JP5879611B2 - Microchannel valve structure, microdevice including the same, microsensor and microreactor, and liquid flow control method for microchannel - Google Patents

Microchannel valve structure, microdevice including the same, microsensor and microreactor, and liquid flow control method for microchannel Download PDF

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JP5879611B2
JP5879611B2 JP2011227516A JP2011227516A JP5879611B2 JP 5879611 B2 JP5879611 B2 JP 5879611B2 JP 2011227516 A JP2011227516 A JP 2011227516A JP 2011227516 A JP2011227516 A JP 2011227516A JP 5879611 B2 JP5879611 B2 JP 5879611B2
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芳昭 浮田
芳昭 浮田
高村　禅
禅 高村
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University of Yamanashi NUC
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Description

本発明は、生体物質の分析や化学反応などに使用されるマイクロデバイス等に設けた微細流路内の液体の送液を制御するためのバルブ構造等に関する。   The present invention relates to a valve structure or the like for controlling liquid feeding in a microchannel provided in a microdevice or the like used for analysis of a biological material or chemical reaction.

近年、試料分析の各工程の手間を省き、作業時間を短縮するための技術として、マイクロ統合分析システム（Micro Total Analysis System：μTAS）あるいはラボチップ（Lab-on-a-chip）と呼ばれる数センチないし数ミリ程度の超小型の生化学分析デバイス（マイクロデバイス）が登場してきた。
マイクロデバイスはこれまで人手で行っていた各オペレーションやオペレーション間の試料の移動など、分析に関わる一連の工程を１つの基板上で再現するものであり、従来と比較して試料や試薬の必要量が少ない、反応時間が短い、廃棄物が少ないなどのメリットがあり、医療診断、環境や食品のオンサイト分析、医薬品や化学品の生産等、広い分野での利用が期待されている。 In recent years, a few centimeters or so-called micro total analysis system (μTAS) or lab chip (Lab-on-a-chip) has been used as a technology to save time and labor for sample analysis. An ultra-small biochemical analysis device (micro device) of several millimeters has appeared.
A microdevice reproduces a series of processes related to analysis, such as each operation that has been performed manually and sample transfer between operations, on a single substrate. There are merits such as less reaction time, shorter reaction time, and less waste, and it is expected to be used in a wide range of fields such as medical diagnosis, on-site analysis of the environment and food, and production of pharmaceuticals and chemicals.

通常、マイクロデバイスは、一つの基板上にリアクタやリザーバー等の各種容器及びこれらを繋ぐ微細流路、微細流路を通る液体の流れを制御するためのバルブ等が形成されており、液体の混合、加熱、冷却などによる反応制御や、分光学的あるいは電気的作用を応用した検出作業を可能としている。
マイクロデバイスで用いる液体としては、たとえば血液・蛋白・遺伝子などを含む溶液、微生物・動植物細胞などの固体成分を含む溶液、各種化学物質を含む環境水、土壌抽出水など、さらにはそれらの分析に使用する各種の試薬、バッファ液、洗浄水などが挙げられる。以下、本明細書中ではこれらマイクロデバイスで用いる各種液体をまとめて単に「液体」と表記する。 Usually, a microdevice is formed with various containers such as a reactor and a reservoir, a fine channel connecting them, a valve for controlling the flow of liquid through the fine channel, etc. on a single substrate. It is possible to perform reaction control by heating, cooling, etc. and detection work applying spectroscopic or electrical action.
Examples of liquids used in microdevices include solutions containing blood, proteins, genes, etc., solutions containing solid components such as microorganisms and animal and plant cells, environmental water containing various chemical substances, soil extract water, etc. Examples include various reagents used, buffer solutions, and washing water. Hereinafter, in the present specification, various liquids used in these micro devices are collectively referred to as “liquid”.

マイクロデバイスでは複数の容器内の液体の流れを制御する、いわゆる送液制御のためのバルブ構造の開発が望まれている。
例えば、非特許文献１には、コンパクトディスク（ＣＤ）からなる基板上に作成した複数の容器それぞれの出口にくびれを作り、各くびれで液体を表面張力により保持することでバルブとしての機能を持たせた構造が開示されている。
本構造では、くびれで保持した溶液に対して加える圧力を、容器の形状及び位置、ＣＤの回転数、くびれのサイズ及び表面物性等で適宜調節することで、容器から液体が流出するタイミングを制御する仕組みになっている。 In micro devices, it is desired to develop a valve structure for controlling the flow of liquid in a plurality of containers, so-called liquid feeding control.
For example, Non-Patent Document 1 has a function as a valve by creating a constriction at the outlet of each of a plurality of containers made on a substrate made of a compact disc (CD) and holding the liquid by surface tension in each constriction. The disclosed structure is disclosed.
In this structure, the pressure applied to the solution held in the constriction is appropriately adjusted according to the shape and position of the container, the number of rotations of the CD, the size of the constriction, the surface physical properties, etc., thereby controlling the timing of the liquid flowing out from the container. It is a mechanism to do.

また、非特許文献２には、容器の出口や流路に、酸化鉄のナノ粒子を混ぜた樹脂（ワックス）を詰めて閉鎖する構造が開示されている。
本構造では、ＣＤの回転を止めた上で、所望位置のワックスにレーザを照射して酸化鉄を発熱させることでワックスを溶かし、再度ＣＤを回転させて遠心力を加えることによって液体を流出させる仕組みになっている。 Non-Patent Document 2 discloses a structure in which a resin (wax) mixed with iron oxide nanoparticles is packed and closed at the outlet or flow path of a container.
In this structure, after stopping the rotation of the CD, the wax is melted by irradiating the wax at a desired position with a laser to generate iron oxide, and the liquid is discharged by rotating the CD again and applying a centrifugal force. It is structured.

また、非特許文献３には、遠心力、毛間力、表面張力及びサイフォンの原理を併用する方法が開示されている。すなわち、容器の流出口から出た微細流路が一旦ＣＤの回転中心側に屈曲した後、再び径方向外側に屈曲して他の容器に至る構造になっている。
本構造では、まずＣＤを高速回転させると、流路内の液体には遠心力により径方向外側に向かう力が作用するが、微細流路が回転中心側に屈曲しているため、液体は当該屈曲箇所に留まる。次に、ＣＤの回転数を低くすると、屈曲箇所の液体に作用する遠心力が小さくなるため、液路内壁と液体との濡れ性を良好なものにしておくことにより、液体は毛管力により回転中心側に流れ出す。そして、ＣＤの回転数を再度上昇させると、液体は再び他の容器に向かって流れ出し、その後はサイフォンの原理により容器内の液体が順次他の容器に移動していく仕組みになっている。 Non-Patent Document 3 discloses a method in which centrifugal force, inter-hair force, surface tension and siphon principle are used in combination. In other words, the fine flow path exiting from the outlet of the container once bends toward the center of rotation of the CD and then bends radially outward to reach another container.
In this structure, when the CD is first rotated at a high speed, the force in the radial direction acts on the liquid in the flow path due to the centrifugal force. However, since the fine flow path is bent toward the center of rotation, the liquid Stay at the bend. Next, if the rotational speed of the CD is lowered, the centrifugal force acting on the liquid at the bent portion is reduced, so that the liquid is rotated by capillary force by making the wettability between the liquid path inner wall and the liquid good. It flows out to the center side. When the number of rotations of the CD is increased again, the liquid flows again toward the other container, and thereafter, the liquid in the container is sequentially moved to the other container by the siphon principle.

S.Laiet al., Anal. Chem., 2004, 76, pp. 1832-1837S. Laiet al., Anal. Chem., 2004, 76, pp. 1832-1837 B. S. Lee et al., Lab Chip, 2009, 9, pp. 1548-1555B. S. Lee et al., Lab Chip, 2009, 9, pp. 1548-1555 G. Welte et al., Proc. of Micro TAS 2010, pp. 818-820G. Welte et al., Proc. Of Micro TAS 2010, pp. 818-820

しかし、上記技術では以下のような問題がある。
すなわち、非特許文献１では、バルブの特性の一部は液体の粘度や表面張力、流路表面の濡れ性などの物性に依存することになるが、これら物性は温度・湿度等の環境の影響を受け易いため、設計当初の機能を発揮させることが難しく、誤作動により２種類の液体が混在してしまうというような問題がある。また、構造上、遠心力の影響を受け易いため、極めて高回転に動作させることが困難であると共に、また、動作開始直後は低い回転数に抑えておく必要がある。したがって、例えば高回転により全血から血清だけを遠心分離により取り出すような作業には適さないという問題がある。 However, the above technique has the following problems.
That is, in Non-Patent Document 1, some of the characteristics of the valve depend on the physical properties such as the viscosity and surface tension of the liquid and the wettability of the flow path surface. Since it is easy to receive, it is difficult to exhibit the function of the initial design, and there is a problem that two types of liquids are mixed due to malfunction. In addition, because of its structure, it is easily affected by centrifugal force, so that it is difficult to operate at a very high speed, and it is necessary to keep the rotational speed low immediately after the start of the operation. Therefore, for example, there is a problem that it is not suitable for an operation in which only serum is extracted from whole blood by centrifugation at a high rotation speed.

