JP6012302B2 - Grinding equipment - Google Patents

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JP6012302B2
JP6012302B2 JP2012152260A JP2012152260A JP6012302B2 JP 6012302 B2 JP6012302 B2 JP 6012302B2 JP 2012152260 A JP2012152260 A JP 2012152260A JP 2012152260 A JP2012152260 A JP 2012152260A JP 6012302 B2 JP6012302 B2 JP 6012302B2
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grinding
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holding table
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column
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JP2014014877A (en
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利康 力石
利康 力石
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Disco Corp
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Description

本発明は、板状ワークを研削する研削装置に関する。   The present invention relates to a grinding apparatus for grinding a plate-like workpiece.

半導体ウェーハ等の板状ワークを研削する研削装置には、板状ワークを保持する保持テーブルと、下端部に研削ホイールが装着される研削スピンドルユニットを備えている。例えば特許文献１に記載された研削装置は、研削スピンドルユニットが研削ホルダに支持され、研削ホルダが、進退軸及びガイドを備えた研削送り手段によって上下動可能に片持ち式に支持されており、研削送り手段によって駆動されて研削ホルダが上下動するのにともない、研削スピンドルユニットも上下動する構成となっている。   BACKGROUND ART A grinding apparatus for grinding a plate workpiece such as a semiconductor wafer includes a holding table that holds the plate workpiece and a grinding spindle unit on which a grinding wheel is mounted at a lower end portion. For example, in the grinding apparatus described in Patent Document 1, a grinding spindle unit is supported by a grinding holder, and the grinding holder is supported in a cantilever manner so that it can be moved up and down by a grinding feed means having an advance / retreat shaft and a guide, As the grinding holder moves up and down driven by the grinding feed means, the grinding spindle unit also moves up and down.

特開２０１１−１６１５４６号公報JP 2011-161546 A

しかし、上記研削装置において、保持テーブルに保持された板状ワークを研削する際には、研削ホイールに備えた研削砥石と板状ワークとが接触する研削領域と、研削スピンドルユニットの上下動を案内するガイドと、研削ホルダを上下動させる進退軸と、研削スピンドルユニットの重心とが一直線上に配置されていないため、保持テーブルからの反力等によって研削砥石に負荷がかかり、研削スピンドルユニットの回転軸が傾斜し、研削砥石の異常磨耗や研削不良が発生するという問題がある。   However, when grinding a plate-like workpiece held on the holding table in the above grinding apparatus, the grinding area where the grinding wheel provided on the grinding wheel and the plate-like workpiece come into contact with each other and the vertical movement of the grinding spindle unit are guided. The grinding wheel is loaded by the reaction force from the holding table, and the grinding spindle unit rotates. There is a problem that the shaft is inclined and abnormal grinding of the grinding wheel or poor grinding occurs.

本発明は、このような問題にかんがみなされたもので、研削装置において、研削スピンドルユニットの回転軸が傾斜しないようにして、研削砥石の異常磨耗や研削不良が発生するのを防止することを課題とする。   The present invention has been considered in view of such problems, and it is an object of the present invention to prevent abnormal grinding of grinding wheels and poor grinding from occurring in a grinding apparatus by preventing the rotation shaft of the grinding spindle unit from tilting. And

