JP5891958B2 - 液体成分センサ - Google Patents
液体成分センサ Download PDFInfo
- Publication number
- JP5891958B2 JP5891958B2 JP2012126257A JP2012126257A JP5891958B2 JP 5891958 B2 JP5891958 B2 JP 5891958B2 JP 2012126257 A JP2012126257 A JP 2012126257A JP 2012126257 A JP2012126257 A JP 2012126257A JP 5891958 B2 JP5891958 B2 JP 5891958B2
- Authority
- JP
- Japan
- Prior art keywords
- moth
- eye structure
- detection
- substrate
- detection cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000007788 liquid Substances 0.000 title claims description 53
- 238000001514 detection method Methods 0.000 claims description 108
- 239000000758 substrate Substances 0.000 claims description 67
- 230000002093 peripheral effect Effects 0.000 claims description 49
- 229910052710 silicon Inorganic materials 0.000 claims description 15
- 239000010703 silicon Substances 0.000 claims description 15
- 229910052732 germanium Inorganic materials 0.000 claims description 6
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 239000011295 pitch Substances 0.000 description 33
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 14
- 230000000694 effects Effects 0.000 description 10
- 239000010408 film Substances 0.000 description 10
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 9
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 9
- 230000004048 modification Effects 0.000 description 8
- 238000012986 modification Methods 0.000 description 8
- 238000002834 transmittance Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 239000003502 gasoline Substances 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 238000001020 plasma etching Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000004088 simulation Methods 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000005083 Zinc sulfide Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- -1 ethanol Chemical compound 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000012466 permeate Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 229910052984 zinc sulfide Inorganic materials 0.000 description 2
- 241000135309 Processus Species 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/0303—Optical path conditioning in cuvettes, e.g. windows; adapted optical elements or systems; path modifying or adjustment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3577—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing liquids, e.g. polluted water
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Optical Measuring Cells (AREA)
- Surface Treatment Of Optical Elements (AREA)
Description
11・・・光源(赤外線光源)
12・・・検知セル
13・・・分光器
14・・・光検出器
23・・・通路(通路部)
23a・・・検知部
25・・・フィルタ部
25a・・・突起
26a,26b・・・内周部(モスアイ構造部)
27a,27b・・・内周部(モスアイ構造部)
28・・・外周部(モスアイ構造部)
Claims (7)
- 赤外線光源(11)と、
赤外線を透過する材料からなる基板(20a,20b)が2枚積層されてなり、前記基板の対向面(21a,21b)間に液体を流通させるための通路部(23)が形成され、前記通路部の少なくとも一部が前記液体の検知部(23a)とされた検知セル(12)と、
前記検知セルを透過した光を分光する分光器(13)と、
分光された光を検出する光検出器(14)と、を備え、
前記検知セルは、前記積層の方向における両表面(22a,22b)と各基板の対向面との4面のうちの少なくとも1面に、所定波長の赤外線を選択的に透過させるフィルタ部(25)を有し、該フィルタ部は、少なくとも前記検知部に対応して形成されており、
前記フィルタ部として、多数の突起(25a)が所定ピッチで配列されてなるモスアイ構造部(26a,26b,27a,27b,28)を有し、
前記モスアイ構造部として、前記検知部に対応して形成された内周部(26a,26b,27a,27b)と、前記内周部が形成された面において、前記検知部を取り囲む外周部分に形成された外周部(28)と、を有し、
前記内周部のピッチP1は、前記外周部のピッチP2よりも小さくされるとともに、該内周部が形成された前記基板の屈折率をnとすると、3/n≦P1<10/nの範囲で設定され、
前記赤外線光源は熱型の光源であり、
前記外周部のピッチP2は、P2≧10/nの範囲で設定されていることを特徴とする液体成分センサ。 - 前記モスアイ構造部は、各基板の対向面(21a,21b)の少なくとも一方に形成されていることを特徴とする請求項1に記載の液体成分センサ。
- 前記モスアイ構造部は、前記両表面(22a,22b)の少なくとも一方に形成されていることを特徴とする請求項1又は請求項2に記載の液体成分センサ。
- 前記モスアイ構造部は、前記4面(21a,21b,22a,22b)のそれぞれに形成されていることを特徴とする請求項1〜3いずれか1項に記載の液体成分センサ。
- 前記モスアイ構造部は、前記基板(20a,20b)に形成された凹部(24a,24b,29a,29b)の底面に形成されていることを特徴とする請求項1〜4いずれか1項に記載の液体成分センサ。
- 前記基板は、シリコンからなることを特徴とする請求項1〜5いずれか1項に記載の液体成分センサ。
- 前記基板は、ゲルマニウムからなることを特徴とする請求項1〜5いずれか1項に記載の液体成分センサ。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012126257A JP5891958B2 (ja) | 2012-06-01 | 2012-06-01 | 液体成分センサ |
US13/905,268 US9074996B2 (en) | 2012-06-01 | 2013-05-30 | Liquid component sensor |
CN201310211848.4A CN103454239B (zh) | 2012-06-01 | 2013-05-31 | 液体成分传感器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012126257A JP5891958B2 (ja) | 2012-06-01 | 2012-06-01 | 液体成分センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013250203A JP2013250203A (ja) | 2013-12-12 |
JP5891958B2 true JP5891958B2 (ja) | 2016-03-23 |
Family
ID=49669072
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012126257A Expired - Fee Related JP5891958B2 (ja) | 2012-06-01 | 2012-06-01 | 液体成分センサ |