また、非特許文献２では、ワックスを流路に詰める作業が煩雑であると共に時間を要するという問題がある。また、溶融したワックスが液体に混入する可能性があるという問題がある。また、レーザを照射するためにＣＤの回転を一旦停止する必要があるという問題や、レーザ照射位置の正確な制御を可能にする制御機構を設ける必要があるため、製造コストが増大するという問題や、更には、複数個所のワックスを同時に加熱するには複数のレーザ照射機構を設ける必要があるという問題があった。   Further, in Non-Patent Document 2, there is a problem that the operation of packing the wax into the flow path is complicated and takes time. There is also a problem that molten wax may be mixed into the liquid. In addition, it is necessary to temporarily stop the rotation of the CD in order to irradiate the laser, and it is necessary to provide a control mechanism that enables accurate control of the laser irradiation position. Furthermore, there is a problem that it is necessary to provide a plurality of laser irradiation mechanisms in order to simultaneously heat a plurality of waxes.

また、非特許文献３では、ＣＤの回転数を適宜変化させることで液体に作用する遠心力と毛管力を調節する必要があるため、回転数を正確に制御できる制御機構を設ける必要があるという問題や、流路内壁の濡れ性等の物性や液体の物性の影響を強く受けるため、正確な送液が難しいという問題がある。   In Non-Patent Document 3, since it is necessary to adjust the centrifugal force and capillary force acting on the liquid by appropriately changing the rotational speed of the CD, it is necessary to provide a control mechanism that can accurately control the rotational speed. There is a problem that accurate liquid feeding is difficult because it is strongly affected by physical properties such as wettability of the flow path inner wall and liquid properties.

本発明はこのような問題に鑑み、液体や流路内壁の物性の影響をほとんど受けず、安価且つ簡便な制御機構で動作可能な微細流路のバルブ構造、これを備えるマイクロデバイス、マイクロセンサ及びマイクロリアクター及び微細流路の送液制御方法を提供することを目的とする。   In view of such problems, the present invention is hardly affected by the physical properties of the liquid and the inner wall of the flow path, and can be operated with an inexpensive and simple control mechanism. It is an object of the present invention to provide a microreactor and a liquid flow control method for a fine channel.

本発明の微細流路のバルブ構造は、内部に液体を収容した少なくとも２つの上流側容器と、当該上流側容器内の液体を受容するための下流側容器と、上流側容器と下流側容器とを繋ぐ流路とが基板上に設けられ、前記上流側容器内の液体に外力を作用させることで、前記流路を通して前記下流側容器に液体が送られるように構成した微細流路のバルブ構造において、
前記下流側容器に気体排出口を設けると共に、前記上流側容器のうち気体導入口を設けたものを第１上流側容器、気体導入口を設けないものを第２上流側容器とし、前記第１上流側容器と前記下流側容器とを繋ぐ流路を第１流路、前記第１上流側容器又は前記第１流路と前記第２上流側容器の上流側とを繋ぐ流路を第２流路、前記第２上流側容器の下流側と前記下流側容器又は前記第１流路若しくは前記第２流路が接続されている場合には接続部分よりも下流側の前記第１流路とを繋ぐ流路を第３流路とし、第１上流側容器から前記第１流路を介して下流側容器への送液を開始した時点では、当該第１上流側容器内の液体によって前記第２流路の一部が封鎖されており、送液中の所定の時点又は送液が終了した時点で当該封鎖が解除されることで、第２上流側容器からの送液が自動的に開始されることを特徴とする。
また、気体導入口を設けた第１上流側容器と、気体導入口を設けない第２上流側容器と、気体排出口を設けた下流側容器と、前記第１上流側容器と前記下流側容器とを繋ぐ第１流路と、前記第１上流側容器又は前記第１流路と前記第２上流側容器の上流側とを繋ぐ第２流路と、前記第２上流側容器の下流側と前記下流側容器又は前記第１流路若しくは前記第２流路が接続されている場合には接続部分よりも下流側の前記第１流路とを繋ぐ第３流路と、を備えたことを特徴とする。
The fine channel valve structure of the present invention includes at least two upstream containers containing liquid therein, a downstream container for receiving the liquid in the upstream container, an upstream container, and a downstream container. And a flow path that connects the liquid to the downstream container through the flow path by applying an external force to the liquid in the upstream container. In
Provided with a gas outlet in the downstream vessel, the first upstream container which is provided a gas inlet of said upstream vessel, those without the gas inlet and the second upstream container first wherein the upstream side container downstream vessel and the first flow path a flow path connecting the second flow a flow path connecting the upstream side of the first upstream-side container or the first flow path and the second upstream container A path, a downstream side of the second upstream side container, and the downstream side container, or the first flow path or the second flow path, the first flow path downstream of the connection portion. The connecting flow path is a third flow path, and at the time when liquid feeding from the first upstream side container to the downstream side container via the first flow path is started, the liquid in the first upstream side container causes the second flow path. A part of the flow path is blocked and the blockage is released at a predetermined time during liquid supply or when liquid supply is completed. In, wherein the feed fluid from the second upstream container is automatically started.
A first upstream container provided with a gas inlet; a second upstream container not provided with a gas inlet; a downstream container provided with a gas outlet; the first upstream container; and the downstream container. A first flow path connecting the first upstream container or the second flow path connecting the first flow path and the upstream side of the second upstream container, and a downstream side of the second upstream container; A third flow path that connects the first flow path downstream of the connection portion when the downstream container or the first flow path or the second flow path is connected. Features.

また、前記気体導入口及び前記気体排出口がそれぞれ前記第１上流側容器及び前記下流側容器に対して前記外力の作用方向の反対方向側に設けたことを特徴とする。
また、前記第１上流側容器を前記第２上流側容器に対して前記外力の作用方向側に配置したことを特徴とする。
また、前記第２流路が、前記第１上流側容器又は前記第１流路との接続部から前記外力の作用方向の反対方向側に屈曲した後、第２上流側容器に繋がる構造となっていることを特徴とする。
また、前記下流側容器を前記上流側容器に対して前記外力の作用方向側に配置したことを特徴とする。 Further, the gas introduction port and the gas discharge port are provided on the opposite sides of the direction of the external force with respect to the first upstream container and the downstream container, respectively.
Further, the first upstream container is arranged on the side of the external force acting direction with respect to the second upstream container.
In addition, the second flow path is bent from the connecting portion with the first upstream container or the first flow path to the direction opposite to the direction of the external force and then connected to the second upstream container. It is characterized by.
Further, the downstream container is arranged on the side of the external force acting direction with respect to the upstream container.

また、前記外力が遠心力と重力のうち少なくとも一方であることを特徴とする。
また、前記第２上流側容器を複数備えていることを特徴とする。
また、前記複数の第２上流側容器のそれぞれが前記第１上流側容器に直接繋がる並列構造を有することを特徴とする。
また、前記複数の第２上流側容器を第２‐１〜第２‐ｎ（ｎは１以上の自然数）番目の上流側容器とした場合に、前記第１上流側容器に第２‐１番目の上流側容器が繋がり、第２‐１番目の上流側容器に第２‐２番目の上流側容器に繋がり、以下同様に第２‐（ｎ−１）番目の上流側容器に第２‐ｎ番目の上流側容器が繋がる直列構造を有することを特徴とする。 Further, the external force is at least one of centrifugal force and gravity.
In addition, a plurality of the second upstream containers are provided.
In addition, each of the plurality of second upstream containers has a parallel structure that is directly connected to the first upstream container.
Further, when the plurality of second upstream containers are the 2-1st to 2-nth (n is a natural number of 1 or more) upstream containers, the second upstream container is 2-1st. The upstream container is connected, the 2-1st upstream container is connected to the 2-2th upstream container, and the second- (n-1) th upstream container is connected to the 2nd-n. It has the serial structure where the 2nd upstream container is connected.

