JP6099617B2 - 気密性を検査するための方法及び装置 - Google Patents
気密性を検査するための方法及び装置 Download PDFInfo
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- JP6099617B2 JP6099617B2 JP2014229889A JP2014229889A JP6099617B2 JP 6099617 B2 JP6099617 B2 JP 6099617B2 JP 2014229889 A JP2014229889 A JP 2014229889A JP 2014229889 A JP2014229889 A JP 2014229889A JP 6099617 B2 JP6099617 B2 JP 6099617B2
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- Prior art keywords
- gas
- test gas
- test
- pump
- inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000000034 method Methods 0.000 title claims description 17
- 239000007789 gas Substances 0.000 claims description 122
- 238000007689 inspection Methods 0.000 claims description 32
- 239000012159 carrier gas Substances 0.000 claims description 30
- 230000006835 compression Effects 0.000 claims description 24
- 238000007906 compression Methods 0.000 claims description 24
- 239000000203 mixture Substances 0.000 claims description 15
- 230000004048 modification Effects 0.000 description 15
- 238000012986 modification Methods 0.000 description 15
- 230000035945 sensitivity Effects 0.000 description 12
- 239000001307 helium Substances 0.000 description 8
- 229910052734 helium Inorganic materials 0.000 description 8
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 8
- 238000001514 detection method Methods 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000011144 upstream manufacturing Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000035484 reaction time Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000007705 chemical test Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
- G01M3/229—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators removably mounted in a test cell
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Description
τ= V/S
τ:システムの時定数(63%−時間)
V :検査室の体積
S :ポンプの試験ガスの吸引能力
p = Q/S
p :試験ガスの分圧
Q :検査対象からの試験ガスの漏れ速度
S :試験ガスのためのポンプの吸引能力
c = Qleak/Qcarrier
ヘリウム分圧pHe は、以下に示す式により求められる。
PHe = C*Ptot
Claims (2)
- 気密性を検査するための方法において、
排気された検査対象を、検査室に収容することなく周囲大気に晒し、
試験ガス噴射器が、試験ガスを含む大気を生成し、
前記試験ガスの流れにおける前記検査対象の下流側にキャリアガスを供給し、
圧縮ポンプが、検査対象から取り出された試験ガスと供給されたキャリアガスとからなるガス混合物を圧縮し、
前記ガス混合物の流れ方向に見たとき、前記圧縮ポンプの下流側に配置された試験ガスセンサを用いて、前記圧縮ポンプにより圧縮されたガス混合物を分析することを特徴とする方法。 - 気密性を検査するための装置において、
排気された検査対象の外側で試験ガスを含む大気を生成する試験ガス噴射器と、
前記検査対象から取り出された試験ガスと、該試験ガスの流れにおける前記検査対象の下流側に供給されたキャリアガスとからなるガス混合物を圧縮し、前記検査対象と直接に又は別の要素を介して接続可能な圧縮ポンプと、
該圧縮ポンプにより圧縮されたガス混合物を分析するために、該ガス混合物の流れ方向に見たとき、前記圧縮ポンプの下流側に配置された試験ガスセンサと
を備えており、
前記検査対象は、検査室に収容されずに周囲大気に晒されることを特徴とする装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007057944A DE102007057944A1 (de) | 2007-12-01 | 2007-12-01 | Verfahren und Vorrichtung zur Dichtheitsprüfung |
DE102007057944.8 | 2007-12-01 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013252355A Division JP6042317B2 (ja) | 2007-12-01 | 2013-12-05 | 気密性を検査するための方法及び装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015052614A JP2015052614A (ja) | 2015-03-19 |
