JP5999368B2 - ガス改質装置、排気浄化システム、空気清浄機 - Google Patents
ガス改質装置、排気浄化システム、空気清浄機 Download PDFInfo
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- JP5999368B2 JP5999368B2 JP2013180991A JP2013180991A JP5999368B2 JP 5999368 B2 JP5999368 B2 JP 5999368B2 JP 2013180991 A JP2013180991 A JP 2013180991A JP 2013180991 A JP2013180991 A JP 2013180991A JP 5999368 B2 JP5999368 B2 JP 5999368B2
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- 238000000746 purification Methods 0.000 title claims description 22
- 238000002407 reforming Methods 0.000 claims description 28
- 239000003054 catalyst Substances 0.000 claims description 25
- 239000013618 particulate matter Substances 0.000 claims description 10
- 239000003638 chemical reducing agent Substances 0.000 claims description 9
- 239000003989 dielectric material Substances 0.000 claims description 9
- 239000004020 conductor Substances 0.000 claims description 2
- 239000007800 oxidant agent Substances 0.000 claims description 2
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 75
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 37
- 230000005684 electric field Effects 0.000 description 30
- 238000006243 chemical reaction Methods 0.000 description 13
- 229930195733 hydrocarbon Natural products 0.000 description 13
- 150000002430 hydrocarbons Chemical class 0.000 description 13
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 10
- 238000004088 simulation Methods 0.000 description 10
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 description 8
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 8
- 150000003254 radicals Chemical class 0.000 description 8
- 238000011144 upstream manufacturing Methods 0.000 description 8
- 239000004215 Carbon black (E152) Substances 0.000 description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 5
- 239000004202 carbamide Substances 0.000 description 5
- 238000002485 combustion reaction Methods 0.000 description 5
- 229910021529 ammonia Inorganic materials 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 238000006722 reduction reaction Methods 0.000 description 4
- 238000012935 Averaging Methods 0.000 description 3
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- -1 oxygen radicals Chemical class 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000006057 reforming reaction Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000004887 air purification Methods 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000010531 catalytic reduction reaction Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 235000019256 formaldehyde Nutrition 0.000 description 1
- 125000002485 formyl group Chemical group [H]C(*)=O 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 239000011232 storage material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- WTHDKMILWLGDKL-UHFFFAOYSA-N urea;hydrate Chemical compound O.NC(N)=O WTHDKMILWLGDKL-UHFFFAOYSA-N 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
- F01N3/02—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust
- F01N3/021—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust by means of filters
- F01N3/023—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust by means of filters using means for regenerating the filters, e.g. by burning trapped particles
- F01N3/027—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust by means of filters using means for regenerating the filters, e.g. by burning trapped particles using electric or magnetic heating means
- F01N3/0275—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust by means of filters using means for regenerating the filters, e.g. by burning trapped particles using electric or magnetic heating means using electric discharge means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
- F01N3/08—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous
- F01N3/10—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust
- F01N3/18—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust characterised by methods of operation; Control
- F01N3/20—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust characterised by methods of operation; Control specially adapted for catalytic conversion ; Methods of operation or control of catalytic converters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N2240/00—Combination or association of two or more different exhaust treating devices, or of at least one such device with an auxiliary device, not covered by indexing codes F01N2230/00 or F01N2250/00, one of the devices being
- F01N2240/28—Combination or association of two or more different exhaust treating devices, or of at least one such device with an auxiliary device, not covered by indexing codes F01N2230/00 or F01N2250/00, one of the devices being a plasma reactor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N2410/00—By-passing, at least partially, exhaust from inlet to outlet of apparatus, to atmosphere or to other device
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N2610/00—Adding substances to exhaust gases
- F01N2610/02—Adding substances to exhaust gases the substance being ammonia or urea
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
- F01N3/08—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous
- F01N3/0807—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by using absorbents or adsorbents
- F01N3/0828—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by using absorbents or adsorbents characterised by the absorbed or adsorbed substances
- F01N3/0842—Nitrogen oxides
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
- F01N3/08—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous
- F01N3/10—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust
- F01N3/18—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust characterised by methods of operation; Control
- F01N3/20—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust characterised by methods of operation; Control specially adapted for catalytic conversion ; Methods of operation or control of catalytic converters
- F01N3/2066—Selective catalytic reduction [SCR]
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Exhaust Gas After Treatment (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Plasma Technology (AREA)
- Processes For Solid Components From Exhaust (AREA)
- Treating Waste Gases (AREA)
- Exhaust Gas Treatment By Means Of Catalyst (AREA)
Description
O2→O+O (E1)
H2O→H+OH (E2)
O2+O→O3 (E3)
NO+O→NO2 (E4)
HC+O→R−CHO (E5)
2NO2+C→2NO+CO2 (E6)
R−CHO+NO2+H2O→N2+H2O+NH3 (E7)
HC+NO2→N2+CO2+H2O (E8)
3、3c 誘電体板部(誘電体基部)
3a 誘電体棒部(誘電体基部)
3b 誘電体筒部(誘電体基部)
4、4a、4b、4c、4d、4e 線状電極(電極)
4f 板状電極
5 誘電体膜
6 ガス流通路
Claims (12)
- ガスが流入する流入口(20)と、
その流入口から流入した前記ガスが流出する流出口(21)と、
前記流入口と流出口との間の空間に、間隔を置いて配置された少なくとも1対の電極(4)を備え、その1対のうち少なくとも一方の電極が誘電体に内包された線形状の電極である電極部(3、4、5)と、
対となる前記電極の間に形成され、前記ガスが流通する空間であるガス流通路(6)と、
を備え、
前記線形状の電極を有する電極部は、
誘電体により形成された誘電体基部(3)と、
その誘電体基部の表面に導体によって前記線形状で形成された線状電極(4)と、
前記線状電極を被膜するように形成された誘電体による膜である誘電体膜(5)と、
を備え、
前記線形状の電極の幅は200μm以下であることを特徴とするガス改質装置。 - 前記線形状の電極を有する電極部は、前記流入口から流出口への前記ガスの流通方向に交差する方向に配置された複数対の電極を有する請求項1に記載のガス改質装置。
- 前記線形状の電極を内包する誘電体における、前記線形状の電極と前記ガス流通路との間の部分の距離は50μm以下である請求項1又は2に記載のガス改質装置。
- 前記線形状の電極は、前記流入口から流出口へのガスの流通方向に交差する方向に延びる複数本の線形状の電極を含み、
その複数本の線形状の電極の間の間隔は2.5mm以上10mm以下である請求項1乃至3のいずれか1項に記載のガス改質装置。 - 前記線形状の電極は、その線形状に含まれる1本の線から複数の線が分岐し、分岐した先でさらに分岐する多重分岐形状を有する請求項1乃至4のいずれか1項に記載のガス改質装置。
- 前記電極部は、対となる電極の両方が線形状の電極であり、前記ガス流通路を挟んで前記線形状の電極が鏡像関係で対向するように配置された請求項1乃至5のいずれか1項に記載のガス改質装置。
- 前記電極部は、対となる電極の一方が線形状、他方が面状の電極であり、前記ガス流通路を挟んで前記線形状の電極と面状の電極とが対向するように配置された請求項1乃至5のいずれか1項に記載のガス改質装置。
- 前記電極を内包する誘電体の比誘電率は50以上である請求項1乃至7のいずれか1項に記載のガス改質装置。
- 前記電極を内包する誘電体における前記ガス流通路に面した表面に触媒(9)が担持された請求項1乃至8のいずれか1項に記載のガス改質装置。
- 請求項1乃至9のいずれか1項に記載のガス改質装置と、