また、上記バルブ構造を併用することを特徴とする。
また、前記下流側容器を設けずに、前記第１上流側容器と前記気体排出口とを直接前記第１流路で繋ぐ構成として第１上流側容器から第１流路を通して送られた液体を気体排出口から外部に排出する及び／又は前記第２上流側容器と前記気体排出口とを直接流路で繋ぐ構成として第２上流側容器から流路を通して送られた液体を気体排出口から外部に排出することを特徴とする。
また、本発明のマイクロデバイスは、上記微細流路のバルブ構造を備えることを特徴とする。
また、本発明のマイクロセンサは、上記微細流路のバルブ構造を備えることを特徴とする。
また、本発明のマイクロリアクターは、上記微細流路のバルブ構造を備えることを特徴とする。 Further, the above valve structure is used in combination.
Further, the liquid sent from the first upstream container through the first flow path as a configuration in which the first upstream container and the gas discharge port are directly connected by the first flow path without providing the downstream container. The liquid sent from the second upstream container through the flow path to the outside is configured to be discharged from the gas discharge port and / or the second upstream container and the gas discharge port are directly connected by the flow path. It is characterized by being discharged.
Moreover, the microdevice of the present invention is characterized by comprising the valve structure of the fine channel.
In addition, a microsensor of the present invention includes the valve structure of the fine channel.
Moreover, the microreactor of the present invention is characterized by comprising the above-mentioned fine channel valve structure.

また、本発明の微細流路の送液制御方法は、内部に液体を収容した少なくとも２つの上流側容器と、当該上流側容器内の液体を受容するための下流側容器と、上流側容器と下流側容器とを繋ぐ流路とが基板上に設けられ、前記上流側容器内の液体に外力を作用させることで、前記流路を通して前記下流側容器に液体が送られるように構成した微細流路の送液制御方法において、前記下流側容器に気体排出口を設けると共に、前記上流側容器のうち気体導入口を設けたものを第１上流側容器、気体導入口を設けないものを第２上流側容器とし、前記第１上流側容器と前記下流側容器とを繋ぐ流路を第１流路、前記第１上流側容器又は前記第１流路と前記第２上流側容器の上流側とを繋ぐ流路を第２流路、前記第２上流側容器の下流側と前記下流側容器又は前記第１流路若しくは前記第２流路が接続されている場合には接続部分よりも下流側の前記第１流路とを繋ぐ流路を第３流路とし、第１上流側容器から前記第１流路を介して下流側容器への送液を開始した時点では、当該第１上流側容器内の液体によって前記第２流路の一部が封鎖されており、送液中の所定の時点又は送液が終了した時点で当該封鎖が解除されることで、第２上流側容器からの送液が自動的に開始されることを特徴とする。
また、前記下流側容器を設けずに、前記第１上流側容器と前記気体排出口とを直接前記第１流路で繋ぐ構成として第１上流側容器から第１流路を通して送られた液体を気体排出口から外部に排出する及び／又は前記第２上流側容器と前記気体排出口とを直接流路で繋ぐ構成として第２上流側容器から流路を通して送られた液体を気体排出口から外部に排出することを特徴とする。
Further, the liquid flow control method for a fine channel according to the present invention includes at least two upstream containers containing liquid therein, a downstream container for receiving the liquid in the upstream container, and an upstream container. A flow path connecting the downstream container is provided on the substrate, and an external force is applied to the liquid in the upstream container so that the liquid is sent to the downstream container through the flow path. In the liquid supply control method for a passage, a gas discharge port is provided in the downstream container, and the upstream container provided with the gas inlet is the first upstream container, and the gas inlet is not provided as the second. and the upstream side container, and the upstream side of the first flow path a flow passage between the first upstream vessel connecting said downstream vessel, the first upstream container or the first flow path and the second upstream container the second flow path the flow path connecting the downstream side of the second upstream container downstream If the container or the first flow path or the second flow path is connected to the third flow path a flow path connecting the first flow path downstream of the connecting portion, a first upstream side container When the liquid supply to the downstream container via the first flow path is started, a part of the second flow path is blocked by the liquid in the first upstream container. By releasing the blockade at a predetermined time or when liquid feeding is completed, liquid feeding from the second upstream container is automatically started.
Further, the liquid sent from the first upstream container through the first flow path as a configuration in which the first upstream container and the gas discharge port are directly connected by the first flow path without providing the downstream container. The liquid sent from the second upstream container through the flow path to the outside is configured to be discharged from the gas discharge port and / or the second upstream container and the gas discharge port are directly connected by the flow path. It is characterized by being discharged.

本発明の微細流路のバルブ構造によれば、第１上流側容器からの送液を開始した時点では、当該第１上流側容器内の液体によって第２流路の一部が封鎖される。そして、送液中の所定の時点又は送液が終了した時点で当該封鎖が解除されると、第２上流側容器からの送液が自動的に開始される。
すなわち、原則的に第１上流側容器の送液が終了するまでは第２上流側容器の送液は開始されず、第１上流側容器の送液が終了したことをきっかけにして第２上流側容器の送液が自動的に開始される。したがって、流路内で第１上流側容器の液体と第２上流側容器の液体とが混在するような事態を確実に防止できる。 According to the valve structure of the fine channel of the present invention, when the liquid feeding from the first upstream container is started, a part of the second channel is blocked by the liquid in the first upstream container. And if the said blockade is cancelled | released at the predetermined | prescribed time in liquid feeding, or the time of liquid feeding complete | finished, the liquid feeding from a 2nd upstream container will be started automatically.
That is, in principle, liquid feeding of the second upstream side container is not started until liquid feeding of the first upstream side container is completed, and the second upstream side is triggered by the completion of liquid feeding of the first upstream side container. The feeding of the side container is automatically started. Therefore, it is possible to reliably prevent a situation in which the liquid in the first upstream container and the liquid in the second upstream container are mixed in the flow path.

また、流路内壁の濡れ性や液体の粘度等の物性の影響や気温・湿度等の環境の影響をほとんど受けず、第１上流側容器、第２上流側容器及び流路の構造で送液を制御できるので、設計段階とほぼ同等の正確な送液制御を実現できる。
また、液体に対する外力を遠心力によるとものとすると、基板を回転させるための制御機構を簡略化でき、また、圧力可変装置やレーザ照射装置等の機器も不要であるため、製造コストを抑えることができる。
また、液体に対する外力を遠心力によるとものとすると、動作開始直後からすぐに基板を高速回転させることができるので、例えば全血の遠心分離作業等に特に有用である。 In addition, it is hardly affected by physical properties such as the wettability of the inner wall of the flow path, the viscosity of the liquid, and the environment such as temperature and humidity, and is sent by the structure of the first upstream side container, the second upstream side container, and the flow path. Therefore, it is possible to realize accurate liquid feed control almost equivalent to the design stage.
Also, if the external force on the liquid is due to centrifugal force, the control mechanism for rotating the substrate can be simplified, and equipment such as a pressure variable device and a laser irradiation device is not required, thus reducing manufacturing costs. Can do.
If the external force applied to the liquid is a centrifugal force, the substrate can be rotated at a high speed immediately after the start of the operation, which is particularly useful for, for example, a whole blood centrifugation operation.

また、気体導入口及び気体排出口を外力の作用方向の反対方向側に設けることで、液体と気体との置換がスムーズに行われ、送液のスピードを上げることができる。
また、第１上流側容器を第２上流側容器に対して外力の作用方向側に配置して水頭差を設けたり、第２流路を外力の作用方向の反対方向側に屈曲させて当該屈曲部に第１上流側容器内の液体を留めておくことで、第１上流側容器内の液体が第２流路を介して第２上流側容器に流れ込む事態を防止できる。 Further, by providing the gas introduction port and the gas discharge port on the side opposite to the direction of the external force, the liquid and the gas can be smoothly replaced, and the liquid feeding speed can be increased.
In addition, the first upstream container is disposed on the side of the second upstream container in the direction of the external force to provide a head difference, or the second flow path is bent in the direction opposite to the direction of the external force to bend. By keeping the liquid in the first upstream container in the part, it is possible to prevent the liquid in the first upstream container from flowing into the second upstream container through the second flow path.