本発明は、板状ワークを保持する回転可能な保持テーブルと、保持テーブルに保持された板状ワークを研削加工する研削手段と、研削手段を保持テーブルに対して接近または離反する研削送り方向に進退させる研削送り手段と、保持テーブルが保持した板状ワークを研削手段に装着された研削ホイールに環状に配置された研削砥石に対面する位置に位置づける位置づけ手段と、を少なくとも備え、保持テーブルが保持した板状ワークの上面を研削手段によってインフィード研削する研削装置において、研削手段は、研削ホイールが装着され回転可能な回転軸を有する研削スピンドルと、研削スピンドルを支持するスピンドルホルダーと、から構成され、研削送り手段は、研削送り方向に平行に配置されスピンドルホルダーの上下動を案内する２本のガイドと、２本のガイドによって方向付けられるスピンドルホルダーを研削送り方向に進退させる進退軸と、から構成されていて、保持テーブルによって保持された板状ワークの上面と研削砥石とが板状ワークに接触する研削領域は、回転軸の軸心を中心として研削ホイールの半径方向における研削砥石の幅を有する円弧形状であり、研削送り手段が所定の速度で研削手段を研削送りして研削領域において板状ワークの上面を研削砥石が押圧すると、その研削荷重によって、研削手段が研削位置に位置づけられた保持テーブルを押圧し、横断面視において、研削領域の図心と、２本のガイドのそれぞれの軸心と、進退軸の軸心とが、１本の基準直線上に配置されたことを特徴とする。 The present invention relates to a rotatable holding table for holding a plate-like workpiece, a grinding means for grinding the plate-like workpiece held on the holding table, and a grinding feed direction in which the grinding means approaches or separates from the holding table. Grinding and feeding means for advancing and retreating, and positioning means for positioning the plate-like workpiece held by the holding table at a position facing a grinding wheel arranged in an annular shape on a grinding wheel mounted on the grinding means, the holding table holding In the grinding apparatus for in-feed grinding the upper surface of the plate-like workpiece by the grinding means, the grinding means is composed of a grinding spindle having a rotating shaft mounted with a grinding wheel and a spindle holder that supports the grinding spindle. The grinding feed means is arranged parallel to the grinding feed direction and guides the vertical movement of the spindle holder. The guide is composed of a guide and an advance / retreat shaft for advancing and retreating the spindle holder directed by the two guides in the grinding feed direction. The upper surface of the plate-like workpiece held by the holding table and the grinding wheel are plate-like. The grinding area in contact with the workpiece has an arc shape having the width of the grinding wheel in the radial direction of the grinding wheel around the axis of the rotating shaft, and the grinding means feeds the grinding means at a predetermined speed to the grinding area. When the grinding wheel presses the upper surface of the plate-like workpiece in FIG. 2, the grinding means presses the holding table positioned at the grinding position by the grinding load, and in the cross-sectional view, the centroid of the grinding region and the two guides Each axial center and the axial center of the advancing / retreating axis are arranged on one reference straight line.

上記研削装置においては、回転軸の軸心を、基準直線上に配置することが望ましい。また、２本のガイドと、研削手段を研削送りする進退軸と、を備えた門型コラムを備え、門型コラムが、２本のガイドをそれぞれ支持する２本の柱部と、２本の柱部の上部を連結する連結部と、から構成される場合は、柱部の横断面の図心が基準直線上に配置されていることが望ましい。また、２本の柱部のそれぞれの柱部横断面の図心間を結ぶ直線の中点が、進退軸の軸心と一致していることが望ましい。   In the grinding apparatus, it is desirable to arrange the axis of the rotation axis on the reference straight line. In addition, a portal column having two guides and an advancing / retracting shaft for grinding and feeding the grinding means is provided, and the portal column has two column portions respectively supporting the two guides and two columns. In the case where the upper portion of the column portion is connected to the connecting portion, it is desirable that the centroid of the cross section of the column portion is arranged on the reference straight line. In addition, it is desirable that the midpoint of the straight line connecting the centroids of the respective cross sections of the two column portions coincides with the axis of the advance / retreat axis.

本発明では、研削荷重の中心と、スピンドルホルダーの上下動を案内する２本のガイドのそれぞれの軸心と、スピンドルホルダーを研削送り方向に進退させる進退軸の軸心とが１本の基準直線上に配置されているため、板状ワークの研削時の研削荷重によって保持テーブルが押圧されても、研削スピンドルの回転軸が傾斜しにくく、研削砥石の異常磨耗や研削不良が発生するのを防止することができる。   In the present invention, the center of the grinding load, the axis of each of the two guides that guide the vertical movement of the spindle holder, and the axis of the advance / retreat axis that advances and retracts the spindle holder in the grinding feed direction are one reference straight line. Because it is placed above, even if the holding table is pressed by the grinding load when grinding plate-like workpieces, the rotation axis of the grinding spindle is difficult to tilt, preventing abnormal wear of grinding wheels and poor grinding can do.

とくに、研削スピンドルの回転軸の軸心が基準直線上に配置されていると、研削手段による押圧によって保持テーブルから反力が生じたとしても、研削手段が傾くことを確実に防止することができる。   In particular, if the axis of the rotation axis of the grinding spindle is arranged on the reference straight line, the grinding means can be reliably prevented from tilting even if a reaction force is generated from the holding table due to the pressing by the grinding means. .

