JP5914865B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP5914865B2 JP5914865B2 JP2014209717A JP2014209717A JP5914865B2 JP 5914865 B2 JP5914865 B2 JP 5914865B2 JP 2014209717 A JP2014209717 A JP 2014209717A JP 2014209717 A JP2014209717 A JP 2014209717A JP 5914865 B2 JP5914865 B2 JP 5914865B2
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- Prior art keywords
- insulating film
- field insulating
- region
- semiconductor device
- gate
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Classifications
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Description
一実施形態に係る半導体装置は、例えば、炭化珪素(SiC)半導体から構成されるパワー半導体デバイスであり、高耐圧、大電流、高速動作用に好適に使用される。以下、本実施形態に係る半導体装置の具体的な構成例を次に示す。
図6は図1で示した実施形態に対する変形例に係る半導体装置11を示す。図6において、図1と実質的に同様の構成要素については、図1と同一の符号を付しており、その詳細な説明を省略する場合がある。セル領域Aについては図1と同様であるため、説明を省略する。
次に、図7から図11を参照して、本実施形態の半導体装置10の製造方法を説明する。図7から図11は、本実施形態の半導体装置の製造方法の各工程を示している。
次に、図12および図13を参照して、変形例に係る半導体装置11の製造方法を説明する。図12および図13は変形例に係る半導体装置11の製造方法の各工程を示している。
101 半導体基板(基板)
101a 基板の主面
102 ドリフト領域(第1不純物領域)
104 第1領域(第2不純物領域)
107 ゲート絶縁膜
108 ゲート電極
120 半導体層
201 フィールド絶縁膜
201a フィールド絶縁膜の上面
201b フィールド絶縁膜の端部
202 ゲート配線
210 第1の絶縁膜
211 第2の絶縁膜
301 シリコン材料
302 マスク材料
A セル領域
B 配線領域
Claims (8)
- 基板上に、セル領域および配線領域が設けられた半導体装置であって、
前記基板の主面側に設けられた半導体層と、
前記セル領域において、前記半導体層上に配置されたゲート絶縁膜と、
前記ゲート絶縁膜上に配置されたゲート電極と、
前記配線領域において、前記半導体層上に配置されたフィールド絶縁膜と、
前記フィールド絶縁膜上に配置され、前記ゲート電極と電気的に接続されたゲート配線とを備え、
前記フィールド絶縁膜は、前記ゲート絶縁膜よりも厚く、
前記フィールド絶縁膜の端部は、前記基板の主面に垂直な断面において、凸状の形状を有しており、
前記フィールド絶縁膜の上面は、前記ゲート配線のうち前記フィールド絶縁膜が下に配置されていない部分の上面よりも、粗く、
前記フィールド絶縁膜は、
前記半導体層上に配置され、ポリシリコンにより構成された第1の絶縁膜と、
前記第1の絶縁膜上に配置され、酸化シリコンにより構成された第2の絶縁膜とを備える
半導体装置。 - 請求項1記載の半導体装置において、
前記フィールド絶縁膜の上面は、中心線平均粗さが、0.025μmから0.1μmの範囲である
半導体装置。 - 請求項1または2記載の半導体装置において、
前記基板の主面に垂直な断面において、
前記フィールド絶縁膜の端部が前記半導体層と接する部分の接線が前記半導体層の上面となす角度が、80度以上で90度未満であり、
前記フィールド絶縁膜の端部が前記フィールド絶縁膜の上面の中心線と交わる部分の接線が当該中心線となす角度が、5度以上で30度以下である
半導体装置。 - 請求項1から3のうちいずれか1項記載の半導体装置において、
前記ゲート電極および前記ゲート配線は、ポリシリコンにより構成される
半導体装置。 - 請求項1から4のうちいずれか1項記載の半導体装置において、
前記半導体層は、炭化珪素により構成される
半導体装置。 - 請求項1から5のうちいずれか1項記載の半導体装置において、
前記フィールド絶縁膜の膜厚は、前記ゲート絶縁膜の膜厚の3倍から6倍の範囲である半導体装置。 - 請求項1から5のうちいずれか1項記載の半導体装置において、
前記フィールド絶縁膜のうち前記第2の絶縁膜の膜厚は、前記ゲート絶縁膜の膜厚の4倍から6倍の範囲である
半導体装置。 - 請求項1から7のうちいずれか1項に記載の半導体装置において、
前記半導体層は、
前記配線領域において、第1導電型の第1不純物領域と、前記第1不純物領域上に配置された、第2導電型の第2不純物領域とを有し、
前記ゲート配線のうち前記フィールド絶縁膜が下に配置されていない部分は、前記第2不純物領域との間に、前記ゲート絶縁膜が配置されており、
前記基板の主面に垂直な断面において、前記フィールド絶縁膜の下における前記第2不純物領域の厚さをD1、前記ゲート絶縁膜の下における前記第2不純物領域の厚さをD2とすると、D1>D2の関係を有する
半導体装置。
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