また、第２上流側容器を複数配置することで、複数種類の液体の送液が可能となる。
また、複数の第２上流側容器を並列構造や直列構造としたり、これらを組み合わせた構造とすることで、時間差による逐次送液や同時送液が可能となる。 In addition, by arranging a plurality of second upstream containers, a plurality of types of liquid can be fed.
In addition, by providing a plurality of second upstream containers with a parallel structure or a serial structure, or a structure in which these are combined, it is possible to perform sequential liquid supply or simultaneous liquid supply due to a time difference.

第一の実施の形態における微細流路のバルブ構造を示す図The figure which shows the valve structure of the fine flow path in 1st embodiment. 第二の実施の形態における微細流路のバルブ構造を示す図The figure which shows the valve structure of the fine flow path in 2nd embodiment. 第三の実施の形態における微細流路のバルブ構造を示す図The figure which shows the valve structure of the fine flow path in 3rd embodiment. 第四の実施の形態における微細流路のバルブ構造を示す図The figure which shows the valve structure of the microchannel in 4th embodiment 第五の実施の形態における微細流路のバルブ構造を示す図The figure which shows the valve structure of the microchannel in 5th embodiment 第六の実施の形態における微細流路のバルブ構造を示す図The figure which shows the valve structure of the fine flow path in 6th Embodiment 第七の実施の形態における微細流路のバルブ構造を示す図The figure which shows the valve structure of the fine flow path in 7th Embodiment 第八の実施の形態における微細流路のバルブ構造を示す図The figure which shows the valve structure of the fine flow path in 8th embodiment. 第九の実施の形態における微細流路のバルブ構造を示す図The figure which shows the valve structure of the fine flow path in 9th embodiment

[第一の実施の形態]
本発明の微細流路のバルブ構造の第一の実施の形態について説明する。
図１に示すように、本実施の形態におけるバルブ構造１０は、基板（図示省略）上に配置した２つの上流側容器１及び２、下流側容器３及び流路４から概略構成されている。 [First embodiment]
A first embodiment of the fine channel valve structure of the present invention will be described.
As shown in FIG. 1, the valve structure 10 in the present embodiment is generally composed of two upstream containers 1 and 2, a downstream container 3, and a flow path 4 arranged on a substrate (not shown).

上流側容器は、気体導入口５を備える第１上流側容器１と気体導入口５を備えない第２上流側容器２に区分されており、両容器の内部には予め液体が収容されている。液体の種類は２つの容器で異なるものにしてもよいし、同一種類のものでもよい。
また、第１上流側容器１を第２上流側容器２に対して僅かに外力の作用方向側に配置している。すなわち、第２上流側容器２を第１上流側容器１と比較して、外力が遠心力の場合には基板の回転中心に近い側に配置し、外力が重力の場合には上方に配置している。
気体導入口５は第１上流側容器１の側面であって、外力の作用方向の反対側に設けられている。すなわち、外力が遠心力の場合には回転中心に近い側に設けられており、外力が重力の場合には上方に設けられている。
なお、気体の種類は特に限定されるものではないが、用途に応じて例えば空気、窒素、二酸化炭素等、酸素が挙げられる。 The upstream container is divided into a first upstream container 1 having a gas introduction port 5 and a second upstream container 2 having no gas introduction port 5, and liquid is stored in advance in both containers. . The type of liquid may be different between the two containers, or the same type.
Further, the first upstream side container 1 is arranged slightly on the side of the external force acting direction with respect to the second upstream side container 2. That is, the second upstream container 2 is disposed closer to the rotation center of the substrate when the external force is centrifugal force than the first upstream container 1, and is disposed above when the external force is gravity. ing.
The gas introduction port 5 is a side surface of the first upstream side container 1 and is provided on the opposite side of the acting direction of the external force. That is, when the external force is centrifugal force, it is provided on the side close to the rotation center, and when the external force is gravity, it is provided above.
In addition, although the kind of gas is not specifically limited, For example, oxygen, such as air, nitrogen, a carbon dioxide, is mentioned according to a use.

下流側容器３は上流側容器１及び２内の液体を収容するために設けられており、気体排出口６を備えている。本実施の形態では下流側容器３を一つだけ配置し、上記第１上流側容器１と第２上流側容器２とで共用する構成になっているが、第１上流側容器１用と第２上流側容器２用の２つの下流側容器を配置してもよく、この場合も各下流側容器に気体排出口を設けることになる。
気体排出口６も上記気体導入口５と同様に、下流側容器３の側面であって外力の作用方向の反対側に設けられている。
また、上流側容器１及び２に対し、下流側容器３は外力の作用方向側に配置されている。すなわち、外力が遠心力の場合には回転中心に近い側に上流側容器１及び２を配置し、上流側容器１及び２に対して径方向外側に下流側容器３を配置しており、外力が重力の場合には上流側容器１及び２を上方に配置し、下流側容器３を下方に配置している。 The downstream container 3 is provided to store the liquid in the upstream containers 1 and 2 and includes a gas discharge port 6. In the present embodiment, only one downstream side container 3 is arranged and shared by the first upstream side container 1 and the second upstream side container 2. Two downstream containers for the two upstream containers 2 may be arranged, and in this case as well, a gas discharge port is provided in each downstream container.
Similarly to the gas introduction port 5, the gas discharge port 6 is provided on the side surface of the downstream side container 3 on the side opposite to the direction in which the external force acts.
Further, the downstream side container 3 is arranged on the acting direction side of the external force with respect to the upstream side containers 1 and 2. That is, when the external force is a centrifugal force, the upstream containers 1 and 2 are disposed on the side close to the rotation center, and the downstream container 3 is disposed on the radially outer side with respect to the upstream containers 1 and 2. In the case of gravity, the upstream containers 1 and 2 are disposed above, and the downstream container 3 is disposed below.

流路４は上流側容器１及び２と下流側容器３とを繋ぐものであり、第１上流側容器１と下流側容器３を繋ぐ流路を第１流路４ａ、第１流路４ａと第２上流側容器２とを繋ぐ流路を第２流路４ｂとしている。なお、第２流路４ｂを第１上流側容器１と第２上流側容器２とを繋ぐように配置してもよい。
また、第２流路４ｂは、第１流路４ａとの接続部から外力の作用方向の反対方向側に一旦屈曲した後、第２上流側容器２に繋がる構造となっている。なお、第２流路４ｂの内径はある程度、例えば１０μｍ〜１００μｍ程度の小さいものにすることが好ましい。内径がこれより大きい場合には、外力の作用により第２流路４ｂが押し潰されて内径が小さくなる結果、第２流路４ｂ内に存在する第１上流側容器１の液体が押し出されて第２上流側容器２に入ってしまうおそれがあるためである。 The flow path 4 connects the upstream containers 1 and 2 and the downstream container 3, and the flow path connecting the first upstream container 1 and the downstream container 3 is the first flow path 4a and the first flow path 4a. A flow path connecting the second upstream container 2 is a second flow path 4b. In addition, you may arrange | position the 2nd flow path 4b so that the 1st upstream container 1 and the 2nd upstream container 2 may be connected.
Further, the second flow path 4b has a structure in which the second flow path 4b is once bent from the connecting portion with the first flow path 4a to the opposite direction side of the acting direction of the external force and then connected to the second upstream side container 2. In addition, it is preferable that the internal diameter of the 2nd flow path 4b is made into a small thing to a certain extent, for example, about 10 micrometers-100 micrometers. When the inner diameter is larger than this, as a result of the second flow path 4b being crushed by the action of an external force and the inner diameter becoming smaller, the liquid in the first upstream container 1 existing in the second flow path 4b is pushed out. This is because there is a risk of entering the second upstream container 2.

なお、上流側容器１及び２、下流側容器３及び流路４の材質は特に限定されるものではなく、有機材料では例えばシリコーン樹脂、アクリル樹脂、ポリスチレン、ポリオレフィン、ポリエステル、ポリカーボネート、フッ素樹脂、シリコーンゴムやフッ素ゴムなどのエラストマーなどが挙げられ、無機材料では例えばガラス、石英、アルミナ、ジルコニアなどが挙げられる。また、各容器及び流路の内壁に濡れ性等の物性を調節するための処理を施していてもよい。   The materials of the upstream containers 1 and 2, the downstream container 3 and the flow path 4 are not particularly limited, and examples of organic materials include silicone resin, acrylic resin, polystyrene, polyolefin, polyester, polycarbonate, fluorine resin, and silicone. Examples include elastomers such as rubber and fluororubber, and examples of inorganic materials include glass, quartz, alumina, zirconia, and the like. Moreover, the process for adjusting physical properties, such as wettability, may be given to each container and the inner wall of a flow path.