さらに、２本のガイドと研削手段を研削送りする進退軸とを備えた門型コラムが、２本のガイドをそれぞれ支持する２本の柱部と、２本の柱部の上部を連結する連結部とから構成され、柱部の横断面の図心が基準直線上に配置されていると、柱部が傾斜しないため、基準直線方向に研削手段が傾くのを防止することができる。   Further, a portal column having two guides and an advancing / retracting shaft for grinding and feeding the grinding means connects the two column portions respectively supporting the two guides and the upper portions of the two column portions. If the centroid of the cross section of the column part is arranged on the reference straight line, the column part does not incline, so that it is possible to prevent the grinding means from inclining in the reference straight line direction.

２本の柱部のそれぞれの柱部横断面の図心間を結ぶ直線の中点が、進退軸の軸心と一致している場合は、研削送り方向に傾斜が生じないため、板状ワークの面精度を維持することができる。   If the midpoint of the straight line connecting the centroids of the cross-sections of each of the two column parts coincides with the axis of the advance / retreat axis, there is no inclination in the grinding feed direction. The surface accuracy can be maintained.

研削砥石の一例を示す斜視図である。It is a perspective view which shows an example of a grinding wheel. 保持テーブルと研削手段と研削送り手段との位置関係の第１の例を模式的に示す横断面図である。It is a cross-sectional view which shows typically the 1st example of the positional relationship of a holding table, a grinding means, and a grinding feed means. 保持テーブルと研削手段と研削送り手段との位置関係の第２の例を模式的に示す横断面図である。It is a cross-sectional view schematically showing a second example of the positional relationship among the holding table, the grinding means, and the grinding feed means. 保持テーブルと研削手段と研削送り手段との位置関係の第３の例を模式的に示す横断面図である。It is a cross-sectional view schematically showing a third example of the positional relationship among the holding table, the grinding means, and the grinding feed means. 保持テーブルと研削手段と研削送り手段との位置関係の第４の例を模式的に示す横断面図である。It is a cross-sectional view schematically showing a fourth example of the positional relationship among the holding table, the grinding means, and the grinding feed means. 保持テーブルと研削手段と研削送り手段との位置関係の第５の例を模式的に示す横断面図である。It is a cross-sectional view schematically showing a fifth example of the positional relationship among the holding table, the grinding means, and the grinding feed means.

図１に示す研削装置１は、板状ワークを保持する保持テーブル２と、保持テーブル２に保持された板状ワークを研削加工する研削手段３と、研削手段３を保持テーブルに２対して接近または離反する研削送り方向（Ｚ軸方向）に進退させる研削送り手段４とを備えている。   A grinding apparatus 1 shown in FIG. 1 includes a holding table 2 that holds a plate-like workpiece, a grinding means 3 that grinds the plate-like workpiece held by the holding table 2, and the grinding means 3 that approaches the holding table two times. Alternatively, it is provided with a grinding feed means 4 for moving back and forth in the grinding feed direction (Z-axis direction) that moves away.

保持テーブル２は、回転可能であるとともに、位置づけ手段２０によって駆動されてジャバラ状のカバー部材２１の伸縮をともなって前後方向（Ｙ軸方向）に水平移動可能となっている。保持テーブル２の保持面２ａは、回転中心を頂点とする円錐面に形成されている。   The holding table 2 is rotatable and is horizontally moved in the front-rear direction (Y-axis direction) with the expansion and contraction of the bellows-shaped cover member 21 by being driven by the positioning means 20. The holding surface 2a of the holding table 2 is formed in a conical surface having the rotation center as a vertex.

研削手段３は、研削ホイール３２が装着され回転可能な回転軸３００を有する研削スピンドル３０と、研削スピンドル３０を支持するスピンドルホルダー３１とから構成されている。研削ホイール３２の下面には、回転軸３００の軸心３００ａを中心として半径方向に所定の幅を有する研削砥石３２０が円弧上に固着されている。   The grinding means 3 includes a grinding spindle 30 having a rotating shaft 300 on which a grinding wheel 32 is mounted and a rotatable shaft, and a spindle holder 31 that supports the grinding spindle 30. On the lower surface of the grinding wheel 32, a grinding wheel 320 having a predetermined width in the radial direction around the axis 300a of the rotating shaft 300 is fixed on an arc.

