JP6065366B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 102
- 238000004519 manufacturing process Methods 0.000 title claims description 89
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 178
- 229910052710 silicon Inorganic materials 0.000 claims description 114
- 239000010703 silicon Substances 0.000 claims description 114
- 238000010438 heat treatment Methods 0.000 claims description 109
- 239000000758 substrate Substances 0.000 claims description 109
- 238000000034 method Methods 0.000 claims description 72
- 239000012298 atmosphere Substances 0.000 claims description 27
- 230000007547 defect Effects 0.000 claims description 24
- 239000001257 hydrogen Substances 0.000 claims description 23
- 229910052739 hydrogen Inorganic materials 0.000 claims description 23
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 20
- 239000007789 gas Substances 0.000 claims description 11
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 43
- 229910052814 silicon oxide Inorganic materials 0.000 description 43
- 230000008569 process Effects 0.000 description 24
- 238000002955 isolation Methods 0.000 description 16
- 238000012545 processing Methods 0.000 description 16
- 230000015572 biosynthetic process Effects 0.000 description 13
- 239000010410 layer Substances 0.000 description 9
- 239000012535 impurity Substances 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- 229910052581 Si3N4 Inorganic materials 0.000 description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 7
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 230000008439 repair process Effects 0.000 description 6
- 238000003795 desorption Methods 0.000 description 5
- 238000005468 ion implantation Methods 0.000 description 5
- 239000012299 nitrogen atmosphere Substances 0.000 description 5
- 238000000206 photolithography Methods 0.000 description 5
- 238000001228 spectrum Methods 0.000 description 5
- 238000000859 sublimation Methods 0.000 description 5
- 230000008022 sublimation Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 229910021332 silicide Inorganic materials 0.000 description 4
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 4
- 230000003746 surface roughness Effects 0.000 description 4
- 238000001039 wet etching Methods 0.000 description 4
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 230000008707 rearrangement Effects 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 229910018557 Si O Inorganic materials 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 229910008045 Si-Si Inorganic materials 0.000 description 1
- 229910006411 Si—Si Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910000096 monohydride Inorganic materials 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
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- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
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- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
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Description
第1実施形態による半導体装置の製造方法について図1乃至図9を用いて説明する。
Di=D0×exp(−q・Ea/kBTi)
D0=1×10−3[cm2/s]
Ea=2.0 [eV]
上記の式に基づきステップS14におけるシリコン基板の温度とシリコン原子の移動量との関係を求めた結果が図4である。図4の結果から、ステップS14におけるシリコン原子の合計移動量は、35.9nmと見積もられた。また、700℃における移動量は、シリコンの格子定数である0.543nm程度であると見積もられた。また、ステップS15のみにおけるシリコン原子の移動量は、0.536nmと見積もられた。
Ea=4.0 [eV]
上記の式に基づきステップS14におけるシリコン基板の温度とシリコン原子の昇華レートとの関係を求めた結果が図5である。図5の結果から、シリコン原子を1E6個(1000個×1000個の領域を想定)とした場合、シリコン原子の昇華によるC型欠陥の生成は650℃程度の温度まで生じることが判る。
第2実施形態による半導体装置の製造方法について図10乃至図19を用いて説明する。図1乃至図9に示す第1実施形態による半導体装置の製造方法と同様の構成には同一の符号を付し説明を省略し又は簡潔にする。
第3実施形態による半導体装置の製造方法について図20を用いて説明する。図1乃至図19に示す第1及び第2実施形態による半導体装置の製造方法と同様の構成には同一の符号を付し説明を省略し又は簡潔にする。
参考例による半導体装置の製造方法について図21及び図22を用いて説明する。図1乃至図20に示す第1乃至第3実施形態による半導体装置の製造方法と同様の構成には同一の符号を付し説明を省略し又は簡潔にする。
上記実施形態に限らず種々の変形が可能である。