JP6099617B2 true JP6099617B2 (ja) | 2017-03-22 |
Family
ID=40364361
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010535380A Pending JP2011505553A (ja) | 2007-12-01 | 2008-11-27 | 気密性を検査するための方法及び装置 |
JP2013252355A Active JP6042317B2 (ja) | 2007-12-01 | 2013-12-05 | 気密性を検査するための方法及び装置 |
JP2014229889A Active JP6099617B2 (ja) | 2007-12-01 | 2014-11-12 | 気密性を検査するための方法及び装置 |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010535380A Pending JP2011505553A (ja) | 2007-12-01 | 2008-11-27 | 気密性を検査するための方法及び装置 |
JP2013252355A Active JP6042317B2 (ja) | 2007-12-01 | 2013-12-05 | 気密性を検査するための方法及び装置 |
Country Status (6)
Country | Link |
---|---|
US (2) | US8646315B2 (ja) |
EP (3) | EP3206001A1 (ja) |
JP (3) | JP2011505553A (ja) |
CN (3) | CN102798505B (ja) |
DE (1) | DE102007057944A1 (ja) |
WO (1) | WO2009068614A1 (ja) |
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DE102009059824A1 (de) * | 2009-12-21 | 2011-06-22 | Inficon GmbH, 50968 | Verfahren und Vorrichtung zur Leckbestimmung |
CN102667467B (zh) | 2009-12-22 | 2016-01-20 | Ima生命北美股份有限公司 | 使用对真空泵排气的气体测量来监控冷冻干燥 |
DE102010048982B4 (de) * | 2010-09-03 | 2022-06-09 | Inficon Gmbh | Lecksuchgerät |
FR2969287B1 (fr) * | 2010-12-17 | 2013-10-25 | Alcatel Lucent | Dispositif de detection de fuite utilisant l'hydrogene comme gaz traceur |
DE102010055195B4 (de) * | 2010-12-20 | 2018-04-26 | INPRO Innovationsgesellschaft für fortgeschrittene Produktionssysteme in der Fahrzeugindustrie mbH | Vorrichtung und Verfahren zur Dichtheitsprüfung an geschlossenen hohlen Bauteilen und Verpackungen |
WO2012125108A1 (en) * | 2011-03-16 | 2012-09-20 | Norden Machinery Ab | Method and arrangement for leak detection |
DE102011106165B4 (de) * | 2011-06-30 | 2015-07-02 | Sartorius Stedim Biotech Gmbh | Prüfverfahren und -vorrichtung für Bioreaktorbehälter sowie Verwendung |
CN103048089A (zh) * | 2011-10-12 | 2013-04-17 | 上海莲南汽车附件有限公司 | 一种丙烯测漏的方法 |
FR2993659B1 (fr) * | 2012-07-23 | 2014-08-08 | Adixen Vacuum Products | Procede et installation de detection pour le controle d'etancheite d'emballages de produits scelles |
DE102012220108A1 (de) * | 2012-11-05 | 2014-05-22 | Inficon Gmbh | Verfahren zur Prüfung einer Dichtheitsprüfanlage |
FR3000215B1 (fr) * | 2012-12-21 | 2016-02-05 | Aneolia | Dispositif et procede de test d'un echantillon, en particulier de discrimination d'un gaz d'un echantillon |
TWM454545U (zh) * | 2013-02-01 | 2013-06-01 | Jusun Instr Co Ltd | 充電電池檢測設備 |
CN104034495A (zh) * | 2013-03-06 | 2014-09-10 | 楚天科技股份有限公司 | 一种容器的真空检漏方法及真空检漏*** |
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CN103471777B (zh) * | 2013-08-29 | 2015-12-02 | 中国计量学院 | 一种基于二氧化碳传感器的气体泄漏检测方法 |
DE102013217288A1 (de) * | 2013-08-29 | 2015-03-05 | Inficon Gmbh | Dichtheitsprüfung während der Evakuierung einer Folienkammer |
DE102013218506A1 (de) * | 2013-09-16 | 2015-03-19 | Inficon Gmbh | Schnüffellecksucher mit mehrstufiger Membranpumpe |
