JP6066929B2 - 熱処理可能な被覆ガラス板 - Google Patents
熱処理可能な被覆ガラス板 Download PDFInfo
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- JP6066929B2 JP6066929B2 JP2013554011A JP2013554011A JP6066929B2 JP 6066929 B2 JP6066929 B2 JP 6066929B2 JP 2013554011 A JP2013554011 A JP 2013554011A JP 2013554011 A JP2013554011 A JP 2013554011A JP 6066929 B2 JP6066929 B2 JP 6066929B2
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- layer
- nitride
- glass plate
- oxide
- silver
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- 239000011521 glass Substances 0.000 title claims description 117
- 239000010410 layer Substances 0.000 claims description 267
- 150000004767 nitrides Chemical class 0.000 claims description 83
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 48
- 229910052709 silver Inorganic materials 0.000 claims description 48
- 239000004332 silver Substances 0.000 claims description 48
- 239000002346 layers by function Substances 0.000 claims description 47
- 229910052782 aluminium Inorganic materials 0.000 claims description 45
- 238000010438 heat treatment Methods 0.000 claims description 45
- 230000004888 barrier function Effects 0.000 claims description 43
- 229910052710 silicon Inorganic materials 0.000 claims description 38
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 36
- 229910052718 tin Inorganic materials 0.000 claims description 35
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 33
- 239000010703 silicon Substances 0.000 claims description 33
- 229910052725 zinc Inorganic materials 0.000 claims description 30
- 229910044991 metal oxide Inorganic materials 0.000 claims description 27
- 150000004706 metal oxides Chemical class 0.000 claims description 27
- 238000004544 sputter deposition Methods 0.000 claims description 21
- 238000000926 separation method Methods 0.000 claims description 20
- 230000003667 anti-reflective effect Effects 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 15
- 239000001301 oxygen Substances 0.000 claims description 15
- 229910052760 oxygen Inorganic materials 0.000 claims description 15
- 230000008859 change Effects 0.000 claims description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 238000002834 transmittance Methods 0.000 claims description 10
- 238000005546 reactive sputtering Methods 0.000 claims description 9
- 229910052757 nitrogen Inorganic materials 0.000 claims description 6
- -1 silicon (oxygen) nitride Chemical class 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 5
- 239000000956 alloy Substances 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 229910052758 niobium Inorganic materials 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- 229910052729 chemical element Inorganic materials 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 229910052735 hafnium Inorganic materials 0.000 claims description 2
- 238000002955 isolation Methods 0.000 claims description 2
- 229910052748 manganese Inorganic materials 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 229910052720 vanadium Inorganic materials 0.000 claims description 2
- 239000011701 zinc Substances 0.000 description 42
- 239000011135 tin Substances 0.000 description 40
- 238000000576 coating method Methods 0.000 description 33
- 239000011248 coating agent Substances 0.000 description 25
- 239000000463 material Substances 0.000 description 21
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 18
- 230000003287 optical effect Effects 0.000 description 14
- 230000005540 biological transmission Effects 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 10