ことを特徴とする半導体装置の製造方法。
前記第2のステップでは、前記シリコン基板の前記表面のC型欠陥を修復する
ことを特徴とする半導体装置の製造方法。
前記第2の温度は、前記シリコン基板の前記表面におけるシリコン原子の三次元的な移動よりも二次元的な移動が支配的になる温度である
ことを特徴とする半導体装置の製造方法。
前記第2の温度は、Si−H結合が解離するエネルギー相当する温度よりも低い温度である
ことを特徴とする半導体装置の製造方法。
前記第2の温度は、350℃〜500℃である
ことを特徴とする半導体装置の製造方法。
前記第2のステップは、30秒以上行う
ことを特徴とする半導体装置の製造方法。
前記第1のステップでは、前記酸化膜を除去した後、前記シリコン基板の前記表面のシリコン原子を再配列してステップ・テラス構造を形成し、前記シリコン基板を平坦化する
ことを特徴とする半導体装置の製造方法。
前記第1の温度は、950℃〜1200℃である
ことを特徴とする半導体装置の製造方法。
前記第1の雰囲気は、水素を含む
ことを特徴とする半導体装置の製造方法。
前記第1の雰囲気は、希ガスを含む
ことを特徴とする半導体装置の製造方法。
前記第1のステップは、第1の圧力で処理を行うステップと、前記第1の圧力よりも高い第2の圧力で処理を行うステップとを含む
ことを特徴とする半導体装置の製造方法。
前記熱処理工程の後、前記シリコン基板を熱酸化してシリコン酸化膜を形成する工程を更に有する
ことを特徴とする半導体装置の製造方法。
前記シリコン酸化膜は、ゲート絶縁膜である
ことを特徴とする半導体装置の製造方法。
前記熱処理工程の後に、前記シリコン基板に素子分離絶縁膜を形成する工程を更に有する
ことを特徴とする半導体装置の製造方法。
前記熱処理工程は、前記第2のステップの後、窒素を含む第3の雰囲気中において前記第2の温度から室温まで冷却する第3のステップを含む
ことを特徴とする半導体装置の製造方法。
前記熱処理は、ランプアニール装置により行う
ことを特徴とする半導体装置の製造方法。
前記第1の圧力は、前記表面からの前記酸化膜の離脱を促進する圧力であり、前記第2の圧力は、前記表面からのシリコン原子の離脱が抑制される圧力である
ことを特徴とする半導体装置の製造方法。
12,14,22…シリコン酸化膜
16…シリコン窒化膜
18…素子分離溝
20…素子分離絶縁膜
24…ウェル
26…ゲート絶縁膜
28…多結晶シリコン膜
30…ゲート電極
32,34,38…不純物層
36…サイドウォールスペーサ
40…ソース/ドレイン領域
42…金属シリサイド膜
44…層間絶縁膜
46…コンタクトプラグ
Claims (4)
- シリコン基板を、希ガスを含む第1の雰囲気中、第1の圧力において、第1の温度で熱処理し、前記シリコン基板の表面の酸化膜を除去し、前記酸化膜を除去した後、前記シリコン基板の前記表面のシリコン原子を再配列してステップ・テラス構造を形成し、前記シリコン基板を平坦化する第1のステップと、
前記第1のステップの後、水素を含む第2の雰囲気中、前記第1の圧力より高い第2の圧力において、前記第1の温度よりも低い第2の温度で熱処理を行い、前記シリコン基板の前記表面を水素終端する第2のステップとを含み、
前記第1のステップは、前記表面からの前記酸化膜の離脱を促進する前記第1の圧力で処理を行うステップと、前記表面からのシリコン原子の離脱が抑制される前記第1の圧力よりも高い前記第2の圧力で処理を行うステップとを含む
ことを特徴とする半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記第2のステップでは、前記シリコン基板の前記表面のC型欠陥を修復する
ことを特徴とする半導体装置の製造方法。 - 請求項1又は2記載の半導体装置の製造方法において、
前記第2の温度は、350℃〜500℃である
ことを特徴とする半導体装置の製造方法。 - 請求項1乃至3のいずれか1項に記載の半導体装置に製造方法において、
前記第1の温度は、950℃〜1200℃である
ことを特徴とする半導体装置の製造方法。
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JP6354657B2 (ja) * | 2015-05-12 | 2018-07-11 | 信越半導体株式会社 | 半導体基板の評価方法、半導体基板の製造方法 |
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US5326406A (en) * | 1991-07-31 | 1994-07-05 | Kawasaki Steel Corporation | Method of cleaning semiconductor substrate and apparatus for carrying out the same |
US5571339A (en) * | 1995-04-17 | 1996-11-05 | The Ohio State Univ. Research Found | Hydrogen passivated heteroepitaxial III-V photovoltaic devices grown on lattice-mismatched substrates, and process |
JPH10340909A (ja) * | 1997-06-06 | 1998-12-22 | Hitachi Ltd | 半導体集積回路装置の製造方法 |
JP3811582B2 (ja) * | 1999-03-18 | 2006-08-23 | 信越半導体株式会社 | シリコン基板の熱処理方法およびその基板を用いたエピタキシャルウェーハの製造方法 |
JP3900816B2 (ja) * | 2000-10-24 | 2007-04-04 | 株式会社Sumco | シリコンウェーハの製造方法 |
JP4262433B2 (ja) * | 2002-02-20 | 2009-05-13 | 株式会社日立製作所 | 半導体装置の製造方法 |
US6794303B2 (en) * | 2002-07-18 | 2004-09-21 | Mosel Vitelic, Inc. | Two stage etching of silicon nitride to form a nitride spacer |
JP4376505B2 (ja) * | 2002-10-30 | 2009-12-02 | 富士通マイクロエレクトロニクス株式会社 | 半導体装置の製造方法 |
US7084048B2 (en) * | 2004-05-07 | 2006-08-01 | Memc Electronic Materials, Inc. | Process for metallic contamination reduction in silicon wafers |
CN101641792B (zh) * | 2007-02-22 | 2012-03-21 | 富士通半导体股份有限公司 | 半导体器件及其制造方法 |
EP2073256A1 (en) * | 2007-12-20 | 2009-06-24 | Interuniversitair Microelektronica Centrum vzw ( IMEC) | Method for fabricating a semiconductor device and the semiconductor device made thereof |
JP2010272798A (ja) * | 2009-05-25 | 2010-12-02 | Fujitsu Semiconductor Ltd | 半導体装置の製造方法 |
US8569098B2 (en) * | 2010-06-18 | 2013-10-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing photoelectric conversion device |
JP5439305B2 (ja) * | 2010-07-14 | 2014-03-12 | 信越半導体株式会社 | シリコン基板の製造方法及びシリコン基板 |
US8980767B2 (en) * | 2012-01-13 | 2015-03-17 | Applied Materials, Inc. | Methods and apparatus for processing a substrate |
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