JP5979664B2 - シリコン結晶鋳造炉 - Google Patents
シリコン結晶鋳造炉 Download PDFInfo
- Publication number
- JP5979664B2 JP5979664B2 JP2012167854A JP2012167854A JP5979664B2 JP 5979664 B2 JP5979664 B2 JP 5979664B2 JP 2012167854 A JP2012167854 A JP 2012167854A JP 2012167854 A JP2012167854 A JP 2012167854A JP 5979664 B2 JP5979664 B2 JP 5979664B2
- Authority
- JP
- Japan
- Prior art keywords
- carbon
- gas
- silicon
- casting furnace
- crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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- Silicon Compounds (AREA)
- Photovoltaic Devices (AREA)
Description
ここにおいて、前記不活性ガスが接触する前記箇所は前記不活性ガスを前記ルツボに導入する管及び前記ルツボを覆うキャップを含んでよい。
また、前記不活性ガスはアルゴンであってよい。
Claims (2)
- シリコン融液からシリコン結晶を析出させるルツボと、前記ルツボに不活性ガスを導入するガス導入装置とを設け、
前記ガス導入装置の内の前記不活性ガスが接触する箇所の内面の少なくとも一部はタングステンである、
シリコン結晶鋳造炉において
前記不活性ガスが接触する前記箇所は前記不活性ガスを前記ルツボに導入する管及び前記ルツボを覆うキャップを含む、シリコン結晶鋳造炉。 - 前記不活性ガスはアルゴンである、請求項1に記載のシリコン結晶鋳造炉。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012167854A JP5979664B2 (ja) | 2012-07-30 | 2012-07-30 | シリコン結晶鋳造炉 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012167854A JP5979664B2 (ja) | 2012-07-30 | 2012-07-30 | シリコン結晶鋳造炉 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014024729A JP2014024729A (ja) | 2014-02-06 |
JP5979664B2 true JP5979664B2 (ja) | 2016-08-24 |
Family
ID=50198731
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012167854A Expired - Fee Related JP5979664B2 (ja) | 2012-07-30 | 2012-07-30 | シリコン結晶鋳造炉 |
Country Status (1)
Country | Link |
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JP (1) | JP5979664B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113522393B (zh) * | 2021-07-01 | 2022-07-15 | 北京科技大学 | 一种嵌套式平衡坩埚及控制方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4272488A (en) * | 1977-05-25 | 1981-06-09 | John S. Pennish | Apparatus for producing and casting liquid silicon |
JPH01261213A (ja) * | 1988-04-12 | 1989-10-18 | Idemitsu Petrochem Co Ltd | 4a,Va,6a族金属の炭化方法 |
JPH1149510A (ja) * | 1997-07-31 | 1999-02-23 | Daido Steel Co Ltd | 金属Siの精製方法及びその装置 |
AT3064U1 (de) * | 1998-12-28 | 1999-09-27 | Plansee Tizit Gmbh | Gaskarburierungsverfahren zur herstellung von reinem wc-pulver |
JP3885452B2 (ja) * | 1999-04-30 | 2007-02-21 | 三菱マテリアル株式会社 | 結晶シリコンの製造方法 |
JP2012056796A (ja) * | 2010-09-09 | 2012-03-22 | Sumco Corp | 多結晶シリコンの製造装置および製造方法 |
-
2012
- 2012-07-30 JP JP2012167854A patent/JP5979664B2/ja not_active Expired - Fee Related
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Publication number | Publication date |
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JP2014024729A (ja) | 2014-02-06 |
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