次に、本実施の形態のバルブ構造の動作について説明する。
まず、図１（ａ）に示すように、第１上流側容器１と第２上流側容器２の両者に予め液体を収容し、下流側容器３は空の状態にしておくか、あらかじめ反応試薬等を収容しておいてもよい。図１では例として空にした状態を示している。
この状態から基板を回転させて液体に外力を作用させると、図１（ｂ）に示すように、第１上流側容器１内の液体のほとんどが第１流路４ａを通って下流側容器３内に入っていくと共に液体の一部が第２流路４ｂ側に侵入する。第２流路４ｂ側に侵入した液体にも外力が作用しているため、当該液体は流路の屈曲箇所で留まる。 Next, the operation of the valve structure of the present embodiment will be described.
First, as shown in FIG. 1 (a), the liquid is previously stored in both the first upstream container 1 and the second upstream container 2, and the downstream container 3 is left empty, or the reaction reagent is prepared in advance. Etc. may be accommodated. FIG. 1 shows an empty state as an example.
When an external force is applied to the liquid by rotating the substrate from this state, most of the liquid in the first upstream container 1 passes through the first flow path 4a and the downstream container 3 as shown in FIG. 1 (b). As it enters the inside, a part of the liquid enters the second flow path 4b side. Since an external force is also acting on the liquid that has entered the second flow path 4b, the liquid stays at the bent portion of the flow path.

第１上流側容器１から下流側容器３への送液に関しては、第１上流側容器１からの単位時間当たりの送液量とほぼ同じ割合で気体導入口５から気体が第１上流側容器１内に導入され、更に、ほぼ同じ割合で気体排出口６から下流側容器３内の気体が外部に排出される、つまり、気体導入口５及び気体排出口６を介して液体と気体との置換が速やかに行われるので、第１上流側容器１内の液体は速やかに第１流路４ａを通って下流側容器３内に入っていく。   Regarding the liquid feeding from the first upstream side container 1 to the downstream side container 3, the gas is supplied from the gas inlet 5 to the first upstream side container at substantially the same rate as the liquid feeding amount per unit time from the first upstream side container 1. 1 and the gas in the downstream container 3 is discharged to the outside from the gas discharge port 6 at substantially the same rate, that is, the liquid and the gas are connected via the gas introduction port 5 and the gas discharge port 6. Since the replacement is promptly performed, the liquid in the first upstream container 1 quickly enters the downstream container 3 through the first flow path 4a.

一方、第２上流側容器２に関しては、上記の通り、第１上流側容器１の液体の一部が第２流路４ｂ側の屈曲箇所で留まり、第２流路４ｂを封鎖することになるため、第２上流側容器２への気体の供給が遮断される。
したがって、第１上流側容器１からの送液が終了するまでは第２上流側容器２内の液体はほとんどが第２上流側容器２内に留まっており、ごく一部のみが外力の作用を受けて下流側容器３に繋がる流路内に侵入することになる。
そして、第１上流側容器１内から下流側容器３への液送が完了する直前のタイミングで、上記第２流路４ｂ側に侵入していた液体が第１流路４ａ側に戻ることで第２流路４ｂの封鎖が解除される。なお、第２流路４ｂ側に侵入していた液体は速やかに下流側容器３内に入っていく。 On the other hand, with respect to the second upstream container 2, as described above, a part of the liquid in the first upstream container 1 stays at the bent portion on the second flow path 4b side and seals the second flow path 4b. Therefore, the supply of gas to the second upstream container 2 is blocked.
Therefore, most of the liquid in the second upstream side container 2 remains in the second upstream side container 2 until the liquid feeding from the first upstream side container 1 is finished, and only a part of the liquid acts as an external force. It will enter into the flow path that is received and connected to the downstream container 3.
The liquid that has entered the second flow path 4b side returns to the first flow path 4a side at a timing immediately before the liquid feeding from the first upstream container 1 to the downstream container 3 is completed. The blockage of the second flow path 4b is released. In addition, the liquid that has entered the second flow path 4b side quickly enters the downstream side container 3.

第２流路４ｂの封鎖が解除されることで、気体排出口６から第１上流側容器１及び第２流路４ｂを介して第２上流側容器２へ気体が進入し出すため、図１（ｃ）に示すように、第２上流側容器２から下流側容器３への送液が自動的に開始され、図１（ｄ）に示すように第２上流側容器２内の液体のほとんど全てが下流側容器３内に入っていき、送液が終了する。   Since the blockage of the second flow path 4b is released, the gas enters the second upstream container 2 from the gas outlet 6 via the first upstream container 1 and the second flow path 4b. As shown in (c), the liquid feeding from the second upstream container 2 to the downstream container 3 is automatically started, and most of the liquid in the second upstream container 2 as shown in FIG. 1 (d). All enters the downstream side container 3 and the liquid feeding ends.

このように第１上流側容器１内の液体の送液がほぼ完了した後、第２上流側容器２内の液体の送液が自動的に開始されるので、下流側容器３に対して第１上流側容器１内の液体と第２上流側容器２内の液体とが流路内で混在することがない。   Thus, after the liquid feeding in the first upstream container 1 is almost completed, the liquid feeding in the second upstream container 2 is automatically started. The liquid in the 1 upstream container 1 and the liquid in the 2nd upstream container 2 do not mix in a flow path.

[第二の実施の形態]
次に、本発明の微細流路のバルブ構造の第二の実施の形態について説明する。なお、上記第一の実施の形態と同様の構成となる箇所については同一符号を付してその説明を省略する。
本実施の形態においては、図２に示すように、基板上に第２上流側容器２が複数（図では４つ）配置されており、各第２上流側容器２‐１〜２‐４が第１上流側容器１に直接繋がる並列構造を有する点に特徴を有する。 [Second Embodiment]
Next, a second embodiment of the fine channel valve structure of the present invention will be described. In addition, about the location which becomes the same structure as said 1st embodiment, the same code | symbol is attached | subjected and the description is abbreviate | omitted.
In the present embodiment, as shown in FIG. 2, a plurality of (four in the figure) second upstream containers 2 are arranged on the substrate, and each of the second upstream containers 2-1 to 2-4 is arranged. It is characterized in that it has a parallel structure that is directly connected to the first upstream vessel 1.

この構造によると、第１上流側容器１内の液体は外力の作用方向に流れ出すため、複数の第２上流側容器２のうち、第１上流側容器１に対して最も外力の作用方向の反対側に繋がっている第２‐１番目の上流側容器内の液体から送液が開始され、第１上流側容器１に対して最も外力の作用方向側に繋がっている第２‐４番目の上流側容器からの送液が最後に開始される。
なお、下流側容器３は各第２上流側容器２に対して一つずつ配置してもよく、全ての第２上流側容器２で共用してもよい。 According to this structure, the liquid in the first upstream container 1 flows out in the acting direction of the external force. Therefore, the action direction of the external force most opposite to the first upstream container 1 among the plurality of second upstream containers 2. Liquid supply is started from the liquid in the 2-1st upstream container connected to the side, and the 2-4th upstream connected to the side of the first upstream container 1 in the direction of the external force most. The liquid feeding from the side container is finally started.
One downstream container 3 may be arranged for each second upstream container 2 or may be shared by all the second upstream containers 2.

このように、第１上流側容器１を利用して４つの第２上流側容器２からの送液を時間をずらして（調節して）逐次行うことができるので、送液の時間調節を可能とした水時計（タイマー）としての機能を持ったバルブ構造を得られる。
また、この場合、第１上流側容器１の液体は必ずしも分析用液体として使用しなくてもよいので、例えば精製水などの物性が明らかな液体を使用することにすれば、タイマー機能の精度を向上させることができる。 In this way, liquid feeding from the four second upstream containers 2 can be sequentially performed by shifting (adjusting) the time using the first upstream container 1, so that the liquid feeding time can be adjusted. A valve structure with the function of a water clock (timer) can be obtained.
In this case, the liquid in the first upstream side container 1 does not necessarily have to be used as an analysis liquid. For example, if a liquid with clear physical properties such as purified water is used, the accuracy of the timer function is improved. Can be improved.

[第三の実施の形態]
次に、本発明の微細流路のバルブ構造の第三の実施の形態について説明する。なお、上記各実施の形態と同様の構成となる箇所については同一符号を付してその説明を省略する。
本実施の形態においては、図３に示すように、基板上に第２上流側容器２が複数（図では３つ）配置されており、各第２上流側容器２‐１〜２‐３が直列的に第１上流側容器１に直接繋がっている点に特徴を有する。 [Third embodiment]
Next, a description will be given of a third embodiment of the fine channel valve structure of the present invention. In addition, about the location which becomes the same structure as said each embodiment, the same code | symbol is attached | subjected and the description is abbreviate | omitted.
In the present embodiment, as shown in FIG. 3, a plurality (three in the figure) of second upstream containers 2 are arranged on the substrate, and each of the second upstream containers 2-1 to 2-3 is arranged. It is characterized in that it is directly connected to the first upstream container 1 in series.

すなわち、第１上流側容器１に第２‐１番目の上流側容器が繋がり、第２‐１番目の上流側容器に第２‐２番目の上流側容器に繋がり、第２‐２番目の上流側容器に第２‐３番目の上流側容器が繋がる直列構造になっている。
この構造によると、第１上流側容器１からの送液が開始され、第１上流側容器１内の気体が第２流路４ｂとの接続部に至った時点で、第２‐１番目の上流側容器からの送液が開始され、以下順に第２‐２番目、第２‐３番目の上流側容器の順に送液が開始される。
このように、第１上流側容器１を利用して３つの第２上流側容器２からの送液を連鎖的（逐次的）に行うことができるので、送液連鎖機能を持ったバルブ構造を得られる。 That is, the 2-1st upstream container is connected to the first upstream container 1, the 2-1st upstream container is connected to the 2-2th upstream container, and the 2-2th upstream container is connected. The second and third upstream containers are connected in series with the side container.
According to this structure, liquid supply from the first upstream container 1 is started, and when the gas in the first upstream container 1 reaches the connection portion with the second flow path 4b, the 2-1st Liquid feeding from the upstream container is started, and liquid feeding is started in the order of the 2-2nd and 2-3th upstream containers in the following order.
In this way, liquid feeding from the three second upstream containers 2 can be performed in a chained (sequential) manner using the first upstream container 1, so that a valve structure having a liquid feeding chain function is provided. can get.

[第四の実施の形態]
次に、本発明の微細流路のバルブ構造の第四の実施の形態について説明する。なお、上記各実施の形態と同様の構成となる箇所については同一符号を付してその説明を省略する。
本実施の形態においては、図４に示すように、上記第二の実施の形態で示した水時計型のバルブ構造と、第三の実施の形態で示した連鎖型バルブ構造を組み合わせた点に特徴を有する。
この構造によると、第１上流側容器１に対して外力の作用方向の反対方向側に接続した３つの第２上流側容器２から連鎖的に送液が開始され、水時計機能により所定時間経過後に、他方の３つの第２上流側容器２から連鎖的に送液を開始できる。また、この接続を逆にして連鎖的送液の後水時計機能を開始することも可能である。 [Fourth embodiment]
Next, a fourth embodiment of the fine channel valve structure of the present invention will be described. In addition, about the location which becomes the same structure as said each embodiment, the same code | symbol is attached | subjected and the description is abbreviate | omitted.
In this embodiment, as shown in FIG. 4, the water clock type valve structure shown in the second embodiment and the chain type valve structure shown in the third embodiment are combined. Has characteristics.
According to this structure, liquid feeding is started in a chain manner from the three second upstream containers 2 connected to the first upstream container 1 in the direction opposite to the direction of the external force, and a predetermined time elapses by the water clock function. Later, liquid feeding can be started in a chain from the other three second upstream containers 2. It is also possible to reverse this connection and start the water clock function after chain feeding.

[第五の実施の形態]
次に、本発明の微細流路のバルブ構造の第五の実施の形態について説明する。なお、上記各実施の形態と同様の構成となる箇所については同一符号を付してその説明を省略する。
本実施の形態においては、図５に示すように、第２流路４ｂを途中で分岐させて２つの第２上流側容器２に接続している点に特徴を有する。
この構造によると２つの第２上流側容器２から同時に送液を開始できる。 [Fifth embodiment]
Next, a fifth embodiment of the fine channel valve structure of the present invention will be described. In addition, about the location which becomes the same structure as said each embodiment, the same code | symbol is attached | subjected and the description is abbreviate | omitted.
As shown in FIG. 5, the present embodiment is characterized in that the second flow path 4 b is branched halfway and connected to the two second upstream containers 2.
According to this structure, liquid feeding can be started simultaneously from the two second upstream containers 2.

[第六の実施の形態]
次に、本発明の微細流路のバルブ構造の第六の実施の形態について説明する。なお、上記各実施の形態と同様の構成となる箇所については同一符号を付してその説明を省略する。
本実施の形態においては、図６に示すように、上記第二の実施の形態で示した連鎖型構造に加えて、下流側容器３を共通化すると共に下流側容器３から別途外力の作用方向の反対側に屈曲する流路４ｃを設けた点と、第１上流側容器１の体積が下流側容器３の体積より小さく、第１上流側容器１の体積と第２‐１番目の上流側容器の体積とを足し合わせたものが、下流側容器３の体積よりも大きくなるようにした点に特徴を有する。 [Sixth embodiment]
Next, a sixth embodiment of the fine channel valve structure of the present invention will be described. In addition, about the location which becomes the same structure as said each embodiment, the same code | symbol is attached | subjected and the description is abbreviate | omitted.
In the present embodiment, as shown in FIG. 6, in addition to the chain structure shown in the second embodiment, the downstream side container 3 is shared and the direction of the external force is applied separately from the downstream side container 3. And the volume of the first upstream side container 1 is smaller than the volume of the downstream side container 3, and the volume of the first upstream side container 1 and the 2-1st upstream side. It is characterized in that the sum of the volume of the container is larger than the volume of the downstream container 3.

この構造によるとまず第１上流側容器１内の液体が下流側容器３に入り、次に第２‐１番目の上流側容器内の液体が下流側容器３に入ることにより両液体が混在した状態で別途設けた流路４ｃから送液される。一旦当該流路４ｃから送液が開始されると、いわゆるサイフォン効果により下流側容器３内の液体は継続的に液送され、この時気体排出口６は気体導入口５として働く。第２‐２番目の上流側容器内の液体は第１上流側容器１内の液体と第２‐１番目の上流側容器内の液体とが混在した状態、あるいは第２‐２番目の上流側容器内の液体のみが空の状態の下流側容器３に入った後、別途設けた流路４ｃから送液される。このように、本構造によると複数の液体を混在させた状態で他の容器に送ることができる。   According to this structure, the liquid in the first upstream container 1 enters the downstream container 3 first, and then the liquid in the 2-1st upstream container enters the downstream container 3 so that both liquids are mixed. The liquid is fed from a separately provided flow path 4c. Once liquid feeding is started from the flow path 4c, the liquid in the downstream side container 3 is continuously fed by the so-called siphon effect, and at this time, the gas discharge port 6 functions as the gas introduction port 5. The liquid in the 2-2nd upstream container is a mixture of the liquid in the first upstream container 1 and the liquid in the 2-1st upstream container, or the 2-2nd upstream side. After only the liquid in the container enters the empty downstream container 3, the liquid is fed from a separately provided flow path 4 c. Thus, according to this structure, a plurality of liquids can be mixed and sent to another container.

[第七の実施の形態]
次に、本発明の微細流路のバルブ構造の第七の実施の形態について説明する。なお、上記各実施の形態と同様の構成となる箇所については同一符号を付してその説明を省略する。
本実施の形態においては、図７に示すように、上記第六の実施の形態で示した構造に加えて、第２-２番目の上流側容器からの流路が、第２‐１番目の上流側容器からの流路に合流する前に別途時間調整用容器７を設けた点に特徴を要する。 [Seventh embodiment]
Next, a seventh embodiment of the fine channel valve structure of the present invention will be described. In addition, about the location which becomes the same structure as said each embodiment, the same code | symbol is attached | subjected and the description is abbreviate | omitted.
In the present embodiment, as shown in FIG. 7, in addition to the structure shown in the sixth embodiment, the flow path from the 2-2nd upstream container is the 2-1st A feature is that the time adjusting container 7 is provided separately before joining the flow path from the upstream container.