- 239000010936 titanium Substances 0.000 description 9
- 239000011787 zinc oxide Substances 0.000 description 9
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 8
- 229910001887 tin oxide Inorganic materials 0.000 description 7
- 229910007717 ZnSnO Inorganic materials 0.000 description 5
- 238000005452 bending Methods 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 239000005357 flat glass Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 238000005728 strengthening Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 239000000654 additive Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 239000005329 float glass Substances 0.000 description 3
- 230000001771 impaired effect Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- 238000005496 tempering Methods 0.000 description 3
- 230000000007 visual effect Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 150000002736 metal compounds Chemical class 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910003455 mixed metal oxide Inorganic materials 0.000 description 2
- 229910001120 nichrome Inorganic materials 0.000 description 2
- 230000001737 promoting effect Effects 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 206010021143 Hypoxia Diseases 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000005340 laminated glass Substances 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 238000013441 quality evaluation Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- GZCWPZJOEIAXRU-UHFFFAOYSA-N tin zinc Chemical compound [Zn].[Sn] GZCWPZJOEIAXRU-UHFFFAOYSA-N 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3681—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating being used in glazing, e.g. windows or windscreens
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3618—Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/366—Low-emissivity or solar control coatings
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D1/00—Coating compositions, e.g. paints, varnishes or lacquers, based on inorganic substances
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
- C09D5/006—Anti-reflective coatings
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B9/00—Screening or protective devices for wall or similar openings, with or without operating or securing mechanisms; Closures of similar construction
- E06B9/24—Screens or other constructions affording protection against light, especially against sunshine; Similar screens for privacy or appearance; Slat blinds
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/211—SnO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/216—ZnO
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/25—Metals
- C03C2217/251—Al, Cu, Mg or noble metals
- C03C2217/254—Noble metals
- C03C2217/256—Ag
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/28—Other inorganic materials
- C03C2217/281—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/73—Anti-reflective coatings with specific characteristics
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
- C03C2218/156—Deposition methods from the vapour phase by sputtering by magnetron sputtering
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B9/00—Screening or protective devices for wall or similar openings, with or without operating or securing mechanisms; Closures of similar construction
- E06B9/24—Screens or other constructions affording protection against light, especially against sunshine; Similar screens for privacy or appearance; Slat blinds
- E06B2009/2417—Light path control; means to control reflection
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Geochemistry & Mineralogy (AREA)
- General Chemical & Material Sciences (AREA)
- Wood Science & Technology (AREA)
- Structural Engineering (AREA)
- Architecture (AREA)
- Civil Engineering (AREA)
- Inorganic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
- Physical Vapour Deposition (AREA)
Description
ガラス基板、
該ガラス基板から順に、
Zn及びSnの酸化物及び/又はSnの酸化物を基とする層と、
金属酸化物及び/又はケイ素の(酸化)窒化物及び/又はアルミニウムの(酸化)窒化物を基とする分離層と、
Znの酸化物を基とするトップ層と
を有する下部反射防止層、並びに
銀を基とする機能層
を有する被覆ガラス板を提供する。
ガラス基板、
該ガラス基板から順に、
ケイ素の(酸化)窒化物及び/又はアルミニウムの(酸化)窒化物を基とするベース層と、
Zn及びSnの酸化物及び/又はSnの酸化物を基とする層と、
金属酸化物及び/又はケイ素の(酸化)窒化物及び/又はアルミニウムの(酸化)窒化物を基とする分離層と、
Znの酸化物を基とするトップ層と
を有する下部反射防止層、
銀を基とする機能層、
バリア層、並びに
上部反射防止層
を有する。
ここで、中央反射防止層はそれぞれ、少なくとも、
間に中央反射防止層が設けられた銀を基とする機能層のうち、最もガラス基板の近くに位置する銀を基とする機能層から順に、
ケイ素の(酸化)窒化物及び/又はアルミニウムの(酸化)窒化物を基とするベース層と、Zn及びSnの酸化物及び/又はSnの酸化物を基とする層と、Znの酸化物を基とするトップ層とを有する。
金属酸化物を基とする層と、
アルミニウムの(酸化)窒化物及び/又はケイ素の(酸化)窒化物を基とする層と
を有する。
金属酸化物を基とする層と、
アルミニウムの(酸化)窒化物及び/又はケイ素の(酸化)窒化物を基とする層と
を有する。
Zn及びSnの酸化物及び/又はSnの酸化物を基とする層と、
アルミニウムの(酸化)窒化物及び/又はケイ素の(酸化)窒化物を基とする層と
を有する。
ガラス基板を準備し、次いで、該ガラス基板に、
ケイ素の(酸化)窒化物及び/又はアルミニウムの(酸化)窒化物を基とするベース層、
Zn及びSnの酸化物及び/又はSnの酸化物を基とする層、
少なくとも窒素を含むスパッタ雰囲気中において、金属酸化物ターゲットからスパッタすること、又は、金属層を堆積してその後酸化させることによりなる金属酸化物を基とし、及び/又は、Si及び/又はAlを基とするターゲットから反応的にスパッタすることによりなるケイ素の(酸化)窒化物及び/又はアルミニウムの(酸化)窒化物を基とする分離層、
Znの酸化物を基とするトップ層、
銀を基とする機能層、
バリア層、並びに
上部反射防止層
を相次いで付与する工程を含み、
前記銀を基とする機能層と直接接触する前記バリア層の任意の部分は、0〜最大5体積%の酸素を含む雰囲気中でスパッタすることにより堆積される、被覆ガラス板の製造方法を提供する。
実施例1乃至9のコーティングの堆積の直後に、被覆ガラス板のコーティング積層のパラメータ(ヘイズ、TL及びRfE*)を測定した。次いで、試料を、約650℃で約5分間熱処理した。その後、ヘイズ、TL及びRfE*を再び測定し、それらからΔTL及びRfΔE*を算出した。結果を、上記の表1に示す。
Claims (14)
- 被覆ガラス板であって、少なくとも、順に、以下の層:
ガラス基板、
前記ガラス基板上に直接設けられた、厚さ25〜35nmの、ケイ素の(酸化)窒化物及び/又はアルミニウムの(酸化)窒化物を基とするベース層、
該ベース層から順に、
前記ケイ素の(酸化)窒化物及び/又はアルミニウムの(酸化)窒化物を基とするベース層上に直接設けられた、Zn及びSnの酸化物を基とする層と、
厚さ0.5〜5nmの、金属酸化物及び/又はケイ素の(酸化)窒化物及び/又はアルミニウムの(酸化)窒化物を基とする分離層と、
Znの酸化物を基とするトップ層と
を有する下部反射防止層、並びに
銀を基とする機能層
を有し、
更に、前記ガラス基板から順に、前記銀を基とする機能層の上方にそれに接触して設けられたバリア層であって、準化学量論的なNiCrOxの犠牲バリア層を有しない、前記バリア層を有し、
更に、前記バリア層の上方に順に、
金属酸化物を基とする層と、
アルミニウムの(酸化)窒化物及び/又はケイ素の(酸化)窒化物を基とする層と
を含む上部反射防止層を有する、
被覆ガラス板であって、
熱処理後の前記ガラス板の光透過率の変化の割合が、2%以下である、被覆ガラス板。 - 前記下部反射防止層のZn及びSnの酸化物を基とする層は、厚さが1〜8nmである、請求項1に記載のガラス板。
- 前記分離層が、Ti、Al及び/又はSiの酸化物の層を有する、請求項1又は2に記載のガラス板。
- 前記分離層はさらに、Ti、V、Mn、Co、Cu、Zn、Zr、Hf、Nb、Mo、Taの元素のうちの少なくとも1つから選択される1つ又はそれ以上の他の化学元素、又はこれらの物質のうちの少なくとも2つを基とする合金を含む、請求項1乃至3のいずれかに記載のガラス板。
- 前記Znの酸化物を基とするトップ層は、厚さが3〜10nmである、請求項1乃至4のいずれかに記載のガラス板。
- 前記銀を基とする機能層は、厚さが5〜20nmである、請求項1乃至5のいずれかに記載のガラス板。
- 前記下部反射防止層における前記Znの酸化物を基とするトップ層が、前記銀を基とする機能層と直接接触している、請求項1乃至6のいずれかに記載のガラス板。
- 前記バリア層は、厚さが1〜10nmである、請求項1乃至7のいずれかに記載のガラス板。
- 前記上部反射防止層における前記金属酸化物を基とする層は、厚さが2〜20nmである、請求項1に記載のガラス板。
- 前記上部反射防止層における前記アルミニウムの(酸化)窒化物及び/又はケイ素の(酸化)窒化物を基とする層は、厚さが15〜35nmである、請求項1に記載のガラス板。
- 前記ガラス板は、銀を基とする機能層を複数有する、請求項1に記載のガラス板。
- 前記銀を基とする機能層はそれぞれ、介在する中央反射防止層により、隣接する銀を基とする機能層から間隔が空けられている、請求項11に記載のガラス板。
- 請求項1乃至12のいずれかに記載の被覆ガラス板の製造方法であって、
ガラス基板を準備し、次いで、該ガラス基板に、
厚さ25〜35nmの、ケイ素の(酸化)窒化物及び/又はアルミニウムの(酸化)窒化物を基とするベース層、
前記ケイ素の(酸化)窒化物及び/又はアルミニウムの(酸化)窒化物を基とするベース層の直接上の、Zn及びSnの酸化物を基とする層、
少なくとも窒素を含むスパッタ雰囲気中において、金属酸化物ターゲットからスパッタすること、又は、金属層を堆積してその後酸化させることによりなる金属酸化物を基とし、及び/又は、Si及び/又はAlを基とするターゲットから反応的にスパッタすることによりなるケイ素の(酸化)窒化物及び/又はアルミニウムの(酸化)窒化物を基とする、厚さ0.5〜5nmの、分離層、
Znの酸化物を基とするトップ層、
銀を基とする機能層、
バリア層、並びに
上部反射防止層
を相次いで付与する工程を含む、被覆ガラス板の製造方法であって、
前記銀を基とする機能層と直接接触する前記バリア層の任意の部分は、0〜最大5体積%の酸素を含む雰囲気中でスパッタすることにより堆積され、前記バリア層は、準化学量論的なNiCrO x の犠牲バリア層を有さず、熱処理後の前記ガラス板の光透過率の変化の割合が、2%以下である、被覆ガラス板の製造方法。 - 請求項1乃至12のいずれかに記載のガラス板を組み入れた、多重板ガラス。
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