研削送り手段４は、スピンドルホルダー３１を上下動可能に支持し研削送り方向に平行に配置される２本のガイド４０と、２本のガイドによって方向付けられるスピンドルホルダー４０を研削送り方向に進退させる進退軸４１とを備えている。進退軸４１は、スピンドルホルダー３１の内部に備えたナット構造に螺合している。   The grinding feed means 4 supports the spindle holder 31 so as to move up and down, and advances and retracts the two guides 40 arranged in parallel to the grinding feed direction and the spindle holder 40 directed by the two guides in the grinding feed direction. An advance / retreat axis 41 is provided. The advance / retreat shaft 41 is screwed into a nut structure provided inside the spindle holder 31.

研削送り手段４を構成する２本のガイド４０及び進退軸４１は、保持手段２のＹ軸方向の移動経路をまたいで配設された門型コラム４２に配設されている。この門型コラム４２は、２本のガイド４０をそれぞれ支持する柱部４２０と、２本の柱部４２０の上部を連結する連結部４２１とから構成されている。   The two guides 40 and the advancing / retreating shaft 41 constituting the grinding feed means 4 are disposed in a portal column 42 disposed across the movement path of the holding means 2 in the Y-axis direction. The portal column 42 includes a column portion 420 that supports the two guides 40 and a connecting portion 421 that connects the upper portions of the two column portions 420.

板状ワークの研削時は、最初に、図１に示した位置づけ手段２０によって、図２に示すように、保持テーブル２が保持した板状ワークＷを、研削砥石３２０に対面する研削位置に位置づける。そして、保持テーブル２が研削位置に位置した状態で回転するとともに研削手段３の回転軸３００が回転し、研削送り手段４が所定の速度で研削手段３をＺ方向に研削送りすると、保持テーブル２の保持面２ａが円錐面であるため、板状ワークＷの上面と研削砥石３２０の下面とは、回転軸３００の軸心３００ａを中心として研削ホイール３２の半径方向における研削砥石３２０の幅を有し保持テーブル２の回転中心から板状ワークＷの外周縁にかけての研削領域１００において接触し、板状ワークＷの上面が押圧されてインフィード研削が行われる。また、そのときの研削荷重によって、研削位置に位置づけられた保持テーブル２も押圧される。   At the time of grinding the plate-like workpiece, first, the positioning means 20 shown in FIG. 1 positions the plate-like workpiece W held by the holding table 2 at a grinding position facing the grinding wheel 320 as shown in FIG. . When the holding table 2 rotates in a state where it is located at the grinding position, the rotating shaft 300 of the grinding means 3 rotates, and when the grinding feed means 4 grinds and feeds the grinding means 3 in the Z direction at a predetermined speed, the holding table 2 Since the holding surface 2a is a conical surface, the upper surface of the plate-like workpiece W and the lower surface of the grinding wheel 320 have the width of the grinding wheel 320 in the radial direction of the grinding wheel 32 about the axis 300a of the rotating shaft 300. In contact grinding in the grinding region 100 from the rotation center of the holding table 2 to the outer peripheral edge of the plate-like workpiece W, the upper surface of the plate-like workpiece W is pressed and in-feed grinding is performed. Further, the holding table 2 positioned at the grinding position is also pressed by the grinding load at that time.

このとき、図２に示すように、研削荷重の中心、すなわち研削領域１００の中心１００ａと、２本のガイド４０のそれぞれの軸心４０ａと、進退軸４１の軸心４１ａと、柱部４２０の図心４２０ａとが、１本の基準直線２００上に配置されている。したがって、研削荷重によって保持テーブル２が押圧され、研削砥石３２０に負荷がかかったとしても、研削送り手段４が傾斜しないため、研削送り手段４に支持された研削スピンドル３０の回転軸３００が傾斜しにくく、研削砥石３２０の異常磨耗や研削不良が発生するのを防止することができる。   At this time, as shown in FIG. 2, the center of the grinding load, that is, the center 100 a of the grinding region 100, the axis 40 a of each of the two guides 40, the axis 41 a of the advance / retreat axis 41, and the column part 420. The centroid 420a is arranged on one reference straight line 200. Therefore, even if the holding table 2 is pressed by the grinding load and a load is applied to the grinding wheel 320, the grinding feed means 4 does not incline, so the rotary shaft 300 of the grinding spindle 30 supported by the grinding feed means 4 inclines. It is difficult to prevent abnormal wear of the grinding wheel 320 and poor grinding.