この構造によると、第２‐２番目の上流側容器の液体は一旦時間調整用容器７内に入った後、サイフォン効果により下流側容器３に入る。
したがって、当該第２‐２番目の上流側容器内の液体が、第１上流側容器１内の液体と第２‐１番目の上流側容器内の液体との混合液体に混ざることなく、当該混合液体が下流側容器３から別途設けた流路４ｃを介して送られた後、下流側容器３に入り、その後送られることになる。このように、本構造によると複数種類の液体の混合液体と、非混合液体とを順に送ることができる。 According to this structure, the liquid in the 2-2nd upstream container once enters the time adjustment container 7 and then enters the downstream container 3 due to the siphon effect.
Therefore, the liquid in the 2-2nd upstream container does not mix with the liquid mixture of the liquid in the first upstream container 1 and the liquid in the 2-1st upstream container. After the liquid is sent from the downstream container 3 through the separately provided flow path 4c, the liquid enters the downstream container 3 and is then sent. Thus, according to this structure, a mixed liquid of a plurality of types of liquid and a non-mixed liquid can be sent in order.

[第八の実施の形態]
次に、本発明の微細流路のバルブ構造の第八の実施の形態について説明する。なお、上記各実施の形態と同様の構成となる箇所については同一符号を付してその説明を省略する。
本実施の形態においては、図８に示すように、第２流路４ｂを３つに分岐させ、各分岐流路を容器８‐１〜８‐３に繋ぐと共に、各容器に第２‐１〜第２‐３番目の上流側容器を繋ぎ、各上流側容器に気体導入口を設けた点に特徴を要する。
この構造によると、第１上流側容器１内の送液が終了した後、第２‐１〜第２‐３番目の上流側容器から各容器８‐１〜８‐３への送液が同時に行うことができる。この際には、第１上流側容器１の気体導入口５は気体排出口として機能する。 [Eighth embodiment]
Next, an eighth embodiment of the fine channel valve structure of the present invention will be described. In addition, about the location which becomes the same structure as said each embodiment, the same code | symbol is attached | subjected and the description is abbreviate | omitted.
In the present embodiment, as shown in FIG. 8, the second flow path 4b is branched into three, each branch flow path is connected to the containers 8-1 to 8-3, and each container has a 2-1 The characteristics are required in that the second to third upstream containers are connected and a gas inlet is provided in each upstream container.
According to this structure, after the liquid supply in the first upstream container 1 is completed, the liquid supply from the 2-1st to 2-3rd upstream containers to the containers 8-1 to 8-3 is simultaneously performed. It can be carried out. At this time, the gas inlet 5 of the first upstream container 1 functions as a gas outlet.

[第九の実施の形態]
次に、本発明の微細流路のバルブ構造の第九の実施の形態について説明する。なお、上記各実施の形態と同様の構成となる箇所については同一符号を付してその説明を省略する。
本実施の形態においては、図９に示すように、第２上流側容器２の長手方向の側部に流路４ｄを設けた点に特徴を要する。 [Ninth embodiment]
Next, a ninth embodiment of the fine channel valve structure of the present invention will be described. In addition, about the location which becomes the same structure as said each embodiment, the same code | symbol is attached | subjected and the description is abbreviate | omitted.
In the present embodiment, as shown in FIG. 9, a feature is required in that a flow path 4 d is provided on a side portion in the longitudinal direction of the second upstream side container 2.

この構造において、図９（ａ）に示すように第２上流側容器２内に粒子懸濁液を入れておき、外力として遠心力を作用させると、図９（ｂ）に示すように第１上流側容器１内の送液が終了するまでの所定時間内に、第２上流側容器２内において、遠心力の作用により液体成分と粒子が分離する。そして、第１上流側容器１内の送液が終了した時点で、図９（ｃ）に示すように、第２上流側容器２に設けた流路４ｄから液体成分のみを自動的に送ることができる。
なお、上記各実施の形態においては各容器及び流路を基板表面上に形成したケースについて説明したが、例えば各容器及び流路を基板表面上に積層する構造にしてもよい。 In this structure, when a particle suspension is placed in the second upstream container 2 as shown in FIG. 9A and a centrifugal force is applied as an external force, the first suspension is obtained as shown in FIG. 9B. Within a predetermined time until the liquid feeding in the upstream container 1 is completed, the liquid component and the particles are separated in the second upstream container 2 by the action of centrifugal force. Then, when the liquid feeding in the first upstream side container 1 is completed, as shown in FIG. 9C, only the liquid component is automatically sent from the flow path 4d provided in the second upstream side container 2. Can do.
In each of the above embodiments, the case where each container and the channel are formed on the surface of the substrate has been described. However, for example, the container and the channel may be stacked on the substrate surface.

液体や流路内壁の物性の影響をほとんど受けず、安価且つ簡便な制御機構で動作可能な微細流路のバルブ構造等であり、産業上の利用可能性を有する。   This is a valve structure of a fine flow path that is hardly affected by the properties of the liquid or the inner wall of the flow path and can be operated with an inexpensive and simple control mechanism, and has industrial applicability.

１ 第１上流側容器
２ 第２上流側容器
３ 下流側容器
４ 流路
４ａ 第１流路
４ｂ 第２流路
５ 気体導入口
６ 気体排出口
７ 時間調整用容器
８ 容器
１０ バルブ構造

DESCRIPTION OF SYMBOLS 1 1st upstream side container 2 2nd upstream side container 3 Downstream side container 4 Flow path 4a 1st flow path 4b 2nd flow path 5 Gas inlet 6 Gas outlet 7 Time adjustment container 8 Container 10 Valve structure

Claims (17)

内部に液体を収容した少なくとも２つの上流側容器と、当該上流側容器内の液体を受容するための下流側容器と、上流側容器と下流側容器とを繋ぐ流路とが基板上に設けられ、前記上流側容器内の液体に外力を作用させることで、前記流路を通して前記下流側容器に液体が送られるように構成した微細流路のバルブ構造において、
前記下流側容器に気体排出口を設けると共に、前記上流側容器のうち気体導入口を設けたものを第１上流側容器、気体導入口を設けないものを第２上流側容器とし、
前記第１上流側容器と前記下流側容器とを繋ぐ流路を第１流路、前記第１上流側容器又は前記第１流路と前記第２上流側容器の上流側とを繋ぐ流路を第２流路、前記第２上流側容器の下流側と前記下流側容器又は前記第１流路若しくは前記第２流路が接続されている場合には接続部分よりも下流側の前記第１流路とを繋ぐ流路を第３流路とし、
第１上流側容器から前記第１流路を介して下流側容器への送液を開始した時点では、当該第１上流側容器内の液体によって前記第２流路の一部が封鎖されており、送液中の所定の時点又は送液が終了した時点で当該封鎖が解除されることで、第２上流側容器からの送液が自動的に開始されることを特徴とする微細流路のバルブ構造。 At least two upstream containers containing liquid therein, a downstream container for receiving the liquid in the upstream container, and a flow path connecting the upstream container and the downstream container are provided on the substrate. In the valve structure of the fine flow path configured so that the liquid is sent to the downstream container through the flow path by applying an external force to the liquid in the upstream container,
A gas discharge port is provided in the downstream container, and among the upstream containers, a gas inlet is provided as a first upstream container, and a gas inlet is not provided as a second upstream container,
The first flow path a flow passage between the first upstream vessel connecting said downstream vessel, a flow path connecting an upstream side of the first upstream-side container or the first flow path and the second upstream container When the second flow path, the downstream side of the second upstream container, and the downstream container or the first flow path or the second flow path are connected, the first flow on the downstream side of the connection portion. The flow path connecting the road is the third flow path,
At the time when liquid feeding from the first upstream container to the downstream container via the first flow path is started, a part of the second flow path is blocked by the liquid in the first upstream container. The liquid flow from the second upstream container is automatically started by releasing the blockade at a predetermined time point during liquid supply or when liquid supply is completed. Valve structure. 気体導入口を設けた第１上流側容器と、  A first upstream container provided with a gas inlet;
気体導入口を設けない第２上流側容器と、  A second upstream container without a gas inlet;
気体排出口を設けた下流側容器と、  A downstream container provided with a gas outlet;
前記第１上流側容器と前記下流側容器とを繋ぐ第１流路と、  A first flow path connecting the first upstream container and the downstream container;
前記第１上流側容器又は前記第１流路と前記第２上流側容器の上流側とを繋ぐ第２流路と、  A second flow path connecting the first upstream container or the first flow path and the upstream side of the second upstream container;
前記第２上流側容器の下流側と前記下流側容器又は前記第１流路若しくは前記第２流路が接続されている場合には接続部分よりも下流側の前記第１流路とを繋ぐ第３流路と、  When the downstream side of the second upstream side container and the downstream side container or the first flow path or the second flow path are connected, the first flow path connecting the first flow path downstream of the connection portion. 3 flow paths,
を備えたことを特徴とする微細流路のバルブ構造。A fine channel valve structure characterized by comprising: 前記気体導入口及び前記気体排出口をそれぞれ前記第１上流側容器及び前記下流側容器に対して前記外力の作用方向の反対方向側に設けたことを特徴とする請求項１又は２に記載の微細流路のバルブ構造。 According to claim 1 or 2, characterized in that provided on the opposite side of the direction of application of the external force to said gas inlet and said gas outlet of each of the first upstream container and the downstream container Valve structure with fine flow path. 前記第１上流側容器を前記第２上流側容器に対して前記外力の作用方向側に配置したことを特徴とする請求項１〜３のいずれか一項に記載の微細流路のバルブ構造。 Valve structure of the micro channel according to any one of claims 1-3, characterized in that said first upstream vessel was placed in the working direction of the external force to the second upstream container. 前記第２流路が、前記第１上流側容器又は前記第１流路との接続部から前記外力の作用方向の反対方向側に屈曲した後、第２上流側容器に繋がる構造となっていることを特徴とする請求項１〜４のいずれか一項に記載の微細流路のバルブ構造。 The second flow path is connected to the second upstream container after being bent from the connection portion with the first upstream container or the first flow path to the side opposite to the direction of the external force. The valve structure of the fine flow path according to any one of claims 1 to 4 . 前記下流側容器を前記上流側容器に対して前記外力の作用方向側に配置したことを特徴とする請求項１〜５のいずれか一項に記載の微細流路のバルブ構造。 The valve structure of the fine flow path according to any one of claims 1 to 5 , wherein the downstream container is arranged on the side of the external force acting direction with respect to the upstream container. 前記外力が遠心力と重力のうち少なくとも一方であることを特徴とする請求項１〜６のいずれか一項に記載の微細流路のバルブ構造。 The valve structure of the fine channel according to any one of claims 1 to 6 , wherein the external force is at least one of centrifugal force and gravity. 前記第２上流側容器を複数備えていることを特徴とする請求項１〜７のいずれか一項に記載の微細流路のバルブ構造。 The valve structure of the fine flow path according to any one of claims 1 to 7 , wherein a plurality of the second upstream containers are provided. 前記複数の第２上流側容器のそれぞれが前記第１上流側容器に直接繋がる並列構造を有することを特徴とする請求項８に記載の微細流路のバルブ構造。 9. The valve structure of the fine flow path according to claim 8 , wherein each of the plurality of second upstream containers has a parallel structure directly connected to the first upstream container. 前記複数の第２上流側容器を第２‐１〜第２‐ｎ（ｎは１以上の自然数）番目の上流側容器とした場合に、前記第１上流側容器に第２‐１番目の上流側容器が繋がり、第２‐１番目の上流側容器に第２‐２番目の上流側容器に繋がり、以下同様に第２‐（ｎ−１）番目の上流側容器に第２‐ｎ番目の上流側容器が繋がる直列構造を有することを特徴とする請求項８に記載の微細流路のバルブ構造。 When the plurality of second upstream containers are the 2-1st to 2-nth (n is a natural number of 1 or more) upstream containers, the 2-1st upstream is connected to the first upstream container. Side container connected, connected to the 2-1st upstream container, connected to the 2-2th upstream container, and similarly to the 2- (n-1) th upstream container, the 2-nth 9. The valve structure of the fine flow path according to claim 8 , wherein the valve structure has a series structure in which upstream containers are connected. 請求項９に記載のバルブ構造と請求項１０に記載のバルブ構造を備えることを特徴とする微細流路のバルブ構造。 A valve structure of a fine flow path comprising the valve structure according to claim 9 and the valve structure according to claim 10 . 前記下流側容器を設けずに、前記第１上流側容器と前記気体排出口とを直接前記第１流路で繋ぐ構成として第１上流側容器から第１流路を通して送られた液体を気体排出口から外部に排出する及び／又は前記第２上流側容器と前記気体排出口とを直接流路で繋ぐ構成として第２上流側容器から流路を通して送られた液体を気体排出口から外部に排出することを特徴とする請求項１〜１１のいずれか一項に記載の微細流路のバルブ構造。 Without providing the downstream container, the liquid sent from the first upstream container through the first flow path is exhausted as a configuration in which the first upstream container and the gas discharge port are directly connected by the first flow path. The liquid sent from the second upstream container through the flow path is discharged from the gas outlet to the outside as a configuration in which the second upstream container and the gas outlet are directly connected by the flow path. The valve structure of the fine channel according to any one of claims 1 to 11 , wherein: 請求項１〜１２のうちいずれか一つに記載された微細流路のバルブ構造を備えることを特徴とするマイクロデバイス。 A microdevice comprising the fine channel valve structure according to any one of claims 1 to 12 . 請求項１〜１２のうちのいずれか一つに記載された微細流路のバルブ構造を備えることを特徴とするマイクロセンサ。 A microsensor comprising the fine channel valve structure according to any one of claims 1 to 12 . 請求項１〜１２のうちのいずれか一つに記載された微細流路のバルブ構造を備えることを特徴とするマイクロリアクター。 A microreactor comprising the fine channel valve structure according to any one of claims 1 to 12 . 内部に液体を収容した少なくとも２つの上流側容器と、当該上流側容器内の液体を受容するための下流側容器と、上流側容器と下流側容器とを繋ぐ流路とが基板上に設けられ、前記上流側容器内の液体に外力を作用させることで、前記流路を通して前記下流側容器に液体が送られるように構成した微細流路の送液制御方法において、
前記下流側容器に気体排出口を設けると共に、前記上流側容器のうち気体導入口を設けたものを第１上流側容器、気体導入口を設けないものを第２上流側容器とし、
前記第１上流側容器と前記下流側容器とを繋ぐ流路を第１流路、前記第１上流側容器又は前記第１流路と前記第２上流側容器の上流側とを繋ぐ流路を第２流路、前記第２上流側容器の下流側と前記下流側容器又は前記第１流路若しくは前記第２流路が接続されている場合には接続部分よりも下流側の前記第１流路とを繋ぐ流路を第３流路とし、
第１上流側容器から前記第１流路を介して下流側容器への送液を開始した時点では、当該第１上流側容器内の液体によって前記第２流路の一部が封鎖されており、送液中の所定の時点又は送液が終了した時点で当該封鎖が解除されることで、第２上流側容器からの送液が自動的に開始されることを特徴とする微細流路の送液制御方法。 At least two upstream containers containing liquid therein, a downstream container for receiving the liquid in the upstream container, and a flow path connecting the upstream container and the downstream container are provided on the substrate. In the liquid flow control method of the fine flow path configured so that the liquid is sent to the downstream container through the flow path by applying an external force to the liquid in the upstream container,
A gas discharge port is provided in the downstream container, and among the upstream containers, a gas inlet is provided as a first upstream container, and a gas inlet is not provided as a second upstream container,
The first flow path a flow passage between the first upstream vessel connecting said downstream vessel, a flow path connecting the upstream side of the first upstream-side container or the first flow path and the second upstream container When the second flow path, the downstream side of the second upstream container, and the downstream container or the first flow path or the second flow path are connected, the first flow on the downstream side of the connection portion. The flow path connecting the road is the third flow path,
At the time when liquid feeding from the first upstream container to the downstream container via the first flow path is started, a part of the second flow path is blocked by the liquid in the first upstream container. The liquid flow from the second upstream container is automatically started by releasing the blockade at a predetermined time point during liquid supply or when liquid supply is completed. Liquid feeding control method. 前記下流側容器を設けずに、前記第１上流側容器と前記気体排出口とを直接前記第１流路で繋ぐ構成として第１上流側容器から第１流路を通して送られた液体を気体排出口から外部に排出する及び／又は前記第２上流側容器と前記気体排出口とを直接流路で繋ぐ構成として第２上流側容器から流路を通して送られた液体を気体排出口から外部に排出することを特徴とする請求項１６に記載の微細流路の送液制御方法。
Without providing the downstream container, the liquid sent from the first upstream container through the first flow path is exhausted as a configuration in which the first upstream container and the gas discharge port are directly connected by the first flow path. The liquid sent from the second upstream container through the flow path is discharged from the gas outlet to the outside as a configuration in which the second upstream container and the gas outlet are directly connected by the flow path. The liquid flow control method for a fine channel according to claim 16 , wherein:
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