FR3014197B1 (fr) * | 2013-11-29 | 2017-11-17 | Gaztransport Et Technigaz | Surveillance d'une cuve etanche et thermiquement isolante |
DE102014224799A1 (de) | 2014-12-03 | 2016-06-09 | Inficon Gmbh | Dichtheitsprüfung mit Trägergas in Folienkammer |
CN105466641A (zh) * | 2015-10-15 | 2016-04-06 | 杭州伯坦科技工程有限公司 | 电池漏液快速检测装置及其检测方法 |
DE102015222554A1 (de) * | 2015-11-16 | 2017-05-18 | Inficon Gmbh | Lecksuche mit Sauerstoff |
FR3072774B1 (fr) * | 2017-10-19 | 2019-11-15 | Pfeiffer Vacuum | Detecteur de fuites pour le controle de l'etancheite d'un objet a tester |
EP3567356B1 (en) * | 2018-05-07 | 2021-02-24 | Inficon GmbH | Sniffing leak detector with switching valve and buffer chamber |
DE102018208826A1 (de) * | 2018-06-05 | 2019-12-05 | Inficon Gmbh | Verbindungsvorrichtung zum Verbinden eines Gassensors |
DE102019006343A1 (de) * | 2018-09-24 | 2020-03-26 | Merck Patent Gmbh | Messkammer und Messstand |
CN109540411A (zh) * | 2018-11-19 | 2019-03-29 | 合肥市极点科技有限公司 | 一种机动车天窗密封性检测装置 |
CN109489914A (zh) * | 2018-12-20 | 2019-03-19 | 中国石油集团川庆钻探工程有限公司 | 井下工具实验装置气密封检测方法 |
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CN110553802B (zh) * | 2019-09-12 | 2022-01-14 | 爱发科东方真空(成都)有限公司 | 一种用于大漏测量的检漏装置及检漏方法 |
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-
2007
- 2007-12-01 DE DE102007057944A patent/DE102007057944A1/de not_active Withdrawn
-
2008
- 2008-11-27 CN CN201210250103.4A patent/CN102798505B/zh active Active
- 2008-11-27 CN CN2008801187395A patent/CN101883974B/zh active Active
- 2008-11-27 US US12/744,776 patent/US8646315B2/en active Active
- 2008-11-27 EP EP17157133.4A patent/EP3206001A1/de not_active Withdrawn
- 2008-11-27 EP EP14150166.8A patent/EP2720023B1/de active Active
- 2008-11-27 EP EP08855308.6A patent/EP2217902B1/de active Active
- 2008-11-27 CN CN2012102498027A patent/CN102818684A/zh active Pending
- 2008-11-27 WO PCT/EP2008/066346 patent/WO2009068614A1/de active Application Filing
- 2008-11-27 JP JP2010535380A patent/JP2011505553A/ja active Pending
-
2013
- 2013-10-02 US US14/044,117 patent/US20140096595A1/en not_active Abandoned
- 2013-12-05 JP JP2013252355A patent/JP6042317B2/ja active Active
-
2014
- 2014-11-12 JP JP2014229889A patent/JP6099617B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
EP2720023A2 (de) | 2014-04-16 |
CN102818684A (zh) | 2012-12-12 |
JP6042317B2 (ja) | 2016-12-14 |
US8646315B2 (en) | 2014-02-11 |
JP2014059322A (ja) | 2014-04-03 |
EP3206001A1 (de) | 2017-08-16 |
CN101883974B (zh) | 2013-01-02 |
CN102798505B (zh) | 2016-03-23 |
EP2217902A1 (de) | 2010-08-18 |
US20100313634A1 (en) | 2010-12-16 |
DE102007057944A1 (de) | 2009-06-04 |
CN102798505A (zh) | 2012-11-28 |
WO2009068614A1 (de) | 2009-06-04 |
US20140096595A1 (en) | 2014-04-10 |
JP2011505553A (ja) | 2011-02-24 |
EP2720023A3 (de) | 2017-03-29 |
EP2217902B1 (de) | 2017-02-22 |
EP2720023B1 (de) | 2018-10-10 |
CN101883974A (zh) | 2010-11-10 |
JP2015052614A (ja) | 2015-03-19 |
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