JP6160800B1 - 圧電素子駆動回路および流体制御装置 - Google Patents
圧電素子駆動回路および流体制御装置 Download PDFInfo
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- JP6160800B1 JP6160800B1 JP2017519706A JP2017519706A JP6160800B1 JP 6160800 B1 JP6160800 B1 JP 6160800B1 JP 2017519706 A JP2017519706 A JP 2017519706A JP 2017519706 A JP2017519706 A JP 2017519706A JP 6160800 B1 JP6160800 B1 JP 6160800B1
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- 230000032258 transport Effects 0.000 claims description 3
- 238000007493 shaping process Methods 0.000 abstract description 27
- 238000010586 diagram Methods 0.000 description 17
- 230000007423 decrease Effects 0.000 description 11
- 238000009499 grossing Methods 0.000 description 8
- 239000003990 capacitor Substances 0.000 description 6
- 206010036790 Productive cough Diseases 0.000 description 2
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- 210000004400 mucous membrane Anatomy 0.000 description 1
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- 210000004910 pleural fluid Anatomy 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0207—Driving circuits
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
- F04B17/003—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by piezoelectric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
- F04B49/065—Control using electricity and making use of computers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/08—Regulating by delivery pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2203/00—Motor parameters
- F04B2203/04—Motor parameters of linear electric motors
- F04B2203/0402—Voltage
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Reciprocating Pumps (AREA)
Abstract
Description
本発明の第2の実施形態に係る流体制御装置200について、図を参照して説明する。
本発明の第3の実施形態に係る流体制御装置300について、図を参照して説明する。
本発明の第4の実施形態に係る流体制御装置400について、図を参照して説明する。
なお、前記実施形態において圧電素子駆動回路150、250、350は、圧電ポンプ23の圧電素子Pを駆動しているが、これに限るものではない。実施の際、圧電素子駆動回路150、250、350は例えば、圧電アクチュエータ、圧電トランス、又は圧電MEMS、モータ等にも適用できる。
10…駆動回路
12…LPF付き差動増幅回路
13…BPF付き増幅回路
17…コンパレータ
18…インバータ
21…電池
22…昇圧回路
23…圧電ポンプ
100…流体制御装置
110…波形成形回路
111…演算回路
112…MCU
122…昇圧制御回路
150…圧電素子駆動回路
200…流体制御装置
210…駆動回路
250…圧電素子駆動回路
300…流体制御装置
312…MCU
350…圧電素子駆動回路
400…流体制御装置
450…圧電素子駆動回路
Claims (8)
- DC電源電圧を出力する電源回路と、
前記電源回路から出力される前記DC電源電圧に基づいて駆動信号を生成し、前記駆動信号を圧電素子に印加する駆動回路と、
前記圧電素子に流れる駆動電流に比例する電圧信号を前記駆動回路から抽出し、前記電圧信号に基づいて、前記駆動電流の電流値に相当する電圧値を求める制御回路と、を備え、
前記制御回路は、前記電圧値に基づいて前記駆動電流の変化を抑制する制御信号を出力し、
前記電源回路は、前記制御信号に基づいて前記DC電源電圧の値を設定する、圧電素子駆動回路。 - 前記電源回路は、電池から入力されるDC電圧を前記DC電源電圧に昇圧し、前記DC電源電圧を出力する昇圧回路である、請求項1に記載の圧電素子駆動回路。
- 前記駆動回路は、前記圧電素子に対して直列に接続された抵抗と、前記駆動電流により生じる前記抵抗の両端電圧を差動増幅し、前記電圧信号を出力する差動増幅回路と、を有する、請求項1又は請求項2に記載の圧電素子駆動回路。
- 前記制御回路は、正弦波の前記電圧信号を前記駆動回路から抽出する、請求項1乃至請求項3のいずれか1項に記載の圧電素子駆動回路。
- 前記制御回路は、非線形領域での増幅が可能な増幅回路を用いて、前記制御信号を出力する、
請求項1乃至請求項4のいずれか1項に記載の圧電素子駆動回路。 - 請求項1乃至請求項5のいずれか1項に記載の圧電素子駆動回路と、
前記圧電素子駆動回路により駆動される前記圧電素子を有し、前記圧電素子の駆動により流体を輸送する圧電ポンプと、を備える、流体制御装置。 - 前記圧電ポンプは、負圧を発生させることによって前記流体を吸引する、請求項6に記載の流体制御装置。
- 前記圧電ポンプは、正圧を発生させることによって圧縮した前記流体を送出する、請求項6に記載の流体制御装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015215026 | 2015-10-30 | ||
JP2015215026 | 2015-10-30 | ||
PCT/JP2016/081803 WO2017073642A1 (ja) | 2015-10-30 | 2016-10-27 | 圧電素子駆動回路および流体制御装置 |
Publications (2)
Publication Number | Publication Date |
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JP6160800B1 true JP6160800B1 (ja) | 2017-07-12 |
JPWO2017073642A1 JPWO2017073642A1 (ja) | 2017-10-26 |
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JP2017519706A Active JP6160800B1 (ja) | 2015-10-30 | 2016-10-27 | 圧電素子駆動回路および流体制御装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US11605773B2 (ja) |
JP (1) | JP6160800B1 (ja) |
CN (1) | CN107408620B (ja) |
GB (1) | GB2558703B (ja) |
WO (1) | WO2017073642A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11391278B2 (en) | 2018-04-10 | 2022-07-19 | Murata Manufacturing Co., Ltd. | Fluid control device |