また、２本の柱部４２０のそれぞれの柱部横断面の図心４２０ａ間を結ぶ直線の中点が、進退軸４１の軸心４１ａと一致しているため、研削送り手段４が傾斜するのをより確実に防止することができ、板状ワークの面精度を維持することができる。   In addition, since the midpoint of the straight line connecting the centroids 420a of the cross-sections of the two column portions 420 coincides with the axis 41a of the advance / retreat shaft 41, the grinding feed means 4 is inclined. Can be more reliably prevented, and the surface accuracy of the plate-like workpiece can be maintained.

図３に示すように、研削領域１０１の中心１０１ａと、２本のガイド４０のそれぞれの軸心４０ａと、進退軸４１の軸心４１ａと、２本の柱部４２０の図心４２０ａとが、１本の基準直線２０１上に配置されていることに加え、回転軸３００の軸心３００ａも基準直線２０１上に位置している研削装置１ａでは、研削送り手段４が傾斜するのを防止するだけでなく、研削スピンドル３０の回転軸３００自体が傾斜するのをより確実に防ぐことができ、研削砥石３２０の異常磨耗や研削不良が発生するのを防止することができる。   As shown in FIG. 3, the center 101a of the grinding region 101, the axis 40a of each of the two guides 40, the axis 41a of the advance / retreat axis 41, and the centroid 420a of the two column parts 420 are: In addition to being arranged on one reference straight line 201, the grinding apparatus 1a in which the axis 300a of the rotary shaft 300 is also located on the reference straight line 201 only prevents the grinding feed means 4 from being inclined. In addition, the rotation shaft 300 of the grinding spindle 30 can be more reliably prevented from tilting, and abnormal wear and grinding failure of the grinding wheel 320 can be prevented.

また、図４に示す研削装置１ｂのように、２本の柱部４２０の図心４２０ａと研削領域１０２の中心１０２ａとの間に進退軸４１の軸心４１ａが位置していてもよい。この場合も、研削領域１０２の中心１０２ａと、２本のガイド４０のそれぞれの軸心４０ａと、進退軸４１の軸心４１ａと、２本の柱部４２０の図心４２０ａとが、１本の基準直線２０２上に配置されているため、研削スピンドル３０の回転軸３００が傾斜しにくく、研削砥石３２０の異常磨耗や研削不良が発生するのを防止することができる。   Further, as in the grinding device 1b shown in FIG. 4, the axis 41a of the advance / retreat shaft 41 may be positioned between the centroid 420a of the two column portions 420 and the center 102a of the grinding region 102. Also in this case, the center 102a of the grinding region 102, the axis 40a of each of the two guides 40, the axis 41a of the advance / retreat axis 41, and the centroid 420a of the two pillars 420 are one. Since it is arranged on the reference straight line 202, the rotating shaft 300 of the grinding spindle 30 is difficult to be inclined, and it is possible to prevent abnormal wear or grinding failure of the grinding wheel 320.

図１−図４に示した柱部４２０は、横断面がＬ字型に形成されているが、柱部の横断面形状は、Ｌ字型以外であってもよい。例えば、図５に示すように、２つの柱部５２０の横断面が三角形である場合は、斜辺５２０ｂに沿って２本のガイド４００が配設され、研削領域１０３の中心１０３ａと、２本のガイド４００のそれぞれの軸心４００ａと、進退軸４１の軸心４１ａと、柱部５２０の図心５２０ａとが、１本の基準直線２０３上に配置されているため、研削スピンドル３０の回転軸３００が傾斜しにくく、研削砥石３２０の異常磨耗や研削不良が発生するのを防止することができる。   1-4 has a L-shaped cross section, but the cross-sectional shape of the column may be other than L-shaped. For example, as shown in FIG. 5, when the cross section of the two pillar portions 520 is a triangle, two guides 400 are disposed along the hypotenuse 520b, and the center 103a of the grinding region 103 and the two guides Since each axis 400a of the guide 400, the axis 41a of the advance / retreat axis 41, and the centroid 520a of the column portion 520 are arranged on one reference straight line 203, the rotation axis 300 of the grinding spindle 30 is obtained. Is difficult to tilt, and abnormal grinding of the grinding wheel 320 and poor grinding can be prevented.