Country Status (3)
Country | Link |
---|---|
US (1) | US9074996B2 (ja) |
JP (1) | JP5891958B2 (ja) |
CN (1) | CN103454239B (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5853873B2 (ja) * | 2012-06-18 | 2016-02-09 | 株式会社デンソー | 濃度検出装置 |
CA2882491C (en) * | 2012-08-22 | 2021-03-09 | Franklin Fueling Systems, Inc. | Method and apparatus for limiting acidic corrosion in fuel delivery systems |
CN103822896A (zh) * | 2014-03-04 | 2014-05-28 | 黄伟 | 一种广谱红外液体测量装置 |
WO2016121338A1 (ja) * | 2015-01-29 | 2016-08-04 | パナソニックIpマネジメント株式会社 | センサ |
CN105709295B (zh) * | 2016-04-08 | 2020-04-24 | 联想(北京)有限公司 | 检测装置、输液***及检测方法 |
CN109884064B (zh) * | 2019-04-24 | 2021-09-07 | 山东协和学院 | 一种液体传感器的数据采集装置 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62269042A (ja) * | 1986-05-17 | 1987-11-21 | Canon Inc | 粒子解析装置用フロ−セル |
JPS6412250A (en) * | 1987-07-06 | 1989-01-17 | Agency Ind Science Techn | Infrared optical window |
US5269937A (en) * | 1990-10-23 | 1993-12-14 | Cetus Corporation | HPLC light scattering detector for biopolymers |
JP2815545B2 (ja) * | 1994-11-07 | 1998-10-27 | 日本分光株式会社 | 液体クロマトグラフ用検出器 |
JP3511910B2 (ja) | 1998-10-14 | 2004-03-29 | 株式会社島津製作所 | 検出計セル |
US7371562B2 (en) * | 2000-10-30 | 2008-05-13 | Sru Biosystems, Inc. | Guided mode resonant filter biosensor using a linear grating surface structure |
US7190449B2 (en) * | 2002-10-28 | 2007-03-13 | Nanopoint, Inc. | Cell tray |
EP1960306A4 (en) * | 2005-11-22 | 2014-04-02 | Mycrolab Diagnostics Pty Ltd | MICROFLUIDIC STRUCTURES |
JP2007170828A (ja) * | 2005-12-19 | 2007-07-05 | Asahi Glass Co Ltd | 光学検査用基板および光学検査ユニット |
JP4356724B2 (ja) * | 2006-09-20 | 2009-11-04 | 株式会社デンソー | 赤外線式ガス検知装置およびそのガス検知方法 |
JP2009210312A (ja) * | 2008-03-03 | 2009-09-17 | Denso Corp | ファブリペロー干渉計およびその製造方法 |
JP2010078544A (ja) * | 2008-09-29 | 2010-04-08 | Epson Toyocom Corp | テラヘルツ分光分析用液体セルの製造方法 |
CN101587077B (zh) * | 2009-06-24 | 2011-06-01 | 福州高意通讯有限公司 | 一种光纤传感器结构 |
US9108351B2 (en) * | 2010-03-09 | 2015-08-18 | Sharp Kabushiki Kaisha | Method for forming anodized layer, method for producing mold and method for producing antireflective film |
-
2012
- 2012-06-01 JP JP2012126257A patent/JP5891958B2/ja not_active Expired - Fee Related
-
2013
- 2013-05-30 US US13/905,268 patent/US9074996B2/en not_active Expired - Fee Related
- 2013-05-31 CN CN201310211848.4A patent/CN103454239B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20130320214A1 (en) | 2013-12-05 |
CN103454239B (zh) | 2016-11-23 |
CN103454239A (zh) | 2013-12-18 |
US9074996B2 (en) | 2015-07-07 |
JP2013250203A (ja) | 2013-12-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5891958B2 (ja) | 液体成分センサ | |
TWI692622B (zh) | 光學濾波器及用於獲得沿著一光學路徑傳播之一光束之一光譜之方法 | |
KR102086108B1 (ko) | 분광 장치 및 분광 방법 | |
CN102269833B (zh) | 光谱装置、检测装置以及光谱装置的制造方法 | |
WO2020035003A1 (zh) | 光谱仪和使用其的光谱检测分析方法 | |
US11209352B2 (en) | Device for detecting gases or particles and method for manufacturing such a device | |
CN110764186B (zh) | 光波导基板和微流控装置 | |
US20200033244A1 (en) | Optical detector of particles | |
US11344884B2 (en) | Microfluidic apparatus, method of detecting substance in microfluidic apparatus, and spectrometer | |
Morsy et al. | Highly selective ultraviolet aluminum plasmonic filters on silicon | |
CN104765085B (zh) | 一种线性频域光栅及其设计方法 | |
US10845296B2 (en) | Optical particle detector | |
US11536606B2 (en) | Optical device and spectral detection apparatus | |
JP2009025091A (ja) | センサー装置 | |
JP2016200504A (ja) | 流路デバイスおよびその製造方法 | |
JP2005147891A (ja) | 表面プラズモン共鳴センサ | |
Quaranta et al. | Narrowband optical coupler using fano interference in first order diffraction | |
RU2477451C1 (ru) | Многолучевой интерферометр | |
JP2016029341A (ja) | 分光測定方法及び分光測定装置 | |
JP2020139908A (ja) | 測定セル、濃度測定装置、及び、測定セルの製造方法 | |
JP2016017822A (ja) | 赤外線センサー | |
Neutens et al. | Nano-Scale Electrical Transducers of Surface Plasmons for Integrated Biosensing | |
CH708389A2 (fr) | Cartouche de mesure par fluorescence pour diagnostic biomédical. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20140910 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20150623 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150630 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150826 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20160126 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20160208 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5891958 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |