする請求項1〜3のいずれか1項に記載の撮像装置。 - 前記信号の信号レベルが、前記画素が出力する画素信号の信号レベルに対応することを特徴とする請求項1〜4のいずれか1項に記載の撮像装置。
- 光電変換により電荷が生じる光電変換部と、
前記光電変換部で生じた電荷を保持するフローティングディフージョン部と、前記フローティングディフージョン部に電気的に接続された信号出力部と、
前記フローティングディフージョン部に電気的に接続され、前記フローティングディフージョン部の電位をリセットするリセット部と、
を各々が含む複数の画素と、
複数の信号線と、
前記複数の信号線の各々を介して前記複数の画素の各々の前記信号出力部から出力される前記信号を各々が保持する複数の信号受信部と、
を有する撮像装置であって、前記信号を出力する前記画素の前記信号出力部と前記リセット部がそれぞれ別の電圧源に電気的に接続され、
前記信号出力部は、前記リセット部に電気的に接続された前記電圧源の電圧値とは異なる値の電圧が、前記信号出力部に電気的に接続された前記電圧源から供給されることによって前記信号を前記信号受信部に前記信号線を介して出力し、
前記信号が出力された前記信号受信部が保持した信号を用いて前記信号受信部を検査し、
前記信号受信部は複数のゲインに切り換えうる機能を有し、
前記信号受信部の前記複数のゲインの各々において、前記信号出力部が前記信号を前記信号受信部に供給することを特徴とする撮像装置。 - 請求項1〜6のいずれか1項に記載の撮像装置と、
前記撮像装置が出力する信号を処理する信号処理部とを有することを特徴とする撮像システム。 - 複数の画素と、
前記複数の画素の各々に、それぞれが接続された複数の信号線と、
前記複数の信号線に対応して配された複数の信号受信部と、
前記複数の信号受信部に対応して配されるとともに、電圧バッファもしくは電流バッファであって、対応する前記信号受信部に、対応する前記信号線を介して信号を供給する複数の信号供給部と、
を有する撮像装置と、
前記撮像装置が出力する信号が入力される検査部と、
を有する撮像システムであって、
前記複数の信号受信部の各々は第1ゲインと第2ゲインとで、前記信号を増幅する増幅部を備え、
前記検査部は、
供給された前記信号によって前記複数の信号受信部が生成した信号を用いた前記複数の信号受信部の検査を、前記第1ゲインと前記第2ゲインとのそれぞれで行うことを特徴とする撮像システム。 - 前記検査を、前記第1ゲインと前記第2ゲインとで、前記信号の値を異ならせて行うことを特徴とする請求項8に記載の撮像システム。
- 前記信号供給部が、前記信号として第1信号と第2信号とを前記信号受信部に供給し、
前記第1信号によって前記信号受信部が生成した信号と、前記第2信号によって前記信号受信部が生成した信号との差を得る差分処理部を有することを特徴とする請求項8または9に記載の撮像システム。 - 前記信号の信号レベルが、前記画素が出力する画素信号の信号レベルに対応することを特徴とする請求項8〜10のいずれか1項に記載の撮像システム。
- 前記撮像装置が設けられた半導体基板とは別の半導体基板に前記検査部が設けられていることを特徴とする請求項8〜11のいずれか1項に記載の撮像システム。
- 複数の画素と、
前記複数の画素の各々に、それぞれが接続された複数の信号線と、
前記複数の信号線に対応して配された複数の信号受信部と、
前記複数の信号受信部に対応して配されるとともに、電圧バッファもしくは電流バッファであって、対応する前記信号受信部に、対応する前記信号線を介して信号を供給する複数の信号供給部と、
を有する撮像装置の検査方法であって、
前記複数の信号受信部の各々は第1ゲインと第2ゲインとで、前記信号を増幅する増幅部を備え、
供給された前記信号によって前記複数の信号受信部が生成した信号を用いた前記複数の信号受信部の検査を、前記第1ゲインと前記第2ゲインとのそれぞれで行うことを特徴とする撮像装置の検査方法。 - 前記検査を、前記第1ゲインと前記第2ゲインとで、前記信号の値を異ならせて行うことを特徴とする請求項13に記載の撮像装置の検査方法。
- 前記信号供給部が、前記信号として第1信号と第2信号とを前記信号受信部に供給し、
前記第1信号によって前記信号受信部が生成した信号と、前記第2信号によって前記信号受信部が生成した信号との差を得る差分処理部を有することを特徴とする請求項13または14に記載の撮像装置の検査方法。 - 前記信号の信号レベルが、前記画素が出力する画素信号の信号レベルに対応することを特徴とする請求項13〜15のいずれか1項に記載の撮像装置の検査方法。
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GB2555713B (en) | 2016-09-30 | 2021-03-03 | Canon Kk | Imaging device, imaging system, moving body, and control method |
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JP7316049B2 (ja) | 2019-01-10 | 2023-07-27 | キヤノン株式会社 | 光電変換装置及び光電変換システム |
JP7384211B2 (ja) * | 2019-09-30 | 2023-11-21 | 株式会社ニコン | 撮像素子、及び、撮像装置 |
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JP3667081B2 (ja) | 1998-04-24 | 2005-07-06 | キヤノン株式会社 | 固体撮像装置とその駆動方法 |
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JP2004165825A (ja) | 2002-11-11 | 2004-06-10 | Sony Corp | 固体撮像装置及びその駆動方法 |
JP4468657B2 (ja) * | 2003-04-28 | 2010-05-26 | オリンパス株式会社 | 撮像素子 |
JP2007067484A (ja) * | 2005-08-29 | 2007-03-15 | Olympus Corp | 固体撮像装置 |
JP5064744B2 (ja) * | 2006-09-07 | 2012-10-31 | 株式会社リコー | 半導体集積回路、半導体集積回路を使用したシステム装置及び半導体集積回路の動作制御方法 |
JP2008067084A (ja) | 2006-09-07 | 2008-03-21 | Matsushita Electric Ind Co Ltd | Mos型固体撮像装置及びその駆動方法 |
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JP2008199254A (ja) | 2007-02-13 | 2008-08-28 | Matsushita Electric Ind Co Ltd | 固体撮像装置およびその駆動方法、撮像装置 |
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JP5108713B2 (ja) | 2008-10-10 | 2012-12-26 | パナソニック株式会社 | 固体撮像装置及び撮像装置 |
JP2011029734A (ja) | 2009-07-21 | 2011-02-10 | Panasonic Corp | 固体撮像装置、その駆動方法及びカメラ |
DE102009049201A1 (de) * | 2009-10-13 | 2011-04-28 | Arnold & Richter Cine Technik Gmbh & Co. Betriebs Kg | Bildsensor und Betriebsverfahren |
JP2012109658A (ja) * | 2010-11-15 | 2012-06-07 | Sony Corp | 固体撮像素子及び参照電圧の調整方法 |
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CN102680811A (zh) | 2012-09-19 |
US20150077570A1 (en) | 2015-03-19 |
US8921855B2 (en) | 2014-12-30 |
JP2012199913A (ja) | 2012-10-18 |
US20120228609A1 (en) | 2012-09-13 |
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