また、図６に示すように、２つの柱部６２０の横断面が略Ｌ字の内側にテーパ面６２０ｂを設けた形状であり、テーパ面６２０ｂに沿って２本のガイド４０１が配設され、研削領域１０４の中心１０４ａと、２本のガイド４０１のそれぞれの軸心４０１ａと、進退軸４１の軸心４１ａと、柱部６２０の図心６２０ａとが、１本の基準直線２０４上に配置されているため、研削スピンドル３０の回転軸３００が傾斜しにくく、研削砥石３２０の異常磨耗や研削不良が発生するのを防止することができる。   Further, as shown in FIG. 6, the cross section of the two column portions 620 has a shape in which a tapered surface 620 b is provided on the inner side of a substantially L shape, and two guides 401 are disposed along the tapered surface 620 b, The center 104 a of the grinding region 104, the respective axes 401 a of the two guides 401, the axis 41 a of the advance / retreat axis 41, and the centroid 620 a of the column part 620 are arranged on one reference straight line 204. Therefore, the rotating shaft 300 of the grinding spindle 30 is difficult to tilt, and abnormal grinding of the grinding wheel 320 and poor grinding can be prevented.

なお、研削手段及び研削送り手段を複数備えた研削装置においても同様であり、各研削手段及び研削送り手段について、少なくとも、研削荷重の中心と、２本のガイドのそれぞれの軸心と、進退軸の軸心とが1本の基準直線上に配置されていると、研削スピンドルの回転軸が傾斜しにくく、研削砥石の異常磨耗や研削不良が発生するのを防止することができる。なお、研削手段及び研削送り手段を複数備えた研削装置においては、複数の保持テーブルがターンテーブルによって支持され、ターンテーブルの回転によって各保持テーブルが研削砥石に対面する位置に移動する構成となっており、ターンテーブルが位置づけ手段として機能する。   The same applies to a grinding apparatus provided with a plurality of grinding means and grinding feed means. For each grinding means and grinding feed means, at least the center of the grinding load, the axis of each of the two guides, and the forward / backward axis If the shaft center is arranged on one reference straight line, the rotation axis of the grinding spindle is difficult to tilt, and abnormal grinding of the grinding wheel and poor grinding can be prevented. In the grinding apparatus provided with a plurality of grinding means and grinding feed means, a plurality of holding tables are supported by the turntable, and each holding table moves to a position facing the grinding wheel by rotation of the turntable. The turntable functions as positioning means.

１：研削装置
２：保持テーブル
２０：位置づけ手段 ２１：カバー部材 ２ａ：保持面
３：研削手段
３０：研削スピンドル ３００：回転軸 ３００ａ：軸心
３１：スピンドルホルダー ３２研削ホイール ３２０：研削砥石
４：研削送り手段
４０：ガイド ４０ａ：軸心 ４１：進退軸 ４１ａ：軸心
４２：門型コラム ４２０：柱部 ４２０ａ：図心 ４２１：連結部
４００、４０１：ガイド ４００ａ、４０１ａ：軸心
５２０、６２０：柱部 ５２０ａ、６２０ａ：図心
１００：研削領域 １００ａ：研削領域の中心
１０１：研削領域 １０１ａ：研削領域の中心
１０２：研削領域 １０２ａ：研削領域の中心
２００、２０１，２０２、２０３、２０４：基準直線 1: Grinding device 2: Holding table 20: Positioning means 21: Cover member 2a: Holding surface 3: Grinding means 30: Grinding spindle 300: Rotating shaft 300a: Center axis 31: Spindle holder 32 Grinding wheel 320: Grinding wheel 4: Grinding Feed means 40: guide 40a: shaft center 41: advance / retreat shaft 41a: shaft center 42: portal column 420: pillar portion 420a: centroid 421: connecting portion 400, 401: guide 400a, 401a: shaft center 520, 620: pillar Part 520a, 620a: Centroid 100: Grinding area 100a: Grinding area center 101: Grinding area 101a: Grinding area center 102: Grinding area 102a: Grinding area center 200, 201, 202, 203, 204: Reference straight line

Claims (4)

板状ワークを保持する回転可能な保持テーブルと、該保持テーブルに保持された板状ワークを研削加工する研削手段と、該研削手段を該保持テーブルに対して接近または離反する研削送り方向に進退させる研削送り手段と、該保持テーブルが保持した板状ワークを該研削手段に装着された研削ホイールに環状に配置された研削砥石に対面する位置に位置づける位置づけ手段と、を少なくとも備え、該保持テーブルが保持した板状ワークの上面を該研削手段によってインフィード研削する研削装置において、
該研削手段は、研削ホイールが装着され回転可能な回転軸を有する研削スピンドルと、該研削スピンドルを支持するスピンドルホルダーと、から構成され、
該研削送り手段は、該研削送り方向に平行に配置され該スピンドルホルダーの上下動を案内する２本のガイドと、該２本のガイドによって方向付けられる該スピンドルホルダーを該研削送り方向に進退させる進退軸と、から構成されていて、
該保持テーブルによって保持された板状ワークの上面に該研削砥石が接触する研削領域は、該回転軸の軸心を中心として該研削ホイールの半径方向における該研削砥石の幅を有する円弧形状であり、
該研削送り手段が所定の速度で該研削手段を研削送りして該研削領域において該板状ワークの上面を該研削砥石が押圧すると、その研削荷重によって、該研削手段が該研削位置に位置づけられた該保持テーブルを押圧し、
横断面視において、該研削領域の図心と、該２本のガイドのそれぞれの軸心と、該進退軸の軸心とが、１本の基準直線上に配置された研削装置。 A rotatable holding table for holding a plate-like workpiece, a grinding means for grinding the plate-like workpiece held on the holding table, and a forward and backward movement in a grinding feed direction in which the grinding means approaches or separates from the holding table. Grinding holding means for positioning, and positioning means for positioning a plate-like workpiece held by the holding table at a position facing a grinding wheel arranged in an annular shape on a grinding wheel mounted on the grinding means, and the holding table In a grinding apparatus for infeed grinding the upper surface of the plate-like workpiece held by the grinding means,
The grinding means is composed of a grinding spindle having a rotating shaft on which a grinding wheel is mounted, and a spindle holder that supports the grinding spindle,
The grinding feed means is arranged in parallel to the grinding feed direction, guides the vertical movement of the spindle holder, and advances and retracts the spindle holder directed by the two guides in the grinding feed direction. It consists of advancing and retracting axes,
The grinding area where the grinding wheel comes into contact with the upper surface of the plate-like workpiece held by the holding table has an arc shape having the width of the grinding wheel in the radial direction of the grinding wheel around the axis of the rotating shaft. ,
When the grinding means feeds the grinding means at a predetermined speed and the grinding wheel presses the upper surface of the plate-like workpiece in the grinding region, the grinding means is positioned at the grinding position by the grinding load. Press the holding table,
In cross-section view,該研the centroid of the cutting area, and the respective axis of the two guide, the axis of該進Shisajiku is, one grinding device arranged to the reference straight line of. 前記回転軸の軸心を、前記基準直線上に配置した請求項１記載の研削装置。   The grinding apparatus according to claim 1, wherein an axis of the rotation shaft is arranged on the reference straight line. 前記２本のガイドと、前記研削手段を研削送りする進退軸と、を備えた門型コラムを備え、
該門型コラムは、該２本のガイドをそれぞれ支持する２本の柱部と、該２本の柱部を連結する連結部と、から構成され、
該柱部の横断面の図心が前記基準直線上に配置された請求項１または２に記載の研削装置。 A portal column having the two guides and an advancing / retracting shaft for grinding and feeding the grinding means;
The portal column is composed of two column portions that respectively support the two guides, and a connecting portion that connects the two column portions,
The grinding apparatus according to claim 1 or 2, wherein a centroid of a cross section of the column portion is arranged on the reference straight line. ２本の該柱部のそれぞれの該柱部横断面の図心間を結ぶ直線の中点が、該進退軸の軸心と一致している請求項３に記載の研削装置。   The grinding apparatus according to claim 3, wherein a midpoint of a straight line connecting the centroids of the column section cross section of each of the two column sections coincides with the axis of the advance / retreat axis.
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