US11959472B2 (en) | 2017-12-26 | 2024-04-16 | Murata Manufacturing Co., Ltd. | Piezoelectric pump device |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6908137B2 (ja) * | 2018-01-30 | 2021-07-21 | 株式会社村田製作所 | 駆動装置、および、流体制御装置 |
CN108649945B (zh) * | 2018-05-31 | 2024-07-23 | 苏州攀特电陶科技股份有限公司 | 一种振动驱动电路 |
TWI800436B (zh) * | 2022-07-29 | 2023-04-21 | 研能科技股份有限公司 | 流體泵浦模組之驅動電路 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03120768A (ja) * | 1989-10-03 | 1991-05-22 | Toyota Motor Corp | 圧電アクチュエータの駆動装置 |
JPH05299717A (ja) * | 1992-04-17 | 1993-11-12 | Toyota Motor Corp | 積層型圧電アクチュエータの駆動方法 |
JPH07107754A (ja) * | 1993-09-30 | 1995-04-21 | Toyota Motor Corp | 圧電素子駆動装置 |
JP2007205173A (ja) * | 2006-01-31 | 2007-08-16 | Denso Corp | ピエゾインジェクタの制御装置 |
WO2009014148A1 (ja) * | 2007-07-26 | 2009-01-29 | Shibaura Mechatronics Corporation | 圧電素子駆動装置および塗布装置 |
JP2011083767A (ja) * | 2009-09-18 | 2011-04-28 | Murata Mfg Co Ltd | 圧電アクチュエーター駆動回路 |
JP2011087455A (ja) * | 2009-09-18 | 2011-04-28 | Murata Mfg Co Ltd | 圧電アクチュエーター駆動回路 |
JP2014514188A (ja) * | 2011-04-28 | 2014-06-19 | ヒューレット−パッカード デベロップメント カンパニー エル.ピー. | 圧電プリントヘッド素子のキャパシタンス変化の補償 |
WO2015004872A1 (ja) * | 2013-07-12 | 2015-01-15 | パナソニックIpマネジメント株式会社 | 駆動装置、物理量検出装置及び電子機器 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04370985A (ja) * | 1991-06-19 | 1992-12-24 | Olympus Optical Co Ltd | 圧電体駆動回路 |
JP4945204B2 (ja) * | 2006-09-08 | 2012-06-06 | 株式会社東芝 | アクチュエータ |
JP4526580B2 (ja) * | 2008-07-07 | 2010-08-18 | 株式会社日本自動車部品総合研究所 | ピエゾアクチュエータ駆動装置 |
JP5693177B2 (ja) | 2010-11-26 | 2015-04-01 | 株式会社 和光電子 | 圧電振動子駆動回路 |
CN103988327B (zh) * | 2011-12-09 | 2016-11-16 | 株式会社村田制作所 | 压电元件用驱动电路 |
EP3521887B1 (en) * | 2012-02-28 | 2021-12-22 | Nikon Corporation | Drive apparatus with associated drive method and optical device |
-
2016
- 2016-10-27 CN CN201680012239.8A patent/CN107408620B/zh active Active
- 2016-10-27 JP JP2017519706A patent/JP6160800B1/ja active Active
- 2016-10-27 WO PCT/JP2016/081803 patent/WO2017073642A1/ja active Application Filing
- 2016-10-27 GB GB1713984.1A patent/GB2558703B/en active Active
-
2017
- 2017-09-01 US US15/693,951 patent/US11605773B2/en active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03120768A (ja) * | 1989-10-03 | 1991-05-22 | Toyota Motor Corp | 圧電アクチュエータの駆動装置 |
JPH05299717A (ja) * | 1992-04-17 | 1993-11-12 | Toyota Motor Corp | 積層型圧電アクチュエータの駆動方法 |
JPH07107754A (ja) * | 1993-09-30 | 1995-04-21 | Toyota Motor Corp | 圧電素子駆動装置 |
JP2007205173A (ja) * | 2006-01-31 | 2007-08-16 | Denso Corp | ピエゾインジェクタの制御装置 |
WO2009014148A1 (ja) * | 2007-07-26 | 2009-01-29 | Shibaura Mechatronics Corporation | 圧電素子駆動装置および塗布装置 |
JP2011083767A (ja) * | 2009-09-18 | 2011-04-28 | Murata Mfg Co Ltd | 圧電アクチュエーター駆動回路 |
JP2011087455A (ja) * | 2009-09-18 | 2011-04-28 | Murata Mfg Co Ltd | 圧電アクチュエーター駆動回路 |
JP2014514188A (ja) * | 2011-04-28 | 2014-06-19 | ヒューレット−パッカード デベロップメント カンパニー エル.ピー. | 圧電プリントヘッド素子のキャパシタンス変化の補償 |
WO2015004872A1 (ja) * | 2013-07-12 | 2015-01-15 | パナソニックIpマネジメント株式会社 | 駆動装置、物理量検出装置及び電子機器 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11959472B2 (en) | 2017-12-26 | 2024-04-16 | Murata Manufacturing Co., Ltd. | Piezoelectric pump device |
US11391278B2 (en) | 2018-04-10 | 2022-07-19 | Murata Manufacturing Co., Ltd. | Fluid control device |
Also Published As
Publication number | Publication date |
---|---|
US20170365768A1 (en) | 2017-12-21 |
WO2017073642A1 (ja) | 2017-05-04 |
CN107408620B (zh) | 2019-08-23 |
GB201713984D0 (en) | 2017-10-18 |
JPWO2017073642A1 (ja) | 2017-10-26 |
US11605773B2 (en) | 2023-03-14 |
GB2558703B (en) | 2021-02-24 |
GB2558703A (en) | 2018-07-18 |
CN107408620A (zh) | 2017-11-28 |
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