そのガス改質装置の下流に備えられて、ガス改質装置によって改質された還元剤を含むガスが流入してNOxが還元されるNOx触媒(100、101)と、
を備えたことを特徴とする排気浄化システム。 - 請求項1乃至9のいずれか1項に記載のガス改質装置と、
そのガス改質装置の下流に備えられて、ガス改質装置によって改質された酸化剤を含むガスが流入して、堆積した粒子状物質が酸化されるフィルタ(102)と、
を備えたことを特徴とする排気浄化システム。 - 請求項1乃至9のいずれか1項に記載のガス改質装置と、
そのガス改質装置に空気を供給する供給部(205)と、
を備えたことを特徴とする空気清浄機。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013180991A JP5999368B2 (ja) | 2013-09-02 | 2013-09-02 | ガス改質装置、排気浄化システム、空気清浄機 |
DE102014110789.6A DE102014110789A1 (de) | 2013-09-02 | 2014-07-30 | Gasreformierungsvorrichtung, Abgasreinigungssystem und Luftreiniger |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013180991A JP5999368B2 (ja) | 2013-09-02 | 2013-09-02 | ガス改質装置、排気浄化システム、空気清浄機 |
Publications (2)
Publication Number | Publication Date |
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JP2015048773A JP2015048773A (ja) | 2015-03-16 |
JP5999368B2 true JP5999368B2 (ja) | 2016-09-28 |
Family
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JP2013180991A Expired - Fee Related JP5999368B2 (ja) | 2013-09-02 | 2013-09-02 | ガス改質装置、排気浄化システム、空気清浄機 |
Country Status (2)
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JP (1) | JP5999368B2 (ja) |
DE (1) | DE102014110789A1 (ja) |
Families Citing this family (11)
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JP6537274B2 (ja) * | 2015-01-08 | 2019-07-03 | シャープ株式会社 | プラズマ生成素子、プラズマ生成装置および電気機器 |
JP2017107717A (ja) * | 2015-12-09 | 2017-06-15 | 日本特殊陶業株式会社 | プラズマ反応器及びプラズマ電極板 |
CN105927326B (zh) * | 2016-06-17 | 2020-06-23 | 浙江大学 | 船舶柴油机dpf自动再生装置及再生方法 |
JP6645385B2 (ja) * | 2016-08-30 | 2020-02-14 | 株式会社デンソー | ガス改質装置 |
JP6886349B2 (ja) * | 2017-05-31 | 2021-06-16 | 日本特殊陶業株式会社 | プラズマリアクタ |
DE112018003886A5 (de) * | 2017-07-31 | 2020-09-03 | Cingu Gmbh | Plasmaapplikator zur behandlung eines gases sowie verfahren zur schadstoffreduktion bei verbrennungsprozessen |
JP2019057363A (ja) | 2017-09-19 | 2019-04-11 | 国立大学法人名古屋大学 | 放電リアクタ、及びその製造方法 |
JP2019055884A (ja) | 2017-09-19 | 2019-04-11 | 株式会社デンソー | オゾナイザ |
US20240066161A1 (en) * | 2021-08-09 | 2024-02-29 | TellaPure, LLC | Methods and apparatus for generating atmospheric pressure, low temperature plasma |
US20240196507A1 (en) * | 2022-06-26 | 2024-06-13 | TellaPure, LLC | Methods and apparatus for generating atmospheric pressure, low temperature plasma usable for affecting fluid flow |
JP7458107B1 (ja) | 2023-03-14 | 2024-03-29 | カーボントレードネオ株式会社 | プラズマ処理装置 |
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DE10130163B4 (de) * | 2000-11-21 | 2012-01-12 | Siemens Ag | Anordnung zur Verminderung kohlenstoffhaltiger Partikelemissionen von Dieselmotoren |
JP2004261717A (ja) * | 2003-02-28 | 2004-09-24 | Toshiba Corp | ガス浄化装置およびガス浄化装置に使用する放電反応体 |
JP4476685B2 (ja) * | 2004-05-07 | 2010-06-09 | 株式会社東芝 | ガス浄化装置 |
JP2007216193A (ja) * | 2006-02-20 | 2007-08-30 | Research Institute Of Innovative Technology For The Earth | 加熱機能付プラズマ放電反応器 |
JP4863743B2 (ja) * | 2006-03-24 | 2012-01-25 | 日本碍子株式会社 | プラズマ発生電極、プラズマ反応器及び排ガス浄化装置 |
US8349266B2 (en) * | 2007-03-30 | 2013-01-08 | Kyocera Corporation | Plasma generator and reaction apparatus |
JP2010033914A (ja) * | 2008-07-29 | 2010-02-12 | Kyocera Corp | 誘電性構造体、並びに誘電性構造体を用いた放電装置および流体改質装置 |
JP2010138842A (ja) * | 2008-12-12 | 2010-06-24 | Toshiba Corp | ガス浄化装置 |
JP2010214249A (ja) * | 2009-03-13 | 2010-09-30 | Daihatsu Motor Co Ltd | 排気ガス浄化装置 |
US20120325146A1 (en) * | 2010-03-15 | 2012-12-27 | Hitachi, Ltd. | Plasma Processing Apparatus |
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2013
- 2013-09-02 JP JP2013180991A patent/JP5999368B2/ja not_active Expired - Fee Related
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2014
- 2014-07-30 DE DE102014110789.6A patent/DE102014110789A1/de not_active Withdrawn
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DE102014110789A1 (de) | 2015-03-05 |
JP2015048773A (ja) | 2015-